A process for fabricating a substrate having a dielectrically isolated region, using energy beam recrystallization. An island of polysilicon is formed on an insulating substrate and a cap containing a dopant is coated on the entire surface of the substrate. A laser beam is irradiated through the cap,...http://www.google.com.au/patents/US4584025?utm_source=gb-gplus-sharePatent US4584025 - Process for fabricating a semiconductor on insulator semiconductor device
