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US005703728A
United States Patent [19] [ii] Patent Number: 5,703,728
Smith et al. [45] Date of Patent: *Dec. 30, 1997
[54] SUPPORT POST ARCHITECTURE FOR MICROMECHANICAL DEVICES
[75] Inventors: Gregory C. Smith, Carrollton; Robert M. Boysel. Piano, both of Tex.
[73] Assignee: Texas Instruments Incorporated,
Dallas, Tex.
[ * ] Notice: The term of this patent shall not extend beyond the expiration date of Pat. No. 5,631,782.
[21] Appl. No.: 333,195
[22] Filed: Nov. 2,1994
[51] Int CI.6 G02B 7/182; G02B 5/08;
G02B 26/08; G02B 26/00
[52] U.S. CI 359/871; 359/872; 359/883;
359/884; 359/224; 359/295; 359/291
[58] Field of Search 359/871, 872.
359/883, 884, 224, 295, 291
[56] References Cited
U.S. PATENT DOCUMENTS 4,441,791 4/1984 Hornbeck 359/295
4,954,789 9/1990 Sampsell 330/4.3
5,061,049 10/1991 Hombeck 359/224
5,083,857 1/1992 Hombeck 359/291
5,202,785 4/1993 Nelson 359/214
5,233,456 8/1993 Nelson 359/214
5,485,304 1/1996 Kaeriyama 359/291
5,535,047 7/1996 Hornbeck 359/295
Primary Examiner—Paul M. Dzierzynski
Assistant Examiner—Mohammad Y. Sikder
Attorney, Agent, or Firm—Charles A. Brill; James C.
Kesterson; Richard L. Donaldson
[57] ABSTRACT
A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.
28 Claims, 8 Drawing Sheets
