A method of film deposition in a sub-atmospheric chemical vapor deposition (CVD) process includes (a) providing a model for sub-atmospheric CVD deposition of a film that identifies one or more film properties of the film and at least one deposition model variable that correlates with the one or more...http://www.google.com.au/patents/US20070169694?utm_source=gb-gplus-sharePatent US20070169694 - Feedback control of sub-atmospheric chemical vapor deposition processes
Feedback control of sub-atmospheric chemical vapor deposition processes
