CN103486980A - Cross-scale measurement method based on digital micromirror device - Google Patents
Cross-scale measurement method based on digital micromirror device Download PDFInfo
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- CN103486980A CN103486980A CN201310378749.5A CN201310378749A CN103486980A CN 103486980 A CN103486980 A CN 103486980A CN 201310378749 A CN201310378749 A CN 201310378749A CN 103486980 A CN103486980 A CN 103486980A
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Abstract
The invention discloses a cross-scale measurement method based on a digital micromirror device. After collimation is carried out on light beams emitted by a laser source through a collimating mirror, the light beams irradiates the surface of the DMD with an incidence angle larger than 0 degree and smaller than 90 degrees, the control system of the DMD is used for modulating the light beams into structured light with needed parameter characteristics, the structured light is emitted out in the exit direction of the DMD, is firstly condensed through a first convex lens, then is turned by 90 degrees through a beam splitter mirror to a second convex lens to be condensed, irradiates the surface of a measured object, is reflected through the surface of the measured object, passes through the second convex lens, the beam splitter mirror and a third convex lens, and is finally received by a CCD camera, optical signals are converted into electric signals through the CCD camera, and measurement on the surface of the measured object is achieved. The DMD is used for constructing the structured light with different parameter characteristics, the structured light is applied to the surface appearance measurement of materials, the parameters and the scanning mode of a light source reflected through the DMD can be controlled conveniently, fast and accurately according to measurement needs, and therefore the appearance measurement requirements for surfaces of different scales can be met.
Description
Technical field
The present invention relates to be applied to the measuring method that three-dimensional appearance detects, be specifically related to a kind of based on Digital Micromirror Device across the yardstick measuring method.
Background technology
At present material surface mainly contains across the yardstick measuring method: the composite measurement platform that multiple sensing probe merges, the common software of realizing of image processing method and mathematical modeling is across the yardstick measurement etc.The aspects such as the former linking between gauge head assembling and dismounting, different resolution survey sensor and transition exist deficiency, the common modeling of the latter is more complicated, the surface topography obtained for different materials or different processing mode, often need modeling again, increased the difficulty of morphology characterization.
Summary of the invention
The objective of the invention is for avoiding the existing weak point of above-mentioned art methods, provide a kind of based on Digital Micromirror Device across the yardstick measuring method, it makes any change without the hardware parameter to measuring system, only by software programming, just can realize the control to the characteristic parameter of light probe, light probe array or other structured lights, to meet the measurement demand under different scale.
To achieve these goals, the present invention adopts following technical scheme:
Based on Digital Micromirror Device across the yardstick measuring method, the light beam that LASER Light Source is sent is after the collimating mirror collimation, to be greater than 0 ° and be less than the incident angle of 90 ° and be radiated at the DMD surface, utilize the control system of DMD this light beam to be modulated into to the first structured light of desired parameters feature, this first structured light is penetrated by the first exit direction of DMD, first through the first convex lens, carry out optically focused, by spectroscope reflection, turn to 90 ° to carry out optically focused to the second convex lens again, be radiated at again the measured object surface, after the measured object surface reflection, again successively by the second convex lens, spectroscope and the 3rd convex lens, finally by the CCD camera, received, by the CCD camera, light signal is changed into to electric signal, complete the measurement to the measured object surface, wherein, the focus of the first convex lens, the second convex lens and the 3rd convex lens respective side all falls within on spectroscope, and measured object is positioned near the opposite side focus of the second convex lens, and the CCD camera is positioned near the opposite side focus of the 3rd convex lens.
Above-mentioned incident angle is 66 °.
The control system of above-mentioned DMD is modulated into light beam two bundle structured lights of different parameters feature, and a branch of is above-mentioned the first structured light, and another bundle is the second structured light, and this two bundles structured light forms complementary in space; The second structured light is received by another CCD camera, and the electric signal of two CCD cameras is done stack, to eliminate ground unrest.
Above-mentioned two bundle structured lights are light probe or light probe array.
Compared with the prior art, beneficial effect of the present invention is embodied in:
The present invention utilizes the DMD(Digital Micromirror Device) and control system build the structured light of desired parameters feature, and be applied to the material surface topography measurement, DMD can realize the control to the parameters of pointolite array after the light beam splitting by the software programming of its control system, comprise a size, dot spacing etc., without measuring system hardware is done to any change, the software programming of only passing through the control system of DMD realizes the control to light source, can be according to measuring needs, convenient, fast, control exactly parameter and the scan mode of light source, thereby complete the measuring surface form requirement of different scale.
The accompanying drawing explanation
Fig. 1 is light channel structure figure of the present invention.
Number in the figure:
The 1-LASER Light Source; The 2-collimating mirror; 3-Digital Micromirror Device (DMD); The control system of 31-DMD; The 5-structured light; The 6-structured light; The 7-CCD camera; 8-the first convex lens; The 9-spectroscope; 10-the second convex lens; The 11-worktable; The 12-measured object; 13-the 3rd convex lens; The 14-CCD camera
Embodiment
The present invention is based on Digital Micromirror Device across the yardstick measuring method, the light beam that LASER Light Source is sent is after the collimating mirror collimation, with be greater than 0 ° and be less than 90 ° incident angle (, the angle on DMD surface when light beam and no power be greater than 0 ° and be less than 90 °) be radiated at the DMD(Digital Micromirror Device) surface, utilize the control system of DMD this light beam to be modulated into to the first structured light of desired parameters feature, this first structured light is penetrated by the first exit direction of DMD, first through the first convex lens, carry out optically focused, by spectroscope reflection, turn to 90 ° to carry out optically focused to the second convex lens again, be radiated at again the measured object surface, after the measured object surface reflection, again successively by the second convex lens, spectroscope and the 3rd convex lens, finally by the CCD camera, received, by the CCD camera, light signal is changed into to electric signal, complete the measurement to the measured object surface.
In order to eliminate ground unrest, the control system by DMD is modulated into light beam two bundle structured lights of different parameters feature, and a branch of be above-mentioned the first structured light, and another bundle is the second structured light, and this two bundles structured light forms complementation in space; The second structured light is received by another CCD camera, and the electric signal of two CCD cameras is done stack, to eliminate ground unrest.
The concrete embodiment of the present invention as shown in Figure 1, the light beam that LASER Light Source 1 is sent is invested the collimating mirror 2 with the light beam common optical axis, after collimating mirror 2 collimations, be radiated at the DMD3 surface with 66 ° of incident angles, utilize the control system 31 of DMD that this light beam is modulated into and forms two complementary bundle structured lights 5,6 in space, structured light 5,6 is light probe, light probe array or other structured lights, and the characteristic parameter of structured light 5,6 is controlled by control system 31.Wherein, structured light 6 is penetrated by the second exit direction of DMD3, then is received by the CCD camera 7 be positioned on this exit direction, by CCD camera 7, light signal is changed into to electric signal.Structured light 5 is penetrated by the first exit direction of DMD3, carry out optically focused through the first convex lens 8, by spectroscope 9 reflection, turn to 90 ° to carry out optically focused to the second convex lens 10 again, then be radiated at measured object 12 surfaces on worktable 11, after measured object 12 surface reflections, again successively by the second convex lens 10, spectroscope 9 and the 3rd convex lens 13, finally by CCD camera 14, received, by CCD camera 14, light signal is changed into to electric signal, again the electric signal of CCD camera 7 and 14 outputs of CCD camera is carried out to overlap-add procedure, complete the measurement to measured object 12 surfaces.Wherein, the reflecting surface of DMD3 is positioned on the optical axis of collimating mirror 2 and the first convex lens 8; The focus of the first convex lens 8, the second convex lens 10 and the 3rd convex lens 13 respective side all falls within on spectroscope 9, measured object 12 is positioned near the opposite side focus (can be placed on 1mm place, focus left and right) of the second convex lens 10, and CCD camera 14 is positioned near the opposite side focus of the 3rd convex lens 13.
In the present invention, light beam is injected the unspecified angles in the desirable 0 °<incident angle of incident angle of DMD<90 ° scope, and 66 ° in above-described embodiment is only preferred embodiment.
In above-described embodiment, but elliptical structure light 6 and CCD camera 7, and increasing structured light 6 and CCD camera 7 is for the electric signal by CCD camera 7 and 14 outputs of CCD camera carries out overlap-add procedure, eliminates ground unrest, to obtain better measurement effect.
Existing surface topography measuring method is a lot, the whole bag of tricks has the scope of application of self, in order to realize wide range, high-precision measurement target, the composite measurement platform that has generally adopted multiple sensing probe to merge, or image processing method and the common software of realizing of mathematical modeling across yardstick measurement etc. across the yardstick measuring method.All there is certain deficiency in these methods at aspects such as sensors coupled, modeling complexities.The present invention utilizes Digital Micromirror Device (DMD) to build the probe source of different parameters feature, and be applied to the material surface topography measurement, without measuring system hardware is done to any change, only by software programming, can realize the control to light probe, light probe array and other structured light parameters, convenient, fast for different measurands, adjust the structure light source exactly, to complete the measurement task under different scale.
In addition, the DMD various structured lights such as realizing regional area structure lattice array light in visual field, striped light, face shape light of can also programming, to tackle the different measuring demand of zones of different in same measurement object, these are all other beam splitter members or can't complete across the yardstick measurement mechanism.
Claims (4)
- Based on Digital Micromirror Device across the yardstick measuring method, it is characterized in that: the light beam that LASER Light Source is sent is after the collimating mirror collimation, to be greater than 0 ° and be less than the incident angle of 90 ° and be radiated at the DMD surface, utilize the control system of DMD this light beam to be modulated into to the first structured light of desired parameters feature, this first structured light is penetrated by the first exit direction of DMD, first through the first convex lens, carry out optically focused, by spectroscope reflection, turn to 90 ° to carry out optically focused to the second convex lens again, be radiated at again the measured object surface, after the measured object surface reflection, again successively by the second convex lens, spectroscope and the 3rd convex lens, finally by the CCD camera, received, by the CCD camera, light signal is changed into to electric signal, complete the measurement to the measured object surface, wherein, the focus of the first convex lens, the second convex lens and the 3rd convex lens respective side all falls within on spectroscope, and measured object is positioned near the opposite side focus of the second convex lens, and the CCD camera is positioned near the opposite side focus of the 3rd convex lens.
- According to claim 1 based on Digital Micromirror Device across the yardstick measuring method, it is characterized in that: above-mentioned incident angle is 66 °.
- According to claim 1 based on Digital Micromirror Device across the yardstick measuring method, it is characterized in that: the control system of above-mentioned DMD is modulated into light beam two bundle structured lights of different parameters feature, a branch of is above-mentioned the first structured light, another bundle is the second structured light, and this two bundles structured light forms complementary in space; The second structured light is received by another CCD camera, and the electric signal of two CCD cameras is done stack, to eliminate ground unrest.
- According to claim 3 based on Digital Micromirror Device across the yardstick measuring method, it is characterized in that: above-mentioned two the bundle structured lights is light probe or light probe array.
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| CN201310378749.5A CN103486980A (en) | 2013-08-28 | 2013-08-28 | Cross-scale measurement method based on digital micromirror device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103954232A (en) * | 2014-04-21 | 2014-07-30 | 华侨大学 | Flexible surface appearance quick extraction method |
| CN104006764A (en) * | 2014-05-20 | 2014-08-27 | 华侨大学 | Device and method for removing micro-mirror jitter of digital micro-mirror device |
| CN104020562A (en) * | 2014-05-20 | 2014-09-03 | 华侨大学 | Beam angle modulation device based on digital micromirror device and method thereof |
| CN105067634A (en) * | 2015-08-14 | 2015-11-18 | 华侨大学 | Method and system for detecting surface quality of flat plate |
| CN106597674A (en) * | 2015-10-16 | 2017-04-26 | 高准精密工业股份有限公司 | Optical device |
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| CN104020562A (en) * | 2014-05-20 | 2014-09-03 | 华侨大学 | Beam angle modulation device based on digital micromirror device and method thereof |
| CN105067634A (en) * | 2015-08-14 | 2015-11-18 | 华侨大学 | Method and system for detecting surface quality of flat plate |
| CN106597674A (en) * | 2015-10-16 | 2017-04-26 | 高准精密工业股份有限公司 | Optical device |
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