WO2008054558A3 - Deviation angle self compensating substantially achromatic retarder - Google Patents

Deviation angle self compensating substantially achromatic retarder Download PDF

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Publication number
WO2008054558A3
WO2008054558A3 PCT/US2007/015695 US2007015695W WO2008054558A3 WO 2008054558 A3 WO2008054558 A3 WO 2008054558A3 US 2007015695 W US2007015695 W US 2007015695W WO 2008054558 A3 WO2008054558 A3 WO 2008054558A3
Authority
WO
WIPO (PCT)
Prior art keywords
substantially achromatic
deviation angle
angle self
self compensating
achromatic retarder
Prior art date
Application number
PCT/US2007/015695
Other languages
French (fr)
Other versions
WO2008054558A2 (en
Original Assignee
J A Woollam Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/590,408 external-priority patent/US7460230B2/en
Application filed by J A Woollam Co Inc filed Critical J A Woollam Co Inc
Priority to KR1020087030571A priority Critical patent/KR101335567B1/en
Priority to JP2009534564A priority patent/JP2010508511A/en
Priority to EP07810297A priority patent/EP2062018B1/en
Publication of WO2008054558A2 publication Critical patent/WO2008054558A2/en
Publication of WO2008054558A3 publication Critical patent/WO2008054558A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polarising Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

A substantially achromatic multiple element compensator system (R1, R2, W1, W2) for use in wide spectral range (for example, 190 - 1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements (R1, R2, W1, W2) are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
PCT/US2007/015695 2006-10-31 2007-07-10 Deviation angle self compensating substantially achromatic retarder WO2008054558A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020087030571A KR101335567B1 (en) 2006-10-31 2007-07-10 Deviation angle self compensating substantially achromatic retarder
JP2009534564A JP2010508511A (en) 2006-10-31 2007-07-10 Substantially achromatic retarder that self-compensates for declination
EP07810297A EP2062018B1 (en) 2006-10-31 2007-07-10 Deviation angle self compensating substantially achromatic retarder

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/590,408 US7460230B2 (en) 2005-11-04 2006-10-31 Deviation angle self compensating substantially achromatic retarder
US11/590,408 2006-10-31
US11/633,138 US7450231B2 (en) 2005-11-04 2006-12-04 Deviation angle self compensating substantially achromatic retarder
US11/633,138 2006-12-04

Publications (2)

Publication Number Publication Date
WO2008054558A2 WO2008054558A2 (en) 2008-05-08
WO2008054558A3 true WO2008054558A3 (en) 2008-09-04

Family

ID=39344822

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/015695 WO2008054558A2 (en) 2006-10-31 2007-07-10 Deviation angle self compensating substantially achromatic retarder

Country Status (5)

Country Link
US (1) US7450231B2 (en)
EP (1) EP2062018B1 (en)
JP (2) JP2010508511A (en)
KR (1) KR101335567B1 (en)
WO (1) WO2008054558A2 (en)

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Title
See also references of EP2062018A4 *

Also Published As

Publication number Publication date
JP2012141623A (en) 2012-07-26
US20080100842A1 (en) 2008-05-01
KR101335567B1 (en) 2013-12-02
US7450231B2 (en) 2008-11-11
KR20090087812A (en) 2009-08-18
EP2062018A4 (en) 2009-10-21
WO2008054558A2 (en) 2008-05-08
JP2010508511A (en) 2010-03-18
JP5438789B2 (en) 2014-03-12
EP2062018B1 (en) 2012-03-07
EP2062018A2 (en) 2009-05-27

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