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Publication numberWO1997037264 A1
Publication typeApplication
Application numberPCT/JP1997/001095
Publication date9 Oct 1997
Filing date28 Mar 1997
Priority date29 Mar 1996
Publication numberPCT/1997/1095, PCT/JP/1997/001095, PCT/JP/1997/01095, PCT/JP/97/001095, PCT/JP/97/01095, PCT/JP1997/001095, PCT/JP1997/01095, PCT/JP1997001095, PCT/JP199701095, PCT/JP97/001095, PCT/JP97/01095, PCT/JP97001095, PCT/JP9701095, WO 1997/037264 A1, WO 1997037264 A1, WO 1997037264A1, WO 9737264 A1, WO 9737264A1, WO-A1-1997037264, WO-A1-9737264, WO1997/037264A1, WO1997037264 A1, WO1997037264A1, WO9737264 A1, WO9737264A1
InventorsHideyuki Wakai, Hiroyuki Mizukami, Toru Suzuki, Masato Moriya
ApplicantKomatsu Ltd.
Export CitationBiBTeX, EndNote, RefMan
External Links: Patentscope, Espacenet
Confocal optical apparatus
WO 1997037264 A1
Abstract
A confocal optical apparatus provided with a confocal optical system including relay lenses (7, 7a, 7b), a pinhole array (4) in which pinholes (4a) are linearly or two-dimensionally arranged, and a photodetector array (8), and adapted to measure the intensities of light beams reflected from an object and passing through the pinholes, via the relay lenses. A diffusion member (20) adapted to diffuse at random the reflected light which has passed through the pinholes, is disposed in the vicinity of the reflected light focal point, whereby the reflected light which has passed through the pinholes is directed to the photodetecting portion of the photodetector array uniformly with a constant probability.
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US4806004 *10 Jul 198721 Feb 1989California Institute Of TechnologyScanning microscopy
Referenced by
Citing PatentFiling datePublication dateApplicantTitle
WO2000008415A1 *5 Aug 199917 Feb 2000Cadent Ltd.Imaging a three-dimensional structure by confocal focussing an array of light beams
EP1327851A1 *5 Aug 199916 Jul 2003Cadent Ltd.Imaging a three-dimensional structure by confocal focussing an array of light beams
US66971641 Feb 200124 Feb 2004Cadent Ltd.Imaging a three-dimensional structure by confocal focussing an array of light beams
US694061127 Oct 20036 Sep 2005Cadent Ltd.Imaging a three-dimensional structure by confocal focussing an array of light beams
US70921077 Jul 200515 Aug 2006Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US723072517 Mar 200612 Jun 2007Cadent LtdMethod and apparatus for imaging three-dimensional structure
US747740211 Jan 200713 Jan 2009Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US76300893 Dec 20088 Dec 2009Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US77962773 Dec 200814 Sep 2010Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US794456929 Dec 200917 May 2011Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US799054829 Dec 20092 Aug 2011Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US83106838 Apr 201113 Nov 2012Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US863844714 Sep 201228 Jan 2014Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US86384484 Mar 201328 Jan 2014Cadent Ltd.Method and apparatus for imaging three-dimensional structure
US908927726 Dec 201328 Jul 2015Align Technology, Inc.Method and apparatus for imaging three-dimensional structure
US961590118 Jun 201511 Apr 2017Align Technology, Inc.Method and apparatus for imaging three-dimensional structure
Classifications
International ClassificationG01B11/24, G02B21/00, G01B9/04
Cooperative ClassificationG02B21/004, G01B9/04, G01B11/24
European ClassificationG02B21/00M4A5A, G01B11/24, G01B9/04
Legal Events
DateCodeEventDescription
9 Oct 1997AKDesignated states
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4 Feb 1999REGReference to national code
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