A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas...http://www.google.com.au/patents/US7024798?utm_source=gb-gplus-sharePatent US7024798 - Low-pressure dryer and low-pressure drying method
