CN101514893B - Three-dimensional shape measuring instrument and method - Google Patents
Three-dimensional shape measuring instrument and method Download PDFInfo
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- CN101514893B CN101514893B CN2008101776052A CN200810177605A CN101514893B CN 101514893 B CN101514893 B CN 101514893B CN 2008101776052 A CN2008101776052 A CN 2008101776052A CN 200810177605 A CN200810177605 A CN 200810177605A CN 101514893 B CN101514893 B CN 101514893B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/50—Depth or shape recovery
- G06T7/55—Depth or shape recovery from multiple images
- G06T7/586—Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo
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- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A three dimensional image measuring apparatus and method, which includes an XY stage; a projection portion comprising a first light and a second light which generate a light, a plurality of projection lenses which is installed on one surface of the first light and the second light respectively, a lattice board which is provided between the first and second lights and the plurality of projection lenses, and formed with a plurality of lattices, and a projection portion movement instrument which moves the lattice board into a vertical direction to an emitted direction of the generated light from the first light and the second light; a light path converter comprising a plurality of mirrors which is provided on one surface of the projection portion, and spaced apart from each other at predetermined intervals, a first filter and a second filter which are provided in a lower portion of the plurality of mirrors respectively, and adjust and filter optical properties of a light, having passed through the plurality of mirrors, and a third light which is provided between the first filter and the second filter to emit the light towards a inspection object; and an imaging portion comprising a third filter, an imaging lens which is provided in an upper portion of the third filter to image the light, having passed through the third filter, and an camera which is provided in an upper portion of the imaging lens to take an image, having passed through the imaging lens.
Description
Technical field
This relates to 3 d shape measuring apparatus and method clearly; More particularly, relate to use a plurality of illuminations and light filter alternately a side and the opposite side of scanning survey object can remove regional 3 d shape measuring apparatus and the method for shadow that produces when the measurement 3D shape.
Background technology
Below, utilize Figure 10 to describe with 3 d shape measuring apparatus.
3 d shape measuring apparatus shown in Figure 10 comprises projection arrangement 10, imaging device 20, control device 30 and displacement measuring device 40.Below, each structure roughly is described.
Summary of the invention
But, the 3 d shape measuring apparatus of above-mentioned prior art since only on a side of measurement object transmitted light so produce shadow, therefore have the defective that can not correctly measure measurement object to obtain image at opposite side.
Therefore; The present invention proposes in order to address the above problem; Its purpose is to provide a kind of 3 d shape measuring apparatus and method, on the both sides of inspection object, scans the light through check respectively, obtains the image that is out of shape owing to the measuring object thing; To measure 3D shape, can remove the shadow zone thus.
Another object of the present invention is to provide a kind of 3 d shape measuring apparatus and method; Can utilize a plurality of light filters; Change the optical characteristics of light; Obtain more accurate image,, make the structure miniaturization more of 3 d shape measuring apparatus through optical path changer is useful on the 3 d shape measuring apparatus.
In order to achieve the above object, 3 d shape measuring apparatus of the present invention comprises XY platform, Projection Division, optical path changer and imaging portion, in said XY platform, substrate parts is installed, and said substrate parts is formed with a plurality of distinguishing marks.The Projection Division comprises: first illumination and second illumination that can produce light; A plurality of projecting lens are arranged on said first illumination and second illumination, one side; Original screen panel is arranged between said first illumination, second illumination and the said a plurality of projecting lens, is formed with a plurality of gratings; The Projection Division transfer device is used for said original screen panel is moved towards the vertical direction of direction of illumination with the light that produces from said first illumination and second illumination.Said optical path changer comprises: a plurality of catoptrons, be arranged on a side of said Projection Division, and be spaced from each other certain interval; First light filter and second light filter are separately positioned on the downside of said a plurality of catoptrons, and the characteristic through the light of a plurality of catoptrons is regulated and its light of transmission; The 3rd illumination is arranged between said first light filter and second light filter, to inspection object irradiates light.Said imaging portion comprises: the 3rd light filter; Imaging len is arranged on the upside of said the 3rd light filter, is used for the light through said the 3rd light filter is carried out to picture; The imaging video camera is arranged on the upside of imaging len, is used for the image of the said imaging len of transmission is made a video recording.
Method for measuring three-dimensional shape of the present invention comprises the steps: substrate parts is positioned at the inspection area of XY platform; When said substrate parts is positioned at the inspection area, transfer and illumination control apparatus through grating, open first illumination with brightness, position and the angle of prior setting; Be opened and produce the light time in said first illumination, make first catoptron, three catoptron and first light filter of the light of generation, be projected on the substrate parts through first grating, first projecting lens and the optical path changer of Projection Division from first illumination; When optical projection is on said substrate parts, move grating according to set amount and transfer operating means, obtain image simultaneously; When obtaining said image, utilize phase shift algorithm (bucket algorithm) to obtain reference phase for first illumination; During the reference phase that obtains for said first illumination; Open second illumination; Pass through second catoptron, the 4th catoptron and second light filter of second grating, second projecting lens and the optical path changer of Projection Division according to the method described above, obtain reference phase for second illumination; When obtaining the reference phase of throwing light on, the inspection object is placed on the regulation position on the substrate parts for said first illumination and second; When said inspection object is positioned on the substrate parts; Open the arbitrary illumination in the 3rd illumination and the 4th illumination through grating handover and illumination control apparatus with the brightness of setting; Detect the position of first distinguishing mark and second distinguishing mark; Confirm the position of inspection object simultaneously, and limit the inspection area, to measure the inspection object; When confirming the position of said inspection object, utilize first motor and second motor to move the inspection object; When moving said inspection object; Open first illumination through grating handover and illumination control apparatus with the brightness of setting; Make first catoptron, three catoptron and first light filter of the light of generation, be projected on the inspection object through first grating, first projecting lens and the optical path changer of Projection Division; When the optical projection that from said first illumination, produces is on said inspection object, obtain from the image of inspection object reflection through the 3rd light filter of optical path changer and the imaging video camera of imaging portion; When the raster image that obtains for said first illumination, utilize the phase place of the said image measurement inspection object that obtains, then, utilize and reference phase between difference obtain to check the three-dimensional information of object; When the three-dimensional information that obtains for the inspection object of said first illumination; Obtain light that the method for image will produce by second illumination according to utilizing the light that produces by first illumination through second grating, second projecting lens, second catoptron, the 4th catoptron and second light filter, to obtain three-dimensional information for the inspection object of second illumination; When the three-dimensional information that obtains for the inspection object of said second illumination; Utilization is through the mean value of the gray-scale value of the different pixels of the video camera that respectively forms images of the image of the first illumination acquisition; Do not need other illumination ground to calculate a two dimensional image, utilize the grey brightness value to grasp shadow position and shinny zone for the inspection object; To be equivalent to the part of shadow position of said first illumination is replaced with the three-dimensional information that is acquired by second illumination, and utilize the three-dimensional information of revising by second illumination finally to obtain to check the three-dimensional information of object.
Description of drawings
Fig. 1 is the stereographic map of 3 d shape measuring apparatus of the present invention;
Fig. 2 is the amplification stereogram of XY platform shown in Figure 1;
Fig. 3 is the stereographic map of Projection Division shown in Figure 1;
Fig. 4 is the stereographic map of optical path changer shown in Figure 1;
Fig. 5 is the stereographic map of another embodiment of optical path changer shown in Figure 4;
Fig. 6 is the stereographic map of imaging portion shown in Figure 1;
Fig. 7 is the stereographic map of another embodiment of imaging portion shown in Figure 6;
Fig. 8 is the block scheme of structure of a plurality of control parts of in detail expression control 3 d shape measuring apparatus shown in Figure 1;
Fig. 9 is the block scheme of another embodiment of a plurality of 3 d shape measuring apparatus shown in Figure 8;
Figure 10 is the skeleton diagram of the 3 d shape measuring apparatus of prior art.
Drawing reference numeral
100 XY platforms
112,114 first, second distinguishing marks
200 Projection Divisions
210,212 first, second illuminations
230,232 first, second gratings
250 gratings are transferred operating means
256 feedback transducers
260,262 first, second projecting lens
300 optical path changer
310,312,320,322 first to fourth catoptrons
340 the 3rd illuminations
350 the 4th illuminations
360 beam splitters
400 imaging portions
440,450 the 3rd, the 4th motor
500 first control parts
600 second control parts
Embodiment
Below, utilize the description of drawings embodiments of the invention.
Fig. 1 is the stereographic map of 3 d shape measuring apparatus of the present invention.As shown in the figure, 3 d shape measuring apparatus of the present invention comprises: XY platform 100, Projection Division 200, optical path changer 300, the imaging portion 400 and first control part 500, second control part 600 (with reference to Fig. 8 and Fig. 9).
At first, as shown in Figure 2, be provided with substrate parts 110 at the upside of XY platform 100, be formed with first, second distinguishing mark 112,114 at the upside of substrate parts 110.In addition, the central authorities in substrate parts 110 are mounted with the inspection object 120 that is used for carrying out three-dimensional inspection.In addition, XY platform 100 can move to the XY direction through first, second motor 130,140 that is separately positioned on one of which side and opposite side.
As shown in Figure 3, in Projection Division 200, first, second illumination 210,212 of distributing light is each other isolated and is provided with, and is respectively arranged with first, second collector lens 220,222 in a side of first, second illumination 210,212.First, second illumination 210,212 transfer through grating and illumination control apparatus 270 with the mode Be Controlled of opening/closing optionally.Be respectively arranged with first, second projecting lens 260,262 in first, second illumination side of 210,212, at first, second illumination 210,212 and first, second projecting lens 260, be provided with original screen panel 234 between 262.On original screen panel 234, be formed with a plurality of gratings 230,232.That is, a plurality of gratings comprise first, second grating 230,232, separate certain interval in the both sides of the length direction of original screen panel 234 respectively and form.Side at the original screen panel 234 that is provided with first, second grating 230,232 is provided with the Projection Division transfer device.
The Projection Division transfer device comprises: Projection Division LM (Linear Motion) guide 240 is arranged on original screen panel 234 1 sides; Projection Division LM guide rail 242 is wherein installed Projection Division LM guide 240; Grating is transferred operating means 250, is arranged on the Projection Division LM guide 240, and Projection Division LM guide 240 is driven.Grating is transferred operating means 250 and is transferred and illumination control apparatus 270 Be Controlled and driving through grating; Transfer the driving of operating means 250 through grating; LM guide rail 242 moves towards prescribed direction (upper and lower to) along the Projection Division for Projection Division LM guide 240, transfers original screen panel 234.That is, owing on Projection Division LM guide 240, be connected with original screen panel 234, so can original screen panel 234 be moved towards prescribed direction through moving of Projection Division LM guide 240.
In addition, a side of transferring operating means 250 at grating is provided with the feedback transducer 256 of the transmitting place that is used for discerning first, second grating 230,232.As feedback transducer 256, can adopt representational flexible deformeter sensor with different impedance value according to material, perhaps judge the static capacity sensor of the difference of the quantity of electric charge of concentrating at interval according to distance.
As shown in Figure 4, optical path changer 300 is arranged on a side of Projection Division 200, is used for the path of the light that comes from Projection Division 200 is changed.In optical path changer 300, isolate to be provided with being used for first, second catoptron 310,312 that the light that comes from first, second projecting lens 260,262 is reflected.First, second catoptron 310,312 is towards the inclined setting, and its pitch angle is preferably 45 degree, can be provided with different angles of inclination according to condition of different.
Respectively through the light of first, second catoptron 310,312 again through the 3rd, the 4th catoptron 320,322 to change light path.The change of this light path makes light project on the inspection object 120 through first, second light filter 330,332 respectively.330, the 332 pairs of light through first, second grating 230,232 of first, second light filter that are arranged on the 3rd, the 4th catoptron 320,322 downsides filter; With rayed to the substrate parts 110 that filters, perhaps alternately scan N is inferior with opposite side towards a side of inspection object 120.Three, the 4th catoptron 320,322 is obliquely installed towards vertical direction, and its pitch angle can be arranged in the scope of 20 to 80 degree according to user's requirement.
First, second light filter the 330, the 332nd changes the parts that incide the optical characteristics of the illumination of checking object 120 from first, second illumination 210,212, can select in frequency light filter, color filter, polarized light filter, the light intensity adjusting light filter any for use.
The frequency light filter uses with the ultraviolet ray removal light filter that removes the following wavelength of 400nm, removes light filter with the infrared ray that removes the above wavelength of 700nm, and color filter uses redness, green and blue filter for the special frequency band through the visible region.For example, when the inspection pcb board, main redness and the green filter that uses corresponding to the background colour of plate.That is, on the pcb board of red series, use green filter, on the pcb board of green-series, use red filter.In addition; Under the situation of using light intensity adjusting light filter; For the range regulation with light intensity is that 100～50% scopes are used, regulates light filter as light intensity and be suitable for the neutral concentration light filter, under the situation of using polarized light filter; In order on inspection object 120, to make incident light carry out normal reflection, use linear polarized light filter to reduce the effect that light shines upon in imaging portion 400.
Formed image by the light of scanning on substrate parts 110 and inspection object 120 through the grating pattern that forms by inspection object 120, because of of three illumination 340 of the formed image of the grating pattern of this distortion through O shape ring-type.In the 3rd illumination 340, a plurality of LED elements 342 are spaced from each other certain distance and are provided with.In addition,, promptly between first catoptron 310 and second catoptron 312, be provided with beam splitter 360 as illustrated in fig. 5, also be provided with the 4th illumination 350 in a side of this beam splitter 360 at the 3rd illumination 340 upside.
The 3rd illumination 340 is as the indirect lighting that is incident in object with respect to the inclined light shaft of the imaging video camera 420 of imaging portion 400; If when first, second distinguishing mark 112,114 has the character of diffuse reflection metal surface, use, then on imaging video camera 420, observe first, second distinguishing mark and can discern first, second distinguishing mark 112,114 at 112,114 o'clock effectively.On the other hand; Be incident in the direct illumination of object the light shaft coaxle of the 4th illumination 350 conducts and imaging video camera 420; If when first, second distinguishing mark 112,114 has the character of direct reflection metal surface, use, then on imaging video camera 420, observe first, second distinguishing mark and can discern first, second distinguishing mark 112,114 at 112,114 o'clock effectively.
After the light that produces from the 3rd illumination 340 incides inspection object 120 with relatively large incident angle,, and be input in the imaging portion 400 to the surface reflection of inspection object 120.In addition; The light that produces from the 4th illumination 350 becomes the light with the light shaft coaxle of imaging portion 400 after through beam splitter 360, and this light incides on the inspection object 120, then with narrow incident angle; From the surface reflection of inspection object 120, and be input to imaging portion 400.The incident angle of the 3rd illumination 340 can be used 2～35 degree scopes, and the incident angle of the 4th illumination 350 can use 10 degree with interior scope.At this, the incident angle of the 3rd illumination 340 is suitable for 5～20 degree scopes, and the incident angle of the 4th illumination 350 is suitable for 5 degree with interior scope.
First, second distinguishing mark 112,114 that can reflect the light that is incident to first, second above-mentioned distinguishing mark 112,114 well can be divided into kind with high diffuse and the kind with high specular reflective substantially according to its surface treatment state.First, second distinguishing mark 112,114 uses the metal material that has more reflective characteristic than absorbing light; This material is processed through engraving method, and according to being had different light reflectives by the surface roughness of first and second distinguishing marks 112,114 of surface-treated metal material.
Under the big situation of surfaceness,, show reflected light towards the multi-direction characteristic that reflects, so be referred to as the metal surface of diffuse with the orientation independent ground of incident light because incident light is after the metal surface is repeatedly reflected.Under the small situation of surface roughness; Because direct reflection takes place in the metal surface in incident light; Incident light shows the character that incident light reflects from the teeth outwards, so be referred to as the metal surface of specular reflective with identical perpendicular to the angle of normal to a surface and this normal and reflected light formation.
As shown in Figure 6, imaging portion 400 is provided with imaging len 410 at the downside of imaging video camera 420, is provided with the 3rd light filter 402 at the downside of imaging len 410.In imaging portion 400, the image of the distortion through the 3rd light filter 402 is obtained in imaging video camera 420 through imaging len 410 backs.The 3rd light filter 402 plays and makes from the reflection of inspection object 120 and input to the effect of changes in optical properties of the light of imaging portion 400.At this, " changes in optical properties of light " is meant, the light frequency that sees through corresponding light filter limited, and light is passed through, and perhaps regulates light intensity, perhaps limits the polarisation of light light direction, perhaps changes the polarisation of light light characteristic.And the 3rd light filter frequency of utilization light filter, color filter, polarized light filter, light intensity are regulated any in the light filter.
On the other hand, as shown in Figure 7 as another embodiment of imaging portion 400, also can be so that imaging len 410 and the mode that imaging video camera 420 moves each other are provided with.Imaging len 410 is separately positioned on first, second imaging portion support component 412,422 with imaging video camera 420; First, second imaging portion support component 412,422 is separately positioned on first, second LM of imaging portion guide 414,424, and each side of first, second LM of imaging portion guide 414,424 is provided with the 4th, three-motor 450,440.Be respectively arranged with the 4th, first, second LM of imaging portion guide 414,424 of three-motor 450,440 is arranged on the LM of the imaging portion guide rail 430.Therefore, can imaging len 410 and imaging video camera 420 be moved on the assigned position, therefore can play the zoom function of imaging portion 400 through the action of the 4th motor 450 and three-motor 440.The above-mentioned light filter of the 3rd light filter 402 preferred uses.
Below, utilize Fig. 8 and Fig. 9 that the structure of a plurality of control parts 500,550,600,650 of the action of comprehensive control 3 d shape measuring apparatus of the present invention is described.
Fig. 8 is illustrated in and in imaging portion 400, does not use three-motor and the 4th motor 440,450 in the 3 d shape measuring apparatus of the present invention; The structure of a plurality of control parts 500,550,600,650 under the situation of not using the 4th illumination 350 on the optical path changer 300; A plurality of control parts the 500,550,600, the 650th shown in Figure 9 use three-motor and the 4th motor 440,450 in imaging portion 400 in 3 d shape measuring apparatus of the present invention, on optical path changer 300, use the embodiment of the 4th illumination 350.Consider these points, the structure of a plurality of control parts 500,550,600,650 is described as follows.
Like Fig. 8 and shown in Figure 9, a plurality of control parts 500,550,600,650 comprise first, second control part 500,600 and first, second assist control portion 550,650 substantially.
The first assist control portion 550 is connected with optical path changer 300 with Projection Division 200 respectively; Grating to drive Projection Division 200 is transferred operating means 250; Optionally first of opening/closing optical path changer 300 to second illumination 210,212,340,350; The second assist control portion 650 is connected with XY platform 100, to drive first, second motor 130,140 of XY platform 100.650 pairs of the 3rd, the 4th motor 440,450 that under the situation of using imaging portion transfer device, respectively first, second LM of imaging portion guide 414,424 driven of the second assist control portion are controlled; Through transferring imaging len 410 and imaging video camera 420 respectively; With the interval between adjustment imaging len 410 and the imaging video camera 420, perhaps adjust the multiplying power of zoom function.In addition; Second control part 600 is connected with the second assist control portion 650; Be connected with second control part 600 with the first assist control portion 550 to control the second assist control portion, 650, the first control parts 500, to control the first assist control portion 550 and second control part 600 respectively.
Below, explanation has the structure of a plurality of control parts 500,550,600,650 of above-mentioned syndeton in order.
At first, first control part 500 comprises that in order 3 d shape measuring apparatus of the present invention to be controlled comprehensively image obtains card 280, serial communication apparatus 520 and first CCU 530.
Image obtains card 280 and is connected with imaging portion 400; Reception is that digital signal export with it from analog signal conversion from the image of imaging portion 400 output, produces the illumination enabling signal EEN that is used for optionally first to fourth illumination, 210,212,340,350 opening/closings; From grating handover and illumination control apparatus 270 reception trigger pips the time; Imaging portion 400 is controlled, image is taken, and captured image is exported to first CCU 530.First CCU 530 utilizes this picture signal to calculate the phase place of substrate parts 110 and inspection object 120 when obtaining to receive picture signal the card 280 from image, utilizes the three-dimensional information of the phase calculation inspection object 120 that is calculated.
Reception comprises that from the first assist control portion 550 of the first main control signal MAIN1_S of first control part, 500 outputs grating is transferred driver 252 and grating is transferred and illumination control apparatus 270.
Grating is transferred driver 252 receptions and is transferred control signal MOVC_S, produces and transfers drive signal MOVD_S, makes the grating of Projection Division 200 transfer operating means 250 drivings, receive from the position signalling POS_S of feedback transducer 256 outputs, and with its output.Receiving when grating is transferred the position signalling POS_S of driver 252 outputs, grating is transferred and illumination control apparatus 270 receives its signals, sends it in the serial communication apparatus 520.The grating of delivering position signal POS_S is transferred and illumination control apparatus 270 receives the first main control signal MAIN1_S, produces and transfers control signal MOVC_S, outputs it to grating and transfers driver 252.In addition; Grating is transferred and illumination control apparatus 270 receives the illumination enabling signal EEN that obtains card 280 outputs from image; Optionally first, second illumination 210,212 of opening/closing Projection Division 200, perhaps optionally the 3rd of opening/closing optical path changer 300 the, the 4th illumination 340,350.Optionally opening first illumination to the 4th illumination 210,212,340,350 so that first illumination arbitrary illumination when opening to the 4th illumination 210,212,340,350; Produce trigger pip; And this signal is exported to the image acquisition block 280; When image obtains card 280 and receives trigger pips, to the photography of the imaging video camera 420 of imaging portion 400 begin control.
Measure for form images 420 pairs of substrate parts 110 of video camera or inspection object 120, need drive, second control part 600 is set in order to drive XY platform 100 to XY platform 100.(Transmission Control Protocol/Internet Protocol: transmission control protocol/Internet Protocol) be connected, its structure comprises the control device of electric motor 610 and second CCU 630 for second control part 600 and first control part, 500 serial or parallel communication control processors capable of using or TCP/IP.
Control device of electric motor 610 receives motor-rotational information; First to fourth motor driver 132,142,442,452 of the second assist control portion 650 of giving produces and control signal MOVC_S is transferred in output; And receive the position signalling POS_S that exports from first to fourth motor driver 132,142,442,452 respectively, and signal is exported.Received by second CCU 630 from the position signalling POS_S of control device of electric motor 610 outputs; Calculating is perhaps calculated the imaging video camera 420 of the imaging portion 400 that is transferred by the 3rd, the 4th motor 440,450 and the transmitting place of imaging len 410 by the transmitting place of the XY platform 100 of first, second motor 130,140 handovers.In addition, second CCU 630 receives from the second main control signal MAIN2_S of first CCU, 530 outputs, produces and the output motor rotating signal, to transfer the imaging video camera 420 and the imaging len 410 of XY platform 100 and imaging portion 400.
As shown in Figure 8, reception comprises first, second motor driver 132,142 from the second assist control portion 650 of the handover control signal MOVC_S of control device of electric motor 610 outputs.First, second motor driver 132,142 receives respectively transfers control signal MOVC_S; Drive first, second motor 130,140 of XY platform 100; And receive from the position signalling POS_S of first, second motor 130,140 outputs; That is, receive the position signalling POS_S that exports to the encoder detector (not shown) that is separately positioned on first, second motor 130,140, and its signal is exported to control device of electric motor 610.
As shown in Figure 9; Another embodiment of the second assist control portion 650 comprises first to fourth motor driver 132,142,442,452; First, second motor driver 132,142 of first, second motor driver 132,142 and the second assist control portion 650 shown in Figure 8 serves the same role; Three, the 4th motor driver 442,452 receives respectively from the position signalling POS_S of the 3rd, the 4th motor 440,450 outputs; Signal is exported to control device of electric motor 610, and receive respectively, the 3rd, the 4th motor 440,450 of imaging portion 400 is driven from the handover control signal MOVC_S of control device of electric motor 610 outputs; Through being adjusted to the position of picture video camera 420 and imaging len 410, can playing the zoom function of the multiplying power that can be adjusted to picture video camera 420.
Below, the method for measuring three-dimensional shape that utilizes the 3 d shape measuring apparatus of the present invention that constitutes according to aforesaid way is described.
At first, substrate parts 110 is placed the inspection area I of XY platform 100.When said substrate parts 110 is positioned at inspection area I, open first illumination 210 with brightness, position and the angle of prior setting through grating handover and illumination control apparatus 270.Be opened and threw light on for 210 generation light time in first illumination 210 from first; This light that makes generation is projected on the substrate parts 110 through first catoptron 310, the 3rd catoptron 320 and first light filter 330 of first grating 230, first projecting lens 260 and the optical path changer 300 of Projection Division 200.
, move grating according to set amount and transfer operating means 250 in 110 last times of substrate parts at optical projection, obtain image simultaneously.When obtaining image, utilize phase shift algorithm to obtain reference phase for first illumination 210.During the reference phase that obtains for first illumination 210; Open second illumination 212; Second catoptron 312, the 4th catoptron 322 and second light filter 332 of second grating 232, second projecting lens 262 and the optical path changer 300 through Projection Division 200 obtain the reference phase for second illumination 212 according to the method described above.
When obtaining the reference phase of throwing light on, inspection object 120 is placed on the regulation position on the substrate parts 110 for first illumination and second.Be positioned at 110 last times of substrate parts at inspection object 120; Open the arbitrary illumination in the 3rd illumination the 340 and the 4th illumination 350 through grating handover and illumination control apparatus 270 with the brightness of setting; Detect the position of first distinguishing mark 112 and second distinguishing mark 114; Confirm the position of inspection object 120 simultaneously, and limit the inspection area, to measure inspection object 120.
When confirming the position of inspection object 120, utilize first motor 130 and second motor 140 to move inspection object 120.When moving inspection object 120; Open first illumination 210 through grating handover and illumination control apparatus 270 with the brightness of setting; The light that makes generation is projected on the inspection object 120 through first catoptron 310, the 3rd catoptron 320 and first light filter 330 of first grating 230, first projecting lens 260 and the optical path changer 300 of Projection Division 200.
, obtained from the image of inspection object 120 reflections in 120 last times of inspection object at the optical projection that from first illumination 210, produces through the 3rd light filter 402 of optical path changer 300 and the imaging video camera 420 of imaging portion 400.When the raster image that obtains for first illumination 210, utilize the phase place of the image measurement inspection object 120 that is obtained, then, utilize and reference phase between difference obtain to check the three-dimensional information of object 120.When the three-dimensional information that obtains for the inspection object 120 of first illumination 210; Obtain light that the method for image will produce by second illumination 212 according to utilizing the light that produces by first illumination 210 through second grating 232, second projecting lens 262, second catoptron 312, the 4th catoptron 322 and second light filter 332, to obtain the three-dimensional information of inspection object 120 with respect to second illumination 212.
When the three-dimensional information that obtains with respect to the inspection object 120 of second illumination 212; Utilization is through the mean value of the gray-scale value of the different pixels of the video camera 420 that respectively forms images of the image of first illumination, 210 acquisitions; Do not need other illumination ground to calculate a two dimensional image, utilize the grey brightness value to grasp shadow position and shinny zone for the inspection object.To be equivalent to the part of first illumination, 210 shadow position is replaced with the three-dimensional information that is acquired by second illumination 212, utilize the three-dimensional information that finally obtains to check object 120 by the three-dimensional information of second illumination, 212 revisals.
In the step that obtains said image, the image of the time of acquisition image according to imaging video camera 420 obtains speed and difference.Therefore, when obtaining image, the metraster (not shown) of imaging video camera 420 is the time exposure in imaging video camera 420, to set in advance only.In addition, the beginning of exposure and trigger pip synchronization action.That is,,, the time shutter of avoiding setting, make grating transfer aequum by grating handover and illumination control apparatus 270 so receive trigger pip owing to the situation that begins to make public can be known through trigger pip.
On the other hand; When the imaging video camera 420 through the 3rd light filter 402 and imaging portion 400 obtains image; Utilization is from the first main control signal MAIN1_S of first CCU, 530 outputs; Make grating transfer operating means 250 and move set amount, utilize simultaneously the 4th with the 3rd light filter 402 of three-motor 450,440 adjustment optical path changer 300 and the imaging len 410 and the imaging video camera 420 of imaging portion 400, the image of acquisition stipulated number.That is, as shown in Figure 7, in order to obtain required image, the imaging len 410 and the position of imaging video camera 420 are adjusted.
In addition; When the imaging video camera 420 through the 3rd light filter 402 and imaging portion 400 obtains image; Further be included under the inappropriate situation of the image that is obtained; Utilize the position of 440,450 pairs of imaging video cameras 420 of the 3rd, the 4th motor or imaging len 410 to adjust, to adjust the step of current multiplying power.Through carrying out such step, can adjust current multiplying power to obtain gratifying image.
As stated; 3 d shape measuring apparatus of the present invention has following advantage: through optionally utilizing a plurality of illuminations; Utilize a plurality of light filters simultaneously,, also can tackle this measure of the change 3D shape even the optical characteristics of inspection object is various with how much apperance variations.
Claims (8)
1. 3 d shape measuring apparatus comprises:
The XY platform is equipped with substrate parts on this XY platform, and said substrate parts is formed with a plurality of distinguishing marks;
The Projection Division comprises: first illumination and second illumination produce light; First projecting lens and second projecting lens are arranged on said first illumination and second illumination, one side; Original screen panel is arranged between said first illumination and second illumination and said first projecting lens and second projecting lens, is formed with first grating and second grating, passes through said first grating and second grating respectively from the light of first illumination and the second illumination generation; The Projection Division transfer device, with said original screen panel along the direction handover vertical with the exit direction of the light that produces by first illumination and second illumination;
Imaging portion comprises: imaging len receives the light that the inspected object thing reflects; The imaging video camera is arranged on the upside of said imaging len, and the image that sees through said imaging len is taken;
Optical path changer comprises: a plurality of catoptrons, be arranged on a side of said Projection Division, and be spaced from each other certain interval, be used to change light path from the light of first projecting lens and the second projecting lens outgoing; The 3rd illumination is positioned at the downside of said imaging portion, gives said inspection object with rayed, is used to discern said a plurality of distinguishing mark.
2. 3 d shape measuring apparatus as claimed in claim 1 is characterized in that, first grating and second grating separate certain interval in the both sides of the length direction of original screen panel respectively and form.
3. 3 d shape measuring apparatus as claimed in claim 2 is characterized in that, the Projection Division transfer device comprises:
Projection Division LM guide is arranged on original screen panel one side;
Projection Division LM guide rail wherein is equipped with Projection Division LM guide;
Grating is transferred operating means, is arranged on the LM guide of Projection Division, and Projection Division LM guide is driven.
4. 3 d shape measuring apparatus as claimed in claim 3 is characterized in that, grating is transferred in the operating means and is provided with the transmitting place of feedback transducer with the sensor light screen.
5. 3 d shape measuring apparatus as claimed in claim 1; It is characterized in that; Said a plurality of catoptrons of optical path changer comprise first catoptron, second catoptron, the 3rd catoptron and the 4th catoptron; Wherein, first catoptron and second catoptron are towards inclined, and the 3rd catoptron and the 4th catoptron lay respectively at the outside of first catoptron and second catoptron and tilt towards vertical direction.
6. 3 d shape measuring apparatus as claimed in claim 1 is characterized in that, imaging portion also comprises: imaging portion transfer device, vertically transfer imaging len and imaging video camera.
7. 3 d shape measuring apparatus as claimed in claim 6 is characterized in that, imaging portion transfer device comprises:
The first imaging portion support component is provided with imaging len;
First LM of the imaging portion guide is provided with the first imaging portion support component;
The first imaging portion motor is arranged on first LM of the imaging portion guide;
The second imaging portion support component is provided with the imaging video camera;
Second LM of the imaging portion guide is provided with the second imaging portion support component;
The second imaging portion motor is arranged on second LM of the imaging portion guide;
The LM of imaging portion guide rail is provided with first LM of the imaging portion guide and second LM of the imaging portion guide;
The first imaging portion motor moves first LM of the imaging portion guide along the LM of imaging portion guide rail, and the second imaging portion motor moves second LM of the imaging portion guide along the LM of imaging portion guide rail.
8. 3 d shape measuring apparatus comprises:
The XY platform is equipped with substrate parts on this XY platform, and said substrate parts is formed with a plurality of distinguishing marks;
The Projection Division comprises: first illumination and second illumination produce light; First projecting lens and second projecting lens are arranged on said first illumination and second illumination, one side; Original screen panel is arranged between said first illumination and second illumination and said first projecting lens and second projecting lens, is formed with first grating and second grating, passes through said first grating and second grating respectively from the light of first illumination and the second illumination generation; The Projection Division transfer device, with said original screen panel along the direction handover vertical with the exit direction of the light that produces by first illumination and second illumination;
Imaging portion comprises: imaging len, second reflected light of inspected object thing reflection when receiving first reflected light of inspected object thing reflection when opening first illumination and opening second illumination; The imaging video camera; Be arranged on the upside of said imaging len, take first reflected light see through said imaging len and form see through said imaging len and second raster image that forms for first raster image of said first illumination and second reflected light for said second illumination;
Optical path changer comprises: a plurality of catoptrons, be arranged on a side of said Projection Division, and be spaced from each other certain interval, be used to change light path from the light of first projecting lens and the second projecting lens outgoing; The 3rd illumination is positioned at the downside of said imaging portion, gives said inspection object with rayed, is used to discern said a plurality of distinguishing mark;
First CCU; Utilization is through the mean value of the gray-scale value of the different pixels of the video camera that respectively forms images of first raster image of the first illumination acquisition; Do not need other illumination ground to calculate a two dimensional image for the inspection object; Utilize the grey brightness value to grasp shadow position and shinny zone, replace with the three-dimensional information that obtains by second raster image that obtains through second illumination with the corresponding part in shadow position in the three-dimensional information that will obtain by first raster image that obtains through first illumination.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050123409 | 2005-12-14 | ||
| KR10-2005-0123412 | 2005-12-14 | ||
| KR1020050123409A KR100612932B1 (en) | 2005-12-14 | 2005-12-14 | 3d image measuring apparatus and method thereof |
| KR10-2005-0123409 | 2005-12-14 | ||
| KR1020050123412 | 2005-12-14 | ||
| KR1020050123412A KR100612933B1 (en) | 2005-12-14 | 2005-12-14 | 3d image measuring apparatus and method thereof |
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| CNB2006101678120A Division CN100520286C (en) | 2005-12-14 | 2006-12-14 | 3d shape measuring apparatus and method thereof |
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| CN101514893A CN101514893A (en) | 2009-08-26 |
| CN101514893B true CN101514893B (en) | 2012-08-08 |
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| CNB2006101678120A Active CN100520286C (en) | 2005-12-14 | 2006-12-14 | 3d shape measuring apparatus and method thereof |
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| CNB2006101678120A Active CN100520286C (en) | 2005-12-14 | 2006-12-14 | 3d shape measuring apparatus and method thereof |
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| KR (1) | KR100612932B1 (en) |
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| KR100903346B1 (en) | 2006-12-28 | 2009-06-22 | (주) 인텍플러스 | Method for optical visual examination of three-dimensional shape |
| KR100943407B1 (en) * | 2007-07-23 | 2010-02-19 | 주식회사 나노시스템 | 3D Shape Measuring System using Projection |
| KR100943405B1 (en) * | 2007-07-23 | 2010-02-19 | 주식회사 나노시스템 | A 3D Shape Measuring System using Lateral Scan |
| KR101158892B1 (en) | 2009-05-15 | 2012-06-25 | 선문대학교 산학협력단 | Measuring method by using color filter |
| DE102010029091B4 (en) * | 2009-05-21 | 2015-08-20 | Koh Young Technology Inc. | Form measuring device and method |
| DE202010018585U1 (en) * | 2009-05-27 | 2017-11-28 | Koh Young Technology Inc. | Device for measuring a three-dimensional shape |
| KR101078781B1 (en) * | 2010-02-01 | 2011-11-01 | 주식회사 고영테크놀러지 | Method of inspecting a three dimensional shape |
| CN103575234B (en) * | 2012-07-20 | 2016-08-24 | 德律科技股份有限公司 | 3-dimensional image measurement apparatus |
| KR101622628B1 (en) * | 2014-12-16 | 2016-05-20 | 주식회사 고영테크놀러지 | Method and apparatus of inspecting a substrate with electronic devices mounted thereon |
| JP2017083234A (en) * | 2015-10-26 | 2017-05-18 | オムロン株式会社 | Three-dimensional shape measurement device, three-dimensional shape measurement system, program, computer-readable recording medium, and three-dimensional shape measurement method |
| CN106123807B (en) * | 2016-06-30 | 2018-09-07 | 苏州图锐智能科技有限公司 | A kind of product 3D detecting systems and corresponding method of detection |
| TWI595445B (en) * | 2016-08-31 | 2017-08-11 | 致茂電子股份有限公司 | Anti-noise three dimensional scanning system |
| KR101890330B1 (en) * | 2016-10-20 | 2018-08-23 | 한국원자력연구원 | Apparatus for measuring surface profile of object |
| JP7212240B2 (en) * | 2018-06-11 | 2023-01-25 | オムロン株式会社 | Measuring system and measuring method |
| JP7135495B2 (en) * | 2018-06-26 | 2022-09-13 | セイコーエプソン株式会社 | 3D measuring device, control device and robot system |
| US20220364852A1 (en) * | 2019-06-28 | 2022-11-17 | Koh Young Technology Inc. | Apparatus and method for determining three-dimensional shape of object |
| US11966996B2 (en) * | 2020-02-10 | 2024-04-23 | Cognex Corporation | Composite three-dimensional blob tool and method for operating the same |
| CN115421349A (en) * | 2022-11-02 | 2022-12-02 | 四川川大智胜软件股份有限公司 | Non-digital optical machine structure light projection module, acquisition device and three-dimensional measurement system |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN101514893A (en) | 2009-08-26 |
| CN100520286C (en) | 2009-07-29 |
| KR100612932B1 (en) | 2006-08-14 |
| CN1982841A (en) | 2007-06-20 |
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