WO2008129073A2 - Messanordnung sowie verfahren zum dreidimensionalen messen eines objekts - Google Patents
Messanordnung sowie verfahren zum dreidimensionalen messen eines objekts Download PDFInfo
- Publication number
- WO2008129073A2 WO2008129073A2 PCT/EP2008/054982 EP2008054982W WO2008129073A2 WO 2008129073 A2 WO2008129073 A2 WO 2008129073A2 EP 2008054982 W EP2008054982 W EP 2008054982W WO 2008129073 A2 WO2008129073 A2 WO 2008129073A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- measuring arrangement
- arrangement according
- foci
- holes
- imaged
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C9/00—Impression cups, i.e. impression trays; Impression methods
- A61C9/004—Means or methods for taking digitized impressions
- A61C9/0046—Data acquisition means or methods
- A61C9/0053—Optical means or methods, e.g. scanning the teeth by a laser or light beam
- A61C9/006—Optical means or methods, e.g. scanning the teeth by a laser or light beam projecting one or more stripes or patterns on the teeth
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C9/00—Impression cups, i.e. impression trays; Impression methods
- A61C9/004—Means or methods for taking digitized impressions
- A61C9/0046—Data acquisition means or methods
- A61C9/0053—Optical means or methods, e.g. scanning the teeth by a laser or light beam
- A61C9/0066—Depth determination through adaptive focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Definitions
- the invention relates to a measuring arrangement for measuring three-dimensionally at least part of an object, in particular a semi-transparent object, comprising a light source with a continuous spectrum, a device for generating a multifocal illumination pattern, a lens with large chromatic aberration for imaging foci of the illumination pattern to the object, a detection unit such as CCD area detector for determining the wavelength spectra of the confocal imaged on the object via the lens foci and a spectrally dispersive device, which is arranged between the confocal imaged foci and the detection device.
- a measuring arrangement for measuring three-dimensionally at least part of an object, in particular a semi-transparent object, comprising a light source with a continuous spectrum, a device for generating a multifocal illumination pattern, a lens with large chromatic aberration for imaging foci of the illumination pattern to the object, a detection unit such as CCD area detector for determining the wavelength spectra of the confocal imaged on the object via
- the invention relates to a method for measuring the shape of at least a portion of an object, in particular a semi-transparent object such as at least a portion of a tooth, using a light source for generating light with a continuous spectrum, a device for generating a multifocal illumination pattern, a Lens with large chromatic aberration for imaging foci of the illumination pattern on the object, a detection device for determining the wavelength spectra of the confocal imaged on the object via the lens foci, which is determined from the respective wavelength spectrum spectral Peaklage each focus, from which the Extension of the object in the direction of the imaging beam (Z coordinate) is calculated.
- a wide-band light source of suitable optics with a strongly wavelength-dependent focal length can be used to image the focus or foci.
- the foci are sharply imaged depending on the wavelength at different distances to the lens.
- an intensity maximum can be detected in the focal plane for the color, which is sharply imaged at the corresponding object distance.
- EP-B-0 466 979 relates to an arrangement for simultaneous confocal imaging.
- light spots are produced by means of a perforated louvre aperture, such as a Nipkow disk, which are focused on an object.
- the detection unit used is a CCD array camera.
- a confocal distance sensor is known with imaging optics with chromatic aberration, which is intended for inspection in the electronics sector.
- the light source one having a plurality of point light sources can be used.
- a light receiver point detectors are used, each associated with a point detector and a point light source are assigned to each other and confocal.
- a confocal measuring arrangement for the three-dimensional measurement of an object with chromatic depth splitting is known in which by means of a microlens array a plurality of foci are generated and imaged onto the object. The reflected light is focused back into the plane of the microlens foci. With the arrangement, two- or three-dimensional micro-profiles of measurement objects or two-dimensional or three-dimensional transparency or reflection profiles are measured.
- the object of the present invention is to further develop a measuring arrangement and a method for the three-dimensional determination of the shape of a particularly semi-transparent object such as a tooth such that even with moving objects a surface profile which has a high degree of accuracy can be generated in a relatively short time.
- a particularly semi-transparent object such as a tooth
- scattering or strongly scattering objects that have a very high
- a measuring arrangement of the type mentioned initially provides that in the plane of the confocally imaged Foki a first hole pattern is arranged with first holes, wherein geometrical arrangement of the first holes geometrical arrangement of the Foki corresponds to the multifocal illumination pattern.
- a hole pattern or pinhole array is arranged on which the illumination pattern is consequently confocally imaged backwards by the measurement object.
- the geometric assignment of the first holes of the first hole pattern to the illumination pattern is aligned such that a clear assignment takes place, so that as a result of the foci in the holes of the hole pattern location coordinates are assignable in a plane perpendicular to the lens passing through the beam path.
- holes or pinholes distributed over a surface are arranged in the focal plane of the objective, into which the illumination pattern is confocally imaged backwards by the object.
- foci imaged on the object are imaged in the pinholes, which are then spectrally read out with the detection device.
- the dispersive device arranged upstream of the detection device to laterally split the spectral lines of the focus imaged in the respective hole, before the spectral lines impinge on pixels of the detection device.
- the detection device comprises pixels of a CCD surface sensor arranged in a surface, the dispersive device being relatively inclined to the first hole pattern or the detection device such that the laterally spread spectra can be imaged without overlapping on the pixel surface.
- the spread spectra to impinge on the pixel surface in such a way that successively laterally spread spectra merge into one another pixel-free.
- the direction of the spectral spread of the spectral dispersive device forms an angle of, for example, 6.5 ° to the connecting line of adjacent points, so that the pixel distance which is available for spectral broadening and evaluation is greater than the distance between adjacent pinholes.
- the tilt of the optical axis after the spectral dispersive device such as dispersion prism is eg 15 °.
- a color measuring unit which consists of the dispersive element for spectrally spreading the light of each pinhole along a line and a CCD chip on which the spectrally spread measuring points are imaged.
- the individual holes of the pinhole array correspond to those of a long gap of a line spectrometer.
- the illumination pattern is matched to the color measurement unit, i. E. chosen so that the spaces between the individual foci are used for the spectral decomposition of the light and measurement along lines.
- the illumination pattern a number of interpolation points are obtained with an image acquisition, ie measuring points distributed over the field of view. If the distance of the interpolation points is greater than the required resolution, the illumination pattern must be shifted accordingly. This can be done either by a suitable optical element such as plane-parallel plate in the measuring arrangement or by a continuous movement of the measuring arrangement itself, the resulting individual images are combined to form an overall image.
- the required height information is determined as Z coordinate by spectral evaluation of the focus imaged in the respective hole.
- the light source is arranged downstream of a microlens array for generating the multifocal illumination pattern in the lichtquel- len beau extending first focal plane of the lens.
- a second hole pattern in the first focal plane of the objective, in the holes of which the foci of the multifocal illumination pattern can be imaged or whose holes predetermine the multifocal illumination pattern itself.
- a first beam splitter is arranged between the objective and the detection device.
- a second beam splitter may further be arranged between the objective and the illumination pattern, in particular between the objective and the first beam splitter, in order to obtain a live image of the object.
- the object is irradiated with a second light source, wherein the spectral range of the second light source can also be outside the wavelength range of the first light source, which can be evaluated essentially for the shape detection of the object.
- the live image can be captured via a camera.
- the second beam splitter should be designed optically in such a way that a high transmission for the radiation results for the confocal imaging of the foci.
- the second beam splitter is preferably a dichroic filter, which in addition to the high transmission for the radiation of the first illumination source, a high reflection for the Having radiation of the second light source.
- the spectral range used for the recording is as narrow as possible, which can be done either by using a spectral filter in front of the camera or the camera chip and / or by using a narrowband second light source can.
- the first hole pattern has the first holes assigned to determine the background of the measurement results second holes, which lie outside the illumination pattern.
- a beam deflecting device such as mirrors is provided between the objective and the object so that a structurally simple design results for the intraoral use of the measuring arrangement.
- the first light source is in particular a halogen lamp.
- white light LEDs or multiple colored LEDs can also be used.
- the radiation of the first light source can be supplied via optical fibers whose output ends lie in the first object plane of the objective and thus represent the foci instead of the foci of the microlens array itself.
- the coupling-out end is preferably a light guide in the focal plane of a collimating optical system, after which the collimated beam of the light guide falls onto the microlens array.
- the microlens array, the first hole pattern and the first beam are expensive formed as a structural unit. This results in particular a cube geometry.
- one or more plane-parallel plates can be arranged between the first beam splitter and the objective and can be rotated or swiveled accordingly.
- 24 April 2008-48062 B dere is rotatably arranged in the presence of a plane-parallel plate about two in the plane defined by the plate plane extending axis.
- the deflection device such as the deflection mirror can be arranged displaceably and / or rotatable to measure different portions of the object.
- a method of the type mentioned above is characterized in that in the plane of the confocally imaged foci a first hole pattern is arranged with first holes whose geometric arrangement correlates with that of the multifocal illumination pattern, and that positions of the foci on the position of the first holes the object in a plane perpendicular to the imaging beam plane (X, Y coordinates) are predetermined, wherein the wavelength spectra of the foci imaged in the holes are detected simultaneously by the detecting device.
- the wavelength spectrum of each focus imaged in a hole is spread laterally with a dispersive device arranged downstream of the first hole pattern.
- the invention proposes that the detection device has a wavelength spectrum-detecting pixel area of a CCD sensor, such that the pixel area and / or the dispersive device are aligned with the first hole pattern in such a way that the wavelength spectra of the foci imaged in the first holes are free from overlap hit the pixel area.
- the pixel area and the dispersive device should be aligned with the first hole pattern in such a way that the wavelength spectra of the foci imaged in the first holes merge into one another without overlapping.
- a first spectrum of a focus is determined, which is arranged in the beam path of the focus of a path length of the optical path changing optical element that
- a further proposal for determining the wavelength or the wavelength range of the focus characterizing peak in the trace is provided to determine the background that spectral profile of the background of the spectrum of the focus determined by determining spectra in the first holes associated second holes incident light with the arrangement of the second holes deviating from that of the multifocal illumination pattern.
- spectra of light of a plurality of second holes assigned to a first hole are preferably averaged for background detection.
- partial regions of the object are measured one after the other to measure the object, successive partial regions should comprise a common base region that is 50% to 95% of the respective partial region.
- the subregions are taken in succession with an image sequence of between 25 and 50 images per second.
- the measuring method is provided for the intraoral measurement of teeth or tooth areas.
- the lens can be introduced with the deflection in the mouth area to perform the measurements.
- FIG. 1 shows a first embodiment of a measuring arrangement in a schematic representation
- Fig. 6 shows a monolithic embodiment of a microlens array
- Fig. 7 shows a second embodiment of a measuring arrangement
- Fig. 8 determined by subtracting two traces Peaklagen.
- the measuring arrangement comprises as essential elements a light source 10 such as a halogen lamp whose light is collimated via a lens 12.
- the collimated light beam is incident on a microlens array 14, which has an illumination pattern 16 in one
- the illumination pattern may eg have a size of 20 mm ⁇ 15 mm with about 1600 foci or eg a size of 5 mm ⁇ 6.5 mm with about 2000 foci at a distance of 250 ⁇ m, which is generated by the microlens array 14.
- the corresponding illumination pattern 14 is shown purely by way of example, in which two foci are identified by the reference numerals 20, 22 by way of example.
- the illumination pattern 16 can be designed in such a way that a diameter of the foci 20, 22 of approximately 25 ⁇ m or approximately 12 ⁇ m results.
- the microlens array 14 may be combined with a matching pinhole array located in the object plane of the objective 18.
- the holes of the pinhole array on the illumination pattern which is formed by the Foki 20, 22, geometrically or positionally matched.
- the light originating from the light source 10 after the illumination pattern 16 drops onto a beam splitter 24, from which the transmitted component falls on the objective 18 with strong chromatic aberration.
- the beam splitter 24 is shown in accordance with the drawings as a plate with a partially reflecting layer. Alternatively, other beam-splitting elements are possible. For example, beam splitter cubes are mentioned. An annular mirror or a smaller mirror is also conceivable, with the outer or inner beam portion serving for the detection or illumination to be explained below.
- the radiation passing through the objective 18 is imaged by means of a deflecting device 26, such as deflecting mirrors, onto an object 28 to be measured, such as a tooth.
- a deflecting device 26 such as deflecting mirrors
- the distance between the plane of the illumination pattern 16 and the object 28 is selected so that the foci are imaged on the deflection of the deflection device 26 on the surface of the object 28, wherein depending on the distance of the object surface to
- Lens 18 another color, ie wavelength, is sharply displayed.
- the selected magnification determines the size of the measuring field and the resolution.
- the radiation emitted by the object 28 or the light falls back partly into the lens 18 and after partial reflection at the beam splitter 24 on a first hole pattern or pinhole array 30, the holes.
- the size and the geometric arrangement corresponds to the total of the illumination pattern 16.
- the X, Y coordinate of the imaged focus on the surface of the object 28 is given.
- FIG. 5 shows an embodiment of the pinhole array 30, in which the open circles 32 correspond in arrangement and extent to the pattern of the focuses of the illumination pattern 16.
- the pinhole array 30 is a spectrometric tuned to the illumination pattern 16 and thus the hole pattern of the pinhole array 30
- Arrangement is downstream, which consists in the embodiment of optics 34, 36 and a arranged between them spectral dispersive element, which may be a prism 38.
- the pinhole array 30 is imaged onto a CCD area sensor as a detection device 40.
- the spectral-dispersive element that is to say the prism 38, effects a lateral spectral spread of the wavelength range of the light of the focus occurring in the holes having the intensity maximum, so that each hole of the pinhole array 30 is aligned with the CCD area sensor 40, ie in a surface arranged pixels, where - as in a line spectrometer - the position along this line with a specific wavelength correlates.
- FIG. 3 it can be seen from FIG. 3 that, basically, all the pixels between the measuring points are used for the spectral spread and thus for the determination of the peak position.
- the filled circles 42 symbolize a measuring point and the arrow 46, which extends to the following measuring point 44, the laterally spread spectral lines of the focus imaged in the hole of the pinhole array corresponding to the measuring point 42.
- the illumination pattern given above with the specified dimensions is selected and a CCD chip or camera chip having a size of 6.4 mm ⁇ 4.8 mm with 1 million pixels (pixel size 6.7 ⁇ m ⁇ 6.7 ⁇ m), Thus, 186 pixels are available for the spectral spreading per measuring point. With a line width of 2 pixels, corresponding to the pinhole diameter, a line spectrometer with 93 elements for the spectral spreading is realized for each of the approx. 2000 measuring points and approx. 2000 subsoil points. After image acquisition, the evaluation takes place.
- the spectral peak position and from this the distance of each measuring point to the object 28 are determined at each measuring point by means of a suitable algorithm. With an image one thus obtains the three-dimensional structure of the object 28 in the support points or measurement points, the resolution depending on the selected focus distance and the magnification of the objective 18.
- the illumination pattern 16 can be displaced accordingly. If the measuring arrangement is a device to be operated by hand, a complete detection of the object 28 can take place by continuous movement of the measuring arrangement, the resulting individual images being combined in a suitable manner to form an overall image.
- a typical measurement signal 48 on a tooth is shown as the object 28 in FIG. 4.
- a method can be used that is explained in principle purely by the Fig. 5.
- the pinhole array 30 has further holes 54 which do not coincide with the illumination pattern 14.
- the holes 54 which do not coincide with the illumination pattern 14 lie between the holes 32 corresponding to the illumination pattern 14.
- the holes 54 in which foci are not shown, then approximately reproduce the background signal of the adjacent holes 32 in which foci are imaged and thus form measuring points.
- the measurement signal of a single adjacent basically only white light-containing hole 54 can be used as background or the mean value over a plurality of adjacent holes 54 for the determination of the substrate 52.
- the holes 54 may be referred to as unlit and the holes 32 as illuminated holes or pinholes.
- a plane-parallel plate 56 which is arranged in the beam path between the first beam splitter 24 and the beam deflection 26, in particular between the objective 18 and the first beam splitter 24.
- the plane-parallel plate 56 in the beam path causes an axial displacement of the foci, which ultimately causes a displacement of the Peaklage in the measurement signal.
- By sequential image acquisition at a position with and without plane-parallel plate 56 is obtained per measurement point two spectra with different Peaklage and identical background. By subtracting the two spectra, the background can be eliminated.
- a typical waveform by subtraction of the two spectra is shown in FIG. One recognizes the peaks 58, 60 determined by the subtraction, the distance of which is determined by the plane-parallel plate 56.
- a live image capture can be provided.
- a further camera chip 62 is provided in the embodiment, to which the object 28 is imaged.
- a further light source 64 may be provided, which preferably irradiates the object 28 via the deflection device 26.
- a plurality of light sources may be provided.
- the light source 64 should emit light in a spectral range that is outside the wavelength range used for the actual measurement. As a result, live image and measurement are possible independently of each other.
- a second beam splitter 66 such as a dichroic filter having a high transmission for the measurement signal and a high reflection for the live image signal, can be used in the beam path between the objective 18 and the first beam splitter 24.
- the lens 18 is also used, with the axial position of the camera chip 62 being selected so that the live image is approximately at the center of the measurement range.
- the lens 18 and the beam deflection 26 may be arranged in an intra-oral part of a hand-held device, which is insertable in a mouth.
- the other components may be integrated in an extraoral part of the handset or in a separate device unit. With a compact light source, integration in a handheld device is possible.
- halogen lamp 10 instead of the halogen lamp 10, other light sources such as, for example, a white light LED or a plurality of differently colored LEDs with suitable collimation optics are also conceivable.
- the light source 10 may be integrated in an external device and the light guided via fibers in the handset, wherein the Auskoppelende of the light guide in the focus of the collimator lens 12, or the Auskoppelenden a plurality of corresponding light guide itself, instead of Foki the microlens array the foci of the illumination pattern.
- a pinhole array can also be used, which can be arranged in the plane of the illumination pattern 16 shown in FIGS.
- the object 28 is not measured or scanned by a single image, but rather by a plurality of images, ie individual images, the individual images must have an unambiguous association with one another in order to allow a simple evaluation.
- the frames overlap in parts that account for 50% to 95% of each frame.
- the introduction of fixed points on the object 28 can also serve as an aid to superposition of the individual images.
- actuators may be integrated in the measuring arrangement in order to displace measuring points.
- the maximum necessary displacement corresponds to the measuring point distance less the desired resolution, in the illustrated embodiment, ie at a desired resolution of 225 microns (250 microns distance of the holes - 25 microns resolution).
- plane-parallel plates 70, 72 can be arranged in the measurement beam-specifically in the exemplary embodiment in front of the objective 18, whereby the use of a single plate with two axes of rotation (see arrows) 74, 76) is possible.
- the axes of rotation preferably run in the plane spanned by the plane-parallel plate 70, 72 plane.
- a displaceable or rotatable deflection mirror such as the deflection device 26, as variable beam deflection
- an additional light source can be dispensed with, in particular if the illumination pattern in the spectral range used for the live image acquisition is out of focus.
- a diffractive element for generating the strong chromatic aberration and / or a diffractive element or a grating as a dispersive element and / or CMOS detectors instead of CCD chips and / or LCD modulators or DMDs for generating the illumination pattern instead of the microlens Arrays are used.
Abstract
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2008240597A AU2008240597B2 (en) | 2007-04-24 | 2008-04-24 | Measuring arrangement and method for the three-dimensional measurement of an object |
BRPI0811031-0A BRPI0811031B1 (pt) | 2007-04-24 | 2008-04-24 | Disposição de medição e processo para a medição tridimensional de um objeto |
EP08749696.4A EP2087312B1 (de) | 2007-04-24 | 2008-04-24 | Messanordnung sowie verfahren zum dreidimensionalen messen eines objekts |
CA2682297A CA2682297C (en) | 2007-04-24 | 2008-04-24 | Measuring arrangement and method for three-dimensional measuring of an object |
CN2008800130775A CN101688771B (zh) | 2007-04-24 | 2008-04-24 | 用于物体的三维测量的测量组件和方法 |
US12/532,262 US8515528B2 (en) | 2007-04-24 | 2008-04-24 | Measuring arrangement and method for the three-dimensional measurement of an object |
JP2010504684A JP5102349B2 (ja) | 2007-04-24 | 2008-04-24 | 対象物の3次元測定のための配置および方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007019267.5 | 2007-04-24 | ||
DE102007019267A DE102007019267A1 (de) | 2007-04-24 | 2007-04-24 | Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objekts |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008129073A2 true WO2008129073A2 (de) | 2008-10-30 |
WO2008129073A3 WO2008129073A3 (de) | 2008-12-11 |
Family
ID=39777396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/054982 WO2008129073A2 (de) | 2007-04-24 | 2008-04-24 | Messanordnung sowie verfahren zum dreidimensionalen messen eines objekts |
Country Status (9)
Country | Link |
---|---|
US (1) | US8515528B2 (de) |
EP (1) | EP2087312B1 (de) |
JP (1) | JP5102349B2 (de) |
CN (1) | CN101688771B (de) |
AU (1) | AU2008240597B2 (de) |
BR (1) | BRPI0811031B1 (de) |
CA (1) | CA2682297C (de) |
DE (1) | DE102007019267A1 (de) |
WO (1) | WO2008129073A2 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009049834A3 (en) * | 2007-10-16 | 2009-06-18 | Eric Gurny | Optical sensor device |
DE102009025815A1 (de) | 2009-05-15 | 2010-11-25 | Degudent Gmbh | Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objektes |
JP2013524188A (ja) * | 2010-03-26 | 2013-06-17 | デグデント・ゲーエムベーハー | オブジェクトの材料特性を決定するための方法 |
EP3166531B1 (de) | 2014-07-07 | 2020-04-22 | Align Technology, Inc. | Vorrichtung und verfahren zur dentalen konfokalen bildgebung |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8767216B2 (en) * | 2009-10-13 | 2014-07-01 | California Institute Of Technology | Holographically illuminated imaging devices |
JP5829621B2 (ja) * | 2009-12-30 | 2015-12-09 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 顕微鏡センサ |
WO2011106327A2 (en) * | 2010-02-23 | 2011-09-01 | California Institute Of Technology | High resolution imaging devices with wide field and extended focus |
KR101640456B1 (ko) * | 2010-03-15 | 2016-07-19 | 삼성전자주식회사 | 디스플레이 패널의 각 픽셀들의 개구부를 통해 촬영하는 촬영 장치 및 방법 |
US8134719B2 (en) * | 2010-03-19 | 2012-03-13 | Carestream Health, Inc. | 3-D imaging using telecentric defocus |
DE102010036496A1 (de) * | 2010-04-23 | 2011-10-27 | Degudent Gmbh | Verfahren und Anordnung zum Einkoppeln von von LEDs emittierter Strahlung |
CN101881607A (zh) * | 2010-06-10 | 2010-11-10 | 上海理工大学 | 一种检测平面误差系统 |
CN102008282B (zh) * | 2010-10-29 | 2012-08-08 | 深圳大学 | 数字印模口内扫描仪及口腔内表面形貌图像实时重建系统 |
EP2654607B1 (de) * | 2010-12-21 | 2019-04-24 | 3Shape A/S | Optisches system in einem 3d-fokus-scanner |
WO2012122398A2 (en) | 2011-03-09 | 2012-09-13 | California Institute Of Technology | Talbot imaging devices and systems |
KR101801355B1 (ko) * | 2011-03-25 | 2017-11-24 | 엘지전자 주식회사 | 회절 소자와 광원을 이용한 대상물의 거리 인식 장치 |
US8946619B2 (en) | 2011-04-20 | 2015-02-03 | California Institute Of Technology | Talbot-illuminated imaging devices, systems, and methods for focal plane tuning |
DE102011101476B4 (de) * | 2011-05-11 | 2023-05-25 | Cognex Ireland Ltd. | Verfahren zur 3D-Messung von Objekten |
DE102011083718A1 (de) * | 2011-09-29 | 2013-04-04 | Siemens Aktiengesellschaft | Konfokales Spektrometer und Verfahren zur Bildgebung in einem konfokalen Spektrometer |
DE102011083726A1 (de) * | 2011-09-29 | 2013-04-04 | Siemens Aktiengesellschaft | Konfokales Spektrometer und Verfahren zur Bildgebung in einem konfokalen Spektrometer |
EP2812648B1 (de) * | 2012-02-07 | 2021-08-11 | Nikon Corporation | Optisches bildformungssystem, bildgebungsvorrichtung, profilmessvorrichtung, strukturherstellungssystem und strukturherstellungsverfahren |
DE102012102580A1 (de) | 2012-03-26 | 2013-09-26 | Degudent Gmbh | Verfahren zum Messen eines Objektes sowie Intraoral-Scanner |
GB201205491D0 (en) * | 2012-03-28 | 2012-05-09 | Ucl Business Plc | Measuring surface curvature |
DE102012009836A1 (de) * | 2012-05-16 | 2013-11-21 | Carl Zeiss Microscopy Gmbh | Lichtmikroskop und Verfahren zur Bildaufnahme mit einem Lichtmikroskop |
JP6091100B2 (ja) * | 2012-07-10 | 2017-03-08 | 日本分光株式会社 | 共焦点顕微装置 |
DE102013008582B4 (de) | 2013-05-08 | 2015-04-30 | Technische Universität Ilmenau | Verfahren und Vorrichtung zur chromatisch-konfokalen Mehrpunktmessung sowie deren Verwendung |
FR3006758B1 (fr) * | 2013-06-05 | 2016-05-06 | Asentys Sas | Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs |
US9019576B2 (en) | 2013-06-21 | 2015-04-28 | 3Shape A/S | Scanning apparatus with patterned probe light |
DE102013223894B3 (de) * | 2013-11-22 | 2015-02-19 | Sirona Dental Systems Gmbh | Optisches Messsystem und Verfahren zur dreidimensionalen optischen Vermessung eines Objekts |
US10054429B2 (en) * | 2014-05-18 | 2018-08-21 | Adom, Advanced Optical Technologies Ltd. | System for tomography and/or topography measurements of a layered objects |
US9439568B2 (en) | 2014-07-03 | 2016-09-13 | Align Technology, Inc. | Apparatus and method for measuring surface topography optically |
US9261358B2 (en) | 2014-07-03 | 2016-02-16 | Align Technology, Inc. | Chromatic confocal system |
US10591279B2 (en) | 2014-12-09 | 2020-03-17 | Asentys Sas | Integrated optical device for contactless measurement of altitudes and thicknesses |
CN105807580B (zh) * | 2014-12-31 | 2019-12-24 | 上海微电子装备(集团)股份有限公司 | 一种工件六自由度位置和姿态测量传感器装置 |
DE102015201317A1 (de) * | 2015-01-27 | 2016-07-28 | Bayerische Motoren Werke Aktiengesellschaft | Vermessen einer Abmessung auf einer Oberfläche |
DE202015100878U1 (de) | 2015-02-24 | 2015-03-04 | Göpel electronic GmbH | Automatisches optisches Inspektionssystem zur dreidimensionalen Vermessung von bestückten elektronischen Flachbaugruppen |
CN106154760B (zh) * | 2015-04-15 | 2019-01-29 | 上海微电子装备(集团)股份有限公司 | 一种曝光装置及曝光方法 |
KR101628730B1 (ko) * | 2015-04-30 | 2016-06-21 | 주식회사 투아이스펙트라 | 치과용 3차원 이미징 방법 및 그 시스템 |
DE102015108912A1 (de) | 2015-06-05 | 2016-12-08 | Carl Zeiss Microscopy Gmbh | Vorrichtung und Verfahren zur Erfassung von Oberflächentopographien |
JPWO2017002535A1 (ja) * | 2015-06-29 | 2018-05-31 | 国立大学法人徳島大学 | 計測装置 |
CN105266815B (zh) * | 2015-09-17 | 2017-12-29 | 苏州佳世达光电有限公司 | 电子装置 |
EP3396308B1 (de) * | 2015-12-25 | 2022-02-02 | Keyence Corporation | Konfokaler verdrängungszähler |
DE102016000415A1 (de) * | 2016-01-19 | 2017-07-20 | DüRR DENTAL AG | Vorrichtung zum dreidimensionalen Erfassen einer Oberflächenstruktur |
JP6704831B2 (ja) * | 2016-10-20 | 2020-06-03 | 株式会社ミツトヨ | クロマティック共焦点センサ |
DE102016221630A1 (de) | 2016-11-04 | 2018-05-09 | Carl Zeiss Industrielle Messtechnik Gmbh | Konfokal chromatischer Sensor zur Bestimmung von Koordinaten eines Messobjekts |
US10197781B2 (en) * | 2016-12-29 | 2019-02-05 | Asm Technology Singapore Pte Ltd | Vertical chromatic confocal scanning method and system |
DE102017000296B4 (de) | 2017-01-15 | 2021-02-11 | Baden-Württemberg Stiftung Ggmbh | Messsystem und Verfahren zur kombinierten Erfassung der Oberflächentopographie und hyperspektralen Bildgebung |
CN106907998B (zh) * | 2017-03-20 | 2018-07-06 | 深圳立仪科技有限公司 | 线性优化的光谱共焦测量装置及方法 |
CN107007250B (zh) * | 2017-05-31 | 2018-11-30 | 广东工业大学 | 一种眼底成像光学系统 |
BR112020000830A2 (pt) * | 2017-07-14 | 2020-07-21 | Can Technologies, Inc | métodos para avaliar desenvolvimento muscular na linha superior de um cavalo e para avaliar um atributo de um animal, e, sistema para medir a musculatura de um animal . |
DE102017214189A1 (de) * | 2017-08-15 | 2019-02-21 | Carl Zeiss Microscopy Gmbh | Verfahren zum Betrieb einer Mikroskopieranordnung und Mikroskopieranordnung mit einem ersten Mikroskop und mindestens einem weiteren Mikroskop |
DE102018107710B4 (de) * | 2018-03-29 | 2021-01-14 | Dürr Dental SE | Intraoraler parallelkonfokaler Oberflächenscanner mit Störlichtsubtraktion |
JP6908556B2 (ja) * | 2018-05-08 | 2021-07-28 | 京セラ株式会社 | 電磁波検出装置及び情報取得システム |
DE102018115673A1 (de) * | 2018-06-28 | 2020-02-13 | Carl Zeiss Ag | Verfahren und Vorrichtungen zur Musterprojektion |
WO2020042190A1 (zh) * | 2018-08-31 | 2020-03-05 | 苏州大学张家港工业技术研究院 | 一种基于色散光谱编码的微结构形貌测量方法及其装置 |
WO2020093321A1 (zh) | 2018-11-08 | 2020-05-14 | 成都频泰鼎丰企业管理中心(有限合伙) | 三维测量设备 |
CN109350010B (zh) * | 2018-11-19 | 2023-12-26 | 郑州轻工业学院 | 一种全息内窥光学相干层析成像装置和成像方法 |
CN111351448B (zh) * | 2018-12-24 | 2021-07-06 | 深圳中科飞测科技股份有限公司 | 检测设备和检测方法 |
US11287626B2 (en) | 2019-05-17 | 2022-03-29 | Hong Kong Applied Science and Technology Research Institute Comoanv Limited | Chromatic confocal system and a method for inspecting an object |
DE102019208114B4 (de) | 2019-06-04 | 2022-03-17 | Carl Zeiss Industrielle Messtechnik Gmbh | Vorrichtung und Verfahren zur 3D Vermessung von Objektkoordinaten |
DE102020200214A1 (de) | 2020-01-09 | 2021-07-15 | Hochschule für angewandte Wissenschaften Kempten Körperschaft des öffentlichen Rechts | Konfokale Messvorrichtung zur 3D-Vermessung einer Objektoberfläche |
CN111457836A (zh) * | 2020-04-09 | 2020-07-28 | 中山易美杰智能科技有限公司 | 一种即时表面三维相机的构造 |
DE102020110298A1 (de) | 2020-04-15 | 2021-09-30 | Carl Zeiss Industrielle Messtechnik Gmbh | Vorrichtung und Verfahren zur optischen Messung einer Oberflächentopographie |
CN113418469B (zh) * | 2021-07-08 | 2023-01-31 | 西安工业大学 | 光谱共焦扫描共光路数字全息测量系统及测量方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19632594A1 (de) * | 1996-08-13 | 1998-02-19 | Johannes Prof Dr Schwider | Konfokales Mikroskop unter Anwendung von refraktiven Mikrolinsen-Feldern |
DE10321885A1 (de) * | 2003-05-07 | 2004-12-02 | Universität Stuttgart | Anordnung und Verfahren zur hochdynamischen, konfokalen Technik |
US6867406B1 (en) * | 1999-03-23 | 2005-03-15 | Kla-Tencor Corporation | Confocal wafer inspection method and apparatus using fly lens arrangement |
WO2007090865A1 (de) * | 2006-02-08 | 2007-08-16 | Sirona Dental Systems Gmbh | Verfahren und anordnung zur schnellen und robusten, chromatisch-konfokalen 3d-messtechnik |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1963594A1 (de) | 1969-12-18 | 1971-06-24 | Hans Zimmermann | Hoehenverstellbare Heizkoerperkonsole |
CH671828A5 (de) | 1987-06-26 | 1989-09-29 | Battelle Memorial Institute | |
JPH03223709A (ja) | 1989-12-04 | 1991-10-02 | Fuji Photo Film Co Ltd | 共焦点走査型顕微鏡 |
DE4023292A1 (de) | 1990-07-21 | 1992-01-23 | Leica Lasertechnik | Anordnung zur simultanen konfokalen bilderzeugung |
JPH08233544A (ja) * | 1995-02-28 | 1996-09-13 | Komatsu Ltd | 共焦点光学装置 |
JP3816632B2 (ja) * | 1997-05-14 | 2006-08-30 | オリンパス株式会社 | 走査型顕微鏡 |
JPH11211439A (ja) * | 1998-01-22 | 1999-08-06 | Takaoka Electric Mfg Co Ltd | 表面形状計測装置 |
DE19918689C2 (de) * | 1999-04-23 | 2003-05-28 | Rudolf Groskopf | Vorrichtung zur dreidimensionalen konfocalen optischen Untersuchung eines Objektes mit Beleuchtung durch eine Lochplatte |
DE10242374A1 (de) * | 2002-09-12 | 2004-04-01 | Siemens Ag | Konfokaler Abstandssensor |
JP4231754B2 (ja) | 2003-08-22 | 2009-03-04 | オリンパス株式会社 | レーザ走査型蛍光顕微鏡 |
-
2007
- 2007-04-24 DE DE102007019267A patent/DE102007019267A1/de not_active Withdrawn
-
2008
- 2008-04-24 WO PCT/EP2008/054982 patent/WO2008129073A2/de active Application Filing
- 2008-04-24 CA CA2682297A patent/CA2682297C/en active Active
- 2008-04-24 JP JP2010504684A patent/JP5102349B2/ja active Active
- 2008-04-24 EP EP08749696.4A patent/EP2087312B1/de active Active
- 2008-04-24 BR BRPI0811031-0A patent/BRPI0811031B1/pt not_active IP Right Cessation
- 2008-04-24 US US12/532,262 patent/US8515528B2/en active Active
- 2008-04-24 CN CN2008800130775A patent/CN101688771B/zh active Active
- 2008-04-24 AU AU2008240597A patent/AU2008240597B2/en not_active Ceased
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19632594A1 (de) * | 1996-08-13 | 1998-02-19 | Johannes Prof Dr Schwider | Konfokales Mikroskop unter Anwendung von refraktiven Mikrolinsen-Feldern |
US6867406B1 (en) * | 1999-03-23 | 2005-03-15 | Kla-Tencor Corporation | Confocal wafer inspection method and apparatus using fly lens arrangement |
DE10321885A1 (de) * | 2003-05-07 | 2004-12-02 | Universität Stuttgart | Anordnung und Verfahren zur hochdynamischen, konfokalen Technik |
WO2007090865A1 (de) * | 2006-02-08 | 2007-08-16 | Sirona Dental Systems Gmbh | Verfahren und anordnung zur schnellen und robusten, chromatisch-konfokalen 3d-messtechnik |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009049834A3 (en) * | 2007-10-16 | 2009-06-18 | Eric Gurny | Optical sensor device |
US8736846B2 (en) | 2007-10-16 | 2014-05-27 | Werth Messtechnik Gmbh | Optical sensor device |
DE102009025815A1 (de) | 2009-05-15 | 2010-11-25 | Degudent Gmbh | Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objektes |
CN102575928A (zh) * | 2009-05-15 | 2012-07-11 | 德固萨有限责任公司 | 用于对对象进行三维测量的方法以及测量装置 |
JP2012526977A (ja) * | 2009-05-15 | 2012-11-01 | デグデント・ゲーエムベーハー | 物体を3次元的に測定するための方法および測定装置 |
CN102575928B (zh) * | 2009-05-15 | 2015-05-13 | 德固萨有限责任公司 | 用于对对象进行三维测量的方法以及测量装置 |
JP2013524188A (ja) * | 2010-03-26 | 2013-06-17 | デグデント・ゲーエムベーハー | オブジェクトの材料特性を決定するための方法 |
EP3166531B1 (de) | 2014-07-07 | 2020-04-22 | Align Technology, Inc. | Vorrichtung und verfahren zur dentalen konfokalen bildgebung |
US11369271B2 (en) | 2014-07-07 | 2022-06-28 | Align Technology, Inc. | Apparatus for dental imaging |
EP3166531B2 (de) † | 2014-07-07 | 2023-01-11 | Align Technology, Inc. | Vorrichtung und verfahren zur intraoralen dentalen konfokalen bildgebung |
Also Published As
Publication number | Publication date |
---|---|
WO2008129073A3 (de) | 2008-12-11 |
US8515528B2 (en) | 2013-08-20 |
CA2682297C (en) | 2014-03-04 |
DE102007019267A1 (de) | 2008-10-30 |
AU2008240597A1 (en) | 2008-10-30 |
CN101688771A (zh) | 2010-03-31 |
EP2087312B1 (de) | 2015-02-11 |
BRPI0811031B1 (pt) | 2018-06-05 |
EP2087312A2 (de) | 2009-08-12 |
AU2008240597B2 (en) | 2013-08-29 |
JP5102349B2 (ja) | 2012-12-19 |
JP2010525404A (ja) | 2010-07-22 |
US20100099984A1 (en) | 2010-04-22 |
CA2682297A1 (en) | 2008-10-30 |
BRPI0811031A2 (pt) | 2014-12-09 |
CN101688771B (zh) | 2012-06-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2087312B1 (de) | Messanordnung sowie verfahren zum dreidimensionalen messen eines objekts | |
DE102006007170B4 (de) | Verfahren und Anordnung zur schnellen und robusten chromatisch konfokalen 3D-Messtechnik | |
EP2430395B1 (de) | Verfahren sowie messanordnung zum dreidimensionalen messen eines objektes | |
EP2398379B1 (de) | Handgehaltene dentale kamera und verfahren zur optischen 3d-vermessung | |
EP1805480B1 (de) | Verfahren und vorrichtung zur erfassung von konturdaten und/oder optischen eigenschaften eines dreidimensionalen semitransparenten objekts | |
EP2553428B1 (de) | Verfahren zur ermittlung von materialcharakteristika eines objekts | |
EP2137488B1 (de) | Verfahren und anordnung zur optischen abbildung mit tiefendiskriminierung | |
EP1757902B1 (de) | Verfahren und Vorrichtung zur Formerfassung eines zahntechnischen Objektes | |
WO2013171309A1 (de) | Lichtmikroskop und verfahren zur bildaufnahme mit einem lichtmikroskop | |
EP3568667B1 (de) | Messsystem und verfahren zur kombinierten erfassung der oberflächentopografie und hyperspektralen bildgebung | |
EP2326915B1 (de) | Verfahren und anordnung zur erfassung von konturdaten und/oder optischen eigenschaften eines dreidimensionalen semitransparenten objekts | |
DE102014108353A1 (de) | Verfahren und Vorrichtung zur Bestimmung von Geometrien an Messobjekten mittels eines kombinierten Sensorsystems | |
DE202010010932U1 (de) | Vorrichtung zur Abbildung einer Probenoberfläche | |
EP2863167B1 (de) | Verfahren und Vorrichtung zur Messung der Ablenkung von Lichtstrahlen durch eine Objektstruktur oder ein Medium | |
WO2015044035A1 (de) | Konfokales lichtmikroskop und verfahren zum untersuchen einer probe mit einem konfokalen lichtmikroskop | |
DE102015108912A1 (de) | Vorrichtung und Verfahren zur Erfassung von Oberflächentopographien | |
DE10356412A1 (de) | Multifokales konfokales Verfahren und konfokale Anordnung für wenig kooperative Objekte | |
DE102018118290A1 (de) | Sensor zur Bestimmung von geometrischen Eigenschaften eines Messobjekts | |
DE102005019510A1 (de) | Verfahren und Vorrichtung zur Erfassung von Konturdaten dreidimensionaler Objekte, insbesondere semitransparenter Objekte wie Zähne | |
DE4130238A1 (de) | Verfahren zur ausmessung eines raumes, insbesondere eines mundinnenraumes, sowie vorrichtung zur durchfuehrung eines solchen verfahrens |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880013077.5 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08749696 Country of ref document: EP Kind code of ref document: A2 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008749696 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12532262 Country of ref document: US |
|
ENP | Entry into the national phase |
Ref document number: 2682297 Country of ref document: CA |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010504684 Country of ref document: JP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008240597 Country of ref document: AU |
|
ENP | Entry into the national phase |
Ref document number: 2008240597 Country of ref document: AU Date of ref document: 20080424 Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: PI0811031 Country of ref document: BR Kind code of ref document: A2 Effective date: 20091023 |