A system for calibrating a spatial light modulator array includes an illumination system and a spatial light modulator array that reflects or transmits light from the illumination system. A projection optical system images the spatial light modulator array onto an image plane. A shearing interferometer...http://www.google.com.au/patents/US20050168791?utm_source=gb-gplus-sharePatent US20050168791 - SYSTEM AND METHOD FOR CALIBRATING A SPATIAL LIGHT MODULATOR ARRAY USING SHEARING INTERFEROMETRY
