US 7,928,551 B2 Apr. 19, 2011
SEMICONDUCTOR DEVICE AND METHOD
OF MANUFACTURING THE SAME
Inventors: Reiko Fujiwara, Tokyo (JP); Akihiko
Hatasawa, Tokyo (JP); Fumitomo
Watanabe, Tokyo (JP)
Assignee: Elpida Memory, Inc., Chuo-ku, Tokyo
(JP)
Notice: Subject to any disclaimer, the term of this
patent is extended or adjusted under 35
U.S.C. 154(b) by 274 days.
Appl.No.: 12/285,832
Filed: Oct. 15, 2008
Prior Publication Data
US 2009/0096111 Al Apr. 16, 2009
Foreign Application Priority Data
Oct. 16, 2007 (JP) 2007-268504
Int. CI.
H01L 23/02 (2006.01)
U.S. CI 257/686; 257/777; 257/E25.006;
257/E25.013; 257/E25.021; 257/E25.027;
257/E23.085
Field of Classification Search 257/686,
257/777, E25.006, E25.013, E25.021, E25.027, 257/E23.085; 438/109, FOR. 426 See application file for complete search history.
