WO2002095475A1 - Procede et dispostif de mesure par imagerie confocale a chromatisme entendu - Google Patents
Procede et dispostif de mesure par imagerie confocale a chromatisme entendu Download PDFInfo
- Publication number
- WO2002095475A1 WO2002095475A1 PCT/FR2002/001699 FR0201699W WO02095475A1 WO 2002095475 A1 WO2002095475 A1 WO 2002095475A1 FR 0201699 W FR0201699 W FR 0201699W WO 02095475 A1 WO02095475 A1 WO 02095475A1
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- WIPO (PCT)
- Prior art keywords
- echo
- pulse
- light
- probe
- chromatic
- Prior art date
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
Definitions
- the present invention relates to improvements made to optical measurement systems by confocal imaging using an objective whose axial chromatism is adapted to the desired measurement range.
- the technical field of the invention is that of the manufacture of dimensional measuring devices without contact with the object to be measured.
- Patent application FR-A-2,738,343 (COH EN SABBAN et al) describes an opto-electronic device for microstratigraphy of an object at least partially transparent or translucent in the wavelength domain of the axial chromatism considered, which comprises: 15 - a light source which delivers a polychromatic beam with a continuous spectrum;
- a measurement probe comprising a target whose known axial chromatism is adapted to the working distance and to the desired axial measurement range (depth) as a function of the object to be analyzed;
- a 0 probe is for example offered by the company STIL, AIX EN PROVENCE, FRANCE, under the reference CHR 1 50, which has the following characteristics: measurement range: from 0 to 80 ⁇ , or else from 0 to 300 ⁇ , or from 0 to 3 mm; working distance: 1 mm, 4.5 mm and 38 mm respectively; respective axial resolution: 31 0 "9 m, 1 0 ⁇ 8 m, and 5 1 0 " 7 m;
- spectrophotometer comprising a chromatic disperser (prism or grating) as well as a multiple linear photoelectric detector (for example a CCD or CMOS strip);
- the length of the fiber sections which is of the order of one or more meters is adjusted as a function the distance between the object and the source (and / or the spectrophotometer).
- Such a device allows simultaneous detection and / or simultaneous distance measurement of several interfaces separating superimposed layers or regions of the object which differ from one another by their refractive index, for each interface located in the measurement range of the probe, by analyzing the shape, the central wavelength and the amplitude of the peak (s) detected by the detector of the spectrophotometer.
- An object of the invention is therefore to propose a method and a device - or system - for measurement by chromatic confocal imaging which are improved and / or which remedy, at least in part, the drawbacks of known measurement systems.
- An object of the invention is to propose such systems which are simple and rapid.
- the invention applies to a process in which a polychromatic light source, a chromatic confocal probe, a light guide connecting the source to the probe, and a return beam splitter (reflected and / or backscattered by the object) transported by the light guide, which is capable of directing the return beam towards a detector; in accordance with one aspect of the invention, there is available on the optical path of the incident beam (go) and / or the return beam, a chromatic retarder capable of modifying the duration of propagation of light, between the source and the probe on the one hand, and / or between the probe and the detector on the other hand, in a variable manner as a function of the wavelength; in addition, the emission, by the light source, of a polychromatic light pulse is provoked; the back and forth propagation time is measured, for one (or more) light pulse (s) received by a photoelectric detector, each pulse received corresponding to an echo of the pulse emitted due to a layer or portion of the object to be analyzed, and the position
- the invention uses the temporal dispersion of the different monochromatic components of the polychromatic pulse emitted, and / or of the echo - which is mono or polychromatic -, due to the propagation of light in the chromatic retarder , instead of using the spatial dispersion resulting from the propagation of light in a disperser (prism or equivalent) of a spectrophotometer.
- a single (and / or point-type) photoelectric detector can be used which delivers a continuous (analog) output signal which can be sampled and digitized at very high frequency; the resulting digital data are analyzed by an electronic data processing unit in order to calculate the time between the emission of a pulse and the reception of an echo, and to deduce therefrom by calculation the position in the chromatic field of the probe used, from the point of the object that caused this echo.
- said chromatic retarder comprises - and / or is essentially constituted by - a section of optical fiber; the length of this section is chosen to be large enough so that the delay between two echoes - at two different wavelengths - corresponding to a single pulse emitted by the source is sufficient to allow the (temporal) separation of these two echoes: to use chromatic dispersion optical fiber, generally choose a section of optical fiber whose length is of the order of at least one or several hundred meters, in particular of the order of one or more kilometers.
- a light source emitting in the visible and / or infrared range is preferably used, in particular in a wavelength range from 600 to 1500 nm approximately, in particular ranging from 600 to 1000 nm.
- the curve representing the spectral distribution of the energy of the light pulse emitted by the source can be continuous or discontinuous: it can be a spectrum of “discrete” lines (reference 25, FIG. 4), a spectrum of bands (reference 24, FIG. 3), of a "flat” spectrum (reference 23, FIG. 2), or else of a spectrum having at the same time lines, bands and / or a "continuous component" .
- the optical fiber section of the chromatic retarder is shaped compactly; in particular, this section can be wound to form one (or more) coil (s).
- the duration (temporal width) of the pulse reflected by the object to be analyzed is small, so that one can distinguish, at inside a measurement time window, two echoes corresponding to two very similar measurement distances; in particular, it is advantageous to be able to distinguish (discriminate) several tens, hundreds or thousands of echoes in said measurement window; taking into account the fact that the duration of the echo pulse is greater than that of the pulse emitted by the source, it is desirable that the duration of the latter is short, in particular of the order of 1 0 to 1 000 pico seconds, for example of the order of 1 00 pico seconds.
- a measuring device comprises a source of polychromatic light pulses, a chromatic confocal probe, a photoelectric detector, a light guide connecting the source to the probe on the one hand, and the detector probe on the other hand, as well as a chromatic retarder, in particular a section of optical fiber of adequate length inserted between the source and the probe and / or between the probe and the detector.
- the device further comprises:
- a subtractor for determining, for an emitted pulse and for an associated echo, a propagation duration (go and return) of the pulse, by difference between said time value (return time) and said time reference (start time) ; means for determining, from said propagation time, and as a function of calibration data specific to the retarder and to the chromatic probe, the target point position of the object having produced the echo, in the measurement field of the chromatic confocal probe.
- the invention consists in proposing a hardware and / or software system for measuring dimensions by confocal imaging, with extended chromatism, which comprises means for determining a dimensional measurement result from the propagation time d 'a light pulse in said chromatic retarder.
- the invention consists in using a coiled or compacted optical fiber in a dimensional measurement system by chromatic confocal imaging.
- FIG. 1 schematically illustrates the main components of a device according to the invention.
- Figures 2 to 4 are spectrograms of three alternative embodiments of a light pulse emitted by the source.
- Figure 5 schematically illustrates the effect produced by the optoelectric system of Figure 1 and its use for non-contact distance measurement according to the invention; in this figure is illustrated a timing diagram of a light pulse emitted by the source, as well as a timing diagram of an output signal from a detector illustrating three echoes corresponding to three distinct positions of the target point in the chromatic measurement field.
- the device comprises a light source 1 such as a light-emitting diode, which emits a polychromatic pulse light beam 12;
- the device comprises a separator 2 constituted by two prisms 2a and 2b assembled by their interface 2c treated semi-reflecting to form a cube; alternatively, cube 2 could be replaced by a fiber optic coupler;
- the beam 1 2 crosses the cube 2 to form at the output a bundle 1 3 penetrating at one end 3a of a section of optical fiber 3 of great length;
- the beam 1 4 transmitted by the core of the fiber 3 is integrated at the input of the probe 4 comprising an objective 4a with accentuated chromatism along its optical axis 5; due to the chromaticism of the objective 4a, the incident light pulse 1 4 is spatially dispersed at the exit of the objective 4a, the radius 1 5 schematically indicating the path of a spectral component such as ⁇ l FIG.
- the radius 1 6 schematically indicates the path of a spectral component such as ⁇ 3 in figure 4.
- the object 27 to be analyzed is placed in the measurement field of the probe 4, so that a point 28 of its external contour 29 is located on the axis 5, between the points 17 and 1 8 of this axis which respectively correspond to the focus of the objective 4a for the wavelengths ⁇ l and ⁇ 3 of optical path 1 5, 1 6 respectively; according to the design of the objective 4a, the distance separating the points 17 and 18 may for example vary from a few microns to several tens of millimeters; this distance is the depth of the measurement color field.
- the probe 4 operating according to the principle of confocal imagery, causes a "spatial" filtering: only the echo reflected or backscattered by the point 28, which propagates along an intermediate path between the extreme paths 1 5 and 1 6, is retransmitted by objective 4a to its object focus; moreover, due to the chromaticism of the objective 4a, this echo essentially consists of a spectral line of wavelength (such as ⁇ 2 in FIG.
- the echo pulse 1 9 retransmitted by the probe 4 at the “downstream” end 3b of the fiber 3 therefore essentially consists of said intermediate spectral line ( ⁇ 2), as in the case of the device described in the patent FR-A -2,738,343 mentioned above.
- the echo 1 9 is transported by the fiber 3, from 3b to 3a, with a propagation time characteristic of its wavelength ( ⁇ 2); this echo is reflected by the interface 2c and forms the directed echo pulse 21 to the single detector 6 which delivers an output signal 1 0, to a signal and data processing unit 7, consisting for example of a personal computer equipped with sampling and digitization cards for the signal 1 0.
- the unit 7 is connected for this purpose to the detector 6 by a link 8; it is also connected to the source 1 by a link 9 to send to the source control signals for generating light pulses 12.
- Part of the pulse 1 2 emitted by the source 1 is reflected by the interface 2c and directed by a light guide 22 towards the detector 6; this allows the unit 7 to receive from the detector 6 a signal corresponding to the emission of a pulse, which serves as a time reference for the calculation, by difference with the time value corresponding to the return of the echo on the detector, propagation time - go - of the incident pulse and propagation - return - of the echo.
- the detector 6 or the unit 7 includes a time sampler allowing sufficient resolution along the measurement axis: typically 1000 samples must be available over the overall duration of a measurement (of the order of 1 00 ns) corresponding to the depth of field of observation, and also a few tens of samples (around 30) for an echo.
- the main steps in processing the signal delivered by the detector 6 are:
- a very short polychromatic pulse 12 (the duration of which is generally situated in a range going from 1 0 ps to 1 ns, typically 1 00 ps) corresponding to a pulse emission frequency of the order of 1 to 1 00 GHz, typically 10 GHz, is injected into the system at a referenced instant; part of the source pulse is directed to the detection system;
- the pulse crosses the long optical fiber 3 (typically one or more km): the pulse is "spread out” in time but remains polychromatic;
- the pulse 1 4 crosses the optical rod 4 and is focused on a segment of its optical axis 5 (chromatic coding);
- each object point 28 reinjects into the optical pencil 4 part of the light (narrow spectrum) that it has received; only the object points efficiently inject flux back into the optical pencil (which works according to the principle of confocal imaging);
- the optical pencil focuses each echo pulse always at the same point: the initial source point at the output of the optical fiber, whatever the axial position of the corresponding object point;
- each echo 1 9 is injected into the optical fiber: it is once again widened in time; more and more importantly, it is delayed next its spectral composition characteristic of the altitude of the corresponding object point;
- the delay Tj, T 2 , T 3 (FIG. 5) is variable as a function of the wavelength ⁇ l, ⁇ 2, ⁇ 3 of the echo 21 returned by point 28 of the surface 29 of the object 27, depending on whether this point 28 is located at one end 1 7 or 1 8 of the measurement field on the axis 5 ( Figure 1), or else in an intermediate position between points 1 7 and 1 8;
- each echo 20 is directed by the separating cube on the photoelectric detector 6; on the detector, each echo 21 is sampled temporally;
- the barycenter is determined all the more precisely the greater the number of samples useful for the calculation.
- This number of samples is limited mainly on the one hand by the temporal width induced by the system (widening due to the guidance of the fiber, influence of the optical pencil on the duration of the echo due to the residual spectral width due to the assembly confocal realized, duration of the source pulse), on the other hand by the minimum flux necessary for the measurement; the width 30 of the echo 21 is greater than that 31 of the pulse 1 2 emitted by the source;
- the "temporal" position of the barycenter represents the wavelength selected by the optical pencil, which is itself characteristic of the axial position of the object point.
- the accuracy of the measurement of the position of the object depends on the accuracy of the determination of the time barycenter of the echo 21;
- the object and the sensor can be moved laterally (along two XY axes forming with axis 5 a three-dimensional frame of reference) relatively to each other, to measure the altitudes of all the points of the measured object field. This gives the topography of the surface of the object.
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0106640A FR2824903B1 (fr) | 2001-05-21 | 2001-05-21 | Amelioration aux procedes et dispositifs de mesure par imagerie confocale a chromatisme etendu |
FR01/06640 | 2001-05-21 |
Publications (1)
Publication Number | Publication Date |
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WO2002095475A1 true WO2002095475A1 (fr) | 2002-11-28 |
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Application Number | Title | Priority Date | Filing Date |
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PCT/FR2002/001699 WO2002095475A1 (fr) | 2001-05-21 | 2002-05-21 | Procede et dispostif de mesure par imagerie confocale a chromatisme entendu |
Country Status (2)
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FR (1) | FR2824903B1 (fr) |
WO (1) | WO2002095475A1 (fr) |
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EP0762143A1 (fr) * | 1995-07-31 | 1997-03-12 | Robotic Vision Systems Inc. | Capteur optique chromatique pour détermination de distance |
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FR2824903A1 (fr) | 2002-11-22 |
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