A MEMS device having a spring structure formed by two flexible beams attached between a substrate and a movable bar. When non-end sections of the beams are pulled in opposite directions, the beam ends attached to the movable bar pull that bar toward the substrate, thereby transforming in-plane motion...http://www.google.com.au/patents/US6995895?utm_source=gb-gplus-sharePatent US6995895 - MEMS actuator for piston and tilt motion
