An interface texturing for light-emitting device is formed by utilizing holographic lithography. Two coherent light beams are overlaid to cause constructive and destructive interference and thereby periodical alternative bright and dark lines are formed. A wafer coated with photoresist material is exposed...http://www.google.com.au/patents/US6410348?utm_source=gb-gplus-sharePatent US6410348 - Interface texturing for light-emitting device
