CN103983199A - Optical displacement sensor - Google Patents
Optical displacement sensor Download PDFInfo
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- CN103983199A CN103983199A CN201410232853.8A CN201410232853A CN103983199A CN 103983199 A CN103983199 A CN 103983199A CN 201410232853 A CN201410232853 A CN 201410232853A CN 103983199 A CN103983199 A CN 103983199A
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- amici prism
- housing
- displacement sensor
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- optical displacement
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Abstract
The invention provides an optical displacement sensor, and belongs to the technical field of machines. The optical displacement sensor solves the problems that an existing displacement sensor is high in measuring error and errors are not convenient to correct. According to the optical displacement sensor, two displacement detectors are included and comprise the first detector and the second detector, a first objective lens, a first beam splitter prism, a second beam splitter prism, a first imaging lens and the first detector are arranged in a shell from right to left, a laser device is arranged on the upper portion of the first beam splitter prism, a polarizing film fixedly connected in the shell is arranged between the laser device and the first beam splitter prism, and a reference face is further arranged in the shell. A second objective lens is fixedly connected in the shell and is arranged between the reference face and the first beam splitter prism, quarter-wave plates are arranged between the first beam splitter prism and the first objective lens and between the first beam splitter prism and the second objective lens respectively, the second detector is arranged on the upper portion of the second beam splitter prism, and the second imaging lens is arranged between the second detector and the second beam splitter prism. The optical displacement sensor is small in measuring error and errors are convenient to correct.
Description
Technical field
The present invention relates to a kind of sensor, particularly a kind of optical displacement sensor.
Background technology
The advantages such as that the optical displacement sensor based on Laser Focusing skew has is highly sensitive, good stability, mechanism is succinct, dynamic range is large.
But because the physical construction of sensor itself, optical facilities are easily subject to the variation of temperature to produce skew the extraneous variation of ambient temperature in the situation that, make the measurement of sensor produce error.
Chinese patent CN1957230 provides a kind of " error calibration method of displacement transducer signal ", the method and apparatus that it is proofreaied and correct for the error that the sensor signal of inductance type force-displacement or angular transducer is produced due to electromagnetic interference (EMI).Can produce the components and parts of electromagnetic interference (EMI) activating at least one by known way, and while making thus the sensor signal of inductance type force-displacement or angular transducer produce known error, the sensor signal recording be carried out to the correction of this error.
But above-mentioned displacement transducer is mainly to the comparison between known error and measuring error, then it is proofreaied and correct.But the bad confirmation of known error in above-mentioned error correction, causes its error correction difficulty larger.And it is very not loaded down with trivial details that the error correction operation of above-mentioned patent also seems.
Existing other is positioned at sensor and also all exists similar problem.
Summary of the invention
The object of the invention is the problems referred to above that exist for prior art, a kind of optical displacement sensor that can conveniently eliminate measuring error is provided.
Object of the present invention can realize by following technical proposal: a kind of optical displacement sensor, comprise housing, laser instrument, Amici prism, object lens, imaging lens and displacement detector, it is characterized in that, the quantity of described object lens is two: object lens one and object lens two, the quantity of described Amici prism is two: Amici prism one and Amici prism two, the quantity of described imaging lens is two: imaging lens one and imaging lens two, the quantity of described displacement detector is two: detector one and detector two, described object lens one, Amici prism one, Amici prism two, imaging lens one and detector one arrange from right to left in housing, described laser instrument is positioned at Amici prism one top and between has the polaroid that is connected in housing, in described housing, also there is reference surface, above-mentioned object lens two be connected in housing and object lens two between reference surface and Amici prism one, between described Amici prism one and object lens one and between Amici prism one and object lens two, all there is quarter-wave plate, described detector two is positioned at Amici prism two tops, above-mentioned imaging lens two is between detector two and Amici prism two.
The laser beam of laser instrument transmitting enters Amici prism one through polaroid, light beam is divided into two polarized light portions under the effect of Amici prism one: s polarized light part and p polarized light part.S polarized light part enters object lens one place, and p polarized light part enters object lens two places.
The s polarized light part being seen through by object lens one place enters measured surface, and s polarized light part enters Amici prism two after measured surface reflection.Under the effect of Amici prism two, s polarized light part enters imaging lens two, and under the effect of imaging lens two, light beam forms hot spot at detector two places.
The p polarized light part being seen through by object lens two places enters reference surface, and p polarized light part enters Amici prism two after reference surface reflection.Under the effect of Amici prism two, p polarized light part enters imaging lens one, and under the effect of imaging lens one, light beam forms hot spot at detector one place.
Light beam by with reference to reflecting surface and tested plane reflection is entered respectively to imaging lens one and imaging lens two after the common light path that polarization splitting prism one and polarization splitting prism two form.With the displacement measurement to reference to reflecting surface as a reference, the displacement of tested plane is revised, in the common light path of inhibition, noise and laser instrument light intensity and pointing stability change the error causing.
Quarter-wave plate is two exit facet places that are positioned at Amici prism one, and polarized light, after quarter-wave plate, becomes circularly polarized light.Circularly polarized light, after tested plane or reference surface reflection, enters quarter-wave plate again, again changes linearly polarized light into by the light of quarter-wave plate outgoing.
In above-mentioned optical displacement sensor, in the housing between described Amici prism one and Amici prism two, be fixed with optical filter.
To filter out parasitic light by optical filter, ensure that Amici prism two can stably be incident to two polarized light parts respectively imaging lens two and imaging lens one place.
In above-mentioned optical displacement sensor, between described polaroid and housing, there is the detent mechanism that can be located after polaroid swings.
According to actual measurement needs, after being regulated, polaroid polaroid can be located firmly by detent mechanism.
In above-mentioned optical displacement sensor, in described housing, be fixed with link, above-mentioned reference surface and object lens one are all connected on link, and the material of described link is zirconium tungstate (ZrW2O8).
The link thermal expansivity of this material is less, has reduced measuring error.
In above-mentioned optical displacement sensor, in described housing, be fixed with link, above-mentioned reference surface and object lens one are all connected on link, and the material of described link is quartz.
Same, the link thermal expansivity of this material is smaller, and it has also reduced measuring error.
In above-mentioned optical displacement sensor, described polaroid is connected on adjustable plate, and above-mentioned detent mechanism is between adjustable plate and housing inner side.
Polaroid is common optical device, and polaroid has the function of covering and seeing through to the polarized light of incident, can make longitudinal light or lateral light one see through, and one is covered.
The light beam that makes to enter Amici prism one place by polaroid is linearly polarized light.
In above-mentioned optical displacement sensor, described detent mechanism comprises rotating shaft, elastic component, keeper and positioning strip, described positioning strip is connected in housing, on described adjustable plate, there is recessed pilot hole, above-mentioned elastic component and keeper be all positioned at pilot hole place and under the elastic force effect of elastic component keeper part stretch out pilot hole, described positioning strip is curved and on positioning strip, have the some positioning recess that distribute taking rotating shaft as center of circle arc, and described keeper can embed above-mentioned any one positioning recess place.
Apply external force and promote adjustable plate, overcome keeper retraction pilot hole after the elastic force of elastic component.Certainly, now keeper is deviate from by positioning recess place.
Stop applying after external force, under the elastic force effect of elastic component, keeper embeds positioning recess place again, thereby adjustable plate is located.
In above-mentioned optical displacement sensor, described positioning strip is plastic material, and described positioning strip is bonded in above-mentioned housing inner side by glue.
The housing of sensor is also plastic material, and housing, positioning strip that material is identical can firmly link together by glue.
Certainly,, if when the housing of sensor is metal material, positioning strip also adopts metal material.Then, both are connected by welding or glue Binder Phase.
In above-mentioned optical displacement sensor, described elastic component is volute spring, and the two ends of elastic component act on respectively on pilot hole bottom and keeper.
In above-mentioned optical displacement sensor, described keeper is ball, and described pilot hole port has the gear edge of protruding ringwise, and described gear is slightly less than ball diameter along the aperture of locating to form.
Under the barrier effect on gear edge, ball is positioned at pilot hole, and cannot be by coming off in pilot hole.Certainly, under the elastic force effect of elastic component, ball is that part is stretched out pilot hole.
In above-mentioned optical displacement sensor, described detent mechanism comprises rotating shaft, ratchet, spring and ratchet, described rotating shaft is connected on adjustable plate, described ratchet is connected in rotating shaft, described ratchet is hinged in housing, and above-mentioned spring ratchet under the elastic force effect between ratchet and housing and at spring is embedded on above-mentioned ratchet.
Under the elastic force effect of spring, ratchet has the trend that embeds ratchet all the time.Because ratchet is connected in rotating shaft, and rotating shaft is connected on adjustable plate.Therefore, adjustable plate can not rotate around the axis when this state.Once apply after the elastic force that external force overcomes spring, slip on the back of tooth of ratchet by ratchet, thereby can make adjustable plate rotate around the axis.
After adjusting to the right place in adjustable plate position, stop applying external force, under the elastic force effect of spring, ratchet restriction ratchet rotates, and again by adjustable plate location, is connected in polaroid on adjustable plate also along with being together positioned.
In above-mentioned optical displacement sensor, described displacement detector is photoelectric displacement detector.
Photoelectric displacement detector has extensive use in the every field of military and national economy.Be mainly used in radionetric survey and detection at visible ray or near-infrared band.
Compared with prior art, when this optical displacement sensor produces larger measuring error, with the displacement of reference surface reflection as a reference, the displacement of tested plane is revised, changed thereby suppress altogether in light path noise and laser instrument intensity and pointing stability the error causing.In error correction process, with the displacement seat reference of reference surface, it is revised, and ratio of precision is higher and error correction is easy.
Meanwhile, polaroid is owing to rotating.Therefore, for the measured object with different reflectivity, can be by adjusting the angle of polaroid, make the light intensity that reflects from reference surface and tested surface basically identical, the precision of measurement is provided.
In addition, after adjust polaroid position, only need to stop applying the external force that promotes adjustable plate, therefore, its adjusting is easy, has very high practical value.
Brief description of the drawings
Fig. 1 is the schematic diagram of this optical displacement sensor.
Fig. 2 is the sectional structure schematic diagram of the detent mechanism of optical displacement sensor in embodiment mono-.
Fig. 3 is the local structure for amplifying schematic diagram at keeper place in Fig. 2.
Fig. 4 is the plan structure schematic diagram of positioning strip in Fig. 2.
Fig. 5 is the sectional structure schematic diagram of the detent mechanism of optical displacement sensor in embodiment bis-.
Fig. 6 is the structural representation at ratchet in Fig. 5, ratchet place.
In figure, 1, housing; 2, laser instrument; 3, Amici prism one; 4, Amici prism two; 5, object lens one; 6, object lens two; 7, imaging lens one; 8, imaging lens two; 9, detector one; 10, detector two; 11, tested plane; 12, reference surface; 13, quarter-wave plate; 14, optical filter; 15, adjustable plate; 15a, pilot hole; 15a1, gear edge; 16, rotating shaft; 17, elastic component; 18, keeper; 19, positioning strip; 19a, positioning recess; 20, polaroid; 21, ratchet; 22, ratchet; 23, spring.
Embodiment
Embodiment mono-
As shown in Figure 1, this optical displacement sensor comprises housing 1, laser instrument 2, Amici prism 1, Amici prism 24, object lens 1, object lens 26, imaging lens 1, imaging lens 28, detector 1 and detector 2 10.In the present embodiment, detector 1 and detector 2 10 are photoelectric displacement detector.
Object lens 1, Amici prism 1, Amici prism 24, imaging lens 1 and detector 1 arrange from right to left in housing 1.Laser instrument 2 is positioned at Amici prism one 3 tops, between laser instrument 2 and Amici prism 1, has polaroid 20, and polaroid 20 is connected in housing 1.
In housing 1, also there is reference surface 12, object lens 26 be connected in housing 1 and object lens 26 between reference surface 12 and Amici prism 1.In the present embodiment, in housing 1, be fixed with link, reference surface 12 and object lens 1 are all connected on link, and the material of link is zirconium tungstate (ZrW2O8), and according to actual conditions, it is also feasible that link adopts quartz material.
Between Amici prism 1 and object lens 1, there is quarter-wave plate 13, between Amici prism 1 and object lens 26, all there is another one quarter-wave plate 13.Detector 2 10 is positioned at Amici prism 24 tops, and imaging lens 28 is between detector 2 10 and Amici prism 24.
In housing 1 between Amici prism 1 and Amici prism 24, be fixed with optical filter 14.
As shown in Fig. 2 and Fig. 3 and Fig. 4, polaroid 20 is connected on adjustable plate 15, has after adjustable plate 15 swings and can be located at the detent mechanism in housing 1 between adjustable plate 15 and housing 1.
Detent mechanism comprises rotating shaft 16, elastic component 17, keeper 18 and positioning strip 19, positioning strip 19 is connected in housing 1, on adjustable plate 15, there is recessed pilot hole 15a, elastic component 17 and keeper 18 are all positioned at pilot hole 15a place, and under the elastic force effect of elastic component 17, keeper 18 parts are stretched out pilot hole 15a.Positioning strip 19 is curved and on positioning strip 19, have the some positioning recess 19a that distribute taking rotating shaft 16 as center of circle arc, and keeper 18 can embed any one positioning recess 19a place.In the present embodiment, elastic component 17 is volute spring, certainly, also can adopt according to actual needs other can push up the common spring of pressing keeper 18.
Positioning strip 19 is plastic material, and housing 1 is also plastic material, and positioning strip 19 is bonded in housing 1 inner side by glue.
The two ends of elastic component 17 act on respectively on pilot hole 15a bottom and keeper 18.In the present embodiment, keeper 18 is ball, and pilot hole 15a port has the gear protruding ringwise along 15a1, and the aperture that gear forms along 15a1 place is slightly less than ball diameter.
This sensor adds a linear polarization Amici prism in the light path of Laser Focusing offset displacement sensor, adds a polaroid 20 between laser instrument and Amici prism, linear polarization that can condition of continuity outgoing laser beam.And being placed on respectively two quarter-wave wave plates at two exit ends of this Amici prism, it is circularly polarized that the placement of quarter-wave plate optical axis direction makes through the light of two quarter-wave plates.
Make a branch of the inciding with reference to reflecting surface in two-beam, another bundle incides tested plane.Two photoelectric displacement detection systems will be entered respectively by the two-beam returning with reference to reflecting surface and tested plane reflection.
Object lens 1 are two object lens that optical property is identical or very approaching with object lens 26, and the primary optical axis of two object lens is in full accord with the primary optical axis of polarization splitting prism or at a distance of identical distance.
The light beam being reflected by reference surface 12 and tested plane 11 is entered respectively to imaging lens 1 and imaging lens 28 after the common light path that Amici prism 1 and Amici prism 24 form.With to the displacement measurement of reference surface 12 as a reference, the displacement of tested plane 11 to be revised, in the common light path of inhibition, noise and laser instrument light intensity and pointing stability change the error causing.
Particularly, the laser beam that laser instrument 2 is launched enters Amici prism 1 through polaroid 20, light beam is divided into two polarized light portions under the effect of Amici prism 1: s polarized light part and p polarized light part.S polarized light part enters object lens one 5 places through Amici prism 1, and p polarized light part enters object lens 26 places through Amici prism 1.
The s polarized light part being seen through by object lens one 5 places enters measured surface 11, and s polarized light part enters Amici prism 24 after measured surface 11 reflections.Under the effect of Amici prism 24, s polarized light part enters imaging lens 28, and under the effect of imaging lens 28, light beam forms hot spot at detector 2 10 places.
The p polarized light part being seen through by object lens 26 places enters reference surface 12, and p polarized light part enters Amici prism 24 after reference surface 12 reflections.Under the effect of Amici prism 24, p polarized light part enters imaging lens 1, and under the effect of imaging lens 1, light beam forms hot spot at detector one 9 places.
The light beam being reflected by reference surface 12 and tested plane 11 is entered respectively to imaging lens 1 and imaging lens 28 after the common light path that polarization splitting prism 1 and polarization splitting prism 24 form.With to the displacement measurement of reference surface 12 as a reference, the displacement of tested plane 11 to be revised, in the common light path of inhibition, noise and laser instrument light intensity and pointing stability change the error causing.
Above-mentioned condominium road refers to the light path part between Amici prism 24 and Amici prism 1.
Embodiment bis-
The present embodiment is basic identical with mechanism and the principle of embodiment mono-, and different place is that detent mechanism comprises rotating shaft 16, ratchet 21, spring 23 and ratchet 22.Rotating shaft 16 is connected on adjustable plate 15, and ratchet 21 is connected in rotating shaft 16.Ratchet 22 is hinged in housing 1, and spring 23 ratchet 22 under the elastic force effect between ratchet 22 and housing 1 and at spring 23 is embedded on above-mentioned ratchet 21, sees shown in Fig. 5 and Fig. 6.
Under the elastic force effect of spring 23, ratchet 22 has the trend that embeds ratchet 21 all the time.Because ratchet 21 is connected in rotating shaft 16, and rotating shaft 16 is connected on adjustable plate.Therefore, adjustable plate 15 can not 16 rotate around the shaft when this state.Once apply after the elastic force that external force overcomes spring 23, on the back of tooth of ratchet 22 by ratchet 21, slip over, thereby can make adjustable plate 15 16 rotate around the shaft.
Adjustable plate 15 positions stop applying external force after adjusting to the right place, and under the elastic force effect of spring 23, ratchet 22 limits ratchet 21 and rotates, and again adjustable plate 15 is located, and are connected in polaroid 20 on adjustable plate 15 also along with being together positioned.
Claims (10)
1. an optical displacement sensor, comprise housing (1), laser instrument (2), Amici prism, object lens, imaging lens and displacement detector, it is characterized in that, the quantity of described object lens is two: object lens one (5) and object lens two (6), the quantity of described Amici prism is two: Amici prism one (3) and Amici prism two (4), the quantity of described imaging lens is two: imaging lens one (7) and imaging lens two (8), the quantity of described displacement detector is two: detector one (9) and detector two (10), described object lens one (5), Amici prism one (3), Amici prism two (4), imaging lens one (7) and detector one (9) arrange from right to left in housing (1), described laser instrument (2) is positioned at Amici prism one (3) top and between has the polaroid (20) that is connected in housing (1), in described housing (1), also there is reference surface (12), above-mentioned object lens two (6) are connected in housing (1) and object lens two (6) are positioned between reference surface (12) and Amici prism one (3), between described Amici prism one (3) and object lens one (5) and between Amici prism one (3) and object lens two (6), all there is quarter-wave plate (13), described detector two (10) is positioned at Amici prism two (4) tops, above-mentioned imaging lens two (8) is positioned between detector two (10) and Amici prism two (4).
2. optical displacement sensor according to claim 1, is characterized in that, in the housing (1) between described Amici prism one (3) and Amici prism two (4), is fixed with optical filter (14).
3. optical displacement sensor according to claim 2, is characterized in that, has the detent mechanism that can be located after polaroid (20) swings between described polaroid (20) and housing (1).
4. optical displacement sensor according to claim 1, it is characterized in that, in described housing (1), be fixed with link, above-mentioned reference surface (12) and object lens one (5) are all connected on link, and the material of described link is zirconium tungstate (ZrW2O8).
5. optical displacement sensor according to claim 3, it is characterized in that, it is upper that described polaroid (20) is connected in adjustable plate (15), and above-mentioned detent mechanism is positioned between adjustable plate (15) and housing (1) inner side.
6. optical displacement sensor according to claim 5, it is characterized in that, described detent mechanism comprises rotating shaft (16), elastic component (17), keeper (18) and positioning strip (19), described positioning strip (19) is connected in housing (1), on described adjustable plate (15), there is recessed pilot hole (15a), above-mentioned elastic component (17) and keeper (18) be all positioned at that pilot hole (15a) is located and under the elastic force effect of elastic component (17) keeper (18) part stretch out pilot hole (15a), described positioning strip (19) is curved and on positioning strip (19), have taking rotating shaft (16) as center of circle arc some positioning recess (19a) that distribute, described keeper (18) can embed above-mentioned any one positioning recess (19a) and locate.
7. optical displacement sensor according to claim 6, is characterized in that, described positioning strip (19) is plastic material, and described positioning strip (19) is bonded in above-mentioned housing (1) inner side by glue.
8. optical displacement sensor according to claim 6, it is characterized in that, described elastic component (17) is volute spring, and the two ends of elastic component (17) act on respectively on pilot hole (18) bottom and keeper (19).
9. optical displacement sensor according to claim 6, it is characterized in that, described keeper (19) is ball, described pilot hole (18) port has the gear protruding ringwise along (15a1), and the aperture that described gear is located to form along (15a1) is slightly less than ball diameter.
10. optical displacement sensor according to claim 5, it is characterized in that, described detent mechanism comprises rotating shaft (16), ratchet (21), spring (23) and ratchet (22), described rotating shaft (16) is connected on adjustable plate (15), described ratchet (21) is connected in rotating shaft (16), described ratchet (22) is hinged in housing (1), above-mentioned spring (23) is positioned at ratchet (22) between ratchet (22) and housing (1) and under the elastic force effect of spring (23) and is embedded on above-mentioned ratchet (21).
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| CN201410232853.8A CN103983199B (en) | 2014-05-28 | 2014-05-28 | Optical displacement sensor |
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| CN201410232853.8A CN103983199B (en) | 2014-05-28 | 2014-05-28 | Optical displacement sensor |
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| CN103983199B CN103983199B (en) | 2016-08-17 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104596635A (en) * | 2015-01-30 | 2015-05-06 | 中国计量学院 | Differential vibration acceleration sensor based on segmental PSD (Power Spectral Density) |
| CN109669273A (en) * | 2019-03-04 | 2019-04-23 | 福建师范大学 | A kind of compact laser beam splitting arrangement for laser power therapeutic |
| WO2024005442A1 (en) * | 2022-06-28 | 2024-01-04 | 엘지전자 주식회사 | Simultaneous multi-axis displacement measurement device using optical system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109669273A (en) * | 2019-03-04 | 2019-04-23 | 福建师范大学 | A kind of compact laser beam splitting arrangement for laser power therapeutic |
| WO2024005442A1 (en) * | 2022-06-28 | 2024-01-04 | 엘지전자 주식회사 | Simultaneous multi-axis displacement measurement device using optical system |
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