CN102867387A - Smoke detection and interlock method - Google Patents
Smoke detection and interlock method Download PDFInfo
- Publication number
- CN102867387A CN102867387A CN201110186491XA CN201110186491A CN102867387A CN 102867387 A CN102867387 A CN 102867387A CN 201110186491X A CN201110186491X A CN 201110186491XA CN 201110186491 A CN201110186491 A CN 201110186491A CN 102867387 A CN102867387 A CN 102867387A
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- China
- Prior art keywords
- smoke
- control circuit
- smoke detector
- smoke detection
- ion implantation
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
A smoke detection and interlock method comprises a smoke detector 1 and an interlock control circuit 2. The smoke detection and interlock method is characterized in that the smoke detector 1 emits a signal when smoke particles are detected; and 2, the interlock control circuit can realize automatic pre-alarm and fire alarm, and can immediately cut off a power supply of a device and poisonous process gas so as to improve a safe protection function of the device. According to the smoke detection and interlock method, an ion implanter body and the ambient environment safety of the device can be ensured for improving safe operation of the ion implanter.
Description
Technical field
The present invention relates to a kind of smoke detection interlocking method, relate to especially for the device security of ion implantation apparatus and the automatic operation method of assurance personal security, belong to field of semiconductor devices.
Background technology
Ion implantation apparatus belongs to a kind of of particle accelerator, and device interior is in the noble potential workspace when ion implantation apparatus turns round, and the ion gun gas tank is in the state of supplying gas.High voltage and toxicity process gas are very dangerous, in case device interior or be with fire outward and occur, equipment will be as can not causing serious injury to personnel with shutoff poison gas by auto-breaking, this design utilizes smoke detector to identify smoke particle, the smoke particle that checkout equipment is inside and outside, in case smoke particle reaches finite concentration, smoke detector is reported to the police and is sent interlocking signal, turn-off apparatus high voltage supply and gas tank power supply, equipment is in a safe condition, alleviates harm and loss that accident causes.
Summary of the invention
The present invention is directed to the characteristics of ion implantation apparatus and design a kind of simple and the smoke detection alarm method that can automatically perform.
Patent of the present invention adopts following technical scheme to realize: utilizes 1 smoke detector to detect and 2 interlocked control circuit, realizes automatic early-warning and fire alarm, and the electric and toxicity process gas of cutoff high immediately.
1 smoke detector, the concentration of smoke particle in the time of can judging fire is sent early warning and two signals of fire alarm according to the concentration difference of smoke particle.The first, when 1 smoke detector, to send early warning signal and control early warning by 2 interlocked control circuit, only can remind operating personnel to take suitable method to tackle this moment, can not cut off equipment high pressure and poison gas process gas.The second, when 1 smoke detector, send fire alarm and control fire alarm by 2 interlocked control circuit, can cut off immediately the power supply of equipment high pressure and gas tank, stop to send poisonous process gas, make complete machine be in off-position.Equipment is in a safe condition like this, can not cause the high pressure of equipment and poison gas to surrounding environment and personnel's injury, alleviates harm and loss that fire failure causes.
The present invention has following remarkable advantage:
1. utilize smoke detector, ion implantation apparatus is carried out automatic safe control, not automatically carried out by human intervention, reliability is high.
2. the method has warning function, when the early warning alarm occurs, can not cut off the electricity supply, but can send early warning signal, reminds operating personnel to eliminate immediately burning things which may cause a fire disaster, get rid of smoke particle, prevents that in time fire failure from occuring, and has very high safety assurance.
3. improved implanter reliability and security at work.
Description of drawings
Fig. 1 is 1 smoke detector and 2 interlocked control circuit working process flow diagrams.
Fig. 2 is 1 smoke detector and 2 interlocked control circuit working schematic diagrams.
Embodiment
The invention will be described further below in conjunction with the drawings and specific embodiments, but not as the restriction to patent of the present invention.
Patent disclosure of the present invention a kind of smoke detection interlocking method, concrete implementer's case is come as follows: utilize 1 smoke detector to detect the concentration of smoke particle in the time of can judging fire, send early warning and two signals of fire alarm according to the concentration difference of smoke particle, by 2 interlocked control circuit, realize automatic early-warning and fire alarm, can cut off immediately equipment high-tension electricity and toxicity process gas.
First, when 1 smoke detector, when sending early warning signal, then normally opened contact P1-3 and P1-4 are closed, Q1 pilot relay K1 line bag by 2 interlocked control circuit becomes off-state from adhesive, this moment, normally opened contact K1-4, the K1-8 of K1 became disconnection by closure, then delivered to main distribution control by J2-3 and J2-4, carried out early warning.Can not cut off equipment high pressure and poison gas process gas this moment, only can remind operating personnel to take suitable method to tackle.
Second, when 1 smoke detector, when sending fire alarm, then normally opened contact P1-1 and P1-2 are closed, Q2 pilot relay K2 line bag by 2 interlocked control circuit becomes off-state from adhesive, this moment, normally opened contact K2-4, the K2-8 of K2 became disconnection by closure, then delivered to main distribution control by J1-1 and J1-2, carried out fire alarm.After fire alarm occurs, can cut off immediately the power supply of equipment high pressure and gas tank, stop to send poisonous process gas, make complete machine be in off-position.
Specific embodiment of the present invention elaborates content of the present invention.For persons skilled in the art, any apparent change of without departing from the premise in the spirit of the present invention it being done all consists of the infringement to patent of the present invention, will bear corresponding legal liabilities.
Claims (1)
1. a smoke detection interlocking method comprises: 1 smoke detector; 2 interlocked control circuit, control circuit have warning module control and fire alarm module controls two parts.It is characterized in that, when 1 smoke detector detects smoke particle, send signal and come automatic early-warning and fire alarm by 2 interlocked control circuit, and can cut off immediately equipment high-tension electricity and toxicity process gas.The present invention is the improvement to the security of ion implantation apparatus, can guarantee that the high-tension electricity of ion implantation apparatus and poisonous gas can not cause damage to human and environment, guarantee the safe operation of ion implantation apparatus itself.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110186491XA CN102867387A (en) | 2011-07-05 | 2011-07-05 | Smoke detection and interlock method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110186491XA CN102867387A (en) | 2011-07-05 | 2011-07-05 | Smoke detection and interlock method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102867387A true CN102867387A (en) | 2013-01-09 |
Family
ID=47446239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110186491XA Pending CN102867387A (en) | 2011-07-05 | 2011-07-05 | Smoke detection and interlock method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102867387A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5945924A (en) * | 1996-01-29 | 1999-08-31 | Marman; Douglas H. | Fire and smoke detection and control system |
| CN2847133Y (en) * | 2005-12-05 | 2006-12-13 | 北京中科信电子装备有限公司 | Toxic gas protection and collecting discharge system for ionic filler |
| CN101051609A (en) * | 2006-04-04 | 2007-10-10 | 北京中科信电子装备有限公司 | High voltage protective interlock for ion injector |
| US20080315114A1 (en) * | 2007-06-25 | 2008-12-25 | Shengwu Chang | High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown |
| CN201477707U (en) * | 2009-08-31 | 2010-05-19 | 深圳市泰永科技股份有限公司 | Electrical fire-detector |
| CN201797235U (en) * | 2010-09-21 | 2011-04-13 | 江苏东源电器集团股份有限公司 | Switching equipment with smoke arc light alarm sensor |
-
2011
- 2011-07-05 CN CN201110186491XA patent/CN102867387A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5945924A (en) * | 1996-01-29 | 1999-08-31 | Marman; Douglas H. | Fire and smoke detection and control system |
| CN2847133Y (en) * | 2005-12-05 | 2006-12-13 | 北京中科信电子装备有限公司 | Toxic gas protection and collecting discharge system for ionic filler |
| CN101051609A (en) * | 2006-04-04 | 2007-10-10 | 北京中科信电子装备有限公司 | High voltage protective interlock for ion injector |
| US20080315114A1 (en) * | 2007-06-25 | 2008-12-25 | Shengwu Chang | High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown |
| CN201477707U (en) * | 2009-08-31 | 2010-05-19 | 深圳市泰永科技股份有限公司 | Electrical fire-detector |
| CN201797235U (en) * | 2010-09-21 | 2011-04-13 | 江苏东源电器集团股份有限公司 | Switching equipment with smoke arc light alarm sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification that Application Deemed to be Withdrawn |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130109 |