CN103983199B - Optical displacement sensor - Google Patents
Optical displacement sensor Download PDFInfo
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- CN103983199B CN103983199B CN201410232853.8A CN201410232853A CN103983199B CN 103983199 B CN103983199 B CN 103983199B CN 201410232853 A CN201410232853 A CN 201410232853A CN 103983199 B CN103983199 B CN 103983199B
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- amici prism
- housing
- object lens
- detector
- ratchet
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Abstract
The invention provides a kind of optical displacement sensor, belong to field of mechanical technique.It solve existing displacement sensor error height and be inconvenient to the problem corrected.This optical displacement sensor, the quantity of described displacement detector is two: detector one and detector two, described object lens one, Amici prism one, Amici prism two, imaging lens one and detector one are arranged in housing from right to left, described laser instrument is positioned at Amici prism one top and has the polarizer being connected in housing between, also there is in described housing the plane of reference, above-mentioned object lens two are connected in housing and object lens two are between the plane of reference and Amici prism one, it is respectively provided with quarter-wave plate between described Amici prism one and object lens one and between Amici prism one and object lens two, described detector two is positioned at Amici prism two top, above-mentioned imaging lens two is between detector two and Amici prism two.This optical displacement sensor measure error is little and error is easy to correction.
Description
Technical field
The present invention relates to a kind of sensor, particularly a kind of optical displacement sensor.
Background technology
Optical displacement sensor based on Laser Focusing skew has highly sensitive, stability
The advantages such as well, mechanism is succinct, dynamic range is big.
But owing to frame for movement, the optical facilities of sensor itself become in ambient temperature
Easily produced by the change of temperature in the case of change and offset, make the measurement of sensor produce by mistake
Difference.
Chinese patent CN1957230 provides one " the error school of displacement transducer signal
Correction method ", it in the sensor signal of inductance type force-displacement or angular transducer due to
The method and apparatus that electromagnetic interference and the error that produces are corrected.Passing through known way
Activate at least one components and parts that can produce electromagnetic interference, and thus make inductance type force-displacement or
When the sensor signal of angular transducer produces known error, to the sensor letter recorded
Number carry out the correction of this error.
But, above-mentioned displacement transducer is mainly between known error and measure error
Comparison, then it is corrected.But, in above-mentioned error correction, known error is not
Good confirmation, causes its error correction difficulty bigger.Further, the error correction of above-mentioned patent
Operation also seems the most loaded down with trivial details.
Existing other is positioned at sensor and the most all there is similar problem.
Summary of the invention
It is an object of the invention to the problems referred to above existed for prior art, it is provided that Yi Zhongneng
The convenient optical displacement sensor eliminating measure error.
The purpose of the present invention can be realized by following technical proposal: a kind of optical displacement passes
Sensor, detects including housing, laser instrument, Amici prism, object lens, imaging lens and displacement
Device, it is characterised in that the quantity of described object lens is two: object lens one and object lens two, institute
The quantity stating Amici prism is two: Amici prism one and Amici prism two, described imaging
The quantity of mirror is two: imaging lens one and imaging lens two, the quantity of described displacement detector
It is two: detector one and detector two, described object lens one, Amici prism one, light splitting
Prism two, imaging lens one and detector one are arranged in housing from right to left, described laser
Device is positioned at Amici prism one top and has the polarizer being connected in housing between,
Also having the plane of reference in described housing, above-mentioned object lens two are connected in housing and object lens two
Between the plane of reference and Amici prism one, between described Amici prism one and object lens one with
And between Amici prism one and object lens two, it is respectively provided with quarter-wave plate, described detector two
Being positioned at Amici prism two top, above-mentioned imaging lens two is positioned at detector two and Amici prism two
Between.
The laser beam that laser instrument is launched enters Amici prism one through polarizer, at light splitting rib
Under the effect of mirror one, light beam is divided into two polarised light portions: s polarised light part and p-polarization
Light part.S polarised light is partially at object lens one, and p-polarization light is partially at object lens two.
The s polarised light passed through by object lens one is partially into measured surface, s polarised light portion
Amici prism two is entered after the reflection of lease making measured surface.S under the effect of Amici prism two
Polarised light is partially into imaging lens two, and under the effect of imaging lens two, light beam is at detector two
Place forms hot spot.
The p-polarization light passed through by object lens two is partially into the plane of reference, p-polarization light part
Amici prism two is entered after the plane of reference reflects.P-polarization under the effect of Amici prism two
Light is partially into imaging lens one, light beam shape at detector one under the effect of imaging lens one
Become hot spot.
By by the light beam with reference to reflecting surface and tested plane reflection through polarization splitting prism one and
Imaging lens one and imaging lens two is respectively enterd after the common light path of polarization splitting prism two composition.
So that the displacement measurement with reference to reflecting surface is repaiied as reference, the displacement to tested plane
Just, in suppression light path altogether, noise and laser instrument light intensity and pointing stability change the mistake caused
Difference.
Quarter-wave plate is at two exit facets of Amici prism one, polarised light warp
After crossing quarter-wave plate, become circularly polarized light.Circularly polarized light is through tested plane or ginseng
After examining face reflection, it is again introduced into quarter-wave plate, by the light of quarter-wave plate outgoing
Again linearly polarized light it is changed into.
In above-mentioned optical displacement sensor, described Amici prism one and Amici prism two
Between housing in be fixed with optical filter.
Veiling glare is will filter out, it is ensured that Amici prism two can be stably by two by optical filter
Individual polarised light part is incident at imaging lens two and imaging lens one respectively.
In above-mentioned optical displacement sensor, have between described polarizer and housing and work as
The detent mechanism that polarizer can be located after swinging.
According to actual measurement needs, can be by partially by detent mechanism after polarizer is regulated
The sheet that shakes positions firmly.
In above-mentioned optical displacement sensor, in described housing, it is fixed with link,
The above-mentioned plane of reference and object lens one are all connected on link, and the material of described link is zirconium
Tungstates (ZrW2O8).
The link thermal coefficient of expansion of this material is less, decreases measure error.
In above-mentioned optical displacement sensor, in described housing, it is fixed with link,
The above-mentioned plane of reference and object lens one are all connected on link, and the material of described link is stone
English.
Same, the link thermal coefficient of expansion of this material is smaller, and it decreases survey
Amount error.
In above-mentioned optical displacement sensor, described polarizer is connected on adjustable plate,
Above-mentioned detent mechanism is between adjustable plate and case inside.
Polarizer is common optics, and incident polarised light is had and covers by polarizer
With the function passed through, longitudinal light or lateral light one can be made to pass through, one is covered.
The light beam at entrance Amici prism one is made to be linearly polarized light by polarizer.
In above-mentioned optical displacement sensor, described detent mechanism includes rotating shaft, bullet
Property part, keeper and positioning strip, described positioning strip is connected in housing, described regulation
Having recessed hole, location on plate, above-mentioned elastic component and keeper are respectively positioned at hole, location
And keeper part stretches out hole, location, described positioning strip under the elastic force effect of elastic component
It is curved and there are on positioning strip the some positioning recess being distributed for center of circle arc with rotating shaft,
Described keeper can embed at any one positioning recess above-mentioned.
Apply external force and promote adjustable plate, overcome keeper retraction location after the elastic force of elastic component
Hole.Certainly, now keeper is deviate from by positioning recess.
After stopping applying external force, under the elastic force effect of elastic component, keeper again embeds and determines
Position indent, thus adjustable plate is positioned.
In above-mentioned optical displacement sensor, described positioning strip is plastic material, institute
State positioning strip and be bonded in above-mentioned case inside by glue.
The housing of sensor is also plastic material, and housing, positioning strip that material is identical pass through
Glue can be securely attached to together.
Certainly, if the housing of sensor is metal material, positioning strip is also adopted by metal
Material.Then, both are connected by welding or glue Binder Phase.
In above-mentioned optical displacement sensor, described elastic component is helical spring, and
The two ends of elastic component are respectively acting on bottom hole, location and on keeper.
In above-mentioned optical displacement sensor, described keeper is ball, described location
Port, hole has the gear edge protruded ringwise, and the aperture formed at described gear edge is slightly less than
Ball diameter.
Under the barrier effect on gear edge, ball is positioned at hole, location, and cannot be by hole, location
Come off.Certainly, under the elastic force effect of elastic component, ball is that part stretches out hole, location.
In above-mentioned optical displacement sensor, described detent mechanism includes rotating shaft, spine
Wheel, spring and ratchet, described rotating shaft is connected on adjustable plate, and described ratchet is connected
In rotating shaft, described ratchet is hinged in housing, and above-mentioned spring is positioned at ratchet and shell
Ratchet is embedded on above-mentioned ratchet between body and under the elastic force effect of spring.
Under the elastic force effect of spring, ratchet has the trend embedding ratchet all the time.Due to spine
Wheel is connected in rotating shaft, and rotating shaft is connected on adjustable plate.Therefore, should
During state, adjustable plate can not rotate around the axis.Once apply external force and overcome spring
After elastic force, ratchet is slipped over by the back of tooth of ratchet, it is thus possible to make adjustable plate rotate around the axis.
After adjustable plate position adjustment puts in place, stop applying external force, in the elastic force effect of spring
Lower ratchet limits pawl wheel, is again positioned by adjustable plate, and be connected on adjustable plate is inclined
Shake sheet also with being together positioned.
In above-mentioned optical displacement sensor, described displacement detector is photoelectric displacement
Detector.
Photoelectric displacement detector has extensive use in military and national economy every field.
It is mainly used in radionetric survey and detection at visible ray or near infrared band.
Compared with prior art, when this optical displacement sensor produces bigger measure error,
It is modified using the displacement of plane of reference reflection as reference, the displacement to tested plane,
Thus suppression is total to what noise and laser intensity and pointing stability change in light path caused
Error.With the displacement seat reference of the plane of reference in error correction process, it revises precision
Compare the highest and error correction is easy.
Meanwhile, polarizer is owing to rotating.Therefore, for the quilt with different reflectivity
Survey thing, can be by adjusting the angle of polarizer so that be reflected back from the plane of reference and tested surface
The light intensity come is basically identical, it is provided that the precision of measurement.
It addition, after polarizer position adjustment is good, it is only necessary to stop applying to promote adjustable plate
External force, therefore, it regulates simplicity, has the highest practical value.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of this optical displacement sensor.
Fig. 2 is that in embodiment one, the sectional structure of the detent mechanism of optical displacement sensor shows
It is intended to.
Fig. 3 is the partial enlargement structural representation in Fig. 2 at keeper.
Fig. 4 is the plan structure schematic diagram of positioning strip in Fig. 2.
Fig. 5 is that in embodiment two, the sectional structure of the detent mechanism of optical displacement sensor shows
It is intended to.
Fig. 6 is the structural representation at ratchet in Fig. 5, ratchet.
In figure, 1, housing；2, laser instrument；3, Amici prism one；4, Amici prism
Two；5, object lens one；6, object lens two；7, imaging lens one；8, imaging lens two；9, visit
Survey device one；10, detector two；11, tested plane；12, the plane of reference；13, four points
One of wave plate；14, optical filter；15, adjustable plate；15a, hole, location；15a1, gear edge；
16, rotating shaft；17, elastic component；18, keeper；19, positioning strip；19a, position recessed
Mouthful；20, polarizer；21, ratchet；22, ratchet；23, spring.
Detailed description of the invention
Embodiment one
As it is shown in figure 1, this optical displacement sensor includes housing 1, laser instrument 2, light splitting
Prism 1, Amici prism 24, object lens 1, object lens 26, imaging lens 1, one-tenth
As mirror 28, detector 1 and detector 2 10.In the present embodiment, detector 1
It is photoelectric displacement detector with detector 2 10.
Object lens 1, Amici prism 1, Amici prism 24, imaging lens 1 and detection
Device 1 is arranged in housing 1 from right to left.Laser instrument 2 is positioned on Amici prism 1
Portion, has polarizer 20 between laser instrument 2 and Amici prism 1, polarizer 20 is even
It is connected in housing 1.
Also there is the plane of reference 12, in object lens 26 are connected in housing 1 and object lens in housing 1
26 between the plane of reference 12 and Amici prism 1.In the present embodiment, housing 1
Inside it is fixed with link, the plane of reference 12 and object lens 1 to be all connected on link, connects
The material of frame is zirconium tungstates (ZrW2O8), and according to actual conditions, link uses quartz
Material is also feasible.
There is between Amici prism 1 and object lens 1 quarter-wave plate 13, light splitting rib
Another one quarter-wave plate 13 it is respectively provided with between mirror 1 and object lens 26.Detector
2 10 are positioned at Amici prism 24 top, and imaging lens 28 is positioned at detector 2 10 and divides
Between light prism 24.
It is fixed with optical filter in housing 1 between Amici prism 1 and Amici prism 24
14。
As shown in Fig. 2 and Fig. 3 and Fig. 4, polarizer 20 is connected on adjustable plate 15,
Have between adjustable plate 15 and housing 1 and can be located at shell after adjustable plate 15 swings
Detent mechanism in body 1.
Detent mechanism includes rotating shaft 16, elastic component 17, keeper 18 and positioning strip 19,
Positioning strip 19 is connected in housing 1, and adjustable plate 15 has recessed hole, location 15a,
Elastic component 17 and keeper 18 are respectively positioned at the hole 15a of location, at the elastic force of elastic component 17
Lower keeper 18 part of effect stretches out location hole 15a.Positioning strip 19 is curved and is determining
On the bar 19 of position, there are the some positioning recess 19a being distributed for center of circle arc with rotating shaft 16,
Keeper 18 can embed at any one positioning recess 19a.In the present embodiment, elastic component
17 is helical spring, certainly, other can also be used according to actual needs to push up compression set position
The common spring of part 18.
Positioning strip 19 is plastic material, and housing 1 is also plastic material, and positioning strip 19 leads to
Cross glue to be bonded in inside housing 1.
The two ends of elastic component 17 are respectively acting on bottom the hole 15a of location and on keeper 18.
In the present embodiment, keeper 18 is ball, and 15a port, hole, location has the most convex
The gear gone out, along 15a1, keeps off the aperture formed at 15a1 and is slightly less than ball diameter.
It is inclined that this sensor adds a line in the light path of Laser Focusing offset displacement sensor
Shake Amici prism, adds a polarizer 20, can connect between laser instrument and Amici prism
The linear polarization of continuous condition shoot laser bundle.And at two exit ends of this Amici prism
It is individually placed to two quarter-wave wave plates, putting of quarter-wave plate optical axis direction
Put so that being circularly polarized through the light of two quarter-wave plates.
Make in two-beam a branch of incides with reference to reflecting surface, and another bundle incides tested
Plane.Two will be respectively enterd by the two-beam returned with reference to reflecting surface and tested plane reflection
Photoelectric displacement detection system.
Object lens 1 and object lens 26 are that two optical properties are identical or closely
Object lens, the primary optical axis of two object lens is completely the same with the primary optical axis of polarization splitting prism or phase
Away from identical distance.
By the light beam that reflected by the plane of reference 12 and tested plane 11 through Amici prism 1 and
Imaging lens 1 and imaging lens 28 is respectively enterd after the common light path of Amici prism 24 composition.
Carry out using the displacement measurement to the plane of reference 12 as reference, the displacement to tested plane 11
Revising, in suppression light path altogether, noise and laser instrument light intensity and pointing stability change cause
Error.
Specifically, the laser beam that laser instrument 2 is launched enters light splitting rib through polarizer 20
Mirror 1, is divided into two polarised light portion: s under the effect of Amici prism 1 by light beam
Polarised light part and p-polarization light part.S polarised light part enters through Amici prism 1
At object lens 1, p-polarization light part enters at object lens 26 through Amici prism 1.
The s polarised light passed through by object lens 1 is partially into measured surface 11, and s polarizes
Light part enters Amici prism 24 after measured surface 11 reflects.At Amici prism 24
Effect under s polarised light be partially into imaging lens 28, under the effect of imaging lens 28
Light beam forms hot spot at detector 2 10.
The p-polarization light passed through by object lens 26 is partially into the plane of reference 12, p-polarization light
Part enters Amici prism 24 after the plane of reference 12 reflects.Work at Amici prism 24
It is partially into imaging lens 1, light beam under the effect of imaging lens 1 with lower p-polarization light
Hot spot is formed at detector 1.
By the light beam that reflected by the plane of reference 12 and tested plane 11 through polarization splitting prism one
3 and polarization splitting prism 24 composition common light path after respectively enter imaging lens 1 and become
As mirror 28.Using to the displacement measurement of the plane of reference 12 as reference, to tested plane 11
Displacement be modified, noise and laser instrument light intensity and pointing stability in suppression altogether light path
The error that change causes.
Above-mentioned condominium road refers to the light between Amici prism 24 and Amici prism 1
Road part.
Embodiment two
The present embodiment is essentially identical with mechanism and the principle of embodiment one, different place
It is that detent mechanism includes rotating shaft 16, ratchet 21, spring 23 and ratchet 22.Rotating shaft 16
Being connected on adjustable plate 15, ratchet 21 is connected in rotating shaft 16.Ratchet 22 is hinged on
In housing 1, spring 23 is between ratchet 22 and housing 1 and at the elastic force of spring 23
The lower ratchet 22 of effect is embedded on above-mentioned ratchet 21, as shown in Fig. 5 and Fig. 6.
Under the elastic force effect of spring 23, ratchet 22 has the trend embedding ratchet 21 all the time.
Owing to ratchet 21 is connected in rotating shaft 16, and rotating shaft 16 is to be connected in adjustable plate
On.Therefore, during this state, adjustable plate 15 can not 16 rotate around the shaft.One
After denier applies the elastic force that external force overcomes spring 23, ratchet 22 is by sliding on the back of tooth of ratchet 21
Cross, it is thus possible to make adjustable plate 15 16 rotate around the shaft.
After adjustable plate 15 position adjustment puts in place, stop applying external force, at the bullet of spring 23
Under power effect, ratchet 22 limits ratchet 21 and rotates, and is again positioned by adjustable plate 15, is connected
Polarizer 20 on adjustable plate 15 is also with being together positioned.
Claims (6)
1. an optical displacement sensor, including housing (1), laser instrument (2), light splitting rib
Mirror, object lens, imaging lens and displacement detector, it is characterised in that the quantity of described object lens
Being two: object lens one (5) and object lens two (6), the quantity of described Amici prism is two:
Amici prism one (3) and Amici prism two (4), the quantity of described imaging lens is two: become
As mirror one (7) and imaging lens two (8), the quantity of described displacement detector is two: detection
Device one (9) and detector two (10), described object lens one (5), Amici prism one (3), light splitting
Prism two (4), imaging lens one (7) and detector one (9) set in housing (1) from right to left
Putting, described laser instrument (2) is positioned at Amici prism one (3) top and has solid between
The polarizer (20) being connected in housing (1), also has the plane of reference (12) in described housing (1),
Above-mentioned object lens two (6) are connected in housing (1) and object lens two (6) are positioned at the plane of reference (12)
And between Amici prism one (3), between described Amici prism one (3) and object lens one (5) and
Quarter-wave plate (13) it is respectively provided with between Amici prism one (3) and object lens two (6), described
Detector two (10) is positioned at Amici prism two (4) top, and above-mentioned imaging lens two (8) is positioned at spy
Survey between device two (10) and Amici prism two (4)；Described Amici prism one (3) and light splitting rib
It is fixed with optical filter (14) in housing (1) between mirror two (4)；Described polarizer (20) with
There is between housing (1) detent mechanism being located after polarizer (20) swings；Institute
The polarizer (20) stated is connected on adjustable plate (15), and above-mentioned detent mechanism is positioned at regulation
Between plate (15) and housing (1) inner side；Described detent mechanism includes rotating shaft (16), elasticity
Part (17), keeper (18) and positioning strip (19), described positioning strip (19) is connected in shell
In body (1), described adjustable plate (15) has recessed hole, location (15a), above-mentioned bullet
Property part (17) and keeper (18) be respectively positioned on (15a) place, hole and at elastic component (17), location
Under elastic force effect, keeper (18) part stretches out hole, location (15a), described positioning strip (19)
Curved and to have on positioning strip (19) with rotating shaft (16) be the some of center of circle arc distribution
Positioning recess (19a), described keeper (18) can embed any one positioning recess above-mentioned
(19a) place.
Optical displacement sensor the most according to claim 1, it is characterised in that institute
Link, the above-mentioned plane of reference (12) and object lens one (5) it are fixed with the most solid in the housing (1) stated
Being connected on link, the material of described link is zirconium tungstates (ZrW2O8).
Optical displacement sensor the most according to claim 2, it is characterised in that institute
The positioning strip (19) stated is plastic material, and described positioning strip (19) is bonded in by glue
Housing (1) inner side stated.
Optical displacement sensor the most according to claim 3, it is characterised in that institute
The elastic component (17) stated is helical spring, and the two ends of elastic component (17) are respectively acting on and determine
On bottom, hole, position (15a) and keeper (18).
Optical displacement sensor the most according to claim 4, it is characterised in that institute
To state keeper (18) be ball, and hole, described location (15a) port has protrudes ringwise
Gear is slightly less than ball diameter along (15a1), the aperture that described gear is formed along (15a1) place.
Optical displacement sensor the most according to claim 5, it is characterised in that institute
The detent mechanism stated includes rotating shaft (16), ratchet (21), spring (23) and ratchet (22),
Described rotating shaft (16) is connected on adjustable plate (15), and described ratchet (21) is connected in and turns
On axle (16), described ratchet (22) is hinged in housing (1), above-mentioned spring (23)
It is positioned between ratchet (22) and housing (1) and ratchet (22) under the elastic force effect of spring (23)
It is embedded on above-mentioned ratchet (21).
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| CN201410232853.8A CN103983199B (en) | 2014-05-28 | 2014-05-28 | Optical displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410232853.8A CN103983199B (en) | 2014-05-28 | 2014-05-28 | Optical displacement sensor |
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| CN103983199A CN103983199A (en) | 2014-08-13 |
| CN103983199B true CN103983199B (en) | 2016-08-17 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104596635B (en) * | 2015-01-30 | 2017-06-23 | 中国计量学院 | Differential type vibration acceleration sensor based on merogenesis PSD |
| CN109669273B (en) * | 2019-03-04 | 2021-05-14 | 福建师范大学 | Compact laser beam splitting device for laser photodynamic therapy |
| WO2024005442A1 (en) * | 2022-06-28 | 2024-01-04 | 엘지전자 주식회사 | Simultaneous multi-axis displacement measurement device using optical system |
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| CN1071005A (en) * | 1992-09-17 | 1993-04-14 | 清华大学 | Double-frequency laser alignment measurement method and alignment measurement interferometer thereof |
| CN1072773A (en) * | 1991-11-22 | 1993-06-02 | 中国科学院上海光学精密机械研究所 | Active laser displacement sensor |
| US6657216B1 (en) * | 2002-06-17 | 2003-12-02 | Nanometrics Incorporated | Dual spot confocal displacement sensor |
| CN1925029A (en) * | 2005-08-31 | 2007-03-07 | 索尼株式会社 | Optical pickup, information processing apparatus and signal processing method |
| CN101067546A (en) * | 2006-06-20 | 2007-11-07 | 哈尔滨工业大学 | Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component |
| CN101520305A (en) * | 2009-03-30 | 2009-09-02 | 哈尔滨工业大学 | Instantaneous phase-shifting secondary interference confocal measuring device and method |
| CN103712562A (en) * | 2013-12-18 | 2014-04-09 | 合肥知常光电科技有限公司 | High-precision laser micro displacement sensing and positioning method and device |
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| CN1072773A (en) * | 1991-11-22 | 1993-06-02 | 中国科学院上海光学精密机械研究所 | Active laser displacement sensor |
| CN1071005A (en) * | 1992-09-17 | 1993-04-14 | 清华大学 | Double-frequency laser alignment measurement method and alignment measurement interferometer thereof |
| US6657216B1 (en) * | 2002-06-17 | 2003-12-02 | Nanometrics Incorporated | Dual spot confocal displacement sensor |
| CN1925029A (en) * | 2005-08-31 | 2007-03-07 | 索尼株式会社 | Optical pickup, information processing apparatus and signal processing method |
| CN101067546A (en) * | 2006-06-20 | 2007-11-07 | 哈尔滨工业大学 | Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component |
| CN101520305A (en) * | 2009-03-30 | 2009-09-02 | 哈尔滨工业大学 | Instantaneous phase-shifting secondary interference confocal measuring device and method |
| CN103712562A (en) * | 2013-12-18 | 2014-04-09 | 合肥知常光电科技有限公司 | High-precision laser micro displacement sensing and positioning method and device |
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| CN103983199A (en) | 2014-08-13 |
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