A solution separation ring made of a material with adhesion to a processing solution stronger than that of a rear face of a wafer is provided to surround the periphery of a substrate horizontally held by a spin chuck with a slight clearance therebetween. A supply nozzle is moved from one end side to...http://www.google.com.au/patents/US6514570?utm_source=gb-gplus-sharePatent US6514570 - Solution processing apparatus and method
