WO1995000871A1 - Three-dimensional imaging device - Google Patents

Three-dimensional imaging device Download PDF

Info

Publication number
WO1995000871A1
WO1995000871A1 PCT/FR1994/000747 FR9400747W WO9500871A1 WO 1995000871 A1 WO1995000871 A1 WO 1995000871A1 FR 9400747 W FR9400747 W FR 9400747W WO 9500871 A1 WO9500871 A1 WO 9500871A1
Authority
WO
WIPO (PCT)
Prior art keywords
imaging device
dimensional imaging
focusing
point
light
Prior art date
Application number
PCT/FR1994/000747
Other languages
French (fr)
Inventor
Bernard Picard
Original Assignee
Commissariat A L'energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat A L'energie Atomique filed Critical Commissariat A L'energie Atomique
Publication of WO1995000871A1 publication Critical patent/WO1995000871A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Abstract

A three-dimensional imaging device including a broad-spectrum light source (7), an assembly (8, 14) for forming point sources therefrom, a member (15) for focusing the light from each point source on an object, said focusing member having axial chromatism, a beam splitter (11), chromatic filtering units (F1, F2), light sensors (C1, C2) and an electronic processing unit (MT) for determining the position of each point on the object (0) in parallel to the axis (Z) of the focusing member. Said device is useful for three-dimensional control.
PCT/FR1994/000747 1993-06-22 1994-06-21 Three-dimensional imaging device WO1995000871A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR93/07534 1993-06-22
FR9307534A FR2707018B1 (en) 1993-06-22 1993-06-22

Publications (1)

Publication Number Publication Date
WO1995000871A1 true WO1995000871A1 (en) 1995-01-05

Family

ID=9448398

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR1994/000747 WO1995000871A1 (en) 1993-06-22 1994-06-21 Three-dimensional imaging device

Country Status (2)

Country Link
FR (1) FR2707018B1 (en)
WO (1) WO1995000871A1 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2738140A1 (en) * 1995-08-30 1997-03-07 Cohen Sabban Joseph Optical tomobiopsy equipment for examining live skin
AT402863B (en) * 1995-03-01 1997-09-25 Thallner Erich Device for forming images (pictures) from two object planes
WO1998025171A1 (en) * 1996-12-05 1998-06-11 Leica Microsystems Heidelberg Gmbh Polyfocal representation of the surface profile of any given object
WO1998044375A2 (en) * 1997-03-29 1998-10-08 Carl Zeiss Jena Gmbh Confocal microscopic device
WO2000033026A1 (en) * 1998-11-30 2000-06-08 Rahmonic Resources Pte Ltd. Apparatus and method to measure three-dimensional data
US7202953B1 (en) * 1998-12-21 2007-04-10 Evotec Biosystems Ag Scanning microscopic method having high axial resolution
WO2007124858A1 (en) * 2006-04-26 2007-11-08 Carl Zeiss Microimaging Gmbh Microscope and microscope microexamination procedure method for the measurement of the surface profile of an object
DE102009060490A1 (en) 2009-12-22 2011-06-30 Carl Zeiss Microlmaging GmbH, 07745 High-resolution microscope and image splitter arrangement

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10056329B4 (en) * 2000-11-14 2006-10-26 Precitec Kg Optical distance measuring method and distance sensor
DE602005004332T2 (en) 2004-06-17 2009-01-08 Cadent Ltd. Method for providing data related to the oral cavity
DE102005052743B4 (en) * 2005-11-04 2021-08-19 Precitec Optronik Gmbh Measuring system for measuring boundary or surfaces of workpieces
EP2667151A1 (en) * 2012-05-21 2013-11-27 Sysmelec SA Chromatic altimetry converter

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988010406A1 (en) * 1987-06-26 1988-12-29 Battelle-Institut E.V. Device for measuring distances between an optical element with high chromatic aberration and an object
EP0327425A1 (en) * 1988-01-27 1989-08-09 Commissariat A L'energie Atomique Method for optical scanning microscopy in confocal arrangement with large depth of field and apparatus to perform this method
WO1992001965A2 (en) * 1990-07-21 1992-02-06 Leica Lasertechnik Gmbh Device for the simultaneous generation of confocal images
EP0485803A1 (en) * 1990-11-10 1992-05-20 Grosskopf, Rudolf, Dr.-Ing. Optical scanning device with confocal beam path using a light source array and a detector array
WO1992017806A1 (en) * 1991-04-05 1992-10-15 Meridian Instruments, Inc. Multiple path scanning microscope

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988010406A1 (en) * 1987-06-26 1988-12-29 Battelle-Institut E.V. Device for measuring distances between an optical element with high chromatic aberration and an object
EP0327425A1 (en) * 1988-01-27 1989-08-09 Commissariat A L'energie Atomique Method for optical scanning microscopy in confocal arrangement with large depth of field and apparatus to perform this method
WO1992001965A2 (en) * 1990-07-21 1992-02-06 Leica Lasertechnik Gmbh Device for the simultaneous generation of confocal images
EP0485803A1 (en) * 1990-11-10 1992-05-20 Grosskopf, Rudolf, Dr.-Ing. Optical scanning device with confocal beam path using a light source array and a detector array
WO1992017806A1 (en) * 1991-04-05 1992-10-15 Meridian Instruments, Inc. Multiple path scanning microscope

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
A.GMITRO ET AL.: "Confocal microscopy through a fiber-optic imaging bundle", OPTICS LETTERS, vol. 18, no. 8, 15 April 1993 (1993-04-15), WASHINGTON US, pages 565 - 567 *
K.KOBAYASHI ET AL.: "LASER-SCANNING IMAGING SYSTEM FOR REAL-TIME MEASUREMENTS OF 3-D OBJECT PROFILES", OPTICS COMMUNICATIONS, vol. 74, no. 3,4, 15 December 1989 (1989-12-15), AMSTERDAM NL, pages 165 - 170 *

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT402863B (en) * 1995-03-01 1997-09-25 Thallner Erich Device for forming images (pictures) from two object planes
FR2738140A1 (en) * 1995-08-30 1997-03-07 Cohen Sabban Joseph Optical tomobiopsy equipment for examining live skin
WO1998025171A1 (en) * 1996-12-05 1998-06-11 Leica Microsystems Heidelberg Gmbh Polyfocal representation of the surface profile of any given object
US6150666A (en) * 1996-12-05 2000-11-21 Leica Microsystems Heidelberg Gmbh Polyfocal representation of the surface profile of any given object
WO1998044375A2 (en) * 1997-03-29 1998-10-08 Carl Zeiss Jena Gmbh Confocal microscopic device
WO1998044375A3 (en) * 1997-03-29 1999-03-04 Zeiss Carl Jena Gmbh Confocal microscopic device
US6674572B1 (en) 1997-03-29 2004-01-06 Carl Zeiss Jena Gmbh Confocal microscopic device
US6611344B1 (en) 1998-11-30 2003-08-26 Rahmonic Resources Pte Ltd Apparatus and method to measure three dimensional data
GB2361534A (en) * 1998-11-30 2001-10-24 Rahmonic Resources Pte Ltd Apparatus and method to measure three-dimensional data
WO2000033026A1 (en) * 1998-11-30 2000-06-08 Rahmonic Resources Pte Ltd. Apparatus and method to measure three-dimensional data
US7202953B1 (en) * 1998-12-21 2007-04-10 Evotec Biosystems Ag Scanning microscopic method having high axial resolution
WO2007124858A1 (en) * 2006-04-26 2007-11-08 Carl Zeiss Microimaging Gmbh Microscope and microscope microexamination procedure method for the measurement of the surface profile of an object
US7715021B2 (en) 2006-04-26 2010-05-11 Carl Zeiss Microimaging Gmbh Microscope and microscope microexamination procedure method for the measurement of the surface profile of an object
DE102009060490A1 (en) 2009-12-22 2011-06-30 Carl Zeiss Microlmaging GmbH, 07745 High-resolution microscope and image splitter arrangement
WO2011085765A1 (en) 2009-12-22 2011-07-21 Carl Zeiss Microlmaging Gmbh High resolution microscope and image divider assembly
US9372333B2 (en) 2009-12-22 2016-06-21 Carl Zeiss Microscopy Gmbh High resolution microscope and image divider assembly
US10078206B2 (en) 2009-12-22 2018-09-18 Carl Zeiss Microscopy Gmbh High-resolution microscope and image splitter arrangment

Also Published As

Publication number Publication date
FR2707018B1 (en) 1995-07-21
FR2707018A1 (en) 1994-12-30

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