(54) GRAYTONE MASK AND METHOD THEREOF
(75) Inventor: Shigenori Nozute, Kumamoto (JP)
(73) Assignee: Hoya Corporation (JP)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
(21) Appl.No.: 10/170,229
(22) Filed: Jun. 13, 2002
(65) Prior Publication Data
US 2004/0161674 Al Aug. 19, 2004
(51) Int. CI.
H01L 33/00 (2010.01)
(52) U.S. CI 257/98; 257/E21.023; 438/942;
430/5
(58) Field of Classification Search 257/88,
257/98, E21.023, E21.025, E21.034, 79; 438/29, 66, 942, 948, 950-952; 349/49, 349/42, 110, 113; 430/5 See application file for complete search history.
(56) References Cited
U.S. PATENT DOCUMENTS
5,510,915 A * 4/1996 Ge et al 349/42
5,808,714 A * 9/1998 Rowlands et al 349/110
6,310,670 Bl* 10/2001 Lee 349/43
6,338,989 Bl * 1/2002 Ahn et al 438/158
6,362,032 Bl* 3/2002 Kim et al 438/158
6,557,174 B2* 5/2003 Martin etal 2/8
A transmissivity controlled film 12 (CrO or the like), a transmissivity reduced film 13 (Cr or the like), and a resist film 14, for instance, are sequentially formed on, e.g., a transparent substrate 11. A resist is removed from an area (an area C) where a light-transmission section is to be formed, and the transmissivity reduced film 13 and the transmissivity controlled film 12 are removed from the area, thereby forming a light-transmission section. Next, a resist is removed from an area (an area A) in which a graytone section is to be formed, thereby removing the transmissivity reduced film 13 from that area, to thereby form a graytone section. Thus, a graytone mask is manufactured.
37 Claims, 7 Drawing Sheets
