CN104568982A - Detection method and detection system for sub-surface defects of optical components - Google Patents
Detection method and detection system for sub-surface defects of optical components Download PDFInfo
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- CN104568982A CN104568982A CN201510014502.4A CN201510014502A CN104568982A CN 104568982 A CN104568982 A CN 104568982A CN 201510014502 A CN201510014502 A CN 201510014502A CN 104568982 A CN104568982 A CN 104568982A
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- 238000001514 detection method Methods 0.000 title claims abstract description 47
- 230000003287 optical effect Effects 0.000 title claims abstract description 35
- 230000007547 defect Effects 0.000 title claims abstract description 30
- 239000000523 sample Substances 0.000 claims abstract description 81
- 239000013307 optical fiber Substances 0.000 claims abstract description 11
- 230000003595 spectral effect Effects 0.000 claims abstract description 8
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- 238000000034 method Methods 0.000 claims description 18
- 238000005286 illumination Methods 0.000 claims description 10
- 239000011324 bead Substances 0.000 claims description 8
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- 230000004323 axial length Effects 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 2
- 230000011514 reflex Effects 0.000 claims description 2
- 230000001427 coherent effect Effects 0.000 abstract description 3
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- 238000005516 engineering process Methods 0.000 description 8
- 230000008901 benefit Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012014 optical coherence tomography Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001218 confocal laser scanning microscopy Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 238000009659 non-destructive testing Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
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Abstract
The invention relates to a detection method and a detection system for sub-surface defects of optical components. The detection method comprises the following steps: an optical fiber coupler is used for shunting an input broadband light source; one path of low-coherence light is input into a reference arm and is reflected by a zero-optical-path reference surface to form reference light; the other path of low-coherence light is input into a sample arm and is subjected to optical path delaying treatment; signal light is obtained by an optical fiber probe array; the signal light and the reference light are coupled by an optical fiber to be subjected to coherent superposition to form spectral information; and two-dimensional or three-dimensional spectral information in a detected area can be obtained by movement of a sample or the optical fiber probe array to reconstruct high-resolution images. The detection system comprises the broadband light source, the optical fiber coupler, the reference arm, the sample arm and a detection arm, wherein the sample arm comprises an optical path delaying unit and the optical fiber probe array which are connected with each other. Compared with the prior art, the detection method and the detection system can be used for quickly displaying defect structure information of a multi-space area with high resolution; novel approaches are provided for the sub-surface defects of the optical components.
Description
Technical field
The present invention relates to light path delay technique, photon nanojet technology, Optical Coherence Tomography Imaging Technology and subsurface defect of optical element detection technique, especially relate to a kind of quick, high-resolution subsurface defect of optical element detection method and detection system.
Background technology
Along with the development of high-energy, high power laser system and high-resolution, high-contrast space optics imaging system, the manufacture of optical element is just towards ultraprecise, Ultra-smooth machining future development, the surface precision of optical element should be improved, reduce the surfaceness of optical element, eliminate again or reduce subsurface defect of optical element.
At present, the method for detecting optical element sub-surface damage mainly divide damage detection and Non-Destructive Testing.The conventional detection technique that damages comprises cross section microscopy, angle polishing method, successively polishing etching method, ball spot-facing method, cone spot-facing method, MRF dot technology, constant chemical etch rate method etc.The essence of these methods is the square section or the xsect that are exposed different depth damage by physics or chemical method, and in conjunction with optical microscope, scanning near-field microscope, electron microscope etc. obtain the microstructure information of subsurface defect.Although these detection methods are the most directly, effectively, and generally adopted by optical manufacturing industry, but it is on the low side still to there is measurement efficiency, metrical information is not comprehensive, there is loss measurement to cause test specimen to destroy or the processing cost increase introduced of losing efficacy, introduce new sub-surface damage and cause the open defects such as measuring error.The information gap that Dynamic Non-Destruction Measurement mainly utilizes the harmless means such as surfaceness, ultrasound wave, scattered light, fluorescence to obtain from sub-surface damage layer and base layer comes quantitatively or qualitative analysis material sub-surface damage, has high frequency sweep acoustics microtechnic, laser scattering technology, total internal reflection detection technique, optical coherence tomography, confocal laser scanning microscopy etc.These detection methods have the advantage do not damaged optical element, increase processing cost, but the shortcoming that often Existential Space resolution is on the low side, detection speed is slow.
Summary of the invention
Object of the present invention is exactly provide a kind of quick, high-resolution subsurface defect of optical element detection method and detection system to overcome defect that above-mentioned prior art exists, provides new approach for subsurface defect of optical element detects.
Object of the present invention can be achieved through the following technical solutions:
A kind of subsurface defect of optical element detection method, comprises the following steps:
1) wideband light source of fiber coupler to input carries out shunt;
2) a road low-coherent light input reference arm, is reflected by zero light path reference surface, forms reference light;
3) another road low-coherent light input sample arm, carry out light path delay process, formed the space multipoint parallel illumination with different light path amount of delay by fibre-optical probe array, be radiated on the detected region of sample, and receive this regional reflex and backward scattered flashlight;
4) described flashlight and reference light carry out relevant superposition through coupling fiber and form spectral information;
5) obtain by sample or the mobile of fibre-optical probe array the two dimension or three-dimensional light spectrum information that are detected region;
6) full resolution pricture in region is detected according to two dimension or the reconstruct of three-dimensional light spectrum information, the shape of display defect and distribution.
Described step 3) in, light path delay process is: change the free space distance between fiber coupler sample arm output terminal and each fibre-optical probe, and the Detection Information Relative Zero light path reference surface realizing the reception of each fibre-optical probe has different light path amount of delay.
Described step 3) in, multipoint parallel illumination in space is in below diffraction limit and axial length the illumination light field of 200 microns for lateral dimension.
A kind of subsurface defect of optical element detection system, comprise wideband light source, fiber coupler, reference arm, sample arm and feeler arm, described fiber coupler connects wideband light source, reference arm, sample arm and feeler arm respectively, described sample arm comprises the light path delay unit and fibre-optical probe array that are connected, and described fibre-optical probe array is made up of multiple fibre-optical probe.
Described light path delay unit comprises the main lens, beam splitter, the catoptron and from lens that set gradually, and described beam splitter is provided with n-1, and described catoptron is provided with 1, is describedly provided with n from lens, and n is the number of fibre-optical probe.
Described fibre-optical probe is made up of single-mode fiber and micron medium bead, and described micron medium bead is glued on the single-mode fiber concave surface crossed through end face processing.
The length of described multiple fibre-optical probe is identical.
Also comprise the moveable scanister for fixing optical fiber probe array or sample.
Compared with prior art, the present invention is based on spectral domain optical coherent tomographic (SD-OCT) system, the optical system of general SD-OCT system sample arm is replaced with the fibre-optical probe designed based on photon nanojet, form quick, high-resolution subsurface defect of optical element detection method and detection system, have the following advantages:
(1) fibre-optical probe of the present invention designs based on photon nanojet, be made up of micron medium bead and single-mode fiber, the low-coherent light that micron medium bead (microballoon) is transmitted by scattering single-mode fiber forms photon nanojet, obtain lateral dimension and be in below diffraction limit and axial length the illumination light field of 200 microns, make system have the transverse spatial resolution of superelevation.
(2) the present invention utilizes light path delay technique by the sample arm end of multiple fibre-optical probe incoming fiber optic coupling mechanism, realizes many fibre-optical probes spatial parallelism and detects to improve detection speed;
(3) the present invention adopts spectral domain optical coherent tomographic (SD-OCT) technology, there is wide spectral parallel detection, light path resolution characteristic and transverse direction and the advantage such as axial spatial resolution is separate, by the light path resolution characteristic of SD-OCT technology, the depth information with different light path amount received from different fiber probe can be separated, utilize signal processing technology just can reconstruct the structural information of many fibre-optical probes surveyed area.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is light path delay technique schematic diagram of the present invention.
In figure: 1, wideband light source, 2, fiber coupler, 3, reference arm, 4, sample arm, 5, feeler arm, 6, fibre-optical probe array, 7, scanister, 8, sample.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.The present embodiment is implemented premised on technical solution of the present invention, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, the present embodiment provides a kind of subsurface defect of optical element detection system, comprise wideband light source 1, fiber coupler 2, reference arm 3, sample arm 4 and feeler arm 5, fiber coupler 2 connects wideband light source 1, reference arm 3, sample arm 4 and feeler arm 5 respectively, sample arm 4 comprises the light path delay unit and fibre-optical probe array 6 that are connected, and fibre-optical probe array 6 is made up of multiple fibre-optical probe.This detection system also comprises the moveable scanister 7 for fixing optical fiber probe array 6 or sample 8.Fibre-optical probe is made up of single-mode fiber and micron medium bead, micron medium bead is glued on the single-mode fiber concave surface crossed through end face processing, the low-coherent light that microballoon is transmitted by scattering single-mode fiber forms photon nanojet, obtains lateral dimension and is in below diffraction limit and axial length the illumination light field of 200 microns.The diameter of optical fiber processing end face shape, microballoon and refractive index are selected according to required photon nanojet size.The length of multiple fibre-optical probe is identical.
The concrete grammar adopting above-mentioned subsurface defect of optical element detection system to carry out detecting is:
The low-coherent light that wideband light source 1 sends enters fiber coupler 2, after fiber coupler 2 light splitting, the low-coherent light that one tunnel enters reference arm 3 returns feeler arm 5 and forms reference light after zero light path reference surface reflection, the low-coherent light that another road enters sample arm 4 enters fibre-optical probe array 6 through light path delay process, realizes lateral dimension and is in below diffraction limit and axial length the space multipoint parallel illumination of 200 microns; The depth signal light that fibre-optical probe array 6 receives is through fiber coupler 2 import system feeler arm 5, and in system looks arm 5, CCD receives all flashlights and reference light and to be concerned with the spectral signal of superposition; Two dimension or three-dimensional sample spectrum information is obtained, the super-resolution image in the detected region of system looks arm 5 Computer reconstruct, the shape of display optics subsurface defect and distribution by the mobile of scanister 7 of fixing optical fiber probe 6 or sample 8.
As shown in Figure 2, the light path delay unit of the present embodiment comprises the main lens, beam splitter, the catoptron and from lens that set gradually, beam splitter is provided with n-1, catoptron is provided with 1, n is provided with from lens, composition multi-beam transmission system, changes the free space distance between fiber coupler sample arm output terminal and fibre-optical probe, and the Detection Information Relative Zero light path reference surface realizing the reception of each fibre-optical probe has different light path amount of delay.Wherein n is the number of fibre-optical probe.
The flashlight that main lens L is used for collimating Low coherence illumination light and each fibre-optical probe reception of coupling exported from fiber coupler 2 enters fiber coupler 2; Beam splitter m
1-m
n-1with catoptron m
nthe road illuminating bundle that main lens L collimates is divided into Multichannel Parallel illuminating bundle, again the parallel signal light beam received from each fibre-optical probe is synthesized a road signal beams; From lens l
1-l
nmultichannel Parallel illuminating bundle is coupled into respectively corresponding fibre-optical probe, again the detection signal optical alignment that each fibre-optical probe receives is become Multichannel Parallel signal beams.
Other detection techniques relatively existing, the method and system that the present invention proposes utilizes space, frequency spectrum Parallel detection can realize high speed detection; Utilizing the fibre-optical probe based on the design of photon nanojet that transverse spatial resolution can be made lower than diffraction limit, is a kind of quick, high-resolution optics element subsurface defect detection technique completely newly.
Claims (8)
1. a subsurface defect of optical element detection method, is characterized in that, comprises the following steps:
1) wideband light source of fiber coupler to input carries out shunt;
2) a road low-coherent light input reference arm, is reflected by zero light path reference surface, forms reference light;
3) another road low-coherent light input sample arm, carry out light path delay process, formed the space multipoint parallel illumination with different light path amount of delay by fibre-optical probe array, be radiated on the detected region of sample, and receive this regional reflex and backward scattered flashlight;
4) described flashlight and reference light carry out relevant superposition through coupling fiber and form spectral information;
5) obtain by sample or the mobile of fibre-optical probe array the two dimension or three-dimensional light spectrum information that are detected region;
6) full resolution pricture in region is detected according to two dimension or the reconstruct of three-dimensional light spectrum information, the shape of display defect and distribution.
2. subsurface defect of optical element detection method according to claim 1, it is characterized in that, described step 3) in, light path delay process is: change the free space distance between fiber coupler sample arm output terminal and each fibre-optical probe, and the Detection Information Relative Zero light path reference surface realizing the reception of each fibre-optical probe has different light path amount of delay.
3. subsurface defect of optical element detection method according to claim 1, is characterized in that, described step 3) in, multipoint parallel illumination in space is in below diffraction limit and axial length the illumination light field of 200 microns for lateral dimension.
4. a subsurface defect of optical element detection system, comprise wideband light source, fiber coupler, reference arm, sample arm and feeler arm, described fiber coupler connects wideband light source, reference arm, sample arm and feeler arm respectively, it is characterized in that, described sample arm comprises the light path delay unit and fibre-optical probe array that are connected, and described fibre-optical probe array is made up of multiple fibre-optical probe.
5. subsurface defect of optical element detection system according to claim 4, it is characterized in that, described light path delay unit comprises the main lens, beam splitter, the catoptron and from lens that set gradually, described beam splitter is provided with n-1, described catoptron is provided with 1, describedly be provided with n from lens, n is the number of fibre-optical probe.
6. subsurface defect of optical element detection system according to claim 4, is characterized in that, described fibre-optical probe is made up of single-mode fiber and micron medium bead, and described micron medium bead is glued on the single-mode fiber concave surface crossed through end face processing.
7. the subsurface defect of optical element detection system according to claim 4 or 6, is characterized in that, the length of described multiple fibre-optical probe is identical.
8. subsurface defect of optical element detection system according to claim 4, is characterized in that, also comprises the moveable scanister for fixing optical fiber probe array or sample.
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Cited By (8)
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| CN105758798A (en) * | 2015-11-10 | 2016-07-13 | 天津工业大学 | Method for detecting spectra of metal powder flow under effects of high-power laser light |
| CN107931850A (en) * | 2017-12-12 | 2018-04-20 | 佛山科学技术学院 | A kind of laser mark printing device based on frequency sweep OCT |
| CN109087290A (en) * | 2018-07-24 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | Optical element surface flaw inspection method based on spectral estimation Yu electronics light splitting technology |
| CN111156920A (en) * | 2019-12-31 | 2020-05-15 | 深圳市太赫兹科技创新研究院 | High-depth scanning imaging system |
| CN113607747A (en) * | 2021-10-11 | 2021-11-05 | 常州微亿智造科技有限公司 | System and method for detecting film-coated product based on optical coherence tomography |
| CN113607750A (en) * | 2021-08-05 | 2021-11-05 | 浙江大学 | Device and method for detecting subsurface defect of optical element |
| CN114018822A (en) * | 2021-09-18 | 2022-02-08 | 宝宇(武汉)激光技术有限公司 | Remote laser nondestructive flaw detection device and method |
| US11835472B2 (en) | 2021-08-05 | 2023-12-05 | Zhejiang University | Device and method for detecting subsurface defect of optical component |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105758798A (en) * | 2015-11-10 | 2016-07-13 | 天津工业大学 | Method for detecting spectra of metal powder flow under effects of high-power laser light |
| CN107931850A (en) * | 2017-12-12 | 2018-04-20 | 佛山科学技术学院 | A kind of laser mark printing device based on frequency sweep OCT |
| CN107931850B (en) * | 2017-12-12 | 2024-03-26 | 佛山科学技术学院 | Laser marking device based on sweep OCT |
| CN109087290B (en) * | 2018-07-24 | 2022-03-08 | 中国科学院上海光学精密机械研究所 | Optical element surface defect detection method based on spectral estimation and electronic beam splitting technology |
| CN109087290A (en) * | 2018-07-24 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | Optical element surface flaw inspection method based on spectral estimation Yu electronics light splitting technology |
| CN111156920A (en) * | 2019-12-31 | 2020-05-15 | 深圳市太赫兹科技创新研究院 | High-depth scanning imaging system |
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| CN113607750B (en) * | 2021-08-05 | 2022-06-14 | 浙江大学 | Device and method for detecting subsurface defect of optical element |
| US11835472B2 (en) | 2021-08-05 | 2023-12-05 | Zhejiang University | Device and method for detecting subsurface defect of optical component |
| CN113607750A (en) * | 2021-08-05 | 2021-11-05 | 浙江大学 | Device and method for detecting subsurface defect of optical element |
| CN114018822A (en) * | 2021-09-18 | 2022-02-08 | 宝宇(武汉)激光技术有限公司 | Remote laser nondestructive flaw detection device and method |
| CN114018822B (en) * | 2021-09-18 | 2023-03-21 | 宝宇(武汉)激光技术有限公司 | Remote laser nondestructive flaw detection device and method |
| CN113607747B (en) * | 2021-10-11 | 2021-12-10 | 常州微亿智造科技有限公司 | System and method for detecting film-coated product based on optical coherence tomography |
| CN113607747A (en) * | 2021-10-11 | 2021-11-05 | 常州微亿智造科技有限公司 | System and method for detecting film-coated product based on optical coherence tomography |
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