Non-linear control element for a flat electrooptical display screen and a ...

[54] NON-LINEAR CONTROL ELEMENT FOR A FLAT ELECTROOPTICAL DISPLAY SCREEN AND A METHOD OF FABRICATION OF SAID CONTROL ELEMENT

[75] Inventors: Nicolas Szydlo, Limours; Jean N.

Perbet; Rolande Kasprzak, both of
Gif sur Yvette, all of France

[73] Assignee: Thomson-Csf, Paris, France

[21] Appl. No.: 149,976

[22] Filed: Jan. 27,1988

Related U.S. Application Data

[63] Continuation of Ser. No. 859,837, May 5, 1986, abandoned.

[30] Foreign Application Priority Data

May 7, 1985 [FR] France 85 06964

[51] Int CIS H01L 27/06; G09G 3/36

[52] U.S. Q 437/15; 437/101;

437/175; 437/189; 437/193; 437/228; 437/233;

437/966; 148/DIG. 139; 148/DIG. 1; 156/653;

156/657; 357/2

[58] Field of Search 437/101, 15, 175, 177,

437/180,189, 191, 192,193,225, 228,233, 245; 148/DIG. 139, DIG. 140; 357/2; 156/653, 657

[56] References Cited

U.S. PATENT DOCUMENTS

3,626,328 12/1971 Esaki et al 357/58

3,748,501 7/1973 Fritzche et al 357/2

3,882,533 5/1975 Dahler 357/58

4,095,011 6/1978 Hawryloetal 357/2

4,158,717 6/1979 Nelson 136/255

4,400,409 8/1983 Izu et al 29/572

4,525,593 6/1985 Yablonovitch 428/446

4,535,327 8/1985 Hareng et al 357/45

4,567,499 6/1986 Hockley et al 357/59 B

4,583,087 4/1986 van de Venne 340/719

4,600,935 7/1986 Dresner 357/2

4,601,097 7/1986 Shimbe 29/572

4,728,997 3/1988 Szydlo et al 437/228

FOREIGN PATENT DOCUMENTS

0070598 1/1983 European Pat. Off. .

0073705 9/1983 European Pat. Off. .

2518788 6/1983 France .

2548450 1/1985 France .

0211787 12/1982 Japan 357/2

0177322 9/1985 Japan 357/2

2146827 6/1985 United Kingdom .

OTHER PUBLICATIONS

Applied Physics Letters, vol. 44, No. 2, Jan. 1984, pp. 205-206, American Institute of Physics, New York; N. Szydlo et al.: "New Amorphous Silicon Nonlinear Element for Liquid Crystal Display Addressing".

Primary Examiner— Brian E. Hearn
Assistant Examiner—Kevin McAndrews
Attorney, Agent, or Firm—Obion, Fisher, Spivak,
McClelland & Maier

[57] ABSTRACT

A method of fabrication of non-linear control elements as applicable to electrooptical displays and in particular to large-area liquid-crystal displays of the flat-panel type, in which the following layers are stacked successively on a substrate: a first layer of metallic material, a first layer of undoped amorphous semiconductor material, a layer of doped amorphous semiconductor material, a second layer of undoped amorphous semiconductor material, and a second layer of metallic material.

7 Claims, 6 Drawing Sheets