CN103988046A - Optical measurement device - Google Patents
Optical measurement device Download PDFInfo
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- CN103988046A CN103988046A CN201280057337.5A CN201280057337A CN103988046A CN 103988046 A CN103988046 A CN 103988046A CN 201280057337 A CN201280057337 A CN 201280057337A CN 103988046 A CN103988046 A CN 103988046A
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- Prior art keywords
- head
- optical
- control part
- instrumentation
- storage part
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
Abstract
With an optical measurement device according to the present invention, a measurement is carried out on an object to be measured (200) using light, said optical measurement device comprising a head unit (10), a controller unit (20), an optical fiber (11), and a storage unit (40). In the optical measurement device according to the present invention, the head unit (10) and the controller unit (20) are connected with the optical fiber (11). The storage unit (40) stores information which is related to specific manufactured head units (10) and which is necessary to an operation which is carried out with the controller unit as specific information of the respective head units (10). The controller unit (20) reads out the specific information from the storage unit (40, 41) which is physically independent from the controller unit (20), and carries out the operation using the read-out specific information.
Description
Technical field
The present invention relates to utilize light instrumentation object to be carried out to the optical instrumentation device of instrumentation, particularly comprise and make the optical instrumentation device of head (shaven head) acceptance from the optical system of the light of instrumentation object.
Background technology
In recent years, developing light instrumentation object carried out the optical instrumentation device of instrumentation.For example, as the optical instrumentation device that with cordless, the displacement of instrumentation object is carried out instrumentation, developing common focus optical system the displacement of instrumentation object carried out confocal some measuring device of instrumentation.Confocal some measuring device, specifically disclosed by No. 4585349 instructions of United States Patent (USP) (patent documentation 1).The disclosed confocal some measuring device of patent documentation 1 has aberration lens, and these aberration lens make the light of light source (for example white light source) outgoing from the light for the multiple wavelength of outgoing, produce aberration along optical axis.In the disclosed confocal some measuring device of patent documentation 1, because the displacement difference of instrumentation object causes the light wavelength difference from the aberration lens of focus, therefore the light wavelength of having passed through pin hole (pin hole) changes, the light wavelength of having passed through pin hole is measured, measured the displacement of instrumentation object.
In addition, in the disclosed confocal some measuring device of No. 5785651 instructions of United States Patent (USP) (patent documentation 2), replace aberration lens and use diffraction lens, make to produce aberration from the light of light source outgoing along optical axis.In addition,, in the disclosed confocal some measuring device of patent documentation 2, the light path from light source to collimation lens and the light path from collimation lens to optical splitter are used to optical fiber.
Prior art document
Patent documentation
Patent documentation 1: No. 4585349 instructions of United States Patent (USP)
Patent documentation 2: No. 5785651 instructions of United States Patent (USP)
Summary of the invention
The problem that invention will solve
The optical instrumentation device that patent documentation 2 is such, connect head and control part (controller) with optical fiber, this head comprises the optical system of collimation lens etc., this control part comprises the optical unit of optical splitter etc., in such optical instrumentation device, the individual difference of the optical system of head is large, in order to carry out high precision instrumentation, need to adjust one to one head and control part.Therefore, in the time that head is damaged, in the such optical instrumentation device of patent documentation 2, is not only and repaiies head, control part also will be posted to manufacturing firm supportingly and reprocess, and need to carry out man-to-man adjustment to head and control part after repairing.
And then, in the such optical instrumentation device of patent documentation 2, because needs carry out man-to-man adjustment to head and control part, therefore in the situation that thering is multiple optical instrumentation device, can not only change head and the layout of modifier, but need to make head and control part move integratedly.Therefore, in the such optical instrumentation device of patent documentation 2, there are the following problems: when layout at modifier, and compared with only changing the situation of the layout that carrys out modifier of head, more take time and energy (requiring great effort time-consuming).
In addition, developing such optical instrumentation device: the information (such as correction factor etc.) of head and control part having been carried out adjust is stored in the storage part of head, in the time connecting head and control part, from storage part reading information.In this optical instrumentation device, pre-stored head is carried out to the information of adjusting, therefore, needn't make head corresponding one to one with control part, in the time that head is damaged, can only head be posted to manufacturing firm and reprocess, and, also can only change head and come the layout of modifier.
But, in this optical instrumentation device, the circuit part including storage part need to be set in head, therefore can cause head to maximize.And then, owing to reading the information the storage part that is stored in head from control part, therefore between head and control part, except connecting optical fiber, also needing to connect electric wire.
Given this present invention makes just, and object is to provide a kind of optical instrumentation device, under the prerequisite that does not make head maximize, can have with respect to control part and change the such interchangeability of head.
For the means of dealing with problems
Optical instrumentation device of the present invention has head, control part, optical fiber, storage part.Head comprises the optical system of accepting from the light of instrumentation object.Control part comprises optical unit, and the light of being accepted by head is converted to electric signal by this optical unit, and control part carries out computing to changed the electric signal coming by optical unit, output instrumentation result.Fiber connector portion and control part, become the light path that the optical system of head is connected with the optical unit of control part.Storage part is associated with each individuality of the head of manufacturing respectively, and storage is carried out the required information of computing by control part, is used as the individual information of head.Control part, from reading individual information with respect to control part and self-existent physically storage part, utilizes the individual information reading to carry out computing.
In addition, preferably, storage part has the storage medium of storing individual information in electrical mode, by being connected with the input terminal of control part, and can be from storage medium reading individual information.
In addition, preferably, storage part has the storage medium with magnetic or optical mode storage individual information, utilizes the reading part that control part is built-in or connect, from storage medium reading individual information.
In addition, preferably, storage part and head are tied, or together with the optical fiber connecting with head.
In addition, preferably, storage part is built in the connector portion of the optical fiber being connected with control part, by the operation for connector portion being connected to control part, storage part can be connected to the input terminal of control part.
In addition, preferably, control part stores customizing messages, and cannot be from storage part reading individual information in the situation that, this customizing messages can be served as the required information of computing and be used.
The effect of invention
Pass through said structure, optical instrumentation device of the present invention, the storage part of individual information of head will have been stored, for each individuality of the head of manufacturing, incidence relation is set respectively, control part is from the individual information of storage part read head, utilize this individual information to carry out computing, therefore, also can carry out high precision instrumentation even if change head.
Brief description of the drawings
Fig. 1 is the schematic diagram that represents the structure of the optical instrumentation device of the first embodiment of the present invention.
Fig. 2 is the schematic diagram that is illustrated in the structure of the common focus optical system of the head adopting in confocal some measuring device of the first embodiment of the present invention.
Fig. 3 is the schematic diagram describing for obtaining the adjustment of wavelength-distance correction coefficient in confocal some measuring device of the first embodiment of the present invention.
Fig. 4 is the schematic diagram to making other structure that head is associated with storage part describe in confocal some measuring device of the first embodiment of the present invention.
Fig. 5 is the schematic diagram that represents the structure of the optical instrumentation device of the second embodiment of the present invention.
Fig. 6 is the schematic diagram that represents other structure of the optical instrumentation device of the second embodiment of the present invention.
Fig. 7 is the schematic diagram that represents the structure of the optical instrumentation device of the 3rd embodiment of the present invention.
Embodiment
Describe embodiments of the present invention in detail with reference to accompanying drawing below.
(the first embodiment)
Fig. 1 is the schematic diagram that represents the structure of the optical instrumentation device of the first embodiment of the present invention.Optical instrumentation device shown in Fig. 1 is to utilize displacement to instrumentation object 200 of focus optical system altogether (and variation of distance between instrumentation object 200) to carry out confocal some measuring device 100 of instrumentation.Carrying out with confocal some measuring device 100 in the instrumentation object 200 of instrumentation, for example, there is the liquid crystal layer gap (cell gap) of display panels etc.
Confocal some measuring device 100 has: head 10, and it has confocal optical system; Control part 20, via optical fiber 11, optics connects (each portion) for it; Monitoring unit 30, it shows the signal of exporting from control part 20; Storage part 40, it stores the individual information of head 10 described later.
Head 10 has diffraction lens 1 and object lens (to thing lens) 2, and compared with diffraction lens 1, object lens 2 are configured near instrumentation object 200 1 sides.It is poor that the focal length (being called for short focal length below) of diffraction lens 1 is greater than objective focal length, and described objective focal length is poor is poor between distance from diffraction lens to object lens and the focal length of object lens.
At this, diffraction lens 1 is such optical element: for example make, from the light of light source (, white light source) the institute outgoing of the light for the multiple wavelength of outgoing described later, produce aberration along optical axis direction.Diffraction lens 1, on the surface of lens, periodically be formed with for example trickle undulations of position phase diffractogram (kinoform) shape or two dimension (binary) shape (level shape, stairstepping) etc., or, be formed with the zone plate (zone plate) of the amplitude type that makes light transmission rate periodically-varied.In addition, the structure of diffraction lens 1 is not limited in the structure of above-mentioned record.
Object lens 2 are such optical elements: it converges on instrumentation object 200 light that has produced aberration by diffraction lens 1.In addition, in the following description, the light source of the light for the multiple wavelength of outgoing that confocal some measuring device 100 adopts is white light source.
From the light of white light source outgoing, be directed to head 10 via optical fiber 11.In order to make effectively to utilize diffraction lens 1 from the light of optical fiber 11 outgoing, need to make the numerical aperture (NA:numerical aperture) of optical fiber 11 consistent with the numerical aperture of diffraction lens 1.Therefore, between optical fiber 11 and diffraction lens 1, collector lens 3 is set, the numerical aperture of optical fiber 11 is adjusted into consistent with the numerical aperture of diffraction lens 1.
Optical fiber 11 is 10 to arrive the light paths of control part 20 from the head, and also brings into play the function of pin hole.That is, in the light of being assembled by object lens 2, focus only in the peristome focus of optical fiber 11 on instrumentation object 200.Therefore, optical fiber 11 is brought into play the function of such pin hole: the light to wavelength that can focus on instrumentation object 200 blocks, and the light that allows to focus on instrumentation object 200 passes through.For 10 using optical fiber 11 to the light paths of control part 20 from the head, therefore do not need (arranging in addition) pin hole.
In confocal some measuring device 100, for 10 having used optical fiber 11 to the light path of control part 20 from the head, therefore, can make head 10 move neatly with respect to control part 20.
Control part 20 has White LED (Light Emitting Diode: light emitting diode) 21, branch optical fiber 22, optical splitter 23, imaging apparatus 24, the control circuit portion 25 as white light source.Although use White LED 21 as white light source, also can use other light source, as long as light source that can outgoing white light.
Branch optical fiber 22, has an optical fiber 22a in the side being connected with optical fiber 11, has two optical fiber 22b, 22c in its contrary side.In addition, optical fiber 22b is connected to White LED 21, and optical fiber 22c is connected to optical splitter 23.Therefore, branch optical fiber 22 can will guide to optical fiber 11 from the light of White LED 21 outgoing, and, can be via optical fiber 11 10 light that return be from the head guided to optical splitter 23.
Optical splitter 23 has: concave mirror 23a, and it reflects 10 light that return from the head; Diffraction lattice 23b, the light that its incident is come by concave mirror 23a reflection; Collector lens 23c, it is to assembling from the light of diffraction lattice 23b outgoing.As long as optical splitter 23 can be distinguished (separation) 10 light that return from the head according to each wavelength, can use the optical splitter of the disposable type in monochromatic formula (Czerny-Turner type), Littrow formula (Littrow type) etc.
Imaging apparatus 24 is for to carry out setting-out line CMOS (Complementary Metal Oxide Semiconductor: complementary metal oxide semiconductor (CMOS)) and/or CCD (Charge Coupled Device: charge-coupled image sensor) from the light intensity of optical splitter 23 outgoing.At this, in confocal some measuring device 100, form determination part by optical splitter 23 and imaging apparatus 24, this determination part is measured 10 light intensities that return from the head according to each wavelength.In addition, as long as determination part can be measured 10 light intensities that return from the head according to each wavelength, can be formed by the monomer of the imaging apparatus 24 of CCD etc..In addition, imaging apparatus 24 can be also two-dimentional CMOS and/or the CCD of two dimension.
Control circuit portion 25 has: point 25a of light control circuit portion, and it controls the action of White LED 21, imaging apparatus 24 etc.; The 25b of signal processing circuit portion, it is processed the signal of exporting from imaging apparatus 24.And then control circuit portion 25 has: input interface 25c, it is for inputting the individual information of adjusting signal, head described later 10, and this adjustment signal is the signal for the action of white LED21, imaging apparatus 24 etc. is adjusted; Output interface 25d, it is electrically connected with monitoring unit 30, for exporting, the signal of imaging apparatus 24 is carried out to result after treatment.
In addition, in control part 20, form optical unit by point 25a of light control circuit portion of optical splitter 23, imaging apparatus 24 and control circuit portion 25, the light of being accepted by head 10 is converted to electric signal by this optical unit.The 25b of signal processing circuit portion of control circuit portion 25 carries out computing for changed the electric signal coming by optical unit, output instrumentation result.
Monitoring unit 30 shows the signal of being exported by imaging apparatus 24.Monitoring unit 30 is drawn out the spectral waveform of 10 light that return from the head, and the distance of for example showing instrumentation object 200 is 123.45 μ m.
In storage part 40, respectively one by one should associated ground with the individual relative of the head 10 of manufacturing, storage is used for carrying out at control part 20 information of the required head of computing 10, is used as individual information.At this, in the case of the confocal some measuring device 100 for the displacement of instrumentation object 200 being carried out to instrumentation, the individual information of head 10 is wavelength-distance correction coefficients described later.
Then the individual information that, head 10 is described is wavelength-distance correction coefficient.Fig. 2 is the schematic diagram that is illustrated in the structure of the common focus optical system of the head 10 adopting in confocal some measuring device 100 of the first embodiment of the present invention.The structure of the common focus optical system shown in Fig. 2, is compared with diffraction lens 1, and object lens 2 are configured in the structure of instrumentation object 200 1 sides.That is, in confocal some measuring device 100, make to produce aberration from the light of the end outgoing of optical fiber 11 along optical axis direction by diffraction lens 1, the light that has made to produce aberration by object lens 2 converges on instrumentation object 200.
First, in the optical system of confocal some measuring device 100 shown in Fig. 2, by the end from optical fiber 11 till the distance of diffraction lens 1 is made as a, by from diffraction lens 1 till the distance of object lens 2 is made as b, by from object lens 2 till be made as c (λ) by the distance of the point of object lens 2 focuss.And then, with regard to diffraction lens 1, be λ by light wavelength
0time focal length be made as f
d0, effective diameter (effective diameter) is made as
in addition make apart from a and focal distance f,
d0equate.With regard to object lens 2, focal length is made as to f
o, effective diameter (effective diameter) is made as
And, in the optical system of confocal some measuring device 100 shown in Fig. 2, utilize the formula of general lens, can according to (formula 1) show like that from the end of optical fiber 11 till the distance a of diffraction lens 1, from diffraction lens 1 till diffracted lens 1 by the distance a of the point of the emergent light focus from optical fiber 11
g(λ) relation between the focal distance f d (λ) of (not shown) diffraction lens 1, and from diffraction lens 1 till the distance b of object lens 2, from object lens 2 till by the distance c (λ) of the point of object lens 2 focuss, the focal distance f of object lens 2
obetween relation.In addition, the aberration of object lens 2 can be ignored.
[mathematical expression 1]
And then, can utilize the relation of (formula 1), by the effective diameter of object lens 2
(λ) show as (formula 2) such.
[mathematical expression 2]
In addition, can utilize the relation of (formula 1) and (formula 2), by from object lens 2 till to be shown as (formula 3) by the distance c (λ) of the point of object lens 2 focuss such.
[mathematical expression 3]
In logic, although can show from object lens 2 till by the relation the distance c (λ) of the point of object lens 2 focuss and wavelength with (formula 3), but the individual difference of the optical system of head 10 is large, in order to carry out high precision instrumentation, need to adjust to make head 10 corresponding one to one with control part 20.By the wavelength-distance correction coefficient obtaining by this adjustment, as the individual information of head 10 and be stored in storage part 40, by storage part 40 and the optical fiber 11 that is connected to head 10 are tied (being associated), in confocal some measuring device 100, even if change the head 10 being tied with storage part 40, also can utilize the individual information of head 10 to carry out high precision instrumentation.
At this, utilize accompanying drawing that the adjustment of carrying out for obtaining wavelength-distance correction coefficient is described.Fig. 3 is the schematic diagram for the adjustment of carrying out in order to obtain wavelength-distance correction coefficient at confocal some measuring device 100 of the first embodiment of the present invention is described.
First, confocal some measuring device 100 is as shown in Fig. 3 (a), make to be arranged on instrumentation object 200 on automatic carrier (not shown) move to can the scope of instrumentation in, read peak wavelength according to the instrumentation waveform corresponding with each distance.Each distance is such with respect to the curve map that can show as Fig. 3 (b) according to the relation of the peak wavelength of instrumentation waveform display, and the relational expression that can calculate between distance c (λ) and wavelength X is c (λ)=α λ
n+ β λ
n-1+.At this, α and β are wavelength-distance correction coefficients, by this wavelength-distance correction coefficient storage in storage part 40.
With regard to storage part 40, though not shown, have as the flash memories of nonvolatile memory, for the control circuit to this flash memories storage information and reading information, for the interface of input/output information.And, storage part 40 makes interface be connected to the input interface 25c (for example between connector chimeric) of control part 20, can will store in flash memories in electrical mode by the information of adjusting the wavelength-distance correction coefficient getting, or from flash memories, read this information.
Confocal some measuring device 100, be associated with head 10 by the storage part 40 that makes the information of having stored wavelength-distance correction coefficient, thereby in the time that head 10 has been installed, control part 20 can read wavelength-distance correction coefficient from the storage part 40 being associated with installed head 10.In confocal some measuring device 100, the 25b of signal processing circuit portion utilizes the wavelength-distance correction coefficient reading to carry out predetermined computing, thereby can, under the prerequisite of individual difference of optical system of considering installed head 10, carry out instrumentation to the displacement of instrumentation object 200 accurately.
In addition, as long as storage part 40 can be stored wavelength-distance correction coefficient electrically, adopted nonvolatile memory is not limited.In addition, be also not limited to control part 20 and be directly connected to read wavelength-distance correction coefficient via connector with storage part 40, thereby for example also can be connected with storage part 40 and read wavelength-distance correction coefficient in non-contacting mode by electric wave.
And then, in confocal some measuring device 100 shown in Fig. 1, the optical fiber 11 that is connected to head 10 is tied with storage part 40 with tie, thereby head 10 is associated with storage part 40, but confocal some measuring device 100 of the present invention is not limited only to this.For example, can the optical fiber 11 that be connected to head 10 be tied with storage part 40 without tie, and directly head 10 and storage part 40 be tied with tie, thereby head 10 is associated with storage part 40.
In addition, Fig. 4 is the schematic diagram that makes other structure that head 10 is associated with storage part 40 at confocal some measuring device 100 of the first embodiment of the present invention for illustrating.As shown in Figure 4, in the optical fiber 11 that is connected to head 10, at the built-in storage part 40 of the connector portion 12 for being connected with control part 20, in this connector portion 12, with the terminal 13 of optical fiber 11, the terminal 40a of storage part 40 is set abreast.In the input interface 25c of control part 20, be provided with the input terminal 25c1 of terminal 13 tablings of optical fiber 11 and with the input terminal 25c2 of the terminal 40a tabling of storage part 40.Therefore,, by the connector portion 12 of optical fiber 11 being inserted to the input interface 25c of control part 20, can, when head 10 is connected with control part 20 optics, storage part 40 be electrically connected with control part 20.Thus, in confocal some measuring device 100 shown in Fig. 4, user needn't deliberately operate the wavelength-distance correction coefficient being stored in storage part 40 is read to control part 20, just can securement head 10.
And then, with regard to associated between head 10 and storage part 40, needn't leave no choice but with physics mode, head 10 and storage part 40 are tied, and as long as the numbering identical with the serial numbering that is attached to head 10 is attached on storage part 40.
As described above, in confocal some measuring device 100 of the first embodiment of the present invention, the storage part 40 of wavelength-distance correction coefficient will have been stored, associated respectively with the individuality of each head 10 of manufacturing, control part 20 reads wavelength-distance correction coefficient from storage part 40, utilizes this wavelength-distance correction coefficient to carry out computing, therefore, even if changed head 10, also can carry out high precision instrumentation.In addition, in confocal some measuring device 100 of the first embodiment of the present invention, owing to thering is interchangeability, that is, can change head 10 with respect to control part 20, therefore, in the time that head 10 is damaged, can only head 10 be delivered to manufacturing firm and reprocess.And then, in the situation that thering is multiple confocal some measuring device 100, can only change head 10 and come the layout of change device.In addition, in confocal some measuring device 100 of the first embodiment of the present invention, not in head 10, be provided for storing the storage part of wavelength-distance correction coefficient, therefore can make head 10 miniaturizations.
At this, the individual information that is stored in the head 10 in storage part 40 is not limited in wavelength-distance correction coefficient, can also comprise: the device related information of the serial numbering of device, model, machine etc., the having or not of the having or not of instrumentation centre distance, scope that can instrumentation, the associative mode distinguished by work, sensitivity adjustment modes, the software related information etc. of instrumentation related information, the version information etc. of fader control coefficient etc. automatically.
In addition, in the optical instrumentation device of the first embodiment of the present invention, illustrated and utilized common focus optical system the displacement of instrumentation object 200 to be carried out to confocal some measuring device 100 of instrumentation, but the present invention is not limited to this.Optical instrumentation device of the present invention, as long as connect the structure of the optical system of head and the optical unit of control part with optical fiber, also go for that the thickness of instrumentation object is carried out to the film thickness gauge of instrumentation, the color to instrumentation object, wavelength and carry out the color sensor of instrumentation, the light quantity of instrumentation object carried out to photometer of instrumentation etc.
(the second embodiment)
In the optical instrumentation device of the second embodiment of the present invention, storage part electrically mode is stored the individual information of head, but enters storage by optics or magnetic means, the following describes this structure.Fig. 5 is the schematic diagram of the structure of the optical instrumentation device of the second embodiment of the present invention.Optical instrumentation device shown in Fig. 5 is also confocal some measuring device 110, except the structure of the storage part 41 of the individual information with optical mode storage head 10 and the reading machine (reading part) 27 of storage part 41, other is all identical with the structure of confocal some measuring device 100 shown in Fig. 1, identical textural element is marked to identical Reference numeral, do not repeat to describe in detail.
Storage part 41 is two-dimensional bars of having stored the individual information of the head 10 of wavelength-distance correction coefficient etc.Being built in the reading machine 27 in control part 20, is barcode reader or camera for the two-dimensional bar of storage part 41 is read.As shown in Figure 5, confocal some measuring device 110, by having recorded the label of two-dimensional bar of storage part 41, is tied with the optical fiber 11 that is connected to head 10.Therefore, confocal some measuring device 110, in the time that head 10 is arranged on control part 20, utilizes reading machine 27 to carry out the two-dimensional bar that reading tag is recorded by control part 20, thereby can read the wavelength-distance correction coefficient being stored in storage part 41.
In addition, storage part 41 is not limited in two-dimensional bar, as long as can be read the information that machine 27 reads with optical mode, can be also one-dimensional bar code, sum etc.And then storage part 41 can be also with the CD of the individual information of optical mode storage head 10 (CD-ROM, DVD-ROM etc.).In addition,, in the situation that storage part 41 is CD, reading machine 27 is the drive units from the individual information of disc reading head 10.
In addition, with regard to associated between head 10 and storage part 40, be not limited in and the two-dimensional bar label of having recorded storage part 41 and the optical fiber 11 that is connected to head 10 be tied with tie, also the strip of paper used for sealing of the two-dimensional bar of having recorded storage part 41 can be attached on head 10.
And then storage part 41 can be also magnetic card, the disk etc. with the individual information of magnetic means storage head 10.In addition,, in the situation that storage part 41 is magnetic card or disk, reading machine 27 is reader or the drive units from the individual information of magnetic card or disk read head 10.Storage part 41 can be also by any two storage mediums that mode combines to store in the mode of electrical, optics and magnetic.For example, storage part 41 can be photomagneto disk, the magnetoimpedance storer that has combined electrical mode and magnetic means etc. that has combined optical mode and magnetic means.
Fig. 6 is the schematic diagram of other structure of the optical instrumentation device of the second embodiment of the present invention.Optical instrumentation device shown in Fig. 6 is also confocal some measuring device 120, except the structure of the reading machine 28 of storage part 41, other structure is all identical with the structure of confocal some measuring device 110 shown in Fig. 5, therefore, identical textural element is marked to identical Reference numeral, do not repeat to describe in detail.
Reading machine 28 is located at the outside of control part 20, is connected with control part 20 via electric wire.Particularly, to have stored the two-dimensional bar of individual information of the head 10 of wavelength-distance correction coefficient etc. at storage part 41, reading machine 28 is barcode readers, and it is connected with control part 20 by distribution, for reading the two-dimensional bar of storage part 41.In confocal some measuring device 120, keep off under the state of control part 20 at the label (storage part 41) being tied with the optical fiber 11 that is connected to head 10, the two-dimensional bar that just can record by reading machine 28 reading tag, thus read the wavelength-distance correction coefficient being stored in storage part 41.
In addition, in confocal some measuring device 120, even if the storage part 41 being associated with head 10 is stored individual information by different way, also can be by the reading machine corresponding with mode 28 being connected to control part 20, reading the wavelength-distance correction coefficient being stored in storage part 41.
As described above, in the confocal some measuring device 110,120 of the second embodiment of the present invention, in storage part 41 with the individual information of optical mode or magnetic means storage head 10, utilize the individual information of corresponding reading machine 27 read head 10, therefore, even if change head 10, also can carry out high precision instrumentation.In addition, in confocal some measuring device 120, reading machine 28 is located at the outside of control part 20, thereby can increase, the position of storage part 41 and the degree of freedom of storage mode is set.
In addition, confocal some measuring device 120, for the storage part 40 of storing the individual information of head 10 as shown in Figure 1 in electrical mode, also can read by being located at the reading machine 28 of control part 20 outsides the individual information of the head 10 being stored in storage part 40.
(the 3rd embodiment)
In the optical instrumentation device of the 3rd embodiment of the present invention, by physical property, independently optical splitter portion and signal processing part form control part.Fig. 7 is the schematic diagram of the structure of the optical instrumentation device of the 3rd embodiment of the present invention.Optical instrumentation device shown in Fig. 7 is also confocal some measuring device 130, except having by the physical property control part 20 that independently optical splitter portion 71 and signal processing part 72 form, all structure is identical with the structure of confocal some measuring device 100 shown in Fig. 1 for other, therefore, identical textural element is marked to identical Reference numeral, do not repeat to describe in detail.
The distribution 73 that control part 20 has optical splitter portion 71, signal processing part 72, optical splitter portion 71 is electrically connected with signal processing part 72.Optical splitter portion 71 has point 25a of light control circuit portion as the White LED 21 of white light source, branch optical fiber 22, optical splitter 23, imaging apparatus 24, control circuit portion 25.Signal processing part 72 has the 25b of signal processing circuit portion, input interface 25c, the output interface 25d of control circuit portion 25.In addition,, though not shown, confocal some measuring device 130 is connected with monitoring unit 30 via the output interface 25d of signal processing part 72.
The signal that distribution 73 is exported the imaging apparatus from optical splitter portion 71 24 is supplied to signal processing part 72, and distribution 73 is the circuits for supply with required electric power from signal processing part 72 to optical splitter portion 71.
In confocal some measuring device 130, control part 20 is divided into optical splitter portion 71 and signal processing part 72, thereby can connects for a signal processing part 72 multiple optical splitter portion 71, make device integral miniaturization.
In addition, in confocal some measuring device 130, as illustrated in the first embodiment, utilize the signal processing part 72 of control part 20 to read the wavelength-distance correction coefficient being stored in storage part 40, in the 25b of signal processing circuit portion, utilize read wavelength-distance correction coefficient to carry out predetermined computing, thereby can, under the prerequisite of individual difference of optical system of considering installed head 10, carry out instrumentation to the displacement of instrumentation object 200 accurately.In addition, confocal some measuring device 130 is in the situation that connecting multiple optical splitter portion 71, the 25b of signalization treatment circuit portion accordingly of optical splitter portion 71 be connected, reads the wavelength-distance correction coefficient being stored in storage part 40 in the 25b of signal processing circuit portion separately respectively.Certainly,, in confocal some measuring device 130, also the read functions that reads the wavelength-distance correction coefficient being stored in storage part 40 can be located in optical splitter portion 71, and not be located in signal processing part 72.
And then confocal some measuring device 130 can as shown in Figure 7, arrange typical value storage unit 75 in signal processing part 72.Typical value storage unit 75 is stored typical value, and this typical value refers to, cannot be from the individual information of storage part 40 read head 10 time, can be used in the information needed (typical value (default value) of head 10) of computing.
At this, the typical value of head 10, be the individual difference of the optical system to head 10 carried out equalization and value, for example as the information of the head 10 of typical value (for example, wavelength-distance correction coefficient), although can not be used for carrying out the displacement instrumentation of high-precision instrumentation object 200, can be used in and carry out temporary instrumentation.
In confocal some measuring device 130, by typical value storage unit 75 is set, thereby in the case of the storage part 40 being associated with head 10 is lost, or situation about damaging at the device for from storage part 40 reading informations is inferior, even cannot be from the individual information of storage part 40 read head 10, although also can carry out the displacement instrumentation of the not high easy instrumentation object 200 of instrumentation precision.
In addition, in confocal some measuring device 130, by typical value storage unit 75 is set, while carrying out simple and easy confirmation not requiring precision, or in the time that emergency processing is used, can omit from the work of the individual information of storage part 40 read head 10.Particularly, do not require precision and carry out the situation of simple and easy confirmation or situation about using in emergency processing comprises: peddle advertising campaign, simple and easy confirming operation, maintenance, head 10 when testing easily, import, the arranging simple and easy confirming operation while changing etc.
In addition, typical value storage unit 75 is not limited in confocal some measuring device 130 shown in Fig. 7 situation about arranging, and also can be arranged in confocal some measuring device 120 shown in confocal some measuring device 110 shown in confocal some measuring device 100 shown in Fig. 1, Fig. 5 and Fig. 6.
As described above, confocal some measuring device 130 of the 3rd embodiment of the present invention, is divided into optical splitter portion 71 and signal processing part 72 by control part 20, thereby can increase the degree of freedom of apparatus structure, makes device integral miniaturization.In addition, in confocal some measuring device 130 of the 3rd embodiment of the present invention, by typical value storage unit 75 is set, cannot be from the individual information of storage part 40 read head 10 time, also can carry out simply the displacement instrumentation of instrumentation object 200.
This disclosed embodiment be all illustrate and unrestricted.Scope of the present invention does not also lie in above-mentionedly, but is illustrated by claims, comprises and claims meaning of equal value and the whole changes within the scope of this.
The explanation of Reference numeral
1 diffraction lens, 2 object lens, 3 collector lenses, 10 heads, 11, 22a, 22b, 22c optical fiber, 12 connector portions, 13, 40a terminal, 20 control parts, 22 branch optical fibers, 23 optical splitters, 23a concave mirror, 23b diffraction lattice, 24 imaging apparatuss, 25 control circuit portions, 25a divides light control circuit portion, 25b signal processing circuit portion, 25c1, 25c2 input terminal, 25c input interface, 25d output interface, 27, 28 reading machines, 30 monitoring units, 40, 41 storage parts, 71 optical splitter portions, 72 signal processing parts, 73 distributions, 75 typical value storage units, 100, 110, 120, 130 confocal somes measuring devices, 200 instrumentation objects.
Claims (6)
1. an optical instrumentation device, utilizes light to carry out instrumentation to instrumentation object, it is characterized in that,
Have:
Head (10), it comprises optical system, this optical system is accepted the light from described instrumentation object,
Control part (20), it comprises optical unit, and the light of being accepted by described head (10) is converted to electric signal by this optical unit, and described control part carries out computing to the described electric signal being come by described optical unit conversion, output instrumentation result,
Optical fiber (11), it connects described head (10) and described control part (20), become the light path that the described optical system of described head (10) is connected with the described optical unit of described control part (20)
Storage part (40,41), it is associated with each individuality of the described head (10) of manufacturing respectively, storage is carried out the required information of described computing by described control part (20), is used as the individual information of described head (10);
Described control part (20), from reading described individual information self-existent physically described storage part (40,41) with respect to described control part (20), utilizes the described individual information reading to carry out described computing.
2. optical instrumentation device as claimed in claim 1, is characterized in that,
Described storage part (40,41), there is the storage medium of storing described individual information in electrical mode, by being connected with the input terminal (25c2) of described control part (20), can read described individual information from described storage medium.
3. optical instrumentation device as claimed in claim 1, is characterized in that,
Described storage part (40,41), has the storage medium of storing described individual information with magnetic or optical mode, utilizes the reading part that described control part (20) is built-in or connect, and reads described individual information from described storage medium.
4. optical instrumentation device as claimed in claim 2 or claim 3, is characterized in that,
Described storage part (40,41), is tied with described head (10), or the described optical fiber (11) being connected with described head (10) is tied.
5. optical instrumentation device as claimed in claim 2, is characterized in that,
Described storage part (40,41), be built in the connector portion of the described optical fiber (11) being connected with described control part (20), by the operation for described connector portion being connected to described control part (20), described storage part can be connected to the described input terminal (25c2) of described control part (20).
6. the optical instrumentation device as described in any one in claim 1～3, is characterized in that,
Described control part (20) stores customizing messages,
In the situation that cannot reading described individual information from described storage part (40,41), this customizing messages can be served as the required information of described computing and be used.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-207412 | 2011-09-22 | ||
| JP2011207412A JP5870576B2 (en) | 2011-09-22 | 2011-09-22 | Optical measuring device |
| PCT/JP2012/073320 WO2013042594A1 (en) | 2011-09-22 | 2012-09-12 | Optical measurement device |
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| CN103988046A true CN103988046A (en) | 2014-08-13 |
| CN103988046B CN103988046B (en) | 2017-03-08 |
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| JP (1) | JP5870576B2 (en) |
| CN (1) | CN103988046B (en) |
| TW (1) | TWI463106B (en) |
| WO (1) | WO2013042594A1 (en) |
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| CN108571926A (en) * | 2017-03-13 | 2018-09-25 | 欧姆龙株式会社 | Optical measuring device and optical measuring device adapter |
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| JP6762221B2 (en) * | 2016-12-19 | 2020-09-30 | 大塚電子株式会社 | Optical characteristic measuring device and optical characteristic measuring method |
| JP6819376B2 (en) * | 2017-03-14 | 2021-01-27 | オムロン株式会社 | Displacement measuring device |
| JP7408265B2 (en) * | 2017-06-13 | 2024-01-05 | 株式会社キーエンス | confocal displacement meter |
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| JP2013068523A (en) | 2013-04-18 |
| TW201326734A (en) | 2013-07-01 |
| TWI463106B (en) | 2014-12-01 |
| JP5870576B2 (en) | 2016-03-01 |
| CN103988046B (en) | 2017-03-08 |
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