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(12) United States Patent

Cornelius et al.

(io) Patent No.: (45) Date of Patent:

US 7,279,356 B2 Oct. 9, 2007

(54) DEPOPULATION OF A BALL GRID ARRAY TO ALLOW VIA PLACEMENT

(75) Inventors: Bill Cornelius, Los Gatos, CA (US);

Paul Baker, Los Altos, CA (US)

(73) Assignee: Apple Inc., Cupertino, CA (US)

( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.

(21) Appl. No.: 11/523,153

(22) Filed: Sep. 18, 2006

(65) Prior Publication Data

US 2007/0072342 Al Mar. 29, 2007

Related U.S. Application Data

(60) Division of application No. 10/991,622, filed on Nov. 17, 2004, now Pat. No. 7,112,880, which is a continuation of application No. 10/140,529, filed on May 6, 2002, now Pat. No. 6,834,427, which is a continuation of application No. 09/678,542, filed on Oct. 2, 2000, now Pat. No. 6,417,463.

(51) Int. CI.

H01L 21/00 (2006.01)
H01L 21/44 (2006.01)

(52) U.S. CI 438/106; 438/612; 438/613;

257/735; 257/737; 257/780; 257/E23.02;

257/E23.069

(58) Field of Classification Search 438/15,

438/26, 51, 55, 64, 66, 100-127 See application file for complete search history.

(56) References Cited

U.S. PATENT DOCUMENTS

5,261,153 A 11/1993 Lucas

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