A nanoelectromechanical (NEM) switch is formed on a substrate with a source electrode containing a suspended electrically-conductive beam which is anchored to the substrate at each end. This beam, which can be formed of ruthenium, bows laterally in response to a voltage applied between a pair of gate...http://www.google.com.au/patents/US7719318?utm_source=gb-gplus-sharePatent US7719318 - Nanoeletromechanical switch and logic circuits formed therefrom
