WO2016207327A1

WO2016207327A1 - Transmitting unit for an optical sensor device

Info

Publication number: WO2016207327A1
Application number: PCT/EP2016/064633
Authority: WO
Inventors: Lin Lin; Peter Horvath
Original assignee: Valeo Schalter Und Sensoren Gmbh
Priority date: 2015-06-24
Filing date: 2016-06-24
Publication date: 2016-12-29
Also published as: DE102015110141A1

Abstract

The invention relates to a transmitting unit (1) for an optical sensor device (10), comprising a plurality of semiconductor light sources (2a-2z) for generating a respective light (a-z), a plurality of optical microlenses (5a-5z), each of which is paired with a semiconductor light source (2a-2z), in order to bundle the light (a-z) generated by each paired semiconductor light source (2a-2z), and a collimator lens (7) for collimating the bundled light (a'-z'). Each of the microlenses (5a-5z) is arranged in an optical path of the light (a,a'-z,z') between each paired semiconductor light source (2a-2z) and the collimator lens (7), and each of the semiconductor light sources (2a-2z) is arranged on a focal plane of the paired microlens (5a-5z) in order to achieve an improved image quality for the optical sensor device (10), in particular a greater usable resolution.

Description

Transmitting unit for an optical sensor device

The invention relates to a transmitting unit for an optical sensor device, comprising a plurality of semiconductor light sources for generating a respective light, with a plurality of optical microlenses each associated with a semiconductor light source for bundling the light generated by the respective associated semiconductor light source, and with a collimating lens for collimating the focused ones lights. The microlenses are each arranged in an optical path of the light between the respective associated semiconductor light sources and the collimator lens. The invention also relates to an optical sensor device with a plurality of such transmission units.

In modern motor vehicles, a variety of different sensor devices are used. Straight optical sensor devices are widely used here. In this case, optical sensor devices are known in which surfaces or bodies in an environment of the sensor device and thus of the motor vehicle with a light beam line or grid are swept over to measure the respective surfaces or body, to edit or to create an image. This can be done by a laser light beam, for example, in a laser scanning device. such

Laser scanning devices are also known as "laser scanners" or as "lidars". In this case, so-called surface emitter or VCSEL (Vertical Cavity Surface Emitting Laser) can be used as a source for the laser light. In these, the light emerges perpendicular to the plane of the associated semiconductor chip.

From US 6,353,502 B1 a device is known in which several

Laser beams of a surface emitter array are collimated by a common optical aperture.

US Pat. No. 6,888,871 B1 discloses a surface emitter which has improved beam properties. Also, there is an array of microlenses used.

It is the object of the present invention to achieve an improved image quality, in particular a greater usable resolution, for an optical sensor device. This object is solved by the subject matter of the independent claim. Advantageous embodiments will become apparent from the dependent claims, the description and the figures.

The invention relates to a transmission unit for an optical sensor device. This sensor device can be a light-scanning device, in particular a

Laser scanning device or a laser scanner include. The transmitting unit has a plurality of semiconductor light sources for generating a respective light. The generated light may in particular be a respective laser light. The transmitting unit also includes a plurality of each of a semiconductor light source

associated optical microlenses or microlens devices for bundling the light generated by the respective associated semiconductor light source. A

Microlens device can also comprise several lenses. The transmitting unit also includes a collimator lens or collimator lens device for collimating the collimated lights. In this case, the collimator lens device can also comprise a plurality of lenses for collimating the collimated lights. In particular, the collimator lens serves to collimate the collimated lights to a common focal point in a focal plane of the collimator lens. The microlenses are each arranged in an optical path of the light between the respective associated semiconductor light sources and the collimator lens. The microlenses may have dimensions which are on the order of the dimensions of the semiconductor light sources.

In particular, the microlenses may have dimensions in the range of several

Have micrometers. In addition, the microlenses or microlens devices can be manufactured by means of a microtechnical manufacturing process. In order to achieve a better image quality, in particular to achieve a greater usable resolution, the semiconductor light sources are each arranged in a focal plane or in a focal point of the associated microlens.

This has the advantage that the generated lights are bundled into light beams, which have a clearly defined propagation direction. It can thus be easily achieved a parallel propagation direction for the different lights. As a result, it can be achieved that the bundled lights of different semiconductor sources do not locally overlap, so that a well-defined illumination of predefined spatial regions by the transmitting unit is improved. Thus, an unintentional light scattering of the light emitted by the transmitting unit into areas, for example pixels or pixels, a detector unit or a detector of the associated optical transmitting unit, in which this light scattering to a Noise can be prevented. This achieves a better image quality and increases the actually usable resolution for an optical sensor device with such a transmission unit.

In an advantageous embodiment it is provided that the semiconductor light sources are arranged in a first plane. In this case, the semiconductor light sources are all arranged one below the other, in particular in a vertical direction. In this case, in turn, the semiconductor light sources are in each case preferably arranged on a straight line in the vertical direction with one another. This has the advantage that the resolution of the transmitting unit in the

Vertical direction is increased and all semiconductor light sources contribute to the resolution in the vertical direction. Just the arrangement on a line with each other and / or in a plane here simplifies the structure, so that the better image quality and greater usable resolution in a particularly simple manner, for example with identical microlenses, can be achieved.

In a further advantageous embodiment, it is provided that the semiconductors each comprise or are at least one surface emitter. One

Surface emitter can also be referred to as VCSEL (Vertical Cavity Surface Emitting Laser) and is a semiconductor laser in which the light is emitted perpendicular to the plane of the semiconductor chip. As a result, the surface emitter differs from the conventional so-called edge emitter, in which the light emerges on one or two flanks of the semiconductor chip. This has the advantage that the

Semiconductor light sources can be easily arranged in the first level. Moreover, the semiconductor light sources can be arranged so particularly close to each other, so that a particularly high resolution of the transmitting unit and thus for the optical sensor device can be achieved.

In another embodiment, it is provided that the microlenses or

Microlens devices are all arranged in a second plane. In particular, the focal planes of the microlenses are all then in the first plane in which the semiconductor light sources are arranged. The microlenses preferably adjoin one another here. They can also be embodied as a microlens array or microlens arrangement, in particular then in one piece. This has the advantage of a particularly simple geometry, so that the lights of the semiconductor light sources can each be bundled particularly precisely and precisely with little effort. Thus, this also increases the usable resolution of the transmitting unit and the associated sensor device. In a preferred embodiment, it is provided that the microlenses all in each case comprise or are at least one converging lens. This has the advantage that a particularly simple optical design can be achieved and thus a particularly high degree of precision can be achieved. Even so, the individual beams of light collimated by the microlenses are defined particularly precisely, so that a better quality of light with a greater usable resolution is achieved.

In a particularly advantageous embodiment, it is provided that the number of semiconductor light sources corresponds to the quotient of a collimator angle of the collimator lens and a predetermined resolution or angular resolution of the transmitting unit. The resolution or angular resolution can be predetermined in particular in the vertical direction. For example, a resolution of 0.1 ° can be specified here. Of the

Collimator angle is the amount of the size of the angular range from which at one focal point of the collimator lens one consisting of all lights

Total light hits the focal point. The size of the angular range is again measured, in particular in the vertical direction. For example, the size of the angular range and thus the collimator angle in the vertical direction can be 12 °. Given a predetermined resolution of the transmitting unit in the vertical direction of 0.1 °, the number of semiconductor light sources 120 then results in this example. Accordingly, the number of microlenses is also 120. Accordingly, the focused lights can each have an identical spatial extent perpendicular to the

Have propagation direction. This results in the advantage that a uniform resolution is achieved, and the number of semiconductor light sources is optimally adapted to the resolution to be achieved. Thus, given ideal space utilization, the given resolution can be achieved without overshooting neighboring lights. This achieves improved image quality and higher usable resolution.

In a further advantageous embodiment it is provided that the

Semiconductor light sources independently controllable by a control device of the transmitting unit, that is, for example, activated and / or deactivated, are. This has the advantage that, for example, only a single semiconductor light source of the transmitting unit can be activated at a given time, so that only one of the transmitting unit in an optical sensor device associated detector unit at a time, for example, in a pixel or pixel of the detector unit, only the light which impinges on a semiconductor light source. Thus, no stray light from adjacent semiconductor light sources is incident on the detector, so that a Noise, which may otherwise be caused by the other semiconductor light sources in the one pixel, can be prevented. Thus, in turn, the usable resolution is increased or improved the image quality, in which here a noise in a detector is prevented or reduced by the structural design of the transmitting unit. Thus, "crosstalk" of the lights of the different semiconductor light sources is prevented, Such crosstalk can otherwise occur, for example, in different processing channels of the detector unit, which are assigned to different pixels.

In a further particularly advantageous embodiment it is provided that the transmitting unit and an optical micromirror for deflecting the through the

Collimator lens includes collimated lights. The optical micromirror may have a mirror surface with dimensions in the micrometer range. For example, the mirror surface dimensions of 2μηι x 2μηι have. It can be an optical micromirror known from the field of "digital micromirror devices" (DMD), which can be used as a microelectromechanical component for the dynamic deflection of light, the optical micromirror being from the semiconductor light sources When viewed in the optical path of the lights behind the collimator lens, the lights of the transmitting unit can be deflected in different spatial directions, resulting in a resolution of the light source

Transmitting unit or the optical sensor device, in which the

Transmitter unit is used, increased.

It can be provided that the optical micromirror is arranged in a focal plane of the collimator lens. Thus, the direction in which the lights are deflected by the micromirror can be adjusted particularly accurately and evenly for the different lights. Furthermore, a particularly small

Micromirror can be used so that the parts to be moved for deflecting are particularly small and lightweight. Also, the distraction can be done very quickly. Accordingly, the arrangement of the micromirror in the focal plane of the collimator lens ensures that better image quality is achieved with greater usable resolution.

In this case, provision can be made, in particular, for the micromirror to be in one

Horizontal direction is pivotable. He can here, for example, by an angle of +/- 15 °, in particular +/- 10 ° pivot. The micromirror can therefore have an axis of rotation which runs parallel to the vertical direction. It is too Note that the vertical direction is perpendicular to the horizontal plane in which the horizontal direction runs. The micromirror can also be embodied as a so-called 1D micromirror, that is, having only a single axis of rotation. Accordingly, the micromirror is then pivotable only in the horizontal direction. This is advantageous in particular when the semiconductor light sources are arranged vertically one below the other. Then, namely by the arrangement of the semiconductor light sources, a vertical and determined by the movement of the micromirror horizontal resolution. A pivotability of +/- 15 ° in particular +/- 10 ° has proven to be advantageous in terms of mechanical constraints of

Micromirror proved. The fact that the micromirror exclusively in the

Horizontal direction and thus can be pivoted in the horizontal plane, the corresponding pivoting can be done very quickly. Moreover, such 1 D micromirrors are particularly inexpensive and robust.

The invention also relates to an optical sensor device with a plurality, in particular three, transmitting units according to the above statements and with an optical micromirror. In particular, the optical sensor device may comprise only a single optical micromirror. The optical micromirror is in this case arranged, viewed from the semiconductor light sources, in the optical paths of the lights behind the collimator lenses of the transmitting units. In particular, the micromirror is thus arranged in an intersection of the focal planes of the collimator lenses. This has the advantage that with the various transmitting units and the optical micromirror by the pivoting of the optical micromirror simultaneously several

different spatial areas can be scanned in an environment of the optical sensor device. The increased usable resolution can thus be applied to a particularly large image area, which can be detected by the optical sensor device. This achieves better picture quality.

In an advantageous embodiment, it may be provided that the

Micromirror in the horizontal direction is pivotable and the transmitting units in the horizontal direction in a plane offset from the micromirror are arranged. The micromirror can in turn in particular by an amount of +/- 15 °

be pivoted in particular +/- 10 °. It can thus have, in particular, a single axis of rotation in the vertical direction perpendicular to the horizontal plane. In addition to the advantages to be achieved in accordance with the above statements in the corresponding exemplary embodiment relating to the transmitting unit, it is thus achieved that the greatest possible surrounding area of the optical Sensor device can be detected by this. Correspondingly, a better image quality in the form of a better angular resolution in the horizontal direction is achieved for this enlarged sensor area.

In this case, it can be provided, in particular, that the optical paths of the lights of the transmitting units, which are each next neighbor, meet for all lights in the horizontal direction at an equal angle in the intersection of the collimator lenses or collimator lens devices. This angle can be in particular 40 °. For the same angle, for example, a measurement inaccuracy of +/- 1 ⁰ can be provided here. This has the advantage that the environment of the optical sensor device can be scanned particularly efficiently by pivoting the micromirror. Especially with a pivotability about +/- 10 ⁰ , an amount of 40 ° for the same angle is particularly advantageous. In a pivoting of the micromirror by +/- 10 ° namely a hor izontaler angle range of 40 ° can be covered by a transmitting unit. Thus, by three transmitting units, the environment of the optical sensor device can be efficiently detected at a detection angle of 120 ° in total with the increased usable resolution. In particular, there are no gaps between the individual subregions, which are irradiated or scanned by the lights of the respective transmitting units. At the same time only a single moving part is required, namely the said optical

Micromirrors. Thus, in turn, a particular accuracy can be achieved in the optical system, which in turn increases the usable resolution and the image quality achieved.

In a preferred embodiment, it is provided that the lights of the

different transmission units each have disjoint wavelength distributions for the different transmission units or, in the case of laser lights, each have a mutually different wavelength, this has the advantage that the different lights do not influence each other or a detector unit of the optical sensor device easily detect the different lights separately can. This avoids a "crosstalk" of the lights with a concomitant deterioration of a resolution.

In a further, particularly advantageous embodiment it is provided that the semiconductor light sources of the transmitting units for each transmitting unit are arranged in a respective plane all in the same vertical direction in each case for a transmitting unit with each other. In this case, the semiconductor light sources, which in each case to a Transmit unit belong, in particular be arranged on a straight line. In this case, the straight lines on which the semiconductor light sources are arranged are in each case parallel to one another. This has the advantage that an environment of the sensor device can be scanned or detected particularly efficiently with the maximum possible resolution, particularly in the case of a micromirror which can be swiveled around the rotation axis in the vertical direction (that is, can be pivoted in the horizontal plane). The fact that the semiconductor light sources are all arranged in each case on a straight line perpendicular to the horizontal direction, results in a particularly large detection range for the

Sensor device with a uniform resolution.

The features and feature combinations mentioned above in the description, as well as the features and combinations of features mentioned below in the description of the figures and / or shown alone in the figures, can be used not only in the respectively specified combination but also in other combinations or in isolation, without the frame to leave the invention. Thus, embodiments of the invention are to be regarded as encompassed and disclosed, which are not explicitly shown and explained in the figures, however, emerge and can be produced by separated combinations of features from the embodiments explained. Embodiments and combinations of features are also to be regarded as disclosed, which thus do not have all the features of an originally formulated dependent or independent claim.

Embodiments of the invention are described below with reference to schematic

Drawings explained in more detail. Showing:

1 is a schematic sectional view of an exemplary embodiment of a transmitting unit in a vertical direction; and

2 is a schematic representation of an exemplary embodiment of an optical sensor device with three transmission units and one optical micromirror in a perspective view.

The same and functionally identical elements are provided with the same reference numerals.

FIG. 1 schematically shows an exemplary embodiment of a transmitting unit in a sectional view parallel to a vertical direction. The transmitting unit 1 initially comprises a multiplicity of semiconductor light sources 2a, 2b, 2y, 2z. These are in the present case arranged on a carrier board 3. Correspondingly, in this example, the semiconductor light sources 2a-2z are arranged in a first plane 4, which extends here in a yz-direction perpendicular to the plane of the drawing. The

Semiconductor light sources 2a-2z are arranged in the y-direction, which here corresponds to the vertical direction, with each other on a straight line. Present are the

Semiconductor light sources 2a-2z also arranged equidistantly. Due to the equidistance results in a simplified geometry, which is also advantageous to the achievable

Image quality or usable resolution of the transmitting unit affects. The

Semiconductor light sources 2a-2z are in the example shown as a surface emitter, so-called VCSEL (Vertical Cavity Surface Emissive Laser) executed, in the form of a so-called VCSEL array. In the example shown, this comprises a series of 120 semiconductor light sources 2a-2z, which are not completely shown for reasons of clarity.

The transmitting unit 1 also includes a plurality of optical microlenses 5a-5z associated with the respective semiconductor light sources 2a-2z. Accordingly, a light a, b,..., Z generated by the respective semiconductor light sources 2a-2z is detected by the

associated microlenses 5a-z bundled. The microlenses 5a-z are presently arranged at a distance D from the semiconductor light sources 2a-2z, which is the

Focal length of the microlenses 5a-5z corresponds. In the present case, the microlenses 5a-5z are all designed identically as converging lenses and arranged adjacent to one another in the form of a so-called array in a second plane 6. This microlens array can be designed, for example, in one piece.

Since the microlenses 5a-5z adjacent to each other, which also form by the

Semiconductor light sources 2a-2z initially as the lights a-z and generated by the

Microlenses 5a-5z focused lights a'-z 'parallel light beams adjacent to each other. The bundled lights a'-z 'thus form a kind of light band with simultaneously activated semiconductor light sources 2a-2z, which extends quasi one-dimensionally (ie almost exclusively) in the y-direction, ie the vertical direction.

The transmitting unit 1 further comprises a collimator lens 7 which collimates the collimated lights a'-z 'to a focal point F. This focal point F is in one

Distance E, which corresponds to the focal length of the collimator lens 7, of the

Semiconductor light sources 2a-2z seen in the beam path of the lights a, a 'to z, z' behind the collimator lens 7 is arranged. The collimated by the collimator lens 7

Lights a ", b", z ", which the respective generated lights az and the bundled When the semiconductor light sources 2a-2z are simultaneously activated, they coincide with the focal point F at a collimator angle Θ. The sum of the collimated lights a "-z" or the total light formed by the collimated lights a "-z" thus comes from an angular range whose magnitude corresponds to the

Collimator angle Θ corresponds to the focal point F. The collimator angle Θ in the example shown is 12 °. Since present 120 semiconductor light sources 2a-2z the corresponding lights a, a ', a "to z, z', z" generate and the diffracted or collimated lights a ', a "to z', z" adjacent to each other, corresponds to each semiconductor light source 2a-2z present in the total light 9. Take the individual collimated lights a "-z"

120

thus viewed from the focal point F, in each case a same (here vertical)

12 °

Solid angle Φ on. This solid angle Φ is shown in Example J ^ ⁼ ® ^ ° ^ ^he

Solid angle Φ thus determines the resolution, in this case the resolution in

Vertical direction of the transmitting unit 1.

In the focal point F, a micromirror 8 is arranged in the present case. The collimated lights a "-z" strike the micromirror 8 at the focal point F. In the present case, the micromirror 8 is pivotable about an axis of rotation A, which here runs parallel to the vertical direction in the plane of the drawing. As a result, with simultaneous activation of the semiconductor light sources 2a-2z a light band 9, which is practically only in the

Vertical direction extends, be deflected in the horizontal direction and with this an environment of the transmitting unit 1 are irradiated. In a preferred

Embodiment is provided, however, that at the same time only one of the semiconductor light sources 2a-2z is active at the same time. This is achieved by the transmitting unit 1, a vertical resolution of presently 0.1 °. However, corresponding to d is at a detector, which is not shown, only one signal, which a single pixel, which of the respectively activated semiconductor light source 2a-2z or one through this

Semiconductor light source 2a-2z irradiated area corresponds to the environment detected. Thereby, this one pixel in the detector unit will not receive a signal through the other semiconductor light sources 2a-2z. This signal and thus the others

Semiconductor light sources 2a-2z would otherwise contribute to noise.

Accordingly, there is no crosstalk between signals corresponding to adjacent pixels or pixels in the detector unit. This improves the usable resolution and achieves better image quality. In Fig. 2 is an exemplary embodiment of an optical schematic

Sensor device with present three transmitting units shown in a perspective view. Each of the three transmitting units 1, 1 ', 1 "here corresponds by way of example in each case to the exemplary embodiment shown in Fig. 1. The vertical directions of the respective transmitting units 1, 1', 1" are arranged parallel to one another and the

Transmitting units 1, 1 ', 1 "distributed in a horizontal direction perpendicular to the vertical direction in the horizontal plane present radially around a single micromirror 8. The micromirror 8, for example, have a mirror surface of 2x2 mm .. The transmitting units 1, 1', 1" can thereby In the present case, in each case a vertical, quasi-one-dimensional light band 9, 9 ', 9 "emanate. The respective light bands 9, 9', 9" have their common focal point F, in which the micromirror 8 is arranged, their point of intersection. The micromirror 8 is pivotable about a rotation axis A in one dimension, namely in the horizontal plane. In the present case, the optical micromirror 8 can be switched by +/- 10 °. Correspondingly, the light bands 9, 9 ', 9 "depending on the position of the optical micromirror 8 are directed into an area which in each case covers +/- 20 °, ie 40 °, of a surrounding area 1 1.

Characterized in that in the arrangement shown between the respective light bands 9, 9 'and 9 "in the horizontal plane a uniform angle Ω of 40 ° is set here, thus can be scanned by the optical sensor device 10 in the horizontal plane, a total range of 120 °. As a result of the fact that only one of the semiconductor light sources 2a-2z (FIG. 1) of the respective transmitting units 1, 1 ', 1 "is activated at the same time, a noise is reduced and crosstalk of adjacent channels in an associated one, as shown in FIG , not shown receiving unit avoided. In the present case, this is further supported by the fact that the transmitting units 1, 1 ', 1 "use light of different wavelengths.

Characterized in that the angular distance between the transmitting units 1, 1 ', 1 "relative to the micromirror 8, which is determined by the angle Ω, identical to the angular range over which the light bands 9, 9', 9" and the lights a "-z" (Fig. 1) of the respective transmitting units 1, 1 ', 1 "can be deflected, the entire

Surrounding area 1 1, in this case the 120 ° in the horizontal direction Horizontalrichtung and, for example, 12 ° in the vertical direction, seamlessly through the op table sensor device 10 with its transmitting units 1, 1 ', 1 "are scanned.

Claims

claims

1 . Transmitting unit (1) for an optical sensor device (10), with

- a plurality of semiconductor light sources (2a-2z) for generating a respective light (a-z);

- A plurality of each of a semiconductor light source (2a-2z) associated optical microlenses (5a-5z) for bundling the light generated by the respective associated semiconductor light source (2a-2z) (A-Z); and

a collimator lens (7) for collimating the collimated lights (a'-z '),

wherein the microlenses (5a-5z) are each arranged in an optical path of the light (a, a'-ζ, ζ ') between the respective associated semiconductor light sources (2a-2z) and the collimator lens (7),

characterized in that

the semiconductor light sources (2a-2z) are each arranged in a focal plane of the associated microlens (5a-5z).

2. transmitting unit (1) according to claim 1,

characterized in that

the semiconductor light sources (2a-2z) are arranged in a first plane (4), in particular in a vertical direction all together, preferably all on a straight line in the vertical direction with each other.

3. transmitting unit (1) according to one of the preceding claims,

characterized in that

the semiconductor light sources (2a-2z) each comprise at least one surface emitter.

4. transmitting unit (1) according to one of the preceding claims,

characterized in that

the microlenses (5a-5z) are all arranged in a second plane (6) and in particular adjoin one another.

5. transmitting unit (1) according to one of the preceding claims, characterized in that

the microlenses (5a-5z) each comprise at least one converging lens.

6. transmitting unit (1) according to one of the preceding claims,

characterized in that

the number of semiconductor light sources (2a-2z) is the quotient of a

Collimator angle (Θ) of the collimator lens (7) and a predetermined resolution of the transmitting unit (1), wherein the collimator angle (Θ) is the amount of the size of the angular range from which at a focal point (F) of the collimator lens (7) one of all Lights (a "-z") existing total light (9) hits the focal point (F).

7. transmitting unit (1) according to one of the preceding claims,

characterized in that

the semiconductor light sources (2a-2z) can be controlled independently of one another by a control device of the transmitting unit (1).

8. transmitting unit (1) according to one of the preceding claims,

characterized in that

the transmitting unit (1) also comprises an optical micromirror (8) for deflecting the lights (a "-z") collimated by the collimator lens (7), which of the

Semiconductor light sources (2a-2z) seen in the optical path of the lights (a, a'- ζ, ζ ') behind the collimator lens (7) is arranged.

9. transmitting unit (1) according to claim 8,

characterized in that

the optical micromirror (8) is arranged in a focal plane of the collimator lens (7).

10. transmitting unit (1) according to claim 8 or 9,

characterized in that

the micromirror (8) is pivotable in a horizontal direction, in particular by an angle of +/- 10 ⁰ .

1 1. Optical sensor device (10) with several, in particular three, transmission units (1, 1 ', 1 ") according to one of claims 1 to 7 with an optical micromirror (8), which viewed from the semiconductor light sources (2a-2z) in the optical Because of the lights (a, a'-z, z ') behind the collimator lenses (7, 7', 7 ") of the

Transmitting units (1, 1 ', 1 ") is arranged, in particular in an intersection of the focal planes of the collimator lenses (7, 7', 7").

12. An optical sensor device (10) according to claim 1 1,

characterized in that

the micromirror (8) is pivotable in the horizontal direction and the

Transmitting units (1, 1 ', 1 ") offset in the horizontal direction about the micromirror (8) are arranged.

13. An optical sensor device (10) according to claim 12,

characterized in that

the optical paths of the lights of the transmitting units (1, 1 ', 1 "), which are next nearest each other, meet for all lights in the horizontal direction at an equal angle (Ω) at the point of intersection, in particular below 40 °.

14. An optical sensor device (10) according to any one of claims 1 1 to 13,

characterized in that

the lights of the transmitting units (1, 1 ', 1 ") each disjoint

Have wavelength distributions and / or have a mutually different wavelength.

15. An optical sensor device (10) according to any one of claims 1 1 to 14,

characterized in that

the semiconductor light sources (2a-2z) of the transmitting units (1, 1 ', 1 ") for each

Transmitting unit (1, 1 ', 1 ") in a respective plane all in the same

Vertical direction are arranged one below the other.