A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The fluid delivery system includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels,...http://www.google.com.au/patents/US7559527?utm_source=gb-gplus-sharePatent US7559527 - Diffusion bonded fluid flow manifold with partially integrated inter-active component
