A method for forming a patterned silicon bearing material, e.g., silicon substrate. The method includes providing a silicon substrate, which has a surface region and a backside region. The method includes forming a plurality of recessed regions on the surface region. Each of the plurality of recessed...http://www.google.com.au/patents/US7064045?utm_source=gb-gplus-sharePatent US7064045 - Laser based method and device for forming spacer structures for packaging optical reflection devices
