LED heat lamp arrays for CVD heating

US007173216B2

(12;

United States Patent

Ptak

(io) Patent No.: (45) Date of Patent:

US 7,173,216 B2 Feb. 6, 2007

(54) LED HEAT LAMP ARRAYS FOR CVD HEATING

(75) Inventor: John C. Ptak, Phoenix, AZ (US)

(73) Assignee: ASM America, Inc., Phoenix, AZ (US)

( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.

(21) Appl. No.: 10/956,165

(22) Filed: Oct. 1, 2004

(65) Prior Publication Data

US 2005/0077280 Al Apr. 14, 2005

Related U.S. Application Data

(63) Continuation of application No. 10/217,230, filed on Aug. 9, 2002, now Pat. No. 6,818,864.

(51) Int. CI.

F27B 5/14 (2006.01)
F26B 3/30 (2006.01)

(52) U.S. CI 219/390; 392/418

(58) Field of Classification Search 219/390,

219/405,411; 118/724,725,50.1; 392/416,

392/418

See application file for complete search history. (56) References Cited

U.S. PATENT DOCUMENTS

A reactor chamber is positioned between a top array of LED heat lamps and a bottom array of LED heat lamps. The LED heat lamps forming the top and bottom arrays are individually or controllable in groups such that power output along each array of LED heat lamps can dynamically differ. The LED lamps can be controlled in response to, for example, feedback from chamber sensors, a desired temperature profile, and a failed LED lamp. In this way, the methods and systems described herein can dynamically compensate for operational characteristics of the reactor chamber. In one configuration, the LED heat lamps are arranged in a rectangular pattern. In some configurations, the LED heat lamps are arranged in a circular or a concentric pattern.

29 Claims, 8 Drawing Sheets

Page 2

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