US 20020127743A1
(19) United States
(12) Patent Application Publication (io) Pub. No.: US 2002/0127743 Al
Nickel et al. (43) Pub. Date: Sep. 12,2002
(54) METHOD FOR FABRICATING CLADDING LAYER IN TOP CONDUCTOR
(76) Inventors: Janice H. Nickel, Sunnyvale, CA (US);
Thomas C. Anthony, Sunnyvale, CA
(US)
Correspondence Address:
HEWLETT-PACKARD COMPANY
Intellectual Property Administration
P.O. Box 272400
Fort Collins, CO 80527-2400 (US)
Publication Classification
H01L 21/00; H01L 21/4763;
H01L 21/44 438/3; 438/637; 438/652
(51) Int. CI.7 .
(52) U.S. CI. .
(57)
A method for cladding two or three sides of a top conductor
for a magnetic memory device in ferromagnetic material
includes forming a trench with side walls in a coating layer
above the memory device. A first ferromagnetic material is
deposited along the side walls of the trench. Any ferromag-
netic material in a bottom of the trench can be removed. A
conductor material is deposited in the trench over the
memory device. A second ferromagnetic material is depos-
ited over the conductor material in the trench to form a
cladding of the ferromagnetic material around three sides of
the conductor.
