DE602008000157D1 - Linsenanordnung für einen chromatischen Abstandssensor - Google Patents

Linsenanordnung für einen chromatischen Abstandssensor

Info

Publication number
DE602008000157D1
DE602008000157D1 DE602008000157T DE602008000157T DE602008000157D1 DE 602008000157 D1 DE602008000157 D1 DE 602008000157D1 DE 602008000157 T DE602008000157 T DE 602008000157T DE 602008000157 T DE602008000157 T DE 602008000157T DE 602008000157 D1 DE602008000157 D1 DE 602008000157D1
Authority
DE
Germany
Prior art keywords
distance sensor
lens arrangement
chromatic distance
chromatic
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008000157T
Other languages
English (en)
Inventor
Eric Altendorf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602008000157D1 publication Critical patent/DE602008000157D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
DE602008000157T 2007-03-30 2008-03-04 Linsenanordnung für einen chromatischen Abstandssensor Active DE602008000157D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/694,820 US7626705B2 (en) 2007-03-30 2007-03-30 Chromatic sensor lens configuration

Publications (1)

Publication Number Publication Date
DE602008000157D1 true DE602008000157D1 (de) 2009-11-05

Family

ID=39495995

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008000157T Active DE602008000157D1 (de) 2007-03-30 2008-03-04 Linsenanordnung für einen chromatischen Abstandssensor

Country Status (4)

Country Link
US (1) US7626705B2 (de)
EP (1) EP1975554B1 (de)
JP (1) JP5011166B2 (de)
DE (1) DE602008000157D1 (de)

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Also Published As

Publication number Publication date
EP1975554B1 (de) 2009-09-23
EP1975554A1 (de) 2008-10-01
JP2008256679A (ja) 2008-10-23
US7626705B2 (en) 2009-12-01
JP5011166B2 (ja) 2012-08-29
US20080239278A1 (en) 2008-10-02

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