Hybertson, B.M. et al., "Deposition of palladium films by a novel supercritical fluid transport chemical deposition process," Mat. Res. Bull, vol. 26, pp. 1127-1133, 1991. Ziger, D. H. et al., "Compressed fluid technology: Applications to RIE-Developed resists," AiChE Jour., vol. 33, No. 10, pp. 1585-1591, Oct. 1987.
Matson, D.W. et al., "Rapid expansion of supercritical fluid solutions: Solute formation of powders, thin films, and fibers," Ind. Eng. Chem. Res., vol. 26, No. 11, pp. 2298-2306, 1987.
Tolley, W.K. et al., "Stripping organics from metal and mineral surfaces using supercritical fluids," Separation Science and Technology, vol. 22, pp. 1087-1101, 1987.
"Final report on the safety assessment of propylene carbonate," J. American College of Toxicology, vol. 6, No. 1, pp. 23-51.
"A Comparison of Chilled DI Water/Ozone and Co2-Based Supercritical Fluids as Replacements for Photoresist-Stripping Solvents" by J.B. Rubin et al., Physical Organic Chemistry Group (CST-12) Chemical Science & Technology Division Los Alamos National Laboratory, Los Alamos, New Mexico.
* cited by examiner