US5706565A - Method for making an all-silicon capacitive pressure sensor - Google Patents
Method for making an all-silicon capacitive pressure sensor Download PDFInfo
- Publication number
- US5706565A US5706565A US08/707,107 US70710796A US5706565A US 5706565 A US5706565 A US 5706565A US 70710796 A US70710796 A US 70710796A US 5706565 A US5706565 A US 5706565A
- Authority
- US
- United States
- Prior art keywords
- semiconductor wafer
- diaphragm
- pressure sensor
- capacitor plate
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (12)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/707,107 US5706565A (en) | 1996-09-03 | 1996-09-03 | Method for making an all-silicon capacitive pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/707,107 US5706565A (en) | 1996-09-03 | 1996-09-03 | Method for making an all-silicon capacitive pressure sensor |
Publications (1)
Publication Number | Publication Date |
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US5706565A true US5706565A (en) | 1998-01-13 |
Family
ID=24840372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/707,107 Expired - Lifetime US5706565A (en) | 1996-09-03 | 1996-09-03 | Method for making an all-silicon capacitive pressure sensor |
Country Status (1)
Country | Link |
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US (1) | US5706565A (en) |
Cited By (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000002028A1 (en) * | 1998-07-07 | 2000-01-13 | The Goodyear Tire & Rubber Company | Method of fabricating silicon capacitive sensor |
WO2000069663A1 (en) | 1999-05-17 | 2000-11-23 | The Goodyear Tire & Rubber Company | Power-on reset for transponder |
WO2001044000A1 (en) | 1999-05-17 | 2001-06-21 | The Goodyear Tire & Rubber Company | Relaxation oscillator for transponder |
US6279402B1 (en) | 1998-08-10 | 2001-08-28 | Applied Materials, Inc. | Device for measuring pressure in a chamber |
US20010025531A1 (en) * | 2000-02-22 | 2001-10-04 | Leung Albert M. | Gas pressure sensor based on short-distance heat conduction and method for fabricating same |
US6369712B2 (en) | 1999-05-17 | 2002-04-09 | The Goodyear Tire & Rubber Company | Response adjustable temperature sensor for transponder |
US6412977B1 (en) | 1998-04-14 | 2002-07-02 | The Goodyear Tire & Rubber Company | Method for measuring temperature with an integrated circuit device |
US6433401B1 (en) | 1999-04-06 | 2002-08-13 | Analog Devices Imi, Inc. | Microfabricated structures with trench-isolation using bonded-substrates and cavities |
US20020115920A1 (en) * | 2001-01-22 | 2002-08-22 | Rich Collin A. | MEMS capacitive sensor for physiologic parameter measurement |
US6460234B1 (en) | 1998-08-19 | 2002-10-08 | Wisconsin Alumni Research Foundation | Method of forming micromachined sealed capacitive pressure sensors |
US20020199005A1 (en) * | 2001-03-16 | 2002-12-26 | Manfred Schneider | Development computer, development program for combining components to applications, using component descriptors related to the components, method, and computer program |
US20030029245A1 (en) * | 2001-07-20 | 2003-02-13 | Alain Izadnegahdar | Thin piezo resistive pressure sensor |
US6534711B1 (en) | 1998-04-14 | 2003-03-18 | The Goodyear Tire & Rubber Company | Encapsulation package and method of packaging an electronic circuit module |
US6543279B1 (en) | 1998-04-14 | 2003-04-08 | The Goodyear Tire & Rubber Company | Pneumatic tire having transponder and method of measuring pressure within a pneumatic tire |
US6658928B1 (en) | 1999-12-14 | 2003-12-09 | The Goodyear Tire & Rubber Company | Method of monitoring pressure in a pneumatic tire |
US20030229388A1 (en) * | 2002-06-07 | 2003-12-11 | Hayashi Reid K. | Endovascular graft with pressure, temperature, flow and voltage sensors |
US6704185B2 (en) | 2000-02-23 | 2004-03-09 | National Center For Scientific Research | Capacitive pressure-responsive devices and their fabrication |
US20040085858A1 (en) * | 2002-08-08 | 2004-05-06 | Khuri-Yakub Butrus T. | Micromachined ultrasonic transducers and method of fabrication |
US6750521B1 (en) | 1999-10-22 | 2004-06-15 | Delphi Technologies, Inc. | Surface mount package for a micromachined device |
US6770503B1 (en) | 1999-10-21 | 2004-08-03 | The Charles Stark Draper Laboratory, Inc. | Integrated packaging of micromechanical sensors and associated control circuits |
US6775632B1 (en) | 1999-12-14 | 2004-08-10 | The Goodyear Tire & Rubber Company | Calibration of a transponders for a tire pressure monitoring system |
US20040199238A1 (en) * | 2002-06-07 | 2004-10-07 | Brown Peter S. | Endovascular graft wih separable sensors |
US20040237661A1 (en) * | 2003-05-28 | 2004-12-02 | Chien-Sheng Yang | Semiconductor pressure sensor |
US6829814B1 (en) * | 2002-08-29 | 2004-12-14 | Delphi Technologies, Inc. | Process of making an all-silicon microphone |
US6860154B2 (en) | 2001-01-16 | 2005-03-01 | Fujikura Ltd. | Pressure sensor and manufacturing method thereof |
US6922134B1 (en) | 1998-04-14 | 2005-07-26 | The Goodyear Tire Rubber Company | Programmable trimmer for transponder |
US6980084B1 (en) | 1999-05-17 | 2005-12-27 | The Goodyear Tire & Rubber Company | Power-on reset for transponder |
US6995672B1 (en) | 1999-05-17 | 2006-02-07 | The Goodyear Tire & Rubber Co. | Relaxation oscillator for transponder |
US20060042392A1 (en) * | 2004-08-31 | 2006-03-02 | Stanadyne Corporation | Filter change indicator |
US20060063354A1 (en) * | 2004-09-20 | 2006-03-23 | Jeffrey Fortin | Microelectromechanical system pressure sensor and method for making and using |
US20060081043A1 (en) * | 2004-10-18 | 2006-04-20 | Kia Silverbrook | Pressure sensor with apertured membrane guard |
US20060200220A1 (en) * | 2002-06-07 | 2006-09-07 | Brown Peter S | Endovascular graft with sensors design and attachment methods |
WO2006124002A1 (en) * | 2005-05-16 | 2006-11-23 | Sensfab Pte Ltd | Silicon microphone |
EP1733928A2 (en) | 2005-06-16 | 2006-12-20 | Delphi Technologies, Inc. | Vehicle passenger detection apparatus with wireless acquisition of passenger-related data |
US20070072428A1 (en) * | 2005-09-29 | 2007-03-29 | Chilcott Dan W | Method for manufacturing a micro-electro-mechanical structure |
US20070072331A1 (en) * | 2005-09-29 | 2007-03-29 | Chilcott Dan W | Method for manufacturing a micro-electro-mechanical device |
US20070090479A1 (en) * | 2005-10-20 | 2007-04-26 | Chien-Hua Chen | Controlling bond fronts in wafer-scale packaging |
US7260371B1 (en) | 1998-04-14 | 2007-08-21 | The Goodyear Tire & Rubber Company | Programmable modulation index for transponder |
CN100367527C (en) * | 2003-07-11 | 2008-02-06 | 友达光电股份有限公司 | Capacitor type semiconductor pressure sensor |
WO2008044910A1 (en) * | 2006-10-11 | 2008-04-17 | Mems Technology Bhd | Ultra-low pressure sensor and method of fabrication of same |
WO2008079158A1 (en) | 2006-12-26 | 2008-07-03 | Integrated Sensing Systems, Inc. | Sensing and analysis system, data transmission over network |
US20080185669A1 (en) * | 2004-10-18 | 2008-08-07 | Sensfab Pte, Ltd. | Silicon Microphone |
US20080269573A1 (en) * | 2007-04-30 | 2008-10-30 | Integrated Sensing Systems, Inc. | Procedure and system for monitoring a physiological parameter within an internal organ of a living body |
US7918800B1 (en) | 2004-10-08 | 2011-04-05 | Endovascular Technologies, Inc. | Aneurysm sensing devices and delivery systems |
US20120257778A1 (en) * | 2011-04-08 | 2012-10-11 | Board Of Regents, The University Of Texas System | Differential microphone with sealed backside cavities and diaphragms coupled to a rocking structure thereby providing resistance to deflection under atmospheric pressure and providing a directional response to sound pressure |
US8455289B1 (en) * | 2011-12-02 | 2013-06-04 | Texas Instruments Incorporated | Low frequency CMUT with thick oxide |
US9804046B2 (en) * | 2015-10-27 | 2017-10-31 | DunAn Sensing, LLC | Pressure sensor with support structure for non-silicon diaphragm |
Citations (7)
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---|---|---|---|---|
US4530029A (en) * | 1984-03-12 | 1985-07-16 | United Technologies Corporation | Capacitive pressure sensor with low parasitic capacitance |
US4578735A (en) * | 1984-10-12 | 1986-03-25 | Knecht Thomas A | Pressure sensing cell using brittle diaphragm |
US4949581A (en) * | 1989-06-15 | 1990-08-21 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
US5245504A (en) * | 1989-02-28 | 1993-09-14 | United Technologies Corporation | Methodology for manufacturing hinged diaphragms for semiconductor sensors |
US5344423A (en) * | 1992-02-06 | 1994-09-06 | Zimmer, Inc. | Apparatus and method for milling bone |
US5490034A (en) * | 1989-01-13 | 1996-02-06 | Kopin Corporation | SOI actuators and microsensors |
US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
-
1996
- 1996-09-03 US US08/707,107 patent/US5706565A/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4530029A (en) * | 1984-03-12 | 1985-07-16 | United Technologies Corporation | Capacitive pressure sensor with low parasitic capacitance |
US4578735A (en) * | 1984-10-12 | 1986-03-25 | Knecht Thomas A | Pressure sensing cell using brittle diaphragm |
US5490034A (en) * | 1989-01-13 | 1996-02-06 | Kopin Corporation | SOI actuators and microsensors |
US5245504A (en) * | 1989-02-28 | 1993-09-14 | United Technologies Corporation | Methodology for manufacturing hinged diaphragms for semiconductor sensors |
US4949581A (en) * | 1989-06-15 | 1990-08-21 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
US5344423A (en) * | 1992-02-06 | 1994-09-06 | Zimmer, Inc. | Apparatus and method for milling bone |
US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
Cited By (83)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6412977B1 (en) | 1998-04-14 | 2002-07-02 | The Goodyear Tire & Rubber Company | Method for measuring temperature with an integrated circuit device |
US7260371B1 (en) | 1998-04-14 | 2007-08-21 | The Goodyear Tire & Rubber Company | Programmable modulation index for transponder |
US6922134B1 (en) | 1998-04-14 | 2005-07-26 | The Goodyear Tire Rubber Company | Programmable trimmer for transponder |
US6543279B1 (en) | 1998-04-14 | 2003-04-08 | The Goodyear Tire & Rubber Company | Pneumatic tire having transponder and method of measuring pressure within a pneumatic tire |
US6534711B1 (en) | 1998-04-14 | 2003-03-18 | The Goodyear Tire & Rubber Company | Encapsulation package and method of packaging an electronic circuit module |
US6465271B1 (en) * | 1998-07-07 | 2002-10-15 | Wen H. Ko | Method of fabricating silicon capacitive sensor |
EP1271121A2 (en) * | 1998-07-07 | 2003-01-02 | The Goodyear Tire & Rubber Company | Method of fabricating silicon capacitive sensor |
EP1271121A3 (en) * | 1998-07-07 | 2003-05-02 | The Goodyear Tire & Rubber Company | Method of fabricating silicon capacitive sensor |
WO2000002028A1 (en) * | 1998-07-07 | 2000-01-13 | The Goodyear Tire & Rubber Company | Method of fabricating silicon capacitive sensor |
US6452427B1 (en) | 1998-07-07 | 2002-09-17 | Wen H. Ko | Dual output capacitance interface circuit |
US6279402B1 (en) | 1998-08-10 | 2001-08-28 | Applied Materials, Inc. | Device for measuring pressure in a chamber |
US6378378B1 (en) | 1998-08-10 | 2002-04-30 | Applied Materials, Inc. | Wafer to measure pressure at a number of points in a process chamber |
US6460234B1 (en) | 1998-08-19 | 2002-10-08 | Wisconsin Alumni Research Foundation | Method of forming micromachined sealed capacitive pressure sensors |
US6470754B1 (en) | 1998-08-19 | 2002-10-29 | Wisconsin Alumni Research Foundation | Sealed capacitive pressure sensors |
US6433401B1 (en) | 1999-04-06 | 2002-08-13 | Analog Devices Imi, Inc. | Microfabricated structures with trench-isolation using bonded-substrates and cavities |
US6980084B1 (en) | 1999-05-17 | 2005-12-27 | The Goodyear Tire & Rubber Company | Power-on reset for transponder |
US6995672B1 (en) | 1999-05-17 | 2006-02-07 | The Goodyear Tire & Rubber Co. | Relaxation oscillator for transponder |
US6369712B2 (en) | 1999-05-17 | 2002-04-09 | The Goodyear Tire & Rubber Company | Response adjustable temperature sensor for transponder |
WO2001044000A1 (en) | 1999-05-17 | 2001-06-21 | The Goodyear Tire & Rubber Company | Relaxation oscillator for transponder |
WO2000069663A1 (en) | 1999-05-17 | 2000-11-23 | The Goodyear Tire & Rubber Company | Power-on reset for transponder |
US6770503B1 (en) | 1999-10-21 | 2004-08-03 | The Charles Stark Draper Laboratory, Inc. | Integrated packaging of micromechanical sensors and associated control circuits |
US6750521B1 (en) | 1999-10-22 | 2004-06-15 | Delphi Technologies, Inc. | Surface mount package for a micromachined device |
US6775632B1 (en) | 1999-12-14 | 2004-08-10 | The Goodyear Tire & Rubber Company | Calibration of a transponders for a tire pressure monitoring system |
US6658928B1 (en) | 1999-12-14 | 2003-12-09 | The Goodyear Tire & Rubber Company | Method of monitoring pressure in a pneumatic tire |
US20010025531A1 (en) * | 2000-02-22 | 2001-10-04 | Leung Albert M. | Gas pressure sensor based on short-distance heat conduction and method for fabricating same |
US6860153B2 (en) * | 2000-02-22 | 2005-03-01 | Simon Fraser University | Gas pressure sensor based on short-distance heat conduction and method for fabricating same |
US6704185B2 (en) | 2000-02-23 | 2004-03-09 | National Center For Scientific Research | Capacitive pressure-responsive devices and their fabrication |
US6860154B2 (en) | 2001-01-16 | 2005-03-01 | Fujikura Ltd. | Pressure sensor and manufacturing method thereof |
US20020115920A1 (en) * | 2001-01-22 | 2002-08-22 | Rich Collin A. | MEMS capacitive sensor for physiologic parameter measurement |
US6968743B2 (en) | 2001-01-22 | 2005-11-29 | Integrated Sensing Systems, Inc. | Implantable sensing device for physiologic parameter measurement |
US20020199005A1 (en) * | 2001-03-16 | 2002-12-26 | Manfred Schneider | Development computer, development program for combining components to applications, using component descriptors related to the components, method, and computer program |
US6912759B2 (en) | 2001-07-20 | 2005-07-05 | Rosemount Aerospace Inc. | Method of manufacturing a thin piezo resistive pressure sensor |
US20030029245A1 (en) * | 2001-07-20 | 2003-02-13 | Alain Izadnegahdar | Thin piezo resistive pressure sensor |
US7399313B2 (en) | 2002-06-07 | 2008-07-15 | Brown Peter S | Endovascular graft with separable sensors |
US20030229388A1 (en) * | 2002-06-07 | 2003-12-11 | Hayashi Reid K. | Endovascular graft with pressure, temperature, flow and voltage sensors |
US7261733B1 (en) | 2002-06-07 | 2007-08-28 | Endovascular Technologies, Inc. | Endovascular graft with sensors design and attachment methods |
US20040199238A1 (en) * | 2002-06-07 | 2004-10-07 | Brown Peter S. | Endovascular graft wih separable sensors |
US20060200220A1 (en) * | 2002-06-07 | 2006-09-07 | Brown Peter S | Endovascular graft with sensors design and attachment methods |
US6958255B2 (en) | 2002-08-08 | 2005-10-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducers and method of fabrication |
US20040085858A1 (en) * | 2002-08-08 | 2004-05-06 | Khuri-Yakub Butrus T. | Micromachined ultrasonic transducers and method of fabrication |
US7134179B2 (en) | 2002-08-29 | 2006-11-14 | Delphi Technologies, Inc. | Process of forming a capacitative audio transducer |
US20050101047A1 (en) * | 2002-08-29 | 2005-05-12 | Delphi Technologies, Inc. | Process of making an all-silicon microphone |
US6829814B1 (en) * | 2002-08-29 | 2004-12-14 | Delphi Technologies, Inc. | Process of making an all-silicon microphone |
EP1398298A3 (en) * | 2002-08-29 | 2015-06-24 | Delphi Technologies, Inc. | Process of making an all-silicon microphone |
US6880406B2 (en) * | 2003-05-28 | 2005-04-19 | Au Optronics Corp. | Semiconductor pressure sensor |
US20040237661A1 (en) * | 2003-05-28 | 2004-12-02 | Chien-Sheng Yang | Semiconductor pressure sensor |
CN100367527C (en) * | 2003-07-11 | 2008-02-06 | 友达光电股份有限公司 | Capacitor type semiconductor pressure sensor |
US20060042392A1 (en) * | 2004-08-31 | 2006-03-02 | Stanadyne Corporation | Filter change indicator |
US20060063354A1 (en) * | 2004-09-20 | 2006-03-23 | Jeffrey Fortin | Microelectromechanical system pressure sensor and method for making and using |
US7560788B2 (en) | 2004-09-20 | 2009-07-14 | General Electric Company | Microelectromechanical system pressure sensor and method for making and using |
US20070138584A1 (en) * | 2004-09-20 | 2007-06-21 | General Electric Company | Microelectromechanical system pressure sensor and method for making and using |
US20070141808A1 (en) * | 2004-09-20 | 2007-06-21 | General Electric Company | Microelectromechanical system pressure sensor and method for making and using |
US7563692B2 (en) | 2004-09-20 | 2009-07-21 | General Electric Company | Microelectromechanical system pressure sensor and method for making and using |
US20110213413A1 (en) * | 2004-10-08 | 2011-09-01 | Endovascular Technologies, Inc. | Aneurysm sensing devices and delivery systems |
US7918800B1 (en) | 2004-10-08 | 2011-04-05 | Endovascular Technologies, Inc. | Aneurysm sensing devices and delivery systems |
US7194901B2 (en) * | 2004-10-18 | 2007-03-27 | Silverbrook Research Pty Ltd | Pressure sensor with apertured membrane guard |
US7549328B2 (en) | 2004-10-18 | 2009-06-23 | Silverbrook Research Pty Ltd | Method of fabricating a pressure sensor |
US20090239325A1 (en) * | 2004-10-18 | 2009-09-24 | Silverbrook Research Pty Ltd | Method of fabricating a integrated pressure sensor |
US20070157465A1 (en) * | 2004-10-18 | 2007-07-12 | Silverbrook Research Pty Ltd. | Method of fabricating a pressure sensor |
US20060081043A1 (en) * | 2004-10-18 | 2006-04-20 | Kia Silverbrook | Pressure sensor with apertured membrane guard |
US8322205B2 (en) | 2004-10-18 | 2012-12-04 | Silverbrook Research Pty Ltd | Method of fabricating a integrated pressure sensor |
US20080185669A1 (en) * | 2004-10-18 | 2008-08-07 | Sensfab Pte, Ltd. | Silicon Microphone |
WO2006124002A1 (en) * | 2005-05-16 | 2006-11-23 | Sensfab Pte Ltd | Silicon microphone |
US20080175417A1 (en) * | 2005-05-16 | 2008-07-24 | Sensfab Pte Ltd. | Silicon Microphone |
JP2008546240A (en) * | 2005-05-16 | 2008-12-18 | センスファブ・ピーティーイー・リミテッド | Silicon microphone |
US8098870B2 (en) | 2005-05-16 | 2012-01-17 | Sensfab Pte Ltd | Silicon microphone |
EP1733928A2 (en) | 2005-06-16 | 2006-12-20 | Delphi Technologies, Inc. | Vehicle passenger detection apparatus with wireless acquisition of passenger-related data |
US7524767B2 (en) | 2005-09-29 | 2009-04-28 | Delphi Technologies, Inc. | Method for manufacturing a micro-electro-mechanical structure |
US7534641B2 (en) | 2005-09-29 | 2009-05-19 | Delphi Technologies, Inc. | Method for manufacturing a micro-electro-mechanical device |
US20070072331A1 (en) * | 2005-09-29 | 2007-03-29 | Chilcott Dan W | Method for manufacturing a micro-electro-mechanical device |
US20070072428A1 (en) * | 2005-09-29 | 2007-03-29 | Chilcott Dan W | Method for manufacturing a micro-electro-mechanical structure |
US20070090479A1 (en) * | 2005-10-20 | 2007-04-26 | Chien-Hua Chen | Controlling bond fronts in wafer-scale packaging |
US8569850B2 (en) | 2006-10-11 | 2013-10-29 | Sensfab Pte Ltd | Ultra low pressure sensor |
US20100187646A1 (en) * | 2006-10-11 | 2010-07-29 | Mems Technology Bhd | Ultra low pressure sensor and method of fabrication of same |
WO2008044910A1 (en) * | 2006-10-11 | 2008-04-17 | Mems Technology Bhd | Ultra-low pressure sensor and method of fabrication of same |
WO2008079158A1 (en) | 2006-12-26 | 2008-07-03 | Integrated Sensing Systems, Inc. | Sensing and analysis system, data transmission over network |
US8267863B2 (en) | 2007-04-30 | 2012-09-18 | Integrated Sensing Systems, Inc. | Procedure and system for monitoring a physiological parameter within an internal organ of a living body |
US20080269573A1 (en) * | 2007-04-30 | 2008-10-30 | Integrated Sensing Systems, Inc. | Procedure and system for monitoring a physiological parameter within an internal organ of a living body |
US20120257778A1 (en) * | 2011-04-08 | 2012-10-11 | Board Of Regents, The University Of Texas System | Differential microphone with sealed backside cavities and diaphragms coupled to a rocking structure thereby providing resistance to deflection under atmospheric pressure and providing a directional response to sound pressure |
US8989411B2 (en) * | 2011-04-08 | 2015-03-24 | Board Of Regents, The University Of Texas System | Differential microphone with sealed backside cavities and diaphragms coupled to a rocking structure thereby providing resistance to deflection under atmospheric pressure and providing a directional response to sound pressure |
US8455289B1 (en) * | 2011-12-02 | 2013-06-04 | Texas Instruments Incorporated | Low frequency CMUT with thick oxide |
US9804046B2 (en) * | 2015-10-27 | 2017-10-31 | DunAn Sensing, LLC | Pressure sensor with support structure for non-silicon diaphragm |
US11624668B2 (en) | 2015-10-27 | 2023-04-11 | Zhejiang Dunan Artificial Environment Co., Ltd. | Methods for fabricating pressure sensors with non-silicon diaphragms |
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