CN103988046B - Optical instrumentation device - Google Patents
Optical instrumentation device Download PDFInfo
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- CN103988046B CN103988046B CN201280057337.5A CN201280057337A CN103988046B CN 103988046 B CN103988046 B CN 103988046B CN 201280057337 A CN201280057337 A CN 201280057337A CN 103988046 B CN103988046 B CN 103988046B
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- head
- control unit
- storage part
- optical
- individual information
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
Abstract
In the optical instrumentation device of the present invention, using light, measurement object thing (200) is measured, there is head (10), control unit (20), optical fiber (11), storage part (40).In the optical instrumentation device of the present invention, optical fiber (11) connects head (10) and control unit (20).Storage part (40) is associated with each body phase of manufactured head (10) respectively, and storage enters the information needed for row operation by control unit (20), is used as the individual information of head (10).Control unit (20), from the physically reading individual information self-existent storage part (40,41) with respect to control unit (20), enters row operation using the individual information being read.
Description
Technical field
The present invention relates to the use of the optical instrumentation device that light measurement object thing is measured, make head particularly to inclusion
(bare headed) the optical instrumentation device accepting the optical system of light from measurement object thing in portion.
Background technology
In recent years, developing the optical instrumentation device that light measurement object thing is measured.For example, as with
The optical instrumentation device that cordless is measured to the displacement of measurement object thing, is developing common focus optical system
The confocal measuring device that the displacement of measurement object thing is measured.Confocal measuring device, specifically by U.S. Patent No.
No. 4585349 description (patent documentation 1) are disclosed.Confocal measuring device disclosed in patent documentation 1 has aberration lens,
The light source (such as white light source) that this aberration lens makes from the light for the multiple wavelength of outgoing, the light of outgoing, produces along optical axis
Add lustre to difference.In confocal measuring device disclosed in patent documentation 1, lead to from conjunction because the displacement of measurement object thing is different
The wavelength of the burnt light of aberration lens is different, and the wavelength therefore having passed through the light of pin hole (pin hole) changes, to passing through
The wavelength of the light of pin hole is measured, and to measure the displacement of measurement object thing.
In addition, in confocal measuring device disclosed in No. 5785651 description of U.S. Patent No. (patent documentation 2),
Replace aberration lens and use diffraction lenss, make to produce aberration from the light of light source outgoing along optical axis.Additionally, in patent documentation 2 institute
In disclosed confocal measuring device, the light path from light source to collimating lens and the light path from collimating lens to beam splitter are made
Use optical fiber.
Prior art literature
Patent documentation
Patent documentation 1:No. 4585349 description of U.S. Patent No.
Patent documentation 2:No. 5785651 description of U.S. Patent No.
Content of the invention
Problems to be solved by the invention
Optical instrumentation device as patent documentation 2, with optical fiber come connecting head and control unit (controller), this head
Optical system including collimating lens etc., this control unit includes the optical unit of beam splitter etc., in such optical instrumentation device
In, the individual variation of the optical system of head is big, measures to carry out high accuracy, needs to adjust head and control one to one
Portion.Therefore, when head is damaged, in optical instrumentation device as patent documentation 2, it is not only and repaiies head, control unit
Matingly to post to manufacturing firm to reprocess, and need to carry out man-to-man adjustment to the head after repairing and control unit.
And then, in optical instrumentation device as patent documentation 2, one-to-one due to needing head and control unit are carried out
Adjustment, therefore in the case that there are multiple optical instrumentation devices, nor only change head and change the design cloth of device
Office, but need to make head and control unit integratedly move.Therefore, in optical instrumentation device as patent documentation 2
There are the following problems：When changing the layout of device, the situation with the layout to change device only changing head
Compare, more take time and energy (arduously time-consuming).
In addition, developing such optical instrumentation device：By the information that head and control unit are adjusted (for example
Correction factor etc.) it is stored in the storage part of head, when connecting head and control unit, read information from storage part.In this light
Learn in measuring device, prestored the information that head is adjusted, therefore, it is not necessary to make head with control unit in pairs
Should, only head can be posted when head is damaged and reprocess to manufacturing firm, and it is also possible to only change head to change device
Layout.
But, in this optical instrumentation device, need circuit portion including storage part for the setting in head, therefore can
Head is led to maximize.And then, due to needing to read the information the storage part being stored in head from control unit, therefore in head
Also need to connect electric wire and control unit between in addition to connecting optical fiber.
That Given this present invention exactly makes it is therefore intended that provide a kind of optical instrumentation device, do not make head large-scale
On the premise of change, can have to change the such interchangeability of head with respect to control unit.
Means for solving the problem
The optical instrumentation device of the present invention has head, control unit, optical fiber, storage part.Head includes accepting from measurement
The optical system of the light of object.Control unit includes optical unit, and the light being accepted by head is converted to telecommunications by this optical unit
Number, control unit enters row operation to the signal of telecommunication changed by optical unit, and output measures result.Fiber connector portion and control
Portion, becomes the light path that the optical unit of the optical system to head and control unit is attached.Storage part respectively with manufactured
Each body phase association of head, storage is entered the information needed for row operation by control unit, is used as the individual information of head.Control unit
From the physically reading individual information self-existent storage part with respect to control unit, entered using the individual information being read
Row operation.
Furthermore it is preferred that storage part have electrically store individual information storage medium, by with control unit
Input terminal is connected, can be from storage medium reading individual information.
Furthermore it is preferred that storage part has the storage medium storing individual information in magnetical or optical mode, using control
Portion is built-in or the reading part that connected, from storage medium reading individual information.
Furthermore it is preferred that storage part is tied with head, or the optical fiber being connected with head is tied.
Furthermore it is preferred that storage part is built in the connector portion of the optical fiber being connected with control unit, by for connecting
Device portion connects to the operation of control unit, can connect storage part to the input terminal of control unit.
The customizing messages furthermore it is preferred that control unit is stored with, cannot in the case of storage part reading individual information,
This customizing messages can use as the information needed for computing.
The effect of invention
By said structure, the optical instrumentation device of the present invention, the storage part of the individual information of head will be stored, respectively
For each individual setting incidence relation of manufactured head, control unit from the individual information of storage part read head, using this
Individual information enters row operation, therefore, measures even if changing head and also can carrying out high accuracy.
Brief description
Fig. 1 is the schematic diagram of the structure of optical instrumentation device of the first embodiment representing the present invention.
Fig. 2 is confocal light representing the head adopting in confocal measuring device of the first embodiment of the present invention
The schematic diagram of the structure of system.
Fig. 3 is to be used for obtaining wavelength-distance correction in confocal measuring device to the first embodiment in the present invention
The schematic diagram that the adjustment of coefficient illustrates.
Fig. 4 is so that head is associated with storage part in confocal measuring device to the first embodiment in the present invention
The schematic diagram that other structures illustrate.
Fig. 5 is the schematic diagram of the structure of optical instrumentation device representing second embodiment of the present invention.
Fig. 6 is the schematic diagram of the other structures of optical instrumentation device representing second embodiment of the present invention.
Fig. 7 is the schematic diagram of the structure of optical instrumentation device representing third embodiment of the present invention.
Specific embodiment
Below, embodiments of the present invention are described in detail with reference to the attached drawings.
(first embodiment)
Fig. 1 is the schematic diagram of the structure of optical instrumentation device of the first embodiment representing the present invention.Light shown in Fig. 1
Learn measuring device, be using altogether focus optical system to the displacement of measurement object thing 200 (and measurement object thing 200 between away from
From change) confocal measuring device 100 being measured.In the measurement object being measured with confocal measuring device 100
In thing 200, for example, there is liquid crystal lamellar spacing (cell gap) of display panels etc..
Confocal measuring device 100 has：Head 10, it has confocal optical system；Control unit 20, it is via light
Fine 11 and optics connects (each portion)；Monitoring unit 30, its display is from the signal of control unit 20 output；Storage part 40, its storage is aftermentioned
Head 10 individual information.
Head 10 has diffraction lenss 1 and object lens (to thing lens) 2, and compared with diffraction lenss 1, object lens 2 configure close
Measurement object thing 200 side.The focal length (hereinafter referred to as focal length) of diffraction lenss 1 is poor more than objective focal length, and described object lens are burnt
It is the difference between the distance from diffraction lenss to object lens and the focal length of object lens away from difference.
Here, diffraction lenss 1 are such optical elements：Make the light source from the light for the multiple wavelength of outgoing described later
The light of (for example, white light source) institute outgoing, produces aberration along optical axis direction.Diffraction lenss 1, on the surface of lens, periodically
It is formed with the thin of such as position phase diffraction pattern (kinoform) shape or two dimension (binary) shape (level shape, stairstepping) etc.
Micro- undulations, or, it is formed with the zone plate (zone plate) of the amplitude type making light transmission rate periodically-varied.This
Outward, the structure of diffraction lenss 1 is not limited in the structure of above-mentioned record.
Object lens 2 are such optical elements：It makes the light creating aberration by diffraction lenss 1 converge to measurement object
On thing 200.Additionally, in the following description, the light of the light for the multiple wavelength of outgoing that confocal measuring device 100 is adopted
Source is white light source.
From the light of white light source outgoing, it is directed to head 10 via optical fiber 11.In order to make from optical fiber 11 outgoing
Light in diffraction lenss 1 effectively utilizes, need to make the numerical aperture (NA of optical fiber 11：Numerical aperture) and diffraction
The numerical aperture of lens 1 is consistent.Therefore, collecting lenses 3 are set between optical fiber 11 and diffraction lenss 1, by the numerical value of optical fiber 11
Aperture is adjusted to consistent with the numerical aperture of diffraction lenss 1.
Optical fiber 11 is the light path from head 10 to control unit 20, and also plays the function of pin hole.That is, by object lens 2 meeting
In poly- light, focus just in the peristome focus of optical fiber 11 on measurement object thing 200.Therefore, optical fiber 11 plays this
The function of the pin hole of sample：The light of wavelength of focus will not block on measurement object thing 200, allow in measurement object
On thing 200, the light of focus passes through.Use optical fiber 11 for from head 10 to the light path of control unit 20, therefore do not need (in addition to set
Put) pin hole.
In confocal measuring device 100, employ optical fiber 11 for from head 10 to the light path of control unit 20, therefore,
Head 10 can be made neatly to move with respect to control unit 20.
Control unit 20 has White LED (the Light Emitting Diode as white light source：Light emitting diode) 21,
Branch optical fiber 22, beam splitter 23, imaging apparatuss 24, control circuit portion 25.Although White LED 21 is used as white light source,
Can also be using other light sources, as long as being capable of the light source of outgoing white light.
Branch optical fiber 22, has an optical fiber 22a in the side being connected with optical fiber 11, has two in its contrary side
Optical fiber 22b, 22c.Additionally, optical fiber 22b connects to White LED 21, optical fiber 22c connects to beam splitter 23.Therefore, branch optical fiber 22
Light from White LED 21 outgoing can be guided to optical fiber 11, further, it is possible to the light that will return from head 10 via optical fiber 11
Guide to beam splitter 23.
Beam splitter 23 has：Concave mirror 23a, it reflects to the light returning from head 10；Diffraction lattice 23b, it enters
Penetrate the light being come by concave mirror 23a reflection；Collecting lenses 23c, it enters line convergence to the light from diffraction lattice 23b outgoing.Beam splitter
As long as 23 can distinguish the light that (separation) returns from head 10 according to each wavelength, it is possible to use monochromatic formula (Czerny-
Turner type), the beam splitter of disposable type in Littrow-type (Littrow type) etc..
Imaging apparatuss 24 are the Linear CMOS for being measured to the intensity of the light from beam splitter 23 outgoing
(Complementary Metal Oxide Semiconductor：Complementary metal oxide semiconductors (CMOS)) and/or CCD (Charge
Coupled Device：Charge-coupled image sensor).Here, in confocal measuring device 100, by beam splitter 23 and shooting unit
Part 24 constitutes determination part, and this determination part to measure the intensity of the light returning from head 10 according to each wavelength.Additionally, determination part is only
The intensity of the light returning from head 10 can be measured according to each wavelength, can be by the imaging apparatuss 24 of CCD etc.
Monomer is constituted.In addition, imaging apparatuss 24 can also be the CMOS of the two dimension and/or CCD of two dimension.
Control circuit portion 25 has：Light splitting control circuit portion 25a, it controls the dynamic of White LED 21, imaging apparatuss 24 etc.
Make；Signal processing circuit portion 25b, it is processed to the signal exporting from imaging apparatuss 24.And then, control circuit portion 25 has
Have：Input interface 25c, it is used for input adjustment signal, the individual information of head described later 10, and this adjustment signal is for dialogue
The signal that the action of color LED21, imaging apparatuss 24 etc. is adjusted；Output interface 25d, it is electrically connected with monitoring unit 30, is used for
Export the result after the signal to imaging apparatuss 24 is processed.
Additionally, in control unit 20, by the light splitting control circuit of beam splitter 23, imaging apparatuss 24 and control circuit portion 25
Portion 25a constitutes optical unit, and this optical unit will be converted to the signal of telecommunication by the light that head 10 accepts.The signal in control circuit portion 25
Process circuit portion 25b is directed to and enters row operation by the signal of telecommunication that optical unit is changed, and output measures result.
Monitoring unit 30 shows the signal being exported by imaging apparatuss 24.Monitoring unit 30 draws out the light of the light returning from head 10
Spectrum waveform, the distance for example showing measurement object thing 200 is 123.45 μm.
In storage part 40, should associatedly store in control with the individual relative of manufactured head 10 one by one respectively
Enter the information of the head 10 needed for row operation in portion 20 processed, be used as individual information.Here, for measurement object thing 200
Confocal measuring device 100 being measured of displacement in the case of, the individual information of head 10 is that wavelength-distance described later is repaiied
Positive coefficient.
Then, the individual information that head 10 is described is wavelength-distance correction coefficient.Fig. 2 is to represent the first of the present invention
The schematic diagram of the structure of common focus optical system of head 10 adopting in confocal measuring device 100 of embodiment.Fig. 2 institute
The structure of the common focus optical system showing, is compared with diffraction lenss 1, object lens 2 configure the knot in measurement object thing 200 side
Structure.That is, in confocal measuring device 100, produced along optical axis direction by the light that diffraction lenss 1 make the end outgoing from optical fiber 11
Add lustre to difference, so that the light creating aberration is converged on measurement object thing 200 by object lens 2.
First, in the optical system of confocal measuring device 100 shown in Fig. 2, by the end from optical fiber 11 to diffraction
Distance till lens 1 is set to a, and the distance to object lens 2 from diffraction lenss 1 is set to b, will be from object lens 2 to 2-in-1 by object lens
Distance till burnt point is set to c (λ).And then, for diffraction lenss 1, the wavelength of light is λ0When focal length be set to fd0, will
Effective diameter (effective diameter) is set toAdditionally, making apart from a and focal length fd0Equal.For object lens 2, focal length is set to fo, will have
Effect footpath (effective diameter) is set to
And, in the optical system of confocal measuring device 100 shown in Fig. 2, using the formula of general lens, energy
Enough according to (formula 1) show like that from the end of optical fiber 11 to diffraction lenss 1 apart from a, from diffraction lenss 1 to diffracted
Lens 1 by till the point of the emergent light focus of optical fiber 11 apart from ag(λ) the focal length fd (λ) of (not shown) diffraction lenss 1
Between relation, and from diffraction lenss 1 to object lens 2 apart from b, from object lens 2 to burnt point 2-in-1 by object lens away from
Focal length f from c (λ), object lens 2oBetween relation.Additionally, the aberration of object lens 2 can be ignored.
[mathematical expression 1]
... (formula 1)
And then, the relation of (formula 1) can be utilized, by the effective diameter of object lens 2(λ) show as (formula 2) like that.
[mathematical expression 2]
... (formula 2)
In addition, can utilize (formula 1) and (formula 2) relation, by from object lens 2 to by object lens 2-in-1 Jiao point apart from c
(λ) show as (formula 3) like that.
[mathematical expression 3]
... (formula 3)
In logic although can with (formula 3) performance from object lens 2 to burnt point 2-in-1 by object lens apart from c (λ) and ripple
Relation between length, but the individual variation of the optical system of head 10 is big, measures to carry out high accuracy, needs could be adjusted to
Head 10 is made to correspond with control unit 20.Will be by wavelength obtained by this adjustment-distance correction coefficient, as head 10
Individual information and be stored in storage part 40, by by storage part 40 to connect be tied to the optical fiber 11 of head 10 (related
Connection), in confocal measuring device 100, even if changing the head 10 being tied with storage part 40 it is also possible to utilize head 10
Individual information come to carry out high accuracy measure.
Here, utilizing accompanying drawing that the adjustment carrying out for obtaining wavelength-distance correction coefficient is described.Fig. 3 is for saying
Carry out to obtain wavelength-distance correction coefficient in confocal measuring device 100 of the bright first embodiment in the present invention
Adjustment schematic diagram.
First, confocal measuring device 100, as shown in Fig. 3 (a), makes to be arranged on automatic carrier (not shown)
Measurement object thing 200 moves in the range of can measure, and reads peak wavelength according to each apart from corresponding measurement waveform.
The curve chart that each distance can show as Fig. 3 (b) with respect to the relation of the peak wavelength measuring waveform display is such, can
Calculating the relational expression and wavelength X between apart from c (λ) is c (λ)=α λn+βλn-1+···.Here, α and β be wavelength-away from
From correction factor, this wavelength-distance correction coefficient is stored in storage part 40.
For storage part 40, although not shown, but there are flash memories as nonvolatile memory, for this flash memory
The control circuit of device storage information and reading information, the interface for input/output information.And, storage part 40 makes interface connect
To the input interface 25c (chimeric between such as adapter) of control unit 20, can be by the wavelength-distance being got by adjustment
The information of correction factor electrically stores in flash memories, or reads this information from flash memories.
Confocal measuring device 100, by making storage part 40 and the head of the information storing wavelength-distance correction coefficient
10 are associated, thus when being mounted with head 10, control unit 20 can be from the storage part 40 being associated with the head 10 installed
Middle reading wavelength-distance correction coefficient.In confocal measuring device 100, signal processing circuit portion 25b is using the ripple being read
Length-distance correction coefficient carries out predetermined computing such that it is able to individuality in the optical system in view of installed head 10
On the premise of difference, the accurately displacement to measurement object thing 200 measures.
As long as additionally, storage part 40 can electrically store wavelength-distance correction coefficient, non-volatile to adopted
Property memorizer does not limit.In addition, be also not necessarily limited to control unit 20 to be directly connected to read ripple with storage part 40 via adapter
Length-distance correction coefficient, for example can also be connected with storage part 40 in a non-contact manner by electric wave thus read wavelength-
Distance correction coefficient.
And then, in confocal measuring device 100 shown in Fig. 1, with tie by connect to head 10 optical fiber 11 with deposit
Storage portion 40 is tied, so that head 10 is associated with storage part 40, but the confocal measuring device 100 of the present invention is not only
It is limited to this.For example, it is possible to the optical fiber 11 connecting to head 10 is tied with storage part 40 without tie, and direct with tie
Head 10 is tied with storage part 40, so that head 10 is associated with storage part 40.
In addition, Fig. 4 is to make head 10 for explanation in confocal measuring device 100 of the first embodiment of the present invention
The schematic diagram of the other structures being associated with storage part 40.As shown in Figure 4, in connecting to the optical fiber 11 of head 10,
For built-in storage part 40 in the connector portion 12 that is connected with control unit 20, the terminal in this connector portion 12, with optical fiber 11
The 13 terminal 40a that storage part 40 is abreast set.In the input interface 25c of control unit 20, it is provided with the terminal 13 with optical fiber 11
The input terminal 25c1 being mutually the fitted together to and input terminal 25c2 chimeric with the terminal 40a phase of storage part 40.Therefore, by by light
Fine 11 connector portion 12 inserts the input interface 25c of control unit 20, head 10 can be made to be connected with control unit 20 optics
Meanwhile, storage part 40 is made to electrically connect with control unit 20.Thus, in confocal measuring device 100 shown in Fig. 4, user is not
Wavelength-distance correction the coefficient that must deliberately be operable to will be stored in storage part 40 reads to control unit 20 it becomes possible to pacify
Dress head 10.
And then, it is not necessary to head 10 have to be made for physically and deposits for associating between head 10 and storage part 40
Storage portion 40 is tied, as long as and being attached to being identically numbered with the serial numbering being attached to head 10 on storage part 40.
As described above, in confocal measuring device 100 of the first embodiment of the present invention, will store wavelength-
The storage part 40 of distance correction coefficient, is respectively associated with the individuality of each manufactured head 10, control unit 20 is from storage part 40
Read wavelength-distance correction coefficient, enter row operation using this wavelength-distance correction coefficient, therefore, even if having changed head 10,
Also high accuracy can be carried out measure.In addition, in confocal measuring device 100 of the first embodiment of the present invention, due to tool
There is interchangeability, i.e. head 10 can be changed with respect to control unit 20, therefore, can be only by head 10 in head 10 breakage
Deliver to manufacturing firm to reprocess.And then, in the case that there are multiple confocal measuring devices 100, can only change head 10
The layout of change device.Additionally, in confocal measuring device 100 of the first embodiment of the present invention, not in head
It is provided in portion 10 storing the storage part of wavelength-distance correction coefficient, therefore, it is possible to make head 10 miniaturization.
Here, the individual information of the head 10 being stored in storage part 40 is not limited in wavelength-distance correction coefficient, also
Can include：The device related information of the serial numbering of device, model, machine etc., the model that measure centre distance, can measure
The measurement association of the presence or absence of the presence or absence of associative mode enclose, distinguished by work, sensitivity adjustment modes, automatic fader control coefficient etc.
Software related information of information, version information etc. etc..
In addition, in the optical instrumentation device of the first embodiment of the present invention, illustrating using focus optical system altogether
The confocal measuring device 100 that the displacement of measurement object thing 200 is measured, but the present invention is not limited to this.The present invention
Optical instrumentation device, as long as connect the structure of the optical system of head and the optical unit of control unit with optical fiber,
It is readily adaptable for use in the film thickness gauge that the thickness to measurement object thing measured, the color to measurement object thing, wavelength are counted
Photometer that the color sensor of survey, the light quantity to measurement object thing are measured etc..
(second embodiment)
In the optical instrumentation device of second embodiment of the present invention, storage part stores the individual of head without electrical mode
Body information, but enter storage with optics or magnetic means, this structure is described below.Fig. 5 is second embodiment of the present invention
The structure of optical instrumentation device schematic diagram.Optical instrumentation device shown in Fig. 5 is also confocal measuring device 110, except
The structure of the reading machine (reading part) 27 of the storage part 41 of individual information of storage head 10 and storage part 41 optically
In addition, other all identical with the structure of confocal measuring device 100 shown in Fig. 1, identical is marked to identical structural element
Reference, does not repeat to describe in detail.
Storage part 41 is the two-dimensional bar of the individual information of head 10 storing wavelength-distance correction coefficient etc..Interior
Put the reading machine 27 in control unit 20, be barcode reader for being read out to the two-dimensional bar of storage part 41 or
Photographing unit.As shown in Figure 5, confocal measuring device 110 will describe the label of the two-dimensional bar of storage part 41, with company
The optical fiber 11 being connected to head 10 is tied.Therefore, head 10 is being arranged on control unit 20 confocal measuring device 110
When, read the two-dimensional bar described in label by control unit 20 using reading machine 27 and be stored in storage such that it is able to read
Wavelength in portion 41-distance correction coefficient.
Additionally, storage part 41 is not limited in two-dimensional bar, as long as machine 27 reading can be read optically
Information, then can also be one-dimensional bar code, sum etc..And then, storage part 41 can also be to store head 10 optically
Individual information CD (CD-ROM, DVD-ROM etc.).Additionally, in the case that storage part 41 is CD, reading machine 27 be from
The driving means of the individual information of disc reading head 10.
In addition, for associating between head 10 and storage part 40, being not limited in describe storage part with tie
41 two-dimensional bar label is tied it is also possible to the two dimension of storage part 41 will be described with being connected to the optical fiber 11 of head 10
The strip of paper used for sealing of bar code is attached on head 10.
And then, storage part 41 can also be magnetically to store the magnetic card of individual information, disk of head 10 etc..This
Outward, in the case that storage part 41 is magnetic card or disk, reading machine 27 is the individual information from magnetic card or disk read head 10
Reader or driving means.Storage part 41 can also be by any two mode in the mode of electrical, optics and magnetic
Combination is come the storage medium being stored.For example, storage part 41 can be combined with optical mode and magnetic means photomagneto disk,
It is combined with magnetoimpedance memorizer of electrical mode and magnetic means etc..
Fig. 6 is the schematic diagram of the other structures of optical instrumentation device of second embodiment of the present invention.Light shown in Fig. 6
Learn measuring device be also confocal measuring device 120, in addition to the structure of the reading machine 28 of storage part 41, other structures all with
The structure of confocal measuring device 110 shown in Fig. 5 is identical, therefore, marks identical reference to identical structural element,
Do not repeat to describe in detail.
Reading machine 28 is located at the outside of control unit 20, is connected with control unit 20 via electric wire.Specifically, in storage part 41
In the case of being the two-dimensional bar of the individual information of head 10 storing wavelength-distance correction coefficient etc., reading machine 28 is
Barcode reader, it is connected with control unit 20 by distribution, for reading the two-dimensional bar of storage part 41.In common focimeter
Survey in device 120, keeping off control unit 20 with being connected to the label (storage part 41) that the optical fiber 11 of head 10 is tied
It becomes possible to the two-dimensional bar described in label is read by reading machine 28 under state, thus read being stored in storage part 41
Wavelength-distance correction coefficient.
In addition, in confocal measuring device 120, even if the storage part 41 being associated with head 10 is stored by different way
Individual information is it is also possible to by connecting reading machine 28 corresponding with mode to control unit 20, to read and to be stored in storage part 41
In wavelength-distance correction coefficient.
As described above, in the confocal measuring device 110,120 of second embodiment of the present invention, in storage part 41
In optically or magnetic means store head 10 individual information, using corresponding reading machine 27 read head 10
Body information, therefore, even if change head 10 measure it is also possible to carry out high accuracy.In addition, in confocal measuring device 120, reading
Machine 28 is taken to be located at the outside of control unit 20 such that it is able to increase the setting position of storage part 41 and the degree of freedom of storage mode.
Additionally, confocal measuring device 120, for the individuality letter of the head 10 electrically storing as shown in Figure 1
The storage part 40 of breath is it is also possible to read, by the reading machine 28 being located at outside control unit 20, the head being stored in storage part 40
10 individual information.
(the 3rd embodiment)
In the optical instrumentation device of third embodiment of the present invention, control unit by physical property independence beam splitter portion and
Signal processing part is constituted.Fig. 7 is the schematic diagram of the structure of optical instrumentation device of third embodiment of the present invention.Shown in Fig. 7
Optical instrumentation device be also confocal measuring device 130, except having by the beam splitter portion 71 of physical property independence and signal
Outside the control unit 20 that reason portion 72 is constituted, other all structures are identical with the structure of confocal measuring device 100 shown in Fig. 1, because
This, mark identical reference to identical structural element, does not repeat to describe in detail.
Control unit 20 has beam splitter portion 71, signal processing part 72, carries out electricity to beam splitter portion 71 with signal processing part 72
The distribution 73 connecting.Beam splitter portion 71 has White LED 21 as white light source, branch optical fiber 22, beam splitter 23, shooting unit
Part 24, the light splitting control circuit portion 25a in control circuit portion 25.Signal processing part 72 has the signal processing electricity in control circuit portion 25
Road portion 25b, input interface 25c, output interface 25d.Additionally, although not shown, but confocal measuring device 130 is via signal processing
The output interface 25d in portion 72 and be connected with monitoring unit 30.
Distribution 73 supplies the signal exporting from the imaging apparatuss 24 in beam splitter portion 71 to signal processing part 72, and, joins
Line 73 is for supplying the circuit of required electric power from signal processing part 72 to beam splitter portion 71.
In confocal measuring device 130, control unit 20 is divided into beam splitter portion 71 and signal processing part 72 such that it is able to
Connect multiple beam splitter portions 71 for a signal processing part 72, make device integral miniaturization.
In addition, in confocal measuring device 130, as illustrated in the first embodiment, using control unit 20
Signal processing part 72 reading the wavelength-distance correction coefficient being stored in storage part 40, in signal processing circuit portion 25b
Carry out predetermined computing using the wavelength being read-distance correction coefficient such that it is able to consider installed head 10
On the premise of the individual variation of optical system, the accurately displacement to measurement object thing 200 measures.Additionally, confocal point
Measuring device 130, in the case of connecting multiple beam splitter portions 71, is arranged in correspondence with signal with the beam splitter portion 71 being connected
Reason circuit portion 25b, will be stored in the wavelength in storage part 40-distance correction coefficient respectively and reads respective signal processing circuit
In portion 25b.Certainly, it is also possible to repair reading the wavelength-distance being stored in storage part 40 in confocal measuring device 130
The read functions of positive coefficient are located in beam splitter portion 71, and are not located in signal processing part 72.
And then, confocal measuring device 130 can as shown in Figure 7, and in signal processing part 72, setting representative value is protected
Deposit portion 75.Representative value storage unit 75 stores representative value, and this representative value refers to, cannot be from the individuality of storage part 40 read head 10
During information, can be used in the information needed (representative value (default value) of head 10) of computing.
Here, the representative value of head 10, it is obtained by individual variation to the optical system of head 10 is equalized
Value, such as the information (for example, wavelength-distance correction coefficient) as the head 10 of representative value although cannot be used for carries out high-precision
The displacement of the measurement object thing 200 of degree measures, but can be used in carrying out temporary measurement.
In confocal measuring device 130, by arrange representative value storage unit 75, thus with depositing that head 10 is associated
In the case that storage portion 40 loses, or in the case that the device for reading information from storage part 40 damages etc., even if cannot
From the individual information of storage part 40 read head 10, although also can carry out measuring the not high easy measurement object thing of precision
200 displacement measures.
In addition, in confocal measuring device 130, by arranging representative value storage unit 75, carrying out in not precision prescribed
During simple confirmation, or the work that the individual information from storage part 40 read head 10 when emergency processing uses, can be omitted.Tool
For body, not precision prescribed and situation about simply being confirmed or situation about using in emergency processing include：Peddle advertising campaign,
Simple confirming operation when simple confirming operation when easy test, importing, setting, maintenance, head 10 are changed etc..
Additionally, representative value storage unit 75 is not limited in the situation of setting in confocal measuring device 130 shown in Fig. 7,
Can also be arranged on shown in confocal measuring device 110 shown in confocal measuring device 100, Fig. 5 and the Fig. 6 shown in Fig. 1
Confocal measuring device 120 in.
As described above, confocal measuring device 130 of third embodiment of the present invention, control unit 20 is divided into light splitting
Device portion 71 and signal processing part 72, such that it is able to increase the degree of freedom of apparatus structure, make device integral miniaturization.In addition, at this
In the confocal measuring device 130 of the 3rd embodiment of invention, by arranging representative value storage unit 75, cannot be from storage part
It is also possible to the displacement simply carrying out measurement object thing 200 measures during the individual information of 40 read head 10.
Embodiment of disclosure be all illustration and unrestricted.The scope of the present invention does not simultaneously lie in above-mentioned, but by weighing
Sharp claim illustrates, including meaning of equal value with claims and the whole changes in the range of this.
The explanation of reference
1 diffraction lenss, 2 object lens, 3 collecting lenses, 10 heads, 11,22a, 22b, 22c optical fiber, 12 connector portions, 13,40a
Terminal, 20 control units, 22 branch optical fibers, 23 beam splitters, 23a concave mirror, 23b diffraction lattice, 24 imaging apparatuss, 25 control circuits
Portion, 25a light splitting control circuit portion, 25b signal processing circuit portion, 25c1,25c2 input terminal, 25c input interface, 25d exports
Interface, 27,28 reading machines, 30 monitoring units, 40,41 storage parts, 71 beam splitter portions, 72 signal processing parts, 73 distributions, 75 representative values
Storage unit, 100,110,120,130 confocal measuring devices, 200 measurement object things.
Claims (5)
1. a kind of optical instrumentation device, is measured it is characterised in that having to measurement object thing using light：
Head (10), it includes optical system, and this optical system accepts the light from described measurement object thing,
Control unit (20), it includes the optical unit of physical property independence and signal processing unit, and this optical unit will be by described head
The light that portion (10) accepts is converted to the signal of telecommunication, described signal processing unit, to the described telecommunications come by the conversion of described optical unit
Number enter row operation, output measures result,
Optical fiber (11), it connects described head (10) and described control unit (20), becomes the described optics to described head (10)
The light path that the described optical unit of system and described control unit (20) is attached,
Storage part (40,41), it is associated with each body phase of manufactured described head (10) respectively, and storage is by described control unit
(20) carry out the information needed for described computing, be used as the individual information of described head (10)；
Described control unit (20), from respect to described control unit (20) physically self-existent described storage part (40,
41) read described individual information in, carry out described computing using the described individual information being read；
It is provided with representative value storage unit (75) in described signal processing unit, be stored with described representative value storage unit (75) described
The representative value of individual information, described representative value is that the individual variation to the optical system of described head (10) averages and obtains
Value, cannot from described storage part (40,41) read described individual information in the case of, described signal processing unit utilizes institute
State representative value to carry out described computing as described individual information.
2. optical instrumentation device as claimed in claim 1 it is characterised in that
Described storage part (40,41), has the storage medium electrically storing described individual information, by with described control
The input terminal (25c2) in portion (20) is connected, and can read described individual information from described storage medium.
3. optical instrumentation device as claimed in claim 1 it is characterised in that
Described storage part (40,41), has the storage medium storing described individual information in magnetical or optical mode, using described
Control unit (20) is built-in or the reading part that connected, reads described individual information from described storage medium.
4. optical instrumentation device as claimed in claim 2 or claim 3 it is characterised in that
Described storage part (40,41), is tied with described head (10), or the described light being connected with described head (10)
Fine (11) are tied.
5. optical instrumentation device as claimed in claim 2 it is characterised in that
Described storage part (40,41), is built in the connector portion of described optical fiber (11) being connected with described control unit (20), leads to
Cross for connecting described connector portion to the operation of described control unit (20), described storage part can be connected to described control
The described input terminal (25c2) in portion (20).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011207412A JP5870576B2 (en) | 2011-09-22 | 2011-09-22 | Optical measuring device |
| JP2011-207412 | 2011-09-22 | ||
| PCT/JP2012/073320 WO2013042594A1 (en) | 2011-09-22 | 2012-09-12 | Optical measurement device |
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| Publication Number | Publication Date |
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| CN103988046A CN103988046A (en) | 2014-08-13 |
| CN103988046B true CN103988046B (en) | 2017-03-08 |
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| CN201280057337.5A Active CN103988046B (en) | 2011-09-22 | 2012-09-12 | Optical instrumentation device |
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| JP (1) | JP5870576B2 (en) |
| CN (1) | CN103988046B (en) |
| TW (1) | TWI463106B (en) |
| WO (1) | WO2013042594A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6737018B2 (en) | 2016-07-08 | 2020-08-05 | オムロン株式会社 | Optical measuring device |
| US10120196B2 (en) * | 2016-09-30 | 2018-11-06 | National Taiwan University Of Science And Technology | Optical device |
| JP6762221B2 (en) * | 2016-12-19 | 2020-09-30 | 大塚電子株式会社 | Optical characteristic measuring device and optical characteristic measuring method |
| JP6834623B2 (en) * | 2017-03-13 | 2021-02-24 | オムロン株式会社 | Optical measuring device and adapter for optical measuring device |
| JP6819376B2 (en) * | 2017-03-14 | 2021-01-27 | オムロン株式会社 | Displacement measuring device |
| JP7408265B2 (en) * | 2017-06-13 | 2024-01-05 | 株式会社キーエンス | confocal displacement meter |
| JP6939360B2 (en) * | 2017-10-02 | 2021-09-22 | オムロン株式会社 | Confocal measuring device |
| DE102018130901A1 (en) * | 2018-12-04 | 2020-06-04 | Precitec Optronik Gmbh | Optical measuring device |
| JP7296239B2 (en) * | 2019-04-10 | 2023-06-22 | オムロン株式会社 | Optical measurement device, optical measurement method, and optical measurement program |
| JP2021047213A (en) * | 2020-12-25 | 2021-03-25 | オムロン株式会社 | Displacement measurement device |
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| US4585349A (en) * | 1983-09-12 | 1986-04-29 | Battelle Memorial Institute | Method of and apparatus for determining the position of a device relative to a reference |
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Also Published As
| Publication number | Publication date |
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| TWI463106B (en) | 2014-12-01 |
| JP2013068523A (en) | 2013-04-18 |
| JP5870576B2 (en) | 2016-03-01 |
| WO2013042594A1 (en) | 2013-03-28 |
| TW201326734A (en) | 2013-07-01 |
| CN103988046A (en) | 2014-08-13 |
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