A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective...http://www.google.com.au/patents/US20080285121?utm_source=gb-gplus-sharePatent US20080285121 - CATADIOPTRIC PROJECTION OBJECTIVE
