IIIH
US006534160B2
(12) United States Patent ao) Patent No.: us 6,534,160 B2
Farquhar et al. (45) Date of Patent: *Mar. 18,2003
(54) SEMICONDUCTOR DEVICE HAVING A
THERMOSET-CONTAINING DIELECTRIC
MATERIAL AND METHODS FOR
FABRICATING THE SAME
(75) Inventors: Donald S. Farquhar, Endicott, NY
(US); Konstantinos I. Papathomas,
Endicott, NY (US); Mark D. Poliks,
Vestal, NY (US)
(73) Assignee: International Business Machines Corporation, Armonk, NY (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
This patent is subject to a terminal disclaimer.
(21) Appl. No.: 09/781,637
(22) Filed: Feb. 12, 2001
(65) Prior Publication Data
US 2001/0005548 Al Jun. 28, 2001
Related U.S. Application Data
(63) Continuation ol application No. 09/343,079, filed on Jun. 29, 1999, now Pat. No. 6,254,972.
(51) Int. C I. B32B 3/00
(52) U.S. CI 428/209; 428/308.4; 428/323;
428/325; 174/258; 174/259
(58) Field of Search 428/209, 323,
428/325, 308.4; 174/258, 259
(56) References Cited
U.S. PATENT DOCUMENTS
3,953,566 A 4/1976 Gore
4,634,631 A 1/1987 Gazit et al.
4,849,284 A 7/1989 Arthur et al.
4,886,699 A 12/1989 Carroll et al.
