WO2012107094A1 - Mems device comprising an under bump metallization - Google Patents

Mems device comprising an under bump metallization Download PDF

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Publication number
WO2012107094A1
WO2012107094A1 PCT/EP2011/051977 EP2011051977W WO2012107094A1 WO 2012107094 A1 WO2012107094 A1 WO 2012107094A1 EP 2011051977 W EP2011051977 W EP 2011051977W WO 2012107094 A1 WO2012107094 A1 WO 2012107094A1
Authority
WO
WIPO (PCT)
Prior art keywords
ubm
mems device
shape
corners
mems
Prior art date
Application number
PCT/EP2011/051977
Other languages
French (fr)
Inventor
Leif Steen JOHANSEN
Jan Tue Ravnkilde
Original Assignee
Epcos Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Ag filed Critical Epcos Ag
Priority to DE112011104873.4T priority Critical patent/DE112011104873B4/en
Priority to JP2013552852A priority patent/JP5797779B2/en
Priority to US13/983,947 priority patent/US9369066B2/en
Priority to PCT/EP2011/051977 priority patent/WO2012107094A1/en
Priority to CN201180067186.7A priority patent/CN103384639B/en
Publication of WO2012107094A1 publication Critical patent/WO2012107094A1/en

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/007—Interconnections between the MEMS and external electrical signals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0172—Seals
    • B81C2203/019—Seals characterised by the material or arrangement of seals between parts

Definitions

  • the present invention concerns a MEMS device that comprises an under bump metallization (UBM) .
  • UBM under bump metallization
  • the UBM is used to contact the device via flip-chip bonding with a substrate.
  • the UBM is the top metal layer on the MEMS device which forms mechanically and electrically stable bonds with the solder bump.
  • the MEMS device is a microphone
  • a membrane is typically placed on the surface of the device.
  • the membrane is placed directly above a back plate wherein the membrane and the back plate are the two electrodes of a capacitor.
  • As much surface area as possible should be reserved for the membrane in order to improve the performance of the MEMS microphone.
  • a certain area is required for the UBM to obtain a mechanically stable and reliable bond.
  • a MEMS device according to claim 1 provides a solution for this object.
  • the dependent claims disclose advantageous embodiments of the present invention.
  • a MEMS device comprises an UBM to contact the device via flip-chip bonding with a substrate.
  • the UBM is placed on the surface of the MEMS device and close to the corners of the surface.
  • the shape of the UBM is adapted to the shape of the corners. Thereby, no surface space is wasted.
  • a shape adapted to the corner is understood to be a shape different from a circle. Most preferred are shapes having two edges following a tangent of the circle that runs parallel to the edges of the surface forming the corner. But all shapes that cover an amount of area of the surface between a virtual circular UBM and the most preferred shape as defined above are allowed. Thereby the center of the adapted UBM is shifted nearer to the corner and some surface area adjoining the UBM most distant from the corner is saved without diminishing the UBM area with regard to a reference UBM of circular shape. Due to the usually fragile structure of MEMS devices it is advantageous to use laser dicing for the separation of such devices from a wafer where they have been produced.
  • the optical properties of the laser beam require a rather larger clearance of metal around the dicing lane.
  • This clearance defines a minimum distance between the UBM and the dicing lane.
  • adapting the shape of the UBM to the shape of the corners of a device is advantageous also for the use of other dicing methods.
  • the surface of the MEMS device can comprise an active area.
  • the shape of the UBM can further be adapted not only to the shape of the corners, but also to the shape of the active area.
  • the active area comprises a membrane placed on the surface of a MEMS microphone and directly above a counter electrode.
  • the UBM is approximately triangularly shaped in order to fit into the corners of a rectangular surface.
  • Specific embodiments of an approximately triangularly shaped UBM are UBMs with a shape of a triangular with rounded corners or UBM with the shape of an isosceles triangle.
  • one side of the UBM is concave if further
  • elements are placed on the surface of the device.
  • An UBM with one concave side leaves more space in the middle of the device for the further elements.
  • the UBM can follow the shape of the active part of the MEMS device with the minimum allowed design distance.
  • UBM is provided on the surface of a MEMS device in order to allow contacting the MEMS device via flip-chip bonding to a substrate.
  • another metal layer and/or a conducting layer is placed below the UBM.
  • the conducting layer can comprise highly doped polysilicon layers.
  • the term "UBM pad" refers to all metal layers, i.e. the UBM and underlying metal layers, plus other conducting layers. All layers of the UBM pad can obstruct a laser beam during dicing if arranged too close to the dicing line. Therefore, the same limitation as for the UBM are also valid for the UBM pad. In particular, a clearance of roughly 20% of the silicon wafer thickness is required between the UBM pad and the edge of the MEMS device.
  • the UBM pad can have the same shape as the UBM or can overlap the UBM.
  • the UBM pad is typically placed on the substrate close to the corners of the MEMS device.
  • the shape of the UBM pad is adapted to the shape of the corners of the device.
  • the shape of the UBM pad can be adapted not only to the shape of the corners and but also to the shape of the active area. Accordingly, the UBM pad can be approximately triangularly shaped and/or can comprise one concave side.
  • the MEMS device can comprise four UBM and respectively four UBM pads and one of these UBM or UBM pads each is placed in each corner of the device. Each of these UBMs can be adapted to the respective corner.
  • MEMS devices with other numbers of UBMs are possible as well.
  • Figure 1 shows a section of a MEMS microphone wherein a
  • FIG. 1 shows a section of a MEMS microphone comprising an UBM according to the present invention.
  • Figure 3 shows a section of a MEMS microphone comprising an
  • Figure 1 shows a section of a MEMS microphone as known in the prior art.
  • the surface of the MEMS microphone comprises an active part 1 and a circular UBM 2.
  • the active part comprises a membrane.
  • the membrane is placed directly above a back plate.
  • the back plate and the membrane are two electrodes and form a capacitor.
  • the device detects acoustic waves and can be used as a microphone.
  • the active part 1 can comprise further elements that are not shown in Figure 1.
  • the UBM 2 Due to dicing restrains, the UBM 2 needs to have a minimum distance a to the edges 3 of the surface. Further, the UBM 2 needs to have a minimum distance b to the active part 1.
  • the UBM 2 Due to its circular shape, the UBM 2 takes up a relatively large area of the MEMS microphone die. As the shape of the circular UBM 2 is not adjusted to the shape of the active part 1 or the shape of the corners, a lot of surface space is wasted and has to be left empty.
  • Figure 2 shows a section of a surface of a MEMS microphone, wherein the UBM 4 has a shape that is adjusted to the corners and to the shape of the active part 1. Accordingly, the UBM 4 is approximately triangular.
  • the virtual circular area of a known UBM 2 is depicted for reference only as a dotted line. It can be seen from Figure 2 that the size of the active part 1 can be increased while still providing a minimum distance b between the active part 1 and the UBM 4 and a minimum
  • the MEMS microphone is made of a die.
  • the shape of the UBM 4 is adjusted to the shape of the die.
  • a die is rectangularly shaped. Accordingly, the UBM 4 can be
  • the UBM 4 as shown in Figure 2 takes up the same area as the virtual circular UBM 2 being the same as the UBM 2 as shown in Figure 1 or can even be larger. Accordingly, the bonding is as stable as for a circular UBM 2.
  • FIG. 3 shows the second embodiment of the UBM 4.
  • the UBM 4 has a shape that is not only adjusted to the corners but further adjusted to the shape of the active part 1. Accordingly, the shape of the UBM 4 is concave so that the active part 1 and the UBM 4 are almost parallel to each other and have a constant distance of b along the dotted line between the points PI and P2. Between PI and P2, the UBM 4 follows the shape of the active part 1 of the MEMS device with the minimum allowed design distance b.
  • an UBM pad comprises an UBM 2, 4, at least one underlying metal layer and/or at least one conducting layer.
  • the UBM pad can have the same shape as the UBM 2, 4 or can overlap the UBM 2, 4.
  • An UBM 4 or respectively an UBM pad according to the present invention allows to use more active surface area for the MEMS microphone while providing a stable bonding to a substrate. Therefore, an UBM 4 or respectively an UBM pad according to the present invention yields a better electro acoustical performance of the microphone.

Abstract

The present invention concerns a MEMS device comprising an under bump metallization (4) – UBM - to contact the device via flip-chip bonding with a substrate. The UBM (4) is placed on the surface of the MEMS device and close to the corners of the surface. Further, the shape of the UBM (4) is adapted to the shape of the corners.

Description

Description
MEMS device comprising an under bump metallization The present invention concerns a MEMS device that comprises an under bump metallization (UBM) . The UBM is used to contact the device via flip-chip bonding with a substrate.
In flip-chip bonding, a MEMS device is contacted to a
substrate via solder bumps. The UBM is the top metal layer on the MEMS device which forms mechanically and electrically stable bonds with the solder bump.
Standard UBM for flip-chip bonding are circular in area. Due to dicing restrains on bump placement, these UBM
significantly reduce the active area which can be used for the MEMS device. Due to the usually fragile structure of MEMS devices it is advantageous to use laser dicing for the separation of such devices from a wafer where they have been produced. However, the optical properties of the laser beam require a rather larger clearance of metal around the dicing lane. Roughly, a metal clearance of 40% of the silicon wafer thickness between the UBM pads of two adjacent MEMS devices is required. Accordingly, a clearance of roughly 20% of the silicon wafer thickness is required between an UBM pad and the edge of a MEMS device.
If the MEMS device is a microphone, a membrane is typically placed on the surface of the device. The membrane is placed directly above a back plate wherein the membrane and the back plate are the two electrodes of a capacitor. As much surface area as possible should be reserved for the membrane in order to improve the performance of the MEMS microphone. However, a certain area is required for the UBM to obtain a mechanically stable and reliable bond.
It is an object of the present invention to provide a MEMS device having an UBM that allows a more efficient use of the surface space of a MEMS device.
A MEMS device according to claim 1 provides a solution for this object. The dependent claims disclose advantageous embodiments of the present invention.
A MEMS device according to the present invention comprises an UBM to contact the device via flip-chip bonding with a substrate. The UBM is placed on the surface of the MEMS device and close to the corners of the surface. The shape of the UBM is adapted to the shape of the corners. Thereby, no surface space is wasted.
A shape adapted to the corner is understood to be a shape different from a circle. Most preferred are shapes having two edges following a tangent of the circle that runs parallel to the edges of the surface forming the corner. But all shapes that cover an amount of area of the surface between a virtual circular UBM and the most preferred shape as defined above are allowed. Thereby the center of the adapted UBM is shifted nearer to the corner and some surface area adjoining the UBM most distant from the corner is saved without diminishing the UBM area with regard to a reference UBM of circular shape. Due to the usually fragile structure of MEMS devices it is advantageous to use laser dicing for the separation of such devices from a wafer where they have been produced. However, the optical properties of the laser beam require a rather larger clearance of metal around the dicing lane. This clearance defines a minimum distance between the UBM and the dicing lane. However, adapting the shape of the UBM to the shape of the corners of a device is advantageous also for the use of other dicing methods.
The surface of the MEMS device can comprise an active area. The shape of the UBM can further be adapted not only to the shape of the corners, but also to the shape of the active area. In one embodiment, the active area comprises a membrane placed on the surface of a MEMS microphone and directly above a counter electrode.
Usually the surface of MEMS devices is rectangularly shaped as they are separated from wafers. Accordingly, the UBM is approximately triangularly shaped in order to fit into the corners of a rectangular surface. Specific embodiments of an approximately triangularly shaped UBM are UBMs with a shape of a triangular with rounded corners or UBM with the shape of an isosceles triangle.
Preferably, one side of the UBM is concave if further
elements are placed on the surface of the device. An UBM with one concave side leaves more space in the middle of the device for the further elements. The UBM can follow the shape of the active part of the MEMS device with the minimum allowed design distance.
An UBM is provided on the surface of a MEMS device in order to allow contacting the MEMS device via flip-chip bonding to a substrate. Usually, another metal layer and/or a conducting layer is placed below the UBM. The conducting layer can comprise highly doped polysilicon layers. The term "UBM pad" refers to all metal layers, i.e. the UBM and underlying metal layers, plus other conducting layers. All layers of the UBM pad can obstruct a laser beam during dicing if arranged too close to the dicing line. Therefore, the same limitation as for the UBM are also valid for the UBM pad. In particular, a clearance of roughly 20% of the silicon wafer thickness is required between the UBM pad and the edge of the MEMS device.
The UBM pad can have the same shape as the UBM or can overlap the UBM.
The UBM pad is typically placed on the substrate close to the corners of the MEMS device. Preferably, the shape of the UBM pad is adapted to the shape of the corners of the device. Further, the shape of the UBM pad can be adapted not only to the shape of the corners and but also to the shape of the active area. Accordingly, the UBM pad can be approximately triangularly shaped and/or can comprise one concave side. The MEMS device can comprise four UBM and respectively four UBM pads and one of these UBM or UBM pads each is placed in each corner of the device. Each of these UBMs can be adapted to the respective corner. However, MEMS devices with other numbers of UBMs are possible as well.
The invention will be further described with reference to the accompanying drawings .
Figure 1 shows a section of a MEMS microphone wherein a
circular UBM is placed in the corner, as known in the prior art. Figure 2 shows a section of a MEMS microphone comprising an UBM according to the present invention.
Figure 3 shows a section of a MEMS microphone comprising an
UBM according a second embodiment of the present invention .
Figure 1 shows a section of a MEMS microphone as known in the prior art. The surface of the MEMS microphone comprises an active part 1 and a circular UBM 2. The active part comprises a membrane. The membrane is placed directly above a back plate. The back plate and the membrane are two electrodes and form a capacitor. By monitoring the capacitance of the capacitor, the device detects acoustic waves and can be used as a microphone. Furthermore, the active part 1 can comprise further elements that are not shown in Figure 1.
Due to dicing restrains, the UBM 2 needs to have a minimum distance a to the edges 3 of the surface. Further, the UBM 2 needs to have a minimum distance b to the active part 1.
Due to its circular shape, the UBM 2 takes up a relatively large area of the MEMS microphone die. As the shape of the circular UBM 2 is not adjusted to the shape of the active part 1 or the shape of the corners, a lot of surface space is wasted and has to be left empty.
Figure 2 shows a section of a surface of a MEMS microphone, wherein the UBM 4 has a shape that is adjusted to the corners and to the shape of the active part 1. Accordingly, the UBM 4 is approximately triangular. The virtual circular area of a known UBM 2 is depicted for reference only as a dotted line. It can be seen from Figure 2 that the size of the active part 1 can be increased while still providing a minimum distance b between the active part 1 and the UBM 4 and a minimum
distance a between the UBM 4 and the edges 3 adjoining the corner .
The MEMS microphone is made of a die. The shape of the UBM 4 is adjusted to the shape of the die. Typically, a die is rectangularly shaped. Accordingly, the UBM 4 can be
triangularly shaped so that it is adjusted to the corners of the die.
The UBM 4 as shown in Figure 2 takes up the same area as the virtual circular UBM 2 being the same as the UBM 2 as shown in Figure 1 or can even be larger. Accordingly, the bonding is as stable as for a circular UBM 2.
Further, Figure 3 shows the second embodiment of the UBM 4. Here, the UBM 4 has a shape that is not only adjusted to the corners but further adjusted to the shape of the active part 1. Accordingly, the shape of the UBM 4 is concave so that the active part 1 and the UBM 4 are almost parallel to each other and have a constant distance of b along the dotted line between the points PI and P2. Between PI and P2, the UBM 4 follows the shape of the active part 1 of the MEMS device with the minimum allowed design distance b.
The other layers of the UBM pad are not shown in Figures 1 to 3. In general, an UBM pad comprises an UBM 2, 4, at least one underlying metal layer and/or at least one conducting layer. The UBM pad can have the same shape as the UBM 2, 4 or can overlap the UBM 2, 4. An UBM 4 or respectively an UBM pad according to the present invention allows to use more active surface area for the MEMS microphone while providing a stable bonding to a substrate. Therefore, an UBM 4 or respectively an UBM pad according to the present invention yields a better electro acoustical performance of the microphone.

Claims

MEMS device,
comprising surface having an under bump metallization - UBM (4) - to contact the device via flip-chip bonding with a substrate
wherein the UBM (4) is placed on the surface of the MEMS device and close to the corners of the surface, and wherein the shape of the UBM (4) is adapted to the shape of the corners.
MEMS device according to one of claims 1,
wherein the surface of the MEMS device comprises an active part (1) and the shape of the UBM (4) is adapted to the shape of the corners and the shape of the active part ( 1 ) .
MEMS device according to claim 1 or 2,
wherein the UBM (4) is approximately triangularly shaped .
MEMS device according to claim 3,
wherein the UBM (4) has the shape of a triangle with rounded corners .
MEMS device according to claim 3,
wherein the UBM (4) has the shape of an isosceles triangle .
MEMS device according to one of claims 1-3,
wherein one side of the UBM (4) is concave. MEMS device according to one of claims 1-6,
wherein the device comprises four UBM (4) and one of these UBM (4) each is placed in each corner of the surface of the device.
MEMS device according to one of claims 1-7,
that is a MEMS microphone chip.
MEMS device according to one of claim 1-8,
the MEMS device comprises on the surface an UBM pad that comprises the UBM (4), at least one underlying metal layer and/or at least one conducting layer below the UBM
(4)
wherein the UBM pad is placed close to the corners of the MEMS device, and
wherein the shape of the UBM pad is adapted to the shape of the corners.
MEMS device according to claim 9,
wherein the conducting layer comprises highly doped polysilicon .
MEMS device according to claim 9 or 10,
wherein the surface of the MEMS device comprises an active part (1) and the shape of the UBM pad is adapted to the shape of the corners and the shape of the active part ( 1 ) .
MEMS device according to one of claims 9-11,
wherein the UBM pad is approximately triangularly shaped .
13. MEMS device according to one of claims 9-12,
wherein one side of the UBM pad is concave.
14. MEMS device according to one of claims 9-13,
wherein the device comprises four UBM pads and one of these UBM pads each is placed in each corner of the device .
PCT/EP2011/051977 2011-02-10 2011-02-10 Mems device comprising an under bump metallization WO2012107094A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE112011104873.4T DE112011104873B4 (en) 2011-02-10 2011-02-10 MEMS device comprising an under bump metallization
JP2013552852A JP5797779B2 (en) 2011-02-10 2011-02-10 MEMS devices including underbump metallization
US13/983,947 US9369066B2 (en) 2011-02-10 2011-02-10 MEMS device comprising an under bump metallization
PCT/EP2011/051977 WO2012107094A1 (en) 2011-02-10 2011-02-10 Mems device comprising an under bump metallization
CN201180067186.7A CN103384639B (en) 2011-02-10 2011-02-10 Mems device comprising an under bump metallization

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2011/051977 WO2012107094A1 (en) 2011-02-10 2011-02-10 Mems device comprising an under bump metallization

Publications (1)

Publication Number Publication Date
WO2012107094A1 true WO2012107094A1 (en) 2012-08-16

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US (1) US9369066B2 (en)
JP (1) JP5797779B2 (en)
CN (1) CN103384639B (en)
DE (1) DE112011104873B4 (en)
WO (1) WO2012107094A1 (en)

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Also Published As

Publication number Publication date
CN103384639A (en) 2013-11-06
JP5797779B2 (en) 2015-10-21
US9369066B2 (en) 2016-06-14
US20140035434A1 (en) 2014-02-06
DE112011104873B4 (en) 2019-05-29
DE112011104873T5 (en) 2013-11-07
JP2014507297A (en) 2014-03-27
CN103384639B (en) 2017-05-10

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