A method of fabricating an inkjet printhead chip which includes the step of fabricating drive circuitry layers on a substrate with a CMOS fabrication process. A first sacrificial layer is deposited on the substrate. A heater layer for heating circuits is deposited on the first sacrificial layer and etched...http://www.google.com.au/patents/US7144519?utm_source=gb-gplus-sharePatent US7144519 - Method of fabricating an inkjet printhead chip having laminated actuators
