CN104006764A - Device and method for removing micro-mirror jitter of digital micro-mirror device - Google Patents
Device and method for removing micro-mirror jitter of digital micro-mirror device Download PDFInfo
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- CN104006764A CN104006764A CN201410212609.5A CN201410212609A CN104006764A CN 104006764 A CN104006764 A CN 104006764A CN 201410212609 A CN201410212609 A CN 201410212609A CN 104006764 A CN104006764 A CN 104006764A
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- dmd
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Abstract
The invention discloses a device and method for removing micro-mirror jitter of a digital micro-mirror device (DMD). The device comprises a laser light source, the DMD, a first CCD camera and a second CCD camera. The laser light source emits light beams to illuminate the surface of the DMD, after the light beams are reflected by a micro-mirror of the surface of the DMD, a pair of complementation images occur in the reflecting space, the corresponding reflected light beams of the complementation images are simultaneously received by the first CCD camera and the second CCD camera respectively, the received complementation images are stacked, then the DMD micro-mirror jitter is eliminated, and an important error source generated when the DMD is used for surface appearance measurement is eliminated. The device for removing micro-mirror jitter is simple in structure, easy to control and good in jitter removing effect. The method for removing micro-mirror jitter is concise.
Description
Technical field
The present invention relates to Digital Micromirror Device technical field, specifically refer to a kind of device and method of removing the shake of Digital Micromirror Device micro mirror.
Background technology
The purposes of Digital Micromirror Device (DMD) mainly concentrates on the fields such as holographic imaging, measuring surface form, 3D printing at present, utilizes DMD micro mirror to cut apart light beam, to reach the object of parallel imaging or measurement.The shake of DMD micro mirror is the key property of DMD, can realize the light intensity of micro mirror reflection ray is regulated by this characteristic; But this characteristic also can cause unstable after light intensity regulating, at the local gray level generation play of captured picture in the same time not, become the important errors source of measuring surface form.Therefore, how to eliminate the shake of DMD micro mirror, weakening or eliminating it is to utilize DMD to carry out the key technical problem of measuring surface form on measuring the impact causing.At present, the method that can effectively eliminate the shake of DMD micro mirror there is not yet report, is a technical barrier to be solved.
Summary of the invention
Order of the present invention is for avoiding the existing weak point of art methods, a kind of device and method of removing the shake of Digital Micromirror Device micro mirror is provided, utilize two CCD to reach the object of eliminating the shake of DMD micro mirror, thus the important errors source while eliminating DMD for measuring surface form.
In order to reach above-mentioned purpose, solution of the present invention is:
A device of removing the shake of Digital Micromirror Device micro mirror, comprises LASER Light Source, DMD, a CCD camera and the 2nd CCD camera; The light beam irradiates that described LASER Light Source is sent is on described DMD, and a described CCD camera and the 2nd CCD camera lay respectively at described LASER Light Source light and enter to inject the first folded light beam place and the second folded light beam place that described DMD forms.
A kind of method of removing the shake of Digital Micromirror Device micro mirror, LASER Light Source is sent light beam irradiates on DMD surface, after micro mirror reflection via DMD surface, in reflection space, there is a pair of complementary picture, the corresponding folded light beam of this pair of complementary picture is received by a CCD camera and the 2nd CCD camera respectively simultaneously, received a pair of complementary picture is carried out to overlap-add procedure, realize and eliminate the shake of DMD micro mirror.
Adopt after such scheme, the present invention is with respect to the beneficial effect of prior art: the present invention utilizes dexterously two CCD cameras to receive simultaneously and takes a pair of complementary picture via DMD reflection, and one of them complementary picture is highlighted to processing, after another picture stack, can be by because micro mirror is shaken the light intensity play error concealment causing, thus the important errors source producing can eliminate DMD for measuring surface form time.It is simple in structure that the present invention removes jittering device, remove dither method succinct, be easy to control, the removal shake effect reaching is good.
Brief description of the drawings
Fig. 1 is the structural representation that the present invention removes DMD micro mirror jittering device;
Fig. 2 is the schematic diagram that occurs a pair of complementary picture under DMD "on" position.
Label declaration
LASER Light Source 1 DMD 2
The one CCD camera 3 the 2nd CCD camera 4
Embodiment
Below in conjunction with the drawings and specific embodiments, this case is described in further detail.
As shown in Figure 2, the micro mirror of DMD2 can do under "on" position+deflection of 12 ° or-12 °, two kinds of deflection states have determined that light beam can occur that in space a pair of complementation is as a and b after DMD2 reflection.On the other hand, after micro mirror deflection, can not remain on+12 ° or-12 ° always, the substitute is micro mirror and do dither near these two angles, and the size of vibration frequency has determined the light intensity of light beam after reflection, this characteristic of DMD2 micro mirror in image is processed, can cause picture in the play of local light intensity, be to utilize DMD to carry out an error source of optical measurement.
For the problems referred to above that exist in DMD2 application, the present invention proposes a kind of device and method of removing the shake of Digital Micromirror Device micro mirror.Remove Digital Micromirror Device micro mirror jittering device as shown in Figure 1, comprise LASER Light Source 1, DMD2, a CCD camera 3 and the 2nd CCD camera 4.The light beam irradiates that LASER Light Source 1 is sent is on DMD2, and a CCD camera 3 and the 2nd CCD camera 3 lay respectively at LASER Light Source 1 light and enter to inject the first folded light beam place and the second folded light beam place that DMD2 forms.The one CCD camera 3 is all electrically connected with outside PC or embedded system mutually with the 2nd CCD camera 3.
Corresponding above-mentioned removal Digital Micromirror Device micro mirror jittering device, it is as follows that it removes dither method: LASER Light Source 1 is sent light beam irradiates on DMD2 surface, after micro mirror reflection via DMD2 surface, in reflection space, there is a pair of complementary picture (addition of gray-scale value under same coordinate equals 255 to complementation picture for this), take respectively by a CCD camera 3 and the 2nd CCD camera 4 the corresponding folded light beam that receives described a pair of complementary picture simultaneously, after the image information conversion afterwards shooting being received, be transferred to PC or embedded system, by PC or embedded system, one of them complementary picture is highlighted to processing (this highlights processing and this complementation is added to 255 after the gray-scale value negate as each coordinate), after superposeing with another complementary picture again, can be by because DMD2 micro mirror is shaken the light intensity play error concealment causing, reach the object of eliminating the shake of DMD micro mirror.
The foregoing is only the preferred embodiments of the present invention, all equalizations of doing with the claims in the present invention scope change and modify, and all should belong to the scope of the claims in the present invention.
Claims (2)
1. a device of removing the shake of Digital Micromirror Device micro mirror, is characterized in that: comprise LASER Light Source, DMD, a CCD camera and the 2nd CCD camera; The light beam irradiates that described LASER Light Source is sent is on described DMD, and a described CCD camera and the 2nd CCD camera lay respectively at described LASER Light Source light and enter to inject the first folded light beam place and the second folded light beam place that described DMD forms.
2. remove the method for Digital Micromirror Device micro mirror shake for one kind, it is characterized in that: LASER Light Source is sent light beam irradiates on DMD surface, after micro mirror reflection via DMD surface, in reflection space, there is a pair of complementary picture, the corresponding folded light beam of this pair of complementary picture is received by a CCD camera and the 2nd CCD camera respectively simultaneously, received a pair of complementary picture is carried out to overlap-add procedure, realize and eliminate the shake of DMD micro mirror.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410212609.5A CN104006764A (en) | 2014-05-20 | 2014-05-20 | Device and method for removing micro-mirror jitter of digital micro-mirror device |
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| CN201410212609.5A CN104006764A (en) | 2014-05-20 | 2014-05-20 | Device and method for removing micro-mirror jitter of digital micro-mirror device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6977732B2 (en) * | 2002-12-26 | 2005-12-20 | National Taiwan University | Miniature three-dimensional contour scanner |
| KR20100011192A (en) * | 2008-07-24 | 2010-02-03 | 넥스타테크놀로지 주식회사 | Moire measurement device using digital micromirror device |
| CN101655601A (en) * | 2008-08-22 | 2010-02-24 | 麦克奥迪实业集团有限公司 | Light microscope imaging method and system based on DMD structure |
| CN101661159A (en) * | 2008-08-25 | 2010-03-03 | 麦克奥迪实业集团有限公司 | Two-dimensional modulation technique-based method for acquiring shear-layer images |
| CN103486980A (en) * | 2013-08-28 | 2014-01-01 | 华侨大学 | Cross-scale measurement method based on digital micromirror device |
-
2014
- 2014-05-20 CN CN201410212609.5A patent/CN104006764A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6977732B2 (en) * | 2002-12-26 | 2005-12-20 | National Taiwan University | Miniature three-dimensional contour scanner |
| KR20100011192A (en) * | 2008-07-24 | 2010-02-03 | 넥스타테크놀로지 주식회사 | Moire measurement device using digital micromirror device |
| CN101655601A (en) * | 2008-08-22 | 2010-02-24 | 麦克奥迪实业集团有限公司 | Light microscope imaging method and system based on DMD structure |
| CN101661159A (en) * | 2008-08-25 | 2010-03-03 | 麦克奥迪实业集团有限公司 | Two-dimensional modulation technique-based method for acquiring shear-layer images |
| CN103486980A (en) * | 2013-08-28 | 2014-01-01 | 华侨大学 | Cross-scale measurement method based on digital micromirror device |
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Application publication date: 20140827 |