In a microactuator, a fixed substrate and a movable substrate are placed to be spaced opposed to each other. Between these substrates, a plurality of actuators are arranged to provide different moving distances. The actuators include comb-like movable electrodes formed on the movable substrate, and fixed...http://www.google.com.au/patents/US6424504?utm_source=gb-gplus-sharePatent US6424504 - Microactuator, magnetic head device, and magnetic recording apparatus
