DE69734010T2 - Auf spatiochromatischer triangulation basierendes optoelektronisches system - Google Patents

Auf spatiochromatischer triangulation basierendes optoelektronisches system Download PDF

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Publication number
DE69734010T2
DE69734010T2 DE69734010T DE69734010T DE69734010T2 DE 69734010 T2 DE69734010 T2 DE 69734010T2 DE 69734010 T DE69734010 T DE 69734010T DE 69734010 T DE69734010 T DE 69734010T DE 69734010 T2 DE69734010 T2 DE 69734010T2
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Germany
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image
slit
plane
onto
representation
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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DE69734010T
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English (en)
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DE69734010D1 (de
Inventor
Joseph Cohen-Sabban
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Stil S A
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Stil S A
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
DE69734010T 1997-11-06 1997-11-06 Auf spatiochromatischer triangulation basierendes optoelektronisches system Expired - Lifetime DE69734010T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1997/001406 WO1999024786A1 (en) 1997-11-06 1997-11-06 Optoelectronic system using spatiochromatic triangulation

Publications (2)

Publication Number Publication Date
DE69734010D1 DE69734010D1 (de) 2005-09-22
DE69734010T2 true DE69734010T2 (de) 2006-06-14

Family

ID=11004628

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69734010T Expired - Lifetime DE69734010T2 (de) 1997-11-06 1997-11-06 Auf spatiochromatischer triangulation basierendes optoelektronisches system

Country Status (9)

Country Link
US (1) US6573998B2 (de)
EP (1) EP0950168B1 (de)
JP (1) JP2001507808A (de)
AT (1) ATE302401T1 (de)
AU (1) AU4791397A (de)
CA (1) CA2278332C (de)
DE (1) DE69734010T2 (de)
IL (1) IL130780A (de)
WO (1) WO1999024786A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021124504A1 (de) 2021-09-22 2023-03-23 WICKON HIGHTECH GmbH Inspektionssystem und Verfahren zur Fehleranalyse
DE102021124505A1 (de) 2021-09-22 2023-03-23 WICKON HIGHTECH GmbH Inspektionssystem und Verfahren zur Fehleranalyse
DE102021124507A1 (de) 2021-09-22 2023-03-23 WICKON HIGHTECH GmbH Inspektionssystem und Verfahren zur Fehleranalyse

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Publication number Priority date Publication date Assignee Title
DE102021124504A1 (de) 2021-09-22 2023-03-23 WICKON HIGHTECH GmbH Inspektionssystem und Verfahren zur Fehleranalyse
DE102021124505A1 (de) 2021-09-22 2023-03-23 WICKON HIGHTECH GmbH Inspektionssystem und Verfahren zur Fehleranalyse
DE102021124507A1 (de) 2021-09-22 2023-03-23 WICKON HIGHTECH GmbH Inspektionssystem und Verfahren zur Fehleranalyse

Also Published As

Publication number Publication date
EP0950168A1 (de) 1999-10-20
IL130780A0 (en) 2001-01-28
US6573998B2 (en) 2003-06-03
CA2278332C (en) 2009-01-27
DE69734010D1 (de) 2005-09-22
CA2278332A1 (en) 1999-05-20
AU4791397A (en) 1999-05-31
EP0950168B1 (de) 2005-08-17
ATE302401T1 (de) 2005-09-15
WO1999024786A1 (en) 1999-05-20
US20020075484A1 (en) 2002-06-20
JP2001507808A (ja) 2001-06-12
IL130780A (en) 2003-04-10

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