CN103411555A - Parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination - Google Patents
Parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination Download PDFInfo
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- CN103411555A CN103411555A CN2013103548935A CN201310354893A CN103411555A CN 103411555 A CN103411555 A CN 103411555A CN 2013103548935 A CN2013103548935 A CN 2013103548935A CN 201310354893 A CN201310354893 A CN 201310354893A CN 103411555 A CN103411555 A CN 103411555A
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Abstract
The invention provides a parallel confocal annular microstructure measurement device and method based on linear array angular spectrum illumination, and belongs to the field of ultraprecise three-dimensional microstructure surface morphological measurement. The device comprises an angular spectrum scanning illumination circuit and a confocal measurement light path, wherein light beams emitted from a linear array LED array are irradiated to the surface of a detected microstructure sample in parallel through an imaging lens, a beam splitter prism and a microscope objective in sequence; a linear array pinhole array is adopted in the imaging part to be matched with a structure of a linear array image sensor. The method comprises the steps that firstly, tomographic images of pixels on a certain radius under different kinds of angular spectrum scanning illumination are obtained; secondly, the principle of confocal three-dimensional measurement is utilized to judge the axial coordinate of each pixel in the radius direction; at last, fitting of the three-dimensional shape of the detected microstructure sample is achieved. According to the parallel confocal annular microstructure measurement device and method, due to the design, optimal illumination angles corresponding to all parts of the detected microstructure sample can be found out, the strength of detection signals is improved, background noise is lowered, and then measurement precision is improved; meanwhile, high-speed measurement is achieved.
Description
Technical field
Parallel confocal annular microstructure measuring device and method based on the illumination of linear array angular spectrum belong to ultraprecise three-dimensional microstructure measuring surface form field.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and three aspects of micro-optic technology, as typical case's application such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology is to have three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brought the energy and raw-material saving, more promote the progress of modern science and technology, directly driven the development of related industry.Along with the develop rapidly of micro-processing technology, can carry out the three-dimensional instrument detected of quick nondestructive to such sample and will have huge application prospect.
U.S. Pat 3013467, a kind of confocal imaging technology is disclosed for the first time, the confocal imaging technology of 3 optical conjugates is surveyed in this invention by introducing pointolite, some illumination and point, obtained the axial detection ability to the sample profile, what coordinate the horizontal direction objective table moves and then realizes three-dimensional measurement.Chinese patent CN1395127A, disclose a kind of confocal micro-measurement system.This invention utilizes confocal technology, by confocal light path, introducing optical interference circuit, obtains highly sensitive interferometry signal, realizes the high-acruracy survey axial to sample.U.S. Pat 6282020B1, disclose a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, converges the ability of illumination hot spot in the sample surfaces high-speed mobile by introducing the vibration mirror scanning technology, having obtained, and has realized quick confocal detection, has improved measuring speed.But above-mentioned three kinds of methods are all parallel beam to be converged to sample surfaces by microcobjective throw light on, when carrying out the three-dimensional sample measurement, height fluctuating due to sample self surface profile, to converging illuminating bundle, block, can cause some zone can't throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, and make measuring accuracy reduce, even can't measure.
Summary of the invention
In order to address the above problem, the invention discloses a kind of annular microstructure measuring device of parallel confocal based on the illumination of linear array angular spectrum and method, make can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid can't being thrown light on or complex reflex occurring by some zone that the fluctuating of the height of micro-measuring structure sample self surface profile causes, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.Simultaneously accurate confocal measurement light path adopts pinhole array to coordinate imageing sensor, can realize measuring at a high speed.
The object of the present invention is achieved like this:
Parallel confocal annular microstructure measuring device based on the illumination of linear array angular spectrum, comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: linear array LED array, imaging len, Amici prism, diaphragm and microcobjective; The light beam sent from the linear array LED array is successively after imaging len, Amici prism, microcobjective, and parallel radiation is symmetrical by the micro-measuring structure sample surfaces to the circle moved with the Three Degree Of Freedom objective table; Described Three Degree Of Freedom objective table moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table, microcobjective, diaphragm, Amici prism, Guan Jing, linear array pinhole array and line scan image sensor; The symmetrical light beam reflected by the micro-measuring structure sample surfaces of circle moved with the Three Degree Of Freedom objective table passes through microcobjective, diaphragm, Amici prism, Guan Jing successively, is imaged onto linear array pinhole array position, and by the line scan image sensor imaging;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism, diaphragm and microcobjective;
Described linear array LED array is positioned at the object plane of imaging len, and the back focal plane as plane and microcobjective of imaging len coincides with plane, diaphragm place; The front focal plane of Guan Jing is positioned at plane, linear array pinhole array place; Linear array pinhole array and line scan image sensor pixel are close to, and the pin hole on the linear array pinhole array is identical with the pixel quantity of line scan image sensor, the front and back, position are corresponding.
The above-mentioned annular of parallel confocal based on the illumination of linear array angular spectrum microstructure measuring device, the distance between described linear array LED array two adjacent LEDs is identical or not identical.
Parallel confocal annular microstructure measuring method based on the illumination of linear array angular spectrum comprises the following steps:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, adjustment Three Degree Of Freedom objective table, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b;
Step c, according to the LED quantity M in the linear array LED array, circle is symmetrical by the thickness layering N of micro-measuring structure sample, forms M * N subtended angle spectrum illumination image;
Angular spectrum illumination image between different layers under steps d, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same pixel between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of all pixels of judgement;
Step e, according to all pixels and axial coordinate thereof, adopt the compasses construction method to simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
The above-mentioned annular of parallel confocal based on the illumination of linear array angular spectrum microstructure measuring method, described step c is specially:
Step c1: symmetrical by the micro-measuring structure sample by Three Degree Of Freedom objective table adjustment circle, make every one deck in the N layer be placed in successively the front focal plane of microcobjective;
Step c2: by lighting successively M LED in the linear array LED array, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Described step c1, step c2 form two and recirculate, and circular order from outside to inside is followed successively by following order:
Step c1, step c2;
Step c2, step c1;
Final M * N subtended angle spectrum the illumination image that forms.
Because the present invention is designed with illumination path, make that illuminating bundle is parallel to be incided by the micro-measuring structure sample surfaces, and by the different LED of lighting in the linear array LED array, change the irradiating angle of illuminating bundle, and utilize confocal three-dimensional measurement principle, simulate by the three-dimensional appearance of micro-measuring structure sample; This design makes can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid can't being thrown light on or complex reflex occurring by some zone that the fluctuating of the height of micro-measuring structure sample self surface profile causes, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.Simultaneously accurate confocal measurement light path adopts pinhole array to coordinate imageing sensor, can realize measuring at a high speed.
The accompanying drawing explanation
Fig. 1 is the parallel confocal annular microstructure measuring device structural representation that the present invention is based on the illumination of linear array angular spectrum.
Fig. 2 is the parallel confocal annular microstructure measuring device angular spectrum scanning illumination path figure that the present invention is based on the illumination of linear array angular spectrum.
Fig. 3 is the accurate confocal measurement index path of parallel confocal annular microstructure measuring device that the present invention is based on the illumination of linear array angular spectrum.
Fig. 4 is the parallel confocal annular microstructure measuring method process flow diagram that the present invention is based on the illumination of linear array angular spectrum.
In figure: 1 linear array LED array, 2 imaging lens, 3 Amici prisms, 4 diaphragms, 5 microcobjectives, 6 Three Degree Of Freedom objective tables, 7 pipe mirrors, 8 linear array pinhole array, 9 line scan image sensors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
So-called angular spectrum scanning illumination, be to realize continuously changing or the incident angle of discrete change directional light by the micro-measuring structure sample surfaces and by scanning mechanism or other technological means with parallel beam illumination, the description of this kind lighting system in frequency domain is angular spectrum scanning illumination.
Confocal measurement method is: the method for utilizing some illumination, some thing and point to survey 3 optical conjugates realizes the measurement capability of optical axis direction, and then completes three-dimensional measurement.The accurate confocal measurement method of mentioning in this patent is: utilize angular spectrum scanning illumination to replace the some illumination, retention point thing and point are surveyed the method for 2 optical conjugates simultaneously.The method had both retained the three-dimensional measurement ability of confocal measurement, introduced simultaneously angular spectrum scanning illumination, improved signal strength detection, reduced ground unrest, and then improved measuring accuracy.
Specific embodiment one:
As shown in Figure 1, as shown in Figure 2, accurate confocal measurement index path as shown in Figure 3 for angular spectrum scanning illumination path figure for the confocal annular microstructure measuring device structural representation of angular spectrum scanning illumination array formula of the present embodiment.
This measurement mechanism comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: linear array LED array 1, imaging len 2, Amici prism 3, diaphragm 4 and microcobjective 5; The light beam sent from linear array LED array 1 is successively after imaging len 2, Amici prism 3, microcobjective 5, and parallel radiation is symmetrical by the micro-measuring structure sample surfaces to the circle moved with Three Degree Of Freedom objective table 6; Described Three Degree Of Freedom objective table 6 moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table 6, microcobjective 5, diaphragm 4, Amici prism 3, pipe mirror 7, linear array pinhole array 8 and line scan image sensor 9; With what Three Degree Of Freedom objective table 6 moved, justify the symmetrical light beam reflected by the micro-measuring structure sample surfaces successively through microcobjective 5, diaphragm 4, Amici prism 3, pipe mirror 7, be imaged onto linear array pinhole array 8 positions, and by line scan image sensor 9 imagings;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism 3, diaphragm 4 and microcobjective 5;
Described linear array LED array 1 is positioned at the object plane of imaging len 2, and the back focal plane as plane and microcobjective 5 of imaging len 2 coincides with diaphragm 4 planes, place; The front focal plane of pipe mirror 7 is positioned at linear array pinhole array 8 planes, place; Linear array pinhole array 8 is close to line scan image sensor 9 pixels, and the pin hole on linear array pinhole array 8 is identical with the pixel quantity of line scan image sensor 9, the front and back, position are corresponding.
The above-mentioned annular of parallel confocal based on the illumination of linear array angular spectrum microstructure measuring device, the distance between described linear array LED array 1 two adjacent LEDs is identical.
As shown in Figure 4, the method comprises the following steps parallel confocal based on the illumination of the linear array angular spectrum annular microstructure measuring method process flow diagram of the present embodiment:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, adjustment Three Degree Of Freedom objective table 6, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b;
Step c, according to the LED quantity M in linear array LED array 1, circle is symmetrical by the thickness layering N of micro-measuring structure sample, forms M * N subtended angle spectrum illumination image;
Angular spectrum illumination image between different layers under steps d, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same pixel between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of all pixels of judgement;
Step e, according to all pixels and axial coordinate thereof, adopt the compasses construction method to simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
4, the annular of the parallel confocal based on the illumination of linear array angular spectrum microstructure measuring method according to claim 3, described step c is specially:
Step c1: adjust circle by Three Degree Of Freedom objective table 6 symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective 5;
Step c2: by lighting successively M LED in linear array LED array 1, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Described step c1, step c2 form two and recirculate, and circular order from outside to inside is followed successively by: step c2, step c1 finally form M * N subtended angle spectrum illumination image.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, and the distance between described linear array LED array 1 two adjacent LEDs is not identical, and its beneficial effect is can be to accurate adjustment more in certain illumination angle spectral limit.
Specific embodiment three
The present embodiment is from the different of specific embodiment one, and in the confocal annular microstructure measuring method of described angular spectrum scanning illumination array formula, step c preferably two orders that recirculate is step c1, step c2, finally forms M * N subtended angle spectrum illumination image.Make the fastest step c2 of execution speed be placed on innermost layer, the slowest step c1 of execution speed is placed on outermost layer, and its beneficial effect is to reduce the used time of angular spectrum illumination image, improves circle symmetrical by the three-dimensional appearance reconstruct efficiency of micro-measuring structure sample.
Claims (4)
1. based on the parallel confocal annular microstructure measuring device of linear array angular spectrum illumination, it is characterized in that: comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: linear array LED array (1), imaging len (2), Amici prism (3), diaphragm (4) and microcobjective (5); The light beam sent from linear array LED array (1) is successively after imaging len (2), Amici prism (3), microcobjective (5), and parallel radiation is to symmetrical by the micro-measuring structure sample surfaces with the mobile circle of Three Degree Of Freedom objective table (6); Described Three Degree Of Freedom objective table (6) moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table (6), microcobjective (5), diaphragm (4), Amici prism (3), Guan Jing (7), linear array pinhole array (8) and line scan image sensor (9); With the symmetrical light beam reflected by the micro-measuring structure sample surfaces of the mobile circle of Three Degree Of Freedom objective table (6), pass through successively microcobjective (5), diaphragm (4), Amici prism (3), Guan Jing (7), be imaged onto linear array pinhole array (8) position, and by line scan image sensor (9) imaging;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism (3), diaphragm (4) and microcobjective (5);
Described linear array LED array (1) is positioned at the object plane of imaging len (2), and the picture plane of imaging len (2) and the back focal plane of microcobjective (5) coincide with diaphragm (4) plane, place; The front focal plane of Guan Jing (7) is positioned at linear array pinhole array (8) plane, place; Linear array pinhole array (8) is close to line scan image sensor (9) pixel, and the pin hole on linear array pinhole array (8) is identical with the pixel quantity of line scan image sensor (9), the front and back, position are corresponding.
2. the annular of the parallel confocal based on linear array angular spectrum illumination microstructure measuring device according to claim 1, it is characterized in that: the distance between described linear array LED array (1) two adjacent LEDs is identical or not identical.
3. based on the parallel confocal annular microstructure measuring method of linear array angular spectrum illumination, it is characterized in that: said method comprising the steps of:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, adjustment Three Degree Of Freedom objective table (6), make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b;
Step c, according to the LED quantity M in linear array LED array (1), circle is symmetrical by the thickness layering N of micro-measuring structure sample, forms M * N subtended angle spectrum illumination image;
Angular spectrum illumination image between different layers under steps d, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same pixel between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of all pixels of judgement;
Step e, according to all pixels and axial coordinate thereof, adopt the compasses construction method to simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
4. the annular of the parallel confocal based on linear array angular spectrum illumination microstructure measuring method according to claim 3, it is characterized in that: described step c is specially:
Step c1: adjust circle by Three Degree Of Freedom objective table (6) symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective (5);
Step c2: by lighting successively M LED in linear array LED array (1), form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Described step c1, step c2 form two and recirculate, and circular order from outside to inside is followed successively by following order:
Step c1, step c2;
Step c2, step c1;
Final M * N subtended angle spectrum the illumination image that forms.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107764204A (en) * | 2017-11-30 | 2018-03-06 | 苏州优函信息科技有限公司 | Based on the microscopical three-dimensional surface topography instrument of mating plate and 3-D view joining method |
| WO2020042190A1 (en) * | 2018-08-31 | 2020-03-05 | 苏州大学张家港工业技术研究院 | Method and device for measuring microstructure topography based on dispersion spectrum coding |
| CN111351429A (en) * | 2018-12-20 | 2020-06-30 | 武汉永能智翔自动化系统有限公司 | Hexahedron size measuring system and method based on motion control and machine vision |
| WO2022253098A1 (en) * | 2021-05-31 | 2022-12-08 | 苏州德龙激光股份有限公司 | Laser scanning microscopic measurement device and method |
| CN116336953A (en) * | 2023-05-30 | 2023-06-27 | 武汉工程大学 | System and method for measuring radius and depth of perforation model |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116336953A (en) * | 2023-05-30 | 2023-06-27 | 武汉工程大学 | System and method for measuring radius and depth of perforation model |
| CN116336953B (en) * | 2023-05-30 | 2023-08-11 | 武汉工程大学 | System and method for measuring radius and depth of perforation model |
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