CN1882031A - Method and equipment for forming multi-focusing images - Google Patents

Method and equipment for forming multi-focusing images Download PDF

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Publication number
CN1882031A
CN1882031A CN 200510125371 CN200510125371A CN1882031A CN 1882031 A CN1882031 A CN 1882031A CN 200510125371 CN200510125371 CN 200510125371 CN 200510125371 A CN200510125371 A CN 200510125371A CN 1882031 A CN1882031 A CN 1882031A
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image
focusing
array
target
focus
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CN1882031B (en
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菲利普·M.·戈什
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FFEI Ltd
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FFEI Ltd
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Abstract

The present invention provides a method for producing targeted multiple focus pile images, which comprises the steps of utilizing relative scanning movement between targeted and photodetector arrays, receiving repeatedly the image information of the scanning lines, transforming the relative focusing between the targeted and arrays, thus obtaining each images in the pile.

Description

Form the method and apparatus of multi-focusing images
Technical field
The present invention relates to form the method and apparatus of multi-focusing images.
Background technology
In some market segments, utilize the microexamination sample and utilize to generate digital picture attached to microscopical two-dimensional digital camera such as medical application.The observed sample that digital camera is caught is restricted on area.For the object lens of 40x, typical area only is that 0.7mm is wide.Be given as under 64 * 24mm situation at the effective area on the slide, possible sample area only is very little area.A kind of way to this is stepping and repetition on whole sample area, and it also is called grand shake.Preferred processing is to utilize to be similar at US 6,711, disclosed line scanning parts in 283, the rectangular data that wherein can collect 0.7 * 64mm.Thereby band that then can scanning neighbor can engage image or be stitched together, as explanation among the patent GB 2206011.
As US 6,711, to mention in 283 like that, a problem of rectangular scanning is to keep focusing on whole sweep length.As an example, be that 0.65 40x lens depth of focus is about 1 micron for numerical aperture.Typical slide is by keeping the manufacturing of such tolerance limit, and may be because installation method or crooked under gravity above 1 micron when installing.And the sample itself of wanting imaging is uneven up to 1 micron.At US 6,711, address this problem to cooperate by setting up focused view and dynamically adjust focusing in sweep length individually in 283 with this focused view in scan period.Regrettably, it is consuming time setting up focused view for each sample.Typical focus method is that the same zone of scanning utilizes the evaluation algorithm to determine optimum focusing then under different focusing levels.Have some evaluation algorithms that used, an example is the quadratic sum of getting the difference between adjacent image point.This evaluation algorithm produces example function as shown in Figure 1, and wherein peak value (indicating with arrow) is regarded focus as.
The another kind of method that is used for addressing this problem is to obtain the different scanning of a plurality of focusing levels.This is called to focus on piles or Z heap and shown in Figure 2.Its thought is, at any time in the focusing scanning image and later can make up Z image stack 400 to provide single focusedimage at least.Can obtain the software of combination image from some suppliers.The problem of this method, for the little depth of focus in the sample focus variations scope, many image layer need cover complete focusing range and this can be consuming time.The optimum focusing line is shown on 401.Image on different position 402 in the heap only provides useful information seldom.
Thereby need to solve these shortcomings.
Summary of the invention
We provide a kind of method that produces the multi-focusing images of target according to a first aspect of the present invention, and friendship heap image comprises a plurality of images of this target, and each image has corresponding focus or position, and the friendship method comprises:
Cause the relative scanning motion between target and the photodetector array, this array is used for receiving image information in the form scan period with scan line repeatedly from the friendship target; And
Scan period is being caused the relative focusing that changes between this target and this array between the described focus of each image or the position, thereby the image in obtaining piling, wherein each image is to be formed by the image information that obtains from each focus or position in scan period.
Thereby the present invention quite is different from art methods.Pile image in the conventional method and be by in succession picture frame and obtain, and obtain image by scan line in the present invention.Importantly, scan line is to obtain under the situation of exchange between the different focal positions of image (fixing or in a scope) repeatedly scan period, and utilizes these scan lines to form the image of the difference focusing in this heap then when the end of scan.It is focusing level or focus layer that these images can be thought of as.When scanning is discussed, should understand that this term comprises the capable output of plurality of detection device under having more than the array of detectors of delegation.But the quantity of the detector on the scan line is in the smallest number (approximately less than 16) of the order of magnitude greater than this array.
Thereby the present invention obviously is better than prior art under the situation that can use relatively cheap equipment.It also avoids repeatedly scanning target, and repeatedly the scanning meeting throws into question on the information that record obtains.Do not need to be used for producing in advance the auxiliary equipment of focused view in addition.It need at short notice and not also to allow under the later scanning situation very local zone to be obtained the different image informations that focus on.This helps to guarantee not change in any intervention stage optical equipment or sample and the online change of focusing level can be provided the target that has obvious configuration in the scanning.
Typically some areas of target are repeated this method and obtain multi-focusing images in the single sweep operation to target.Best, behind the scan line that obtains image information for certain specific image in the heap from target, revise relatively focusing on, thereby obtaining this scan line at least one other image before for described specific image obtains other scan line (image information) once more.Thereby in the scan period focusing that can between image, circulate, to make up these images from each bar scan line.Can be for every width of cloth image obtain the public area of target or the image information of part, and can suspend relative motion in scan period and reach this point.Alternatively, scanning motion can be continuous substantially, thereby the image information that then can interpolation every width of cloth image be obtained forms the correspondence image with different focal positions or scope in this heap.
This array can be the one-dimensional array of definition first direction, and the relative scanning motion is on the direction that is approximately perpendicular to this first direction.Focal position or scope can evenly or unevenly separate on focusing on each other.Focusing range comprises the focal zone between two exterior focusing positions that are in this scope of qualification.When using focusing range, can be overlapping or not overlapping for the different images focusing range in the heap.When using focusing range, revise and focus on every width of cloth image is obtained in succession scan line when scanning when proceeding thereby this method can be included in image information that scan period is used to the self-scanning row.Can use focusing Assessment Curves as the function of focal position for this reason, thereby and this method then also can comprise the image control in the heap focused on given zone is covered " desirable " focal position.Can be arranged in the bosom image (group) in the heap corresponding with the ideal focusing position in these districts.
Can utilize each image in the heap to produce output image, these output images have according to the focusing range of the image that makes up it or the depth of focus of position.
The friendship array can comprise a plurality of pixels that roughly are arranged in along the scanning direction in the subarray.They can roughly be that separate along the scanning direction and light each subarray adaptation reception corresponding color.
Obtain image information from adjacent district in some instances.When " m " individual integer subarray was provided, preferably the spacing of subarray was by seeing being mn-1 to distinguish wide unit from array, and wherein n is the non-zero integer, typically make different constantly never the image information that obtains of same district interweave.
According to the dimension of array and the speed of the definite relative motion in location.
We provide a kind of equipment that is used for producing the multi-focusing images of target according to a second aspect of the present invention, and this heap image comprises a plurality of images of this target, and a plurality of images have corresponding focus or position, and this equipment comprises:
Photodetector array is used for receiving image information from image with the form of scan line;
Scanning means is used to provide the relative motion between friendship array and the target;
Focusing arrangement is used to control the relative focusing between this array and the target, and
Control system is used to operate this scanning means to cause the relative scanning motion between target and the photodetector array; Be used to adapt to this array is controlled to receive the image information from target repeatedly in scan period; And be used to operate this focusing arrangement between the described focus of each image or position, to cause the change of the relative focusing between target and this array in scan period, thereby each image in obtaining piling, wherein each image be by scan period each focus or the image information that obtains of position form.
This array can comprise one-dimensional array or a plurality of subarray that is arranged on the direction that is approximately perpendicular to the scanning direction.The quantity of pixel can be big, for example is about 5000.The quantity " m " of subarray can be provided, in image, roughly separate along the integer section on the scanning direction thereby subarray is the correspondence image information that obtains from each section that separates.This separating can be that actual physics separates or be that optics separates equivalently, for example provides by the subarray that uses beam splitter and physics to separate.
For coloured image, thereby preferably subarray comprises that respectively filter receives the light corresponding with some particular colors.Focusing block can be by moving this array or target or passing through the part realization focusing of mobile imaging lens or imaging len when it comprises imaging len.When focusing block comprised folded mirror, focusing block was realized focusing on by moving folded mirror.Also can use the controlled window of optical thickness, for example the active quartz window of photoelectricity or have rotatable window as the variable light thickness of the function of angle of rotation for this reason.
Friendship equipment and method can be used in some imaging applications, but have found that it is beneficial especially in visual field and the typically quite effective microscope of field depth.
Description of drawings
Referring now to description of drawings some examples, in the accompanying drawing according to method and apparatus of the present invention:
Fig. 1 illustrates technical known focusing Assessment Curves;
Fig. 2 illustrates prior art heap image and ideal focusing;
Fig. 3 is the perspective illustration of array scanning;
Fig. 4 illustrates the arrangement of scan line in the scanning;
Fig. 5 illustrates three focusing that have " stopping-starting " scanning and piles up;
Fig. 5 a illustrates a kind of three specific focusing heap schemes;
Fig. 6 illustrates the three focusing heaps that have smooth scan;
Fig. 7 illustrates image unevenly spaced in the heap;
Fig. 8 illustrates the nonplanar image in the heap;
Fig. 9 illustrates the inhomogeneous spacing between the scan period image;
Figure 10 a illustrates the intersection of hypograph;
Figure 10 b illustrates the intersection of upper and lower focusing heap image;
Figure 11 illustrates during the focus tracking Assessment Curves in focus;
Figure 12 illustrates the edge that focuses on Assessment Curves during the focus tracking;
Figure 13 illustrates and follows the tracks of the image stack that focuses on;
Figure 13 a illustrates the heap to this sample;
Figure 14 illustrates the variation under extreme of the focus of this heap image;
Figure 15 illustrates on two positions of Figure 14 and focuses on Assessment Curves;
Three Wai Dui picture positions under Figure 16 illustrates in focus;
Figure 17 illustrates three positions, wherein two on the edge that focuses on;
Figure 18 illustrates the multi-row detector array;
Figure 19 a illustrates and has three three adjacent capable detectors that focus on heap and smooth scan;
Figure 19 b illustrates and has three four adjacent capable detectors that focus on heap and smooth scan;
Figure 19 c illustrates and has three two adjacent capable detectors that focus on heap and smooth scan;
Figure 20 illustrates three capable detector arrays that separate;
Figure 21 a illustrates the 3 row detectors that have 2 line spaces;
Figure 21 b illustrates the 3 row detectors that have 5 line spaces;
Figure 21 c illustrates the 3 row detectors that have 8 line spaces.
Figure 22 a illustrates and has the 3 row detectors that 2 line spaces, three focus on heap and smooth scanning;
Figure 22 b illustrates and has the 3 row detectors that 5 line spaces, three focus on heap and smooth scanning; And 3 focal positions are shown;
Figure 22 c illustrates and has the 4 row detectors that 3 line spaces, three focus on heap and smooth scanning;
Figure 23 illustrates the non-conterminous capable detector that has the constriction line;
Figure 24 illustrates the RGB with switches light scanning, and the 3 row detectors that have 2 line spaces and 3 focal positions are shown;
Figure 25 a illustrates a plurality of detectors that are arranged in the color group;
Figure 25 b illustrates a plurality of detectors that are arranged in the color list;
Figure 26 a illustrates the equipment that contains two beam splitters and three arrays;
Figure 26 b illustrates two arrays, two mirror structures;
Figure 26 c illustrates three arrays, two mirror structures;
Moving of Figure 27 a explanation detector head;
Moving of Figure 27 b explanation imaging len;
Figure 27 c illustrates the use of removable folded Shu Jing;
Moving of Figure 27 d explanation sample;
Moving member in Figure 27 e explanation imaging len;
Figure 27 f illustrates the example of tunable optical thickness;
Figure 27 g adopts the rotation window of variable light thickness; And
Figure 28 illustrates the distribution of variable light thickness.
Embodiment
The standard line scanning relates to single file x cell array, and each pixel is typically to a detector in should array.For colour, provide single row (for example RGB) to every kind of color in three colors.Follow traversing this single row on direction perpendicular to the detector array row.This traversing speed is set to the distance that makes detector traversing pixel on the scanning direction behind once " line time " of detector, thereby next line time produces the pixel rows of a previous row of adjacency.This is shown in Figure 3, the scanning direction 1 dimension array of following the arrow among the figure.
Fig. 4 be from 1 the dimension array tail see 1 the dimension array scanning the perspective layout.Sideslip direction represents with arrow, the first scan line one token wherein, and second row is with " 2 " mark, and and the like.Simple embodiment is scanning and focusing is adjusted on the different focusing heap positions moving between the next departure date.Fig. 5 illustrates the situation that obtains three such heaps.This relates to and stop-starts traversing scanning, but does not need the interpolation of the scan line in the same image.The focus direction of indicating with vertical arrows among Fig. 5 is roughly in this case perpendicular to traversing (scanning) direction as can be seen.Fig. 5 a illustrates in greater detail this scheme, and wherein linear array 1 has the direction on the plane that enters this figure.Utilize lens to reach focus variations.At 15 places the sample that has variable thickness is shown, this sample is positioned on the slide glass that serves as supporting.Represent the position of scan line with arrow X, and the scanning direction illustrates with Y.Traversing in this embodiment " stopping-starting " action that has in traversing, this does not always wish, may cause being shown as the site error of beating because stop and starting transverse-moving mechanism in image.
Can be traversing being arranged to level and smooth (fixing sweep speed) in another embodiment, but its than Fig. 4 slow three times and produce the image shown in Fig. 6.Then interpolating method can be used if necessary so that utilize adjacent image to renovate each Z heap image.Although these embodiment illustrate three and focus on the heap image, preferably can produce from 2 multi-focusing images to any actual quantity.Also needn't make these focus on heap image spaced at equal intervals, thereby for example may have 5 heap images, comprising three central authorities' heaps and two peripheral focus heaps.This is shown in Figure 7, wherein row 1 and 5 and the row 2,3 and 4 at more approaching interval separate biglyyer.
Do not need to remain in the fixed pan focusing on heap.This illustrates in Fig. 8.Can follow predetermined on-plane surface projection in scan period or scan period such situation occurs by determining that repeatedly thereby best focus position is followed in the heap image-taking system of the non-planar surfaces in the sample.As explanation among Fig. 9 like that, in the ranks spacing needs not to be fixing in the interior adjacent image of heap.For example in Fig. 9, the unfixed spacing of upper and lower image shows in this heap, and three center image row have fixing spacing in scanning.
In some cases, as shown in Figure 10 a, the 10b, focus on heap and can be arranged in intersected with each other.In Figure 10 a, minimum image in this heap intersected in scan period and time low image, and in Figure 10 b, upper and lower image and adjacent image layer intersect, and the order during the scanning beginning is 1,2,3,4,5 and become 2,1,3,5,4 when the order of the end of scan.
Once get a plurality of focusing heaps and adjust a concrete advantage that focuses on and be in scan period, might follow the tracks of bulk non-planar, the for example focusing on the surface of tissue samples or rock specimens, if two exterior focusing positional alignment on the slope of focusing curve, thereby might predict best focus position and adjust focal position the central focus position is put on best focus position.This can reach by the focusing Assessment Curves shown in Figure 11 by utilizing three focal position C, D, E.Might be under this mode by checking at all three locational relative evaluation value monitor scans devices whether in focus detector.Move if focus on from focal position, then it can change relative focus value as shown in Figure 12.
Compare Figure 11 and 12 as can be seen, the relative evaluation value of exterior focusing position (C and E) changes but central focus position (D) needn't change.If scan period monitors this, then when occurring, this can adjust focusing focal position (for example D) is brought back to the central authorities of focusing range.This can reduce the quantity of the focusing heap that needs scanning, do not focus on the zone that heap is kept off image focusing because do not exist as shown in Figure 13, heap image 300 shown in Figure 13 is followed the optimum focusing line in scanning during 301, and its big advantage is only to have seldom that the heap image of useful information saves time owing to needn't scan more wherein many images.Adjust specified focusing following sample by scan period, thereby can once only provide less different focus value.This is in more detail shown in Figure 13 a.
The measure that separable adjustment focuses on can make scanner when good focusing value scope changes the exterior focusing level be put on focus edge.This is shown in Figure 14 and 15, and wherein Figure 15 illustrates in the scanning of Figure 14 the Assessment Curves on two position A, the B.This variable focus range state for example appears in the scanning of cellular layer, in some embodiment of cellular layer scanning cell in multilayer, pile up other above cell and the quantity of cellular layer in scanning, change.The thought that changes spacing between the image in heap shown in Figure 10 and 14 provides many advantages.Many existing schemes can not provide this function.
Another embodiment is arranged in the exterior focusing image on the edge of focusing range but in fact not in the outside of focus.Then monitor and focus on evaluation to guarantee that all detectors are not outside focus.In case an external detector shows the evaluation value that reaches outside the focus, adjusts focusing so that all detectors are got back in focus.Figure 16 illustrates three focal position C, D, E (all focusing on), although and Figure 17 illustrates the position that is positioned at focus edge but still focuses on.This can make the user whether check scanned samples under than the big depth of focus of the focusing range of scanner by focusing.Can also utilize software the synthetic image of these image sets to be improved depth of focus by an equipment.
Although we only illustrate and use 1 dimension array so far, can use a plurality of detectors under the situation of boosting productivity, to finish this task.As shown in Figure 18, an embodiment adopts 3 cell arrays of taking advantage of x.Move focusing like that by the front under serration type, but traversing speed wants big n doubly, wherein n is the quantity of row detector array.Figure 19 a, 19b and 19c illustrate a plurality of adjacent lines detectors that have the burnt position of poly that is used for 3,4 and 2 capable arrays respectively.
And do not require that these a plurality of capable detectors have row adjacent one another are.Thereby can set up the scanning process that has the gap between detector as shown in Figure 20.The existence restriction is fastened in line space pass at detector under this state.For the integer scanning line spacing, the spacing between 1 dimension detector array is necessary for mn-1, and wherein m is the quantity of 1 dimension detector array, and n is not equal to zero integer (zero situation is identical with the adjacent lines situation).Then must be set to m to sweep speed.This provide Figure 21 a to 21c and Figure 22 a to the scan pattern shown in the 22c.The numeral of listing in Figure 21 a is the row number of 1 dimension detector array, thereby line number is 3 in the case, their spacing be 2 (m=3, n=1).For Figure 21 b, line number=3, spacing=5 (m=3, n=2).For Figure 21 c, line number=3, spacing=8 (m=3, n=3).In Figure 22 a, line number=3, (n=1), and there are three focal positions in m=3 in spacing=2.In Figure 22 b, line number=3, (n=2), and there are three focal positions in m=3 in spacing=5.In Figure 22 c, line number=4, (m=4 n=1), and has three focal positions in spacing=4.Always require to have between detector the integer line space and even wish that as shown in Figure 23 also there are three focal positions line number in Figure 23=3, spacing=2.5, scanning line spacing=2 with line scanning overlapping or " constriction " although may not be.
In order to produce coloured image or multichannel image, can be traversing based on changing the color of illumination line by line and with the port number being that factor slows down.For example should require 1/3rd traversing speed for redgreenblue scanning as shown in Figure 24, in Figure 24, utilize the scanning of switches light generation RGB into monochromatic speed, line number among the figure=3, spacing=2 (m=3, n=1) and three focal positions are arranged.
The another kind of method that produces the red, green, blue colour information is to place the red, green, blue filter on each row of detector.This combination can comprise as shown in Figure 25 a to be combined the identical row of all colours or as shown in Figure 25 b colour sequential is combined.Importantly be noted that if do not require respectively, then use the spacing restriction of " same color capable-same color is capable " like that with monochromatic line space with look capable overlapping or constriction.
In the situation of all focal plane quantity less than the quantity of employed 1 dimension array, the time that requires detector to detect light is shorter than and moves to the required time of next Position Number to prevent fog.For example, for the four lines detector that has single focal plane, light should be shorter than 1/4th of run duration detection time.Needn't have Figure 18,20 and 25a, 25b shown in single detector system.
Can be at the routine detector of single file as shown in Figure 3 of various smooth method of superposition combination shown in Figure 26 a to 26c, so that detector all is positioned on the identical focal plane.Figure 26 a illustrates the equipment that contains 4,5 and three arrays 1,2,3 of two beam splitters that uses.The virtual image of array 1,3 is shown in 1 ', 3 ' respectively.Optical axis is illustrated in 6 places.The spacing of detector array be two scan lines (m=3, n=1).Figure 26 b illustrates line space 2 (m=3, n=1) the two arrays under and bimirror 7,8 schemes.Array 1 and 2 and principal ray respectively 1 " and 2 " locate to illustrate.Figure 26 c illustrates line space 8 (m=3, n=3) tri-array 1,2,3 under and bimirror 7,8 systems.
If layout is not set to detector is placed in the same plane, then when scan period need be carried out any adjustment to relative focal plane, then detector must move relative to each other and cause and be difficult to realize that variable inhomogeneous focal plane separates, and perhaps a large amount of inhomogeneous focusing heaps can need a large amount of detectors so that scan each focal plane simultaneously.The method of other combination detector comprises fiber bundle, physically detector is close together and is arranged in micro prism array on the imaging len.
Have some possible methods that focus in the scan period adjustment, some of them are shown in Figure 27 a to 27g.Figure 27 a illustrates and comprises moving with the detector head 9 of the two beam splitter system of 3 arrays.The focusing moving range is shown on 10.Figure 27 b illustrates a kind of alternative example, wherein utilizes moving of the middle imaging len 11 of sample and detector.Figure 27 c illustrates and utilizes movably the folded mirror 12,13,14 of light beam to reach focusing.Figure 27 d illustrates how to reach the focusing modulation by mobile sample 15.Figure 27 e illustrates by the element 16 in the mobile imaging lens 11 and reaches the focusing change.Figure 27 f illustrates alternate device, wherein in the sample side the adjustable window of thickness 17 is set, for example the active quartz window of photoelectricity.Cause focus movement by the optical thickness that changes window.Figure 27 g uses the rotation window 18 of variable light thickness.Wherein cause focus movement by the optical thickness that changes window.It is function (promptly along circumference) change optical thickness and/or the distribution that changes optical thickness along the radius vector direction that this window has around its rotation.This illustrates in greater detail in Figure 28.
The scheme of this paper explanation is quite different with prior art, utilizes a plurality of detectors to catch image by each detector on different focal positions in the prior art.On the contrary, we can use single detector in many cases to utilize the present invention, for example as shown in Figure 3.We then change focusing to form a plurality of focus value on basis line by line.This is shown in Fig. 5 to 10.We for example adopt a plurality of detectors among Figure 18 to 25 like that, but these detectors of any moment are in identical focal position.
In general, thus provide a kind of line scanning method so that once produce multi-focusing images.1 dimension (typically) detector array is traversing and be in usually in the plane of detector surface on the direction perpendicular to the axle of this array.To the focusing between each image adjustment scan line that focuses on the heap image.When transverse-moving mechanism moves to the next scan line of the first focusing heap image, repeat this process circularly, focus on heap images until forming all.
Detector array typically on perpendicular to the direction of the axle of friendship array (relatively) traversing and usually in the detector surface plane, traversing speed is taken as and makes next row group is the capable integral multiple of m on the image.These row of sensitizing range as detector needn't be measure-alike.Can be that the factor reduces the traversing speed with respect to row by the quantity of color channel (if be provided with), and each change focus on before or during to each channel change illuminating color of image.
Scan period can be adjusted the focusing level valuably so that follow the tracks of the focal zone.Can utilize these focusing levels to determine focusing range by the relation of checking on the both sides, focal zone the focusing evaluation function under at least two levels, wherein these levels are put on the edge of this focal zone, for example keep the fixed relationship between the plane and focal plane edge in focus.
In specific embodiment, can utilize near beam splitter/mirror/micro prism (imaging len) and array to produce a plurality of confocal line 1 dimension arrays.

Claims (38)

1. method that produces the multi-focusing images of target, this heap image comprises a plurality of images of this target, and each image has corresponding focus or position, and this method comprises:
Cause the relative scanning motion between target and the photodetector array, this array is used for receiving image information in the form scan period with scan line repeatedly from this target; And
Between the described focus of each image or position, cause this target that will change and the relative focusing between this array in scan period, thereby obtain the image in this heap, wherein each image is to be formed by the image information that obtains in each focus or position in scan period.
2. according to the process of claim 1 wherein that a plurality of width of cloth district to this target repeats this method.
3. according to the method for claim 1 or 2, wherein in single sweep operation, obtain this multi-focusing images to target.
4. according to the method for arbitrary claim in the claim 1 to 3, wherein after obtaining a scan line from this target for the specific image in this heap, change focusing relatively, thereby before obtaining another scan line, obtain the one scan row for another image at least in this heap for described specific image.
5. according to the method for claim 4,, thereby sequentially obtain scan line circulation focusing repeatedly between image for each image wherein in scan period.
6. according to the method for claim 5, wherein suspend relative motion in each cycle period.
7. according to each method in the claim 1 to 5, wherein scanning motion roughly is continuous.
8. according to the method for claim 7, thereby comprise that also image information that interpolation obtains for each image forms the correspondence image with different focal positions or scope in this heap.
9. according to the method for above-mentioned arbitrary claim, wherein this array is the one-dimensional array of definition first direction.
10. according to the method for claim 9, wherein this relative scanning motion is approximately perpendicular to this first direction.
11. according to the method for above-mentioned arbitrary claim, focal position or the scope even interval of focus each other wherein.
12. according to the method for arbitrary claim in the claim 1 to 10, wherein focus is unevenly at interval each other for focal position or scope.
13. according to the method for claim 12, wherein when adopting focusing range, each focusing range is not overlapping.
14. according to the method for claim 12, wherein when adopting focusing range, focusing range is overlapping.
15., comprise also that when adopting focusing range, scan period utilizes image information to focus on to revise according to the method for above-mentioned arbitrary claim, so that obtain in succession image information for each district of each image.
16., also comprise the Assessment Curves that obtains as the function of focal position according to the method for claim 15.
17., thereby also comprise each the image control focusing in the heap to given zone covering ideal focusing position according to the method for claim 16.
18. according to the method for claim 17, wherein the focusing of center image (group) is set to ideal focusing position corresponding to these districts in the heap.
19. according to the method for above-mentioned arbitrary claim, thereby comprise that also the image in the combined stack produces output image, this output image has according to the focusing range of each image that makes up it or the depth of focus of position.
20. according to the method for above-mentioned arbitrary claim, wherein this array comprises a plurality of pixels that roughly are arranged in along the scanning direction in the subarray.
21. according to the method for claim 20, wherein these subarrays roughly separate along the scanning direction.
22. according to the method for claim 21, wherein each subarray is suitable for receiving the light of corresponding color.
23. method according to claim 22, wherein each image is obtained image information and m subarray wherein is provided from adjacent district, and be m * n-1 wherein to distinguish the wide subarray spacing that is unit is seen from this array, wherein n is a nonzero integer, thus the image information that the different time that interweaves obtains from different sections.
24. according to the method for above-mentioned arbitrary claim, wherein according to the dimension of this array and the speed of the definite relative motion in location.
25. an equipment that is used to produce the multi-focusing images of target, this heap image comprises a plurality of images of this target, and each image has corresponding focus or position, and this equipment comprises:
Photodetector array is used for receiving image information from target with the form of scan line;
Scanning means is used to provide the relative motion between this array and the target;
Focusing arrangement is used to control the relative focusing between this array and the target, and
Control system is used to operate this scanning means to cause the relative scanning motion between target and the photodetector array; Also be adapted to this array is controlled to receive the image information from target repeatedly in scan period; And be used to operate this focusing arrangement between the described focus of each image or position, to cause the change of the relative focusing between target and this array in scan period, thereby each image in obtaining piling, wherein each image be by scan period each focus or the image information that obtains of position form.
26. according to the equipment of claim 25, wherein this array comprises one-dimensional array.
27. according to the equipment of claim 25 or 26, wherein this array comprises a plurality of subarrays that are arranged on the direction that is approximately perpendicular to the scanning direction.
28. according to the equipment of claim 27, wherein provides and separate m subarray, thereby the correspondence image information that obtains from each section roughly separates along the integer section on the scanning direction in image.
29. according to the equipment of claim 27 or 28, thereby wherein subarray comprises that respectively filter receives and the light of particular color correspondence.
30., thereby comprise that also beam splitter provides physics according to the subarray of claim 28 to separate and subarray at interval empty according to the equipment of claim 28 or 29.
31. according to each equipment in the claim 25 to 30, wherein this focusing arrangement focuses on by the mobile realization of array.
32. according to each equipment in the claim 25 to 31, also comprise imaging len and wherein this focusing arrangement focus on by mobile realization this imaging len or the imaging len member.
33. according to each equipment in the claim 25 to 32, also comprise folded mirror and wherein the mobile realization of this focusing arrangement by folded mirror focus on.
34. according to each equipment in the claim 25 to 33, wherein this focusing block focuses on by the mobile realization of target.
35. according to each equipment in the claim 25 to 32, also comprise the window that optical thickness is controlled, wherein this focusing arrangement is realized focusing on by this window of operation.
36. according to the equipment of claim 35, wherein this window is made of photoelectric material.
37. according to the equipment of claim 36, wherein this window turns and has the variable light thickness of the function that is angle of rotation.
38. according to each equipment in the claim 25 to 37, wherein this equipment is configured for the part to the microscopic system of micro-target imaging.
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