65/60 R; 65/60 C; 204/130; 427/12; 427/38
[58] Field of Search 65/30 E, 30 R, 60 C,
65/60 R, 32; 204/130; 427/38, 12
[56] References Cited
U.S. PATENT DOCUMENTS
2,314,804 3/1943 Willson 428/210
2.455.719 12/1948 Weyl et al 428/141
2,468,402 4/1949 Kreidl 65/31
2,732,298 1/1956 Stookey 96/34
2,904,432 9/1959 Ross et al 96/34
2,911,749 11/1959 Stookey 428/208
2,927,042 3/1960 Hall et al 427/38
3,370,948 2/1968 Rosenbauer 96/36.2
3,489,624 1/1970 Lake et al 156/15
3,508,982 4/1970 Shearin 156/3
3,510,371 5/1970 Frankson 156/652
3,515,587 6/1970 Letter 428/333
3,528,847 9/1970 Grego et al 65/30 E X
3,542,612 11/1970 Kashau et al 156/13
3,551,304 12/1970 Letter 204/38
3,561,963 2/1971 Kiba 96/34.3
3,573,948 4/1971 Tarnopol 427/96
3,615,318 10/1971 Jagodzinski et al 65/60 C X
3,620,795 11/1971 Kiba 427/343 X
3,622,295 11/1971 Loukes et al 65/30 E
3.650.720 3/1972 Grego et al 65/30 E
3,653,864 4/1972 Rothermel et al 65/30
3,715,244 2/1973 Szupillo 148/31.5
3,720,515 3/1973 Stanley 96/38.4
3,732,792 5/1973 Tarnopol et al 95/1 R
3,754,913 8/1973 Takeuchi et al 96/38.3
3,811,855 5/1974 Carlson et al 65/30
3,816,222 6/1974 Plumat et al 65/30 EX
3,817,730 6/1974 Uchida 65/30 E
3,836,348 9/1974 Sumimoto et al 65/30 E
3,857,689 12/1974 Koizumi et al 65/30
3,879,183 4/1975 Carlson 65/30
3,880,630 4/1975 Izawa 65/30
3,896,016 7/1975 Goodman et al 204/180 R
3,902,882 9/1975 Loukes et al. 65/30
3,905,791 9/1975 Plumat et al. 96/36.2
3,905,818 9/1975 Margrain 96/36.2
3,907,566 9/1975 Inoue et al 96/48 R
3,933,609 1/1976 Bokov 264/180 R
3,960,560 6/1976 Sato 96/36
3,967,040 6/1976 Plumat et al 65/30 E X
3.991.227 11/1976 Carlson et al 427/39
3.991.228 11/1976 Carlson et al 427/39
4,017,291 4/1977 Gliemeruth 65/60 C X
OTHER PUBLICATIONS
Reports, Research Lab., Asahi Glass Company, Ltd., 25-l-(1975), pp. 51-55.
Coloured Glasses, W. A. Weyl, Society of Glass Technology, 1951, pp. 409-419.
Research, 11 (1958), pp. 461-465, "Coloured Patterns In
Glass", A. J. C. Hall, and J. G. Hayes, Annual Review
of Materials Science, 1976, pp. 267-301.
Journal of Applied Physics, vol. 34, No. 6, Jun. 1963,
"Oxygen Outgassing Caused by Electron Bombard-
ment of Glass", J. L. Lineweaver.
Scientific American, Sep. 1977, pp. 111-128, "The Fab-
rication of Microelectronic Circuits", W. G. Oldham.
Primary Examiner—S. Leon Bashore
Assistant Examiner—Frank W. Miga
Attorney, Agent, or Firm—Dennis G. Millman
[57] ABSTRACT
Glass photomasks having a stained pattern within the glass for use in photolithographic processes are made by exposing and developing a photoresist on a sheet of glass and subsequently migrating stain-producing ions, such as silver and/or copper, into the surface of the glass under the influence of an electric field and moderately elevated temperatures.
44 Claims, 28 Drawing Figures
