An apparatus for supercritical processing of multiple workpieces comprises a transfer module, first and second supercritical processing modules, and a robot. The transfer module includes an entrance. The first and second supercritical processing modules are coupled to the transfer module. The robot is...http://www.google.com.au/patents/US6748960?utm_source=gb-gplus-sharePatent US6748960 - Apparatus for supercritical processing of multiple workpieces
