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US007387815B2
(12) United States Patent ao) Patent No.: Us 7,387,815 B2
Deavenport et al. (45) Date of Patent: Jun. 17,2008
(22) Filed: Sep. 16, 2004
(65) Prior Publication Data
US 2005/0064211 Al Mar. 24, 2005
Related U.S. Application Data
(60) Provisional application No. 60/504,641, filed on Sep. 19, 2003.
(51) Int. CI.
C23C16/12 (2006.01)
C23C16/06 (2006.01)
(52) U.S. CI 427/250; 427/255.23; 427/543;
427/422; 427/427
(58) Field of Classification Search 427/543,
427/250, 255.23, 422, 427 See application file for complete search history.
(56) References Cited
U.S. PATENT DOCUMENTS
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OTHER PUBLICATIONS
J.C. Withers et al., "Aluminum Coatings by a Pyrolytic Spray Chemical Vapor Deposition Process", Chem. Vapor Deposition, Int. Conf. 2nd, pp. 393-407 (1970).
International Search Report, No. PCT/US2004/030376, Dec. 22, 2004.
International Preliminary Examination Report for International Application No. PCT/US04/30376 dated Mar. 22, 2007.
* cited by examiner
Primary Examiner—B. Chen
(74) Attorney, Agent, or Firm—Robert C. Morriss
(57) ABSTRACT
A process for depositing a substantially pure, conformal metal layer on one or more substrates through the decomposition of a metal-containing precursor. During this deposition process, the substrate(s) is maintained at a temperature greater than the decomposition temperature of the precursor while the surrounding atmosphere is maintained at a temperature lower than the decomposition temperature of the precursor. The precursor is dispersed within a transport medium, e.g., a vapor phase. The concentration of the metal-containing precursor(s) in the vapor phase, which also contains liquid therein, can be at a level to provide conditions at or near saturation for the metal precursor(s). In ensuring the aforementioned temperature control between the transport media and substrate, and in maintaining saturation conditions for the transport media, the quality of the deposited metal thin film is markedly improved and the production of by-product metal dust is greatly reduced or substantially eliminated.
47 Claims, 10 Drawing Sheets
