A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable functional element. The movable functional element includes a flexible dielectric layer and a reflective element. The flexible dielectric layer flexes in response to voltages applied to the...http://www.google.com.au/patents/US7643202?utm_source=gb-gplus-sharePatent US7643202 - Microelectromechanical system having a dielectric movable membrane and a mirror
