Inverted pressure vessel with horizontal through loading

(54) INVERTED PRESSURE VESSEL WITH HORIZONTAL THROUGH LOADING

(75) Inventors: James A. Tseronis, Manchester, NH (US); Heiko D. Mortiz, Milford, NH (US); Mohan Chandra, Merrimack, NH (US); Robert B. Farmer, Billerica, MA (US); Ijaz H. Jafri, Nashua, NH (US); Jonathan Talbott, Amherst, NH (US)

(73) Assignee: S.C. Fluids, Inc., Nashua, NH (US)

( * ) Notice: Subject to any disclaimer, the term ol this patent is extended or adjusted under 35 U.S.C. 154(b) by 97 days.

(21) Appl. No.: 09/632,770

(22) Filed: Aug. 4, 2000

Related U.S. Application Data

(60) Provisional application No. 60/147,251, filed on Aug. 5, 1999, and provisional application No. 60/155,454, filed on Sep. 20, 1999.

(51) Int. C I. B08B 3/00

(52) U.S. CI 134/105; 134/143; 134/162;

134/200; 134/902; 118/58; 118/64

(58) Field of Search 134/94.1, 95.3,

134/105, 140, 141, 143, 148, 149, 153, 162, 182, 183, 186, 200, 902; 118/58, 64

(56) References Cited

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* cited by examiner

Primary Examiner—Randy Gulakowski

Assistant Examiner—-Joseph Perrin

(74) Attorney, Agent, or Firm—Maine & Asmus

A pressure vessel for use in production processes requiring elevating and ranging ol temperatures and pressures during the process cycle, readily adaptable to production line operation, suitable for waler processing in the semiconductor industry and for other industries and processes. The pressure vessel is configured within an open support frame with a stationary, prelerably inverted, orientation. The cover or closing plate is vertically movable towards the mouth ol the pressure vessel and frxnctions as the platform by which the object under process is translerred into the vessel. The moving and locking mechanism for the cover is isolated and shielded from the process environment.

13 Claims, 5 Drawing Sheets