A liquid processing apparatus includes containers 26, 27, 26a, 26b surrounding processing chambers 51, 52 for accommodating a plurality of wafers W and nozzles 54, 56 for supplying a processing liquid to the substrates W in order to perform a liquid process. The nozzles 54, 56 are respectively equipped...http://www.google.com.au/patents/US20020029789?utm_source=gb-gplus-sharePatent US20020029789 - Liquid processing apparatus and method
