A system for processing wafers includes a robot moveable within an enclosure to load and unload workpieces into and out of workpiece processors. A processor includes an upper rotor having alignment pins, and a lower rotor having one or more openings for receiving the alignment pins to form a processing...http://www.google.com.au/patents/US6969682?utm_source=gb-gplus-sharePatent US6969682 - Single workpiece processing system
